Integrated circuit with a high speed narrow base width vertical PNP transistor
    4.
    发明授权
    Integrated circuit with a high speed narrow base width vertical PNP transistor 有权
    具有高速窄基极宽垂直PNP晶体管的集成电路

    公开(公告)号:US06809396B2

    公开(公告)日:2004-10-26

    申请号:US10303168

    申请日:2002-11-25

    IPC分类号: H01L2973

    CPC分类号: H01L21/82285 H01L27/0826

    摘要: An integrated circuit (100) includes high performance complementary bipolar NPN and PNP vertical transistors (10, 20). The NPN transistor is formed on a semiconductor substrate whose surface (24) is doped to form a PNP base region (28, 70). A film (32, 34, 30) is formed on the surface with an opening (42) over an edge of the base region. A first conductive spacer (48) is formed along a first sidewall (78) of the opening to define a PNP emitter region (67) within the base region. A second conductive spacer (47) is formed along a second sidewall (76) of the opening to define a PNP collector region (66).

    摘要翻译: 集成电路(100)包括高性能互补双极NPN和PNP垂直晶体管(10,20)。 NPN晶体管形成在其表面(24)被掺杂以形成PNP基极区域(28,70)的半导体衬底上。 在该表面上形成一个薄膜(32,34,30),该开口(42)位于基部区域的边缘上。 沿着开口的第一侧壁(78)形成第一导电间隔物(48),以在基极区域内限定PNP发射极区域(67)。 第二导电间隔物(47)沿着开口的第二侧壁(76)形成以限定PNP收集区(66)。

    Enhancement mode RF device and fabrication method
    6.
    发明授权
    Enhancement mode RF device and fabrication method 失效
    增强型RF器件及其制造方法

    公开(公告)号:US06528405B1

    公开(公告)日:2003-03-04

    申请号:US09506844

    申请日:2000-02-18

    IPC分类号: H01L2128

    摘要: An enhancement mode RF device and method of fabrication includes a stack of compound semiconductor layers, including a central layer defining a device channel, a doped cap layer, and a buffer epitaxially grown on a substrate. Source and drain implant areas, extending at least into the buffer, are formed to define an implant free area in the device channel between the source and drain. Source and drain metal contacts are positioned on an upper surface of the central layer. Several layers of insulation and dielectric are positioned over the device and a gate opening is formed and filled with gate metal. During epitaxial growth, the doped cap layer is tailored with a thickness and a doping to optimize channel performance including gate-drain breakdown voltage and channel resistance.

    摘要翻译: 增强型RF器件和制造方法包括:化合物半导体层的堆叠,包括限定器件沟道的中心层,掺杂的覆盖层和在衬底上外延生长的缓冲层。 形成至少延伸到缓冲器中的源极和漏极注入区域,以在源极和漏极之间的器件沟道中限定无植入区域。 源极和漏极金属触点位于中心层的上表面上。 绝缘和电介质的几层位于器件上方,并形成栅极开口并填充栅极金属。 在外延生长期间,掺杂的覆盖层是通过厚度和掺杂来调整的,以优化沟道性能,包括栅 - 漏击穿电压和沟道电阻。