-
公开(公告)号：EP1278083A2
公开(公告)日：2003-01-22
申请号：EP02090242.5
申请日：2002-07-10
Applicant: NEC CORPORATION
IPC: G02B6/35
CPC classification number: G02B6/357 , B81B3/0062 , B81B2201/045 , G02B6/3518 , G02B6/3556
Abstract: An analog beam-steering free-space optical switch for connecting and switching a plurality of optical signals includes a plurality of optical devices and electrostatic actuators for driving the optical devices. Each optical device is pivotally borne to allow rotation around a prescribed center,
and each electrostatic actuator includes the substrate that holds the optical devices and a plurality of driving electrodes secured to the substrate. The application of electrostatic voltage between an optical device and the driving electrodes generates electrostatic driving torque for causing the optical device to tilt with respect to the substrate around the center of rotation, whereby the direction of reflection of an optical signal is changed. The
driving electrodes are arranged in a radial pattern relative to the electrode center. Each driving electrode is formed such that the electrode width of a prescribed outer portion relative to the electrode center decreases with progression toward the outside. In addition, each driving electrode is shaped such that the width of a prescribed inner portion with respect to the electrode center decreases with progression toward the inside. Forming the driving electrodes in this way improves the driving torque characteristic of the micromirror and extends the range of steering angles within which stable positioning can be performed by low-voltage drive.Abstract translation: 用于连接和切换多个光信号的模拟波束控制自由空间光开关包括用于驱动光学装置的多个光学装置和静电致动器。 每个光学装置枢转地承载以允许围绕规定的中心旋转，并且每个静电致动器包括保持光学装置的基板和固定到基板的多个驱动电极。 在光学器件与驱动电极之间施加静电电压会产生静电驱动扭矩，以使光学器件相对于基板围绕旋转中心倾斜，从而改变光信号的反射方向。 驱动电极相对于电极中心以放射状排列。 每个驱动电极形成为使得相对于电极中心的规定外部的电极宽度随着朝向外部前进而减小。 另外，每个驱动电极被成形为使得相对于电极中心的预定内部的宽度随着朝向内部前进而减小。 以这种方式形成驱动电极改善了微镜的驱动转矩特性，并且扩展了可以通过低压驱动执行稳定定位的转向角范围。
-
公开(公告)号：EP1211544A2
公开(公告)日：2002-06-05
申请号：EP01127668.0
申请日：2001-11-20
Applicant: Memlink Ltd.
Inventor： Chertkow, Igal Roberto , Messica, Avi , Patlakh, Anatoly
CPC classification number: G02B6/3514 , B81B3/0021 , B81B2201/032 , B81B2201/045 , B81B2203/051 , B81B2203/056 , G02B6/266 , G02B6/353 , G02B6/3556 , G02B6/357 , G02B6/3584 , G02B6/3594 , G02B6/423 , G02B26/0841 , H01H2001/0084 , H04Q11/0005 , H04Q2011/0026 , H04Q2011/003 , H04Q2011/0056 , H04Q2011/0058
Abstract: A microelectromechanical (MEMS) device has a substrate (102), and at least one, generally planar moving element (106), such as an absorber or a mirror, disposed in parallel to the surface of the substrate. An actuator is operatively engageable with the moving element for selectively actuating the moving element between a series of successive, closely spaced positions in a plane horizontal to the surface of the substrate. The MEMS device may be effectively used as a variable attenuator and beam splitter. Various different actuators can be used. Preferably, the device is fabricated using a surface micromachining process.
Abstract translation: 微机电（MEMS）装置具有基板（102）和平行于基板的表面设置的至少一个大致平面的移动元件（106），例如吸收体或反射镜。 致动器可操作地与移动元件接合，用于在垂直于衬底表面的平面中的一系列相继紧密间隔的位置之间选择性地启动移动元件。 MEMS器件可以有效地用作可变衰减器和分束器。 可以使用各种不同的致动器。 优选地，使用表面微加工工艺制造该器件。
-
公开(公告)号：EP1193530A2
公开(公告)日：2002-04-03
申请号：EP01307643.5
申请日：2001-09-07
Applicant: Xerox Corporation
Inventor： Rosa, Michel A. , Fork, David K. , Peeters, Eric
CPC classification number: G02B6/3518 , B81B2201/045 , B81B2203/04 , B81C1/00666 , G02B6/3556 , G02B6/358 , G02B6/3584 , G02B26/0841
Abstract: Optical cross-connect (100) involve the general concept of a two dimensional array (104) of microelectromechanical system (MEMS) tilt mirrors (106) being used to direct light coming from a first optical fiber (110) to a second optical fiber (111). Each MEMS tilt mirror (106) in the two dimensional array can rotate about its x and y axis and is suspended by a plurality of suspension arms (450) attached to a glass substrate.
Abstract translation: 光学交叉连接（100）涉及微机电系统（MEMS）倾斜镜（106）的二维阵列（104）的一般概念，其用于将来自第一光纤（110）的光引导至第二光纤 111）。 二维阵列中的每个MEMS倾斜反射镜（106）可以围绕其x轴和y轴旋转并且通过附接到玻璃基板的多个悬臂（450）悬挂。
-
公开(公告)号：EP1193529A2
公开(公告)日：2002-04-03
申请号：EP01307620.3
申请日：2001-09-07
Applicant: Xerox Corporation
Inventor： Peeters, Eric , Rosa, Michel A , Fork, David K
CPC classification number: G02B26/0841 , B81B3/0021 , B81B7/0003 , B81B2201/045 , G02B6/3518 , G02B6/3556 , G02B6/358 , G02B6/3584 , Y10S359/904
Abstract: An optical cross-connect (100) involves the general concept of a two dimensional array (104) of micro electromechanical system (MEMS) tilt mirrors (106) being used to direct light coming from a first optical fiber (110) to a second optical fiber (111). Each MEMS tilt mirror (106) in the two dimensional array (104) can rotate about its x and y axis and is suspended by a plurality of suspension arms (450) attached to a substrate.
Abstract translation: 光学交叉连接（100）涉及微机电系统（MEMS）倾斜反射镜（106）的二维阵列（104）的一般概念，其用于将来自第一光纤（110）的光引导至第二光学 纤维（111）。 二维阵列（104）中的每个MEMS倾斜反射镜（106）可以围绕其x轴和y轴旋转并且通过附接到基板的多个悬臂（450）悬挂。
-
75.发明公开
公开(公告)号：EP1193527A2
公开(公告)日：2002-04-03
申请号：EP01307609.6
申请日：2001-09-07
Applicant: Xerox Corporation
Inventor： Rosa, Michel A. , Peeters, Eric , Fork, David K.
CPC classification number: G02B6/3518 , B81B2201/045 , B81B2203/04 , B81C1/00666 , G02B6/3556 , G02B6/358 , G02B6/3584 , G02B26/0841
Abstract: Optical cross-connect systems (100) involve the general concept of a two dimensional array (104) of microelectromechanical systems (MEMS) tilt mirrors (106) being used to direct light coming from a first optical fiber (110) to a second optical fiber (111). Each MEMS tilt mirror (106) in the two dimensional array (104) can tilt about two non-colinear axes (x,y) and is suspended by a plurality of suspension arms (450) attached to a substrate.
Abstract translation: 光学交叉连接系统（100）涉及用于将来自第一光纤（110）的光引导到第二光纤的微机电系统（MEMS）倾斜镜（106）的二维阵列（104）的一般概念 （111）。 二维阵列（104）中的每个MEMS倾斜镜（106）可以围绕两个非共线轴线（x，y）倾斜并且被附接到基板的多个悬架臂（450）悬置。
-
Patent Agency Ranking76.发明公开MICROMACHINED MEMBERS COUPLED FOR RELATIVE ROTATION BY TORSIONAL FLEXURE HINGES 审中-公开微机械耦合以相对旋转LINKS BY旋扭弯接头
公开(公告)号：EP1119792A2
公开(公告)日：2001-08-01
申请号：EP99945469.7
申请日：1999-09-02
Applicant: Xros, Inc.
Inventor： SLATER, Timothy, G. , NEUKERMANS, Armand, P.
CPC classification number: H04Q11/0005 , B81B3/0051 , B81B2201/042 , B81B2201/045 , B81B2203/058 , G02B6/32 , G02B6/327 , G02B6/3518 , G02B6/357 , G02B6/3584 , G02B26/0833 , G02B26/0841 , G02B26/085 , H04Q2011/003 , H04Q2011/0039 , H04Q2011/0043
Abstract: A monolithically fabricated micromachined structure couples a reference frame (56) to a dynamic plate (58). Performance of torsional oscillators or scanners benefits greatly by coupling the frame (56) to the plate (58) with folded torsional flexure hinges (96) rather than torsion bars. A folded torsion flexure hinge (96) for supporting the plate (58) from the frame (56) is made up of three basic hinge segments (102a, 102b, 102c). Each basic hinge segment (102a, 102b, 102c) has a longitudinal axis (98) which is not oriented perpendicular to the rotation axis (62) of the plate (58). An intermediaire region (104) of the folded torsional flexure hinge (96) couples together immediately adjacent ends (106) of the basic hinge segments (102a, 102b, 102c). A basic hinge segment (102b) may include a torsion sensor (108) for measuring angular rotation of the plate (58) about axis (62) with respect to the frame (56).
-
公开(公告)号：EP1104746A1
公开(公告)日：2001-06-06
申请号：EP00307167.7
申请日：2000-08-21
Applicant: LUCENT TECHNOLOGIES INC.
Inventor： Anatolyevich Aksyuk, Vladimir , Bishop, David John
CPC classification number: G02B26/0841 , B81B3/004 , B81B3/0062 , B81B5/00 , B81B7/0003 , B81B2201/042 , B81B2201/045 , G02B26/0866
Abstract: A micro-electro-mechanical optical device is disclosed. The micro-electro-mechanical optical device includes a micro-electro-mechanical structure coupled with an optical device. Both the micro-electro-mechanical structure and the optical device are disposed on a substrate surface. The micro-electro-mechanical structure lifts the optical device a predetermined distance above the plane of the substrate surface. Thereafter, the lifted optical device is moveable relative to the plane of the substrate surface in response to an electrostatic field generated between the optical device and the substrate.
Abstract translation: 公开了一种微电子机械光学装置。 微电子机械光学装置包括与光学装置耦合的微电子机械结构。 微机电结构和光学器件均设置在基板表面上。 微机电结构将光学器件提升到衬底表面平面之上的预定距离。 此后，响应于在光学装置和基板之间产生的静电场，提升的光学装置可相对于基板表面的平面移动。
-
公开(公告)号：EP3193176A4
公开(公告)日：2018-05-16
申请号：EP15840211
申请日：2015-06-29
Applicant: HITACHI AUTOMOTIVE SYSTEMS LTD
Inventor： KANAMARU MASATOSHI , HAYASHI MASAHIDE , YURA MASASHI , JEONG HEEWON
CPC classification number: B81B7/0064 , B81B2201/0235 , B81B2201/0242 , B81B2201/0264 , B81B2201/045 , B81B2203/0136 , B81C99/0045 , G01C19/574 , G01P15/08 , G01P15/125 , G01P21/00 , H01L29/84
Abstract: For a small sensor produced through a MEMS process, when an electrode pad, wiring, or a shield layer is formed in a final step, it is difficult to nondestructively investigate whether a structure for sensing a physical quantity has been processed satisfactorily. In the present invention, in a physical quantity sensor formed from an MEMS structure, in a structure in which a surface electrode having through wiring is formed on the surface of an electrode substrate and the periphery thereof is insulated, forming a shield layer comprising a metallic material on the surface of the electrode substrate in a planar view and providing a space for internal observation inside the shield layer makes it possible to check for internal defects.
-
公开(公告)号：EP1509946B1
公开(公告)日：2015-09-09
申请号：EP03756181.8
申请日：2003-05-14
Applicant: Silicon Light Machines Corporation
Inventor： HUNTER, James, A.
CPC classification number: G02B26/0808 , B81B2201/045 , B81B2207/015 , B81B2207/07 , B81C1/00246 , B81C2201/016 , B81C2203/0735 , B81C2203/0778 , H01L27/0611
-
80.发明公开ELECTROSTATICALLY DRIVEN MEMS DEVICE, IN PARTICULAR ROTATABLE MICROMIRROR 审中-公开ELEKTROSTATISCH ANGESTEUERTE MEMS-VORRICHTUNG，INSBESONDERE DREHBARER MIKROSPIEGEL
公开(公告)号：EP2902358A1
公开(公告)日：2015-08-05
申请号：EP15153380.9
申请日：2015-01-30
Applicant: STMicroelectronics S.r.l.
Inventor： Carminati, Roberto , Conti, Sebastiano
CPC classification number: B81B3/0062 , B81B3/0043 , B81B7/008 , B81B2201/018 , B81B2201/033 , B81B2201/042 , B81B2201/045 , B81B2203/058 , G02B26/0841 , G03B21/142 , G03B21/2033 , G03B21/28
Abstract: The MEMS device has a suspended mass (31) supported via a pair of articulation arms (32) by a supporting region (33). An electrostatic driving system (36), coupled to the articulation arms (32), has mobile electrodes (38) and fixed electrodes (39) that are coupled to each other. The electrostatic driving system is formed by two pairs of actuation assemblies (36), arranged on opposite sides of a respective articulation arm (32) and connected to the articulation arm through connection elements (30). Each actuation assembly (36) extends laterally to the suspended mass (31) and has an auxiliary arm (37) carrying a respective plurality of mobile electrodes (38). Each auxiliary arm is parallel to the articulation arms (32). The connection elements (30) may be rigid or formed by linkages.
Abstract translation: MEMS器件具有经由支撑区域（33）经由一对关节臂（32）支撑的悬挂块（31）。 耦合到关节臂（32）的静电驱动系统（36）具有彼此耦合的移动电极（38）和固定电极（39）。 静电驱动系统由两对致动组件（36）形成，所述致动组件布置在相应的关节臂（32）的相对侧上，并通过连接元件（30）连接到关节臂。 每个致动组件（36）横向延伸到悬挂质量块（31），并且具有承载相应多个移动电极（38）的辅助臂（37）。 每个辅助臂平行于铰接臂（32）。 连接元件（30）可以是刚性的或通过连杆形成。
-
-
-
-
-
-
-
-
-
Search Results
106
records
(took 0.016 seconds)
