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    VERFAHREN ZUM HERSTELLEN VON ISOLATIONSSTRUKTUREN
    72.
    发明公开
    VERFAHREN ZUM HERSTELLEN VON ISOLATIONSSTRUKTUREN 有权
    一种用于制造隔离结构的方法

    公开(公告)号：EP1585702A2

    公开(公告)日：2005-10-19

    申请号：EP03756438.2

    申请日：2003-09-12

    Applicant: Conti Temic microelectronic GmbH

    Inventor： AIKELE, Matthias ,  ENGELHARDT, Albert ,  FREY, Marcus ,  HARTMANN, Bernhard ,  SEIDEL, Helmut

    IPC: B81C1/00

    CPC classification number: B81C1/00698 ,  B81B2201/0235 ,  B81B2203/033 ,  B81C2201/0178

    Abstract: The invention relates to methods for producing insulation structures for micromechanical sensors according to a monocrystalline surface technique. According to known methods, silicon structures defined by deep trenches are etched and the lower side thereof facing the substrate is exposed by a release etch step. The filling of said trenches with a dielectrically insulating material, such as silicon dioxide, enables the silicon structure to be solidly clutched on three sides. The invention is based on the fact that instead of filling trenches, thin-walled silicon is converted into an electrically non-conductive material. This can be carried out, for example, by means of thermal oxidation of narrow silicon sections previously exposed by trenches. In a minimal configuration, two trenches (holes) must be etched per section with the desired structural depth. The interlying silicon section must be narrow enough to be able to be fully thermally oxidised.

    Accelerometer with mass support springs having predetermined vibration modes
    78.
    发明公开
    Accelerometer with mass support springs having predetermined vibration modes 审中-公开
    Beschleunigungssensor mit Massen-Biegefedern mit bestimmten Vibrationsmoden

    公开(公告)号：EP1408336A2

    公开(公告)日：2004-04-14

    申请号：EP03028054.9

    申请日：2001-06-21

    Applicant: Input/Output, Inc.

    Inventor： Selvakumar, Arjun ,  Yu, Lianzhong ,  Yu, Duli ,  Jones, Ben

    IPC: G01P15/08 ,  G01P15/00

    CPC classification number: G01V1/181 ,  B81B3/0051 ,  B81B2201/0235 ,  B81B2203/0109 ,  B81B2203/0163 ,  B81B2203/053 ,  G01P1/023 ,  G01P15/0802 ,  G01P15/125

    Abstract: An accelerometer is disclosed comprising a measuring mass 1405 for detecting acceleration, including a housing having a cavity, one or more spring mass assemblies 1400 positioned within the cavity, wherein each spring mass assembly 1400 includes a support structure 1410, including one or more resilient folded beams 1415a-1415d coupled to the support structure 1410 and the measuring mass 1405 is coupled to the resilient folded beams 1415a-1415d, wherein one or more electrode patterns are coupled to the spring mass assembly 1400, wherein a top cap wafer, including a top capacitor electrode, is coupled to the measurement mass 1405, and a bottom cap wafer, including a bottom capacitor electrode, is also coupled to the measurement mass 1405.

    Abstract translation: 加速度计包括一个或多个弹簧质量组件（1400），其定位在壳体中的空腔内。 每个弹簧质量组件包括耦合到一个或多个弹性折叠梁（1415a-1415d）的测量块（1405），所述弹性折叠梁又连接到支撑结构（1410）。 一个或多个电极图案耦合到弹簧质量组件。 耦合到测量质量的是顶盖和底盖晶片，分别包括顶部和底部电容器电极。 弹簧质量组件还可以包括联接到支撑结构的一个或多个移动范围的止挡件，用于限制质量块在止挡件的方向上的移动。

    Composite sensor device and method of producing the same
    79.
    发明公开
    Composite sensor device and method of producing the same 有权
    Zusammengesetzte Sensorvorrichtung undzugehörigesHerstellungsverfahren

    公开(公告)号：EP1167979A3

    公开(公告)日：2004-04-07

    申请号：EP01114998.6

    申请日：2001-06-20

    Applicant: Murata Manufacturing Co., Ltd.

    Inventor： Tamura, Masaya, (A170) Intellect. Prop. Department

    IPC: G01P15/08 ,  G01P1/02 ,  G01C19/56

    CPC classification number: G01P15/125 ,  B81B7/0041 ,  B81B7/02 ,  B81B2201/0235 ,  B81B2201/025 ,  B81C2203/0145 ,  G01C19/5719 ,  G01P1/02 ,  G01P15/0802 ,  G01P2015/0814

    Abstract: A plane vibrator (5) of an angular velocity sensor (2) and a movable member (20) of an acceleration sensor (3) are provided in a spaced floating state on the same substrate (4). A lid (30) is formed so as to cover and be spaced from the upper side of the plane vibrator (5) and the movable member (20). A space defined by the substrate (4) and the lid (30) is sectioned into a angular velocity sensor space (33) and an acceleration sensor space (34) by use of a sectioning wall (36). The angular velocity sensor space (33) is hermetically sealed to be in the vacuum state. The acceleration sensor space (34) is hermetically sealed to be under atmospheric pressure. The plane vibrator (5) is vibrated at a high frequency and a large amplitude so that the angular velocity detection sensitivity is enhanced. The movable member (20), even if vibration of the plane vibrator (5) is transmitted thereto, is prevented from vibrating at a high frequency and a large amplitude, due to the damping effect of air. Thus, the acceleration detection sensitivity is enhanced.

    Abstract translation: 角速度传感器（2）的平面振动器（5）和加速度传感器（3）的可移动部件（20）以间隔的浮动状态设置在同一基板（4）上。 盖（30）形成为覆盖并与平面振动器（5）和可动构件（20）的上侧隔开。 由基板（4）和盖（30）限定的空间通过使用分段壁（36）分成角速度传感器空间（33）和加速度传感器空间（34）。 角速度传感器空间（33）气密地处于真空状态。 将加速度传感器空间（34）气密地密封在大气压下。 平面振动器（5）以高频率和大振幅振动，从而提高角速度检测灵敏度。 即使由于空气的阻尼作用，即使是平面振动体（5）的振动被传递给可动构件20也能够以高频率和大幅度振动。 因此，提高了加速度检测灵敏度。

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