PELLICLE SUPPORT FRAME AND PRODUCTION METHOD
    10.
    发明公开
    PELLICLE SUPPORT FRAME AND PRODUCTION METHOD 审中-公开
    圆柱支撑框架和生产方法

    公开(公告)号:EP3217221A1

    公开(公告)日:2017-09-13

    申请号:EP15856945.9

    申请日:2015-09-09

    发明人: ISHITO Nobuyuki

    IPC分类号: G03F1/64 B23K20/00

    摘要: A pellicle support frame (1A) is provided with a frame body (10) made of aluminum alloy and has a pellicle film bonded to the upper surface (10a) of the frame body (10) and a transparent substrate bonded to the lower surface of the frame body (10). Within the frame body (10), a plurality of hollow portions (51-53) are provided to be lined up in the circumferential direction of the frame body (10), and a through-hole (20) which leads from the outer peripheral surface (10c) to the inner peripheral surface (10d) of the frame body (10) is formed between two adjacent hollow portions. This configuration makes it possible to prevent strain from arising in the support frame (1A) and the transparent substrate after the support frame (1A) is bonded to the transparent substrate.

    摘要翻译: 一种防护膜支架(1A),其特征在于,具备:框体(10),其由铝合金构成,在框体(10)的上表面(10a)粘贴有防护膜;透光性基材 框架体(10)。 在框体10内,在框体10的圆周方向上排列设置有多个中空部51-53,该外周部具有贯通孔20, 在两个相邻的中空部之间形成有朝向框体(10)的内周面(10d)的表面(10c)。 通过该结构,能够防止支承框架(1A)与透明基板接合后的支承框架(1A)和透明基板产生应变。