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53 条记录 (耗时 0.013 秒)

    INERTIA SENSOR
    33.
    发明授权
    INERTIA SENSOR 有权

    公开(公告)号：EP3147674B1

    公开(公告)日：2018-07-04

    申请号：EP15796172.3

    申请日：2015-04-08

    申请人： Hitachi Automotive Systems, Ltd.

    发明人： MAEDA, Daisuke ,  JEONG, Heewon ,  HAYASHI, Masahide

    IPC分类号： G01P15/10 ,  G01C19/5726 ,  G01C19/5755 ,  G01C19/5769 ,  G01P15/18 ,  G01P15/097 ,  G01P15/125

    CPC分类号： G01C19/5726 ,  G01C19/5755 ,  G01C19/5769 ,  G01C19/5776 ,  G01P15/097 ,  G01P15/125 ,  G01P15/18

    摘要： Provided is a technique forming a highly stable inertial sensor with a simple configuration by vacuum sealing a resonator which detects acceleration and exploiting a resonance vibration using a high Q value of a MEMS device. The inertial sensor includes: a detecting proof mass and beam 105 which detects acceleration; a driving electrode 106 which excites the detecting proof mass and beam 105; a resonant frequency tuning electrode 108 which changes the resonant frequency of the detecting proof mass and beam 105; and a detecting circuit which applies voltage (frequency controlling part 433, DAC part 436) to the resonant frequency tuning electrode 108 for changing the resonant frequency to cancel a change of the resonant frequency of the detecting proof mass and beam 105 when the acceleration is applied to the detecting proof mass and beam 105 during the vibration of the detecting proof mass and beam 105 by the voltage applied to the detecting proof mass and beam 105, and outputs the acceleration (CV converting part 430, ADC part 431, demodulation part 432, frequency controlling part 433, signal adjusting part 435) based on a value of the voltage applied to resonant frequency tuning electrode 108.

    FREQUENCY READOUT GYROSCOPE
    35.
    发明公开
    FREQUENCY READOUT GYROSCOPE 审中-公开
    FREQUENZAUSLESEGYROSKOP

    公开(公告)号：EP2932192A4

    公开(公告)日：2016-08-10

    申请号：EP13863507

    申请日：2013-12-12

    申请人： UNIV CALIFORNIA

    发明人： IZYUMIN IGOR ,  BOSER BERNHARD E ,  KLINE MITCHELL H

    IPC分类号： G01C19/56 ,  G01C19/5755 ,  G01C19/5776

    CPC分类号： G01C19/5776 ,  G01C19/5755 ,  G01D5/243

    摘要： A frequency readout gyroscope is provided, having 2 or 3 axes, in which the frequency of the carrier associated with the oscillation of the proof mass changes while the amplitude stays constant. The invention departs from conventional gyroscopes which rely on measuring transducer sense axis displacement (amplitude modulation) to determine angular input rate. The invention utilizes what could be termed a form of frequency modulation, such as evaluating frequency phase difference between the axes of modulation. Examples include gyroscopes having either a quadrature or Lissajous FM mode of operation, in which angle random walk contribution from the electronics is reduced by approximately two orders of magnitude.

    摘要翻译： 提供了具有2或3轴的频率读出陀螺仪，其中与振动的振荡相关联的载体的频率在振幅保持恒定的同时变化。 本发明离开常规陀螺仪，其依赖于测量换能器感测轴位移（幅度调制）以确定角度输入速率。 本发明利用可以被称为频率调制的形式，例如评估调制轴之间的频率相位差。 示例包括具有正交或者李萨如FM操作模式的陀螺仪，其中来自电子装置的角度随机游走贡献减少了大约两个数量级。

    Composite sensor
    39.
    发明公开
    Composite sensor 失效
    Verbundmessaufnehmer

    公开(公告)号：EP0810441A3

    公开(公告)日：1998-12-16

    申请号：EP97303700

    申请日：1997-05-29

    申请人： TEXAS INSTRUMENTS INC

    发明人： KUBOTA TOMOYUKI

    IPC分类号： B81B3/00 ,  B81C1/00 ,  G01C19/56 ,  G01C19/5755 ,  G01C19/5769 ,  G01P15/08 ,  G01P15/125 ,  G01P15/18

    CPC分类号： G01C19/5719 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/082 ,  G01P2015/0828

    摘要： Fixed electrodes (A through F) are formed by means of a structural layer that has been provided on fixed bodies (7
    1 through 7
    4 ) of a silicon micro-machined substrate and a movable electrode (G) is formed by a movable body attached to fixed bodies (5
    1 through 5
    4 ) by flexible members (6
    1 through 6
    4 ). Variable capacitors of the parallel plate-type are formed by the movable electrode (G) and the fixed electrodes (A through F). When the movable electrode (G) has been vibrated, the Coriolis force incident to rotation or the force incident to acceleration are added to the movable electrode (G), with a result that the charge of the various variable capacitors change. By detecting the change in charge, both angular velocity and acceleration can be obtained. By providing another variable capacitor formed by a mass portion (H) by a movable body and the substrate, acceleration components in the directions of three axes can be detected.

    摘要翻译： 固定电极（A至F）借助于设置在硅微机械加工基板的固定体（7 1至7 4）上的结构层形成，可动电极（G）由附着的可移动体形成 通过柔性构件（6 1至6 4）固定到固定体（5 1至5 4）。 平行板型的可变电容器由可动电极（G）和固定电极（A至F）形成。 当可动电极（G）振动时，入射到旋转的科里奥利力或与加速度相关的力被加到可动电极（G）上，结果是各种可变电容器的电荷改变。 通过检测电荷的变化，可以获得角速度和加速度。 通过由可移动体和基板提供由质量部分（H）形成的另一可变电容器，可以检测三轴方向上的加速度分量。