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1.发明授权Substrate processing apparatus and method of manufacturing semiconductor device 有权基板处理装置及半导体装置的制造方法公开(公告)号：US09028191B2
公开(公告)日：2015-05-12
申请号：US13163165
申请日：2011-06-17
CPC分类号： H01L21/67196 , H01J37/32743 , H01J37/32788 , H01J37/32889 , H01J37/32899 , H01L21/67201
摘要： Reduction in cooling rate of a substrate having a lower temperature is suppressed because the substrate having a lower temperature is not affected by radiant heat of a substrate having a higher temperature while cooling a plurality of substrates in a cooling chamber. The substrate processing apparatus includes a load lock chamber configured to accommodate stacked substrates; a first transfer mechanism having a first transfer arm provided with a first end effector, and configured to transfer the substrates into/from the load lock chamber at a first side of the load lock chamber; a second transfer mechanism having a second transfer arm provided with a second end effector, and configured to transfer the substrates into/from the load lock chamber at a second side of the load lock chamber; a barrier installed between the substrates to be spaced apart from the substrates supported by a substrate support provided in the load lock chamber; and an auxiliary barrier unit installed between the substrate support and the barrier, wherein the auxiliary barrier unit is installed at places other than standby spaces of the end effectors.
摘要翻译： 由于具有较低温度的基板在冷却室中冷却多个基板的同时不受具有较高温度的基板的辐射热的影响，因此抑制了具有较低温度的基板的冷却速率的降低。 基板处理装置包括：负载锁定室，被配置为容纳堆叠的基板; 第一传送机构，其具有设置有第一端部执行器的第一传送臂，并且被配置为在所述负载锁定室的第一侧将所述基板传送到所述负载锁定室中或从所述负载锁定室传送; 第二传送机构，具有设置有第二端部执行器的第二传送臂，并且被配置为在所述负载锁定室的第二侧将所述基板传送到所述负载锁定室中或从所述负载锁定室传送; 安装在基板之间的屏障，其与由设置在负载锁定室中的基板支撑件支撑的基板间隔开; 以及安装在所述基板支撑件和所述屏障之间的辅助屏障单元，其中所述辅助屏障单元安装在所述末端执行器的备用空间以外的位置。
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公开(公告)号：US08753754B2
公开(公告)日：2014-06-17
申请号：US13816914
申请日：2011-08-15
申请人： Shigeru Hirano , Makoto Kawabata
发明人： Shigeru Hirano , Makoto Kawabata
CPC分类号： C25D3/12 , B32B15/013 , B32B15/015 , B32B15/04 , B32B15/18 , B65D7/42 , B65D85/00 , C21D9/00 , C22C9/06 , C22C19/00 , C22C19/002 , C22C19/03 , C22C30/02 , C22C38/00 , C23C22/24 , C23C28/321 , C23C28/34 , C23C28/3455 , C25D3/562 , C25D5/48 , C25D9/08 , C25D9/10 , C25D11/38 , Y10T428/12611 , Y10T428/12806 , Y10T428/12937
摘要： The present invention provides a steel sheet for a can exhibiting excellent corrosion resistance, adhesive properties, and weldability, including a steel sheet, an Ni—Cu alloy plating layer formed on at least one surface of the steel sheet; and a chromate film layer formed on a surface of the Ni—Cu alloy plating layer, in which the Ni—Cu alloy plating layer has Ni attached thereto in an amount of from 0.30 g/m2 to 3.0 g/m2, and Cu contained therein in an amount of from 0.5 mass % to 20 mass %; and the chromate film layer has Cr attached thereto in an amount of from 1.0 mg/m2 to 40 mg/m2 in equivalent units of Cr.
摘要翻译： 本发明提供一种表现出优异的耐腐蚀性，粘合性和焊接性的罐的钢板，包括钢板，形成在钢板的至少一个表面上的Ni-Cu合金镀层; 以及形成在Ni-Cu合金镀层的表面上的Ni-Cu合金镀层的Ni-Cu合金镀层的附着量为0.30g / m 3〜3.0g / m 2的铬酸盐膜层，其中含有Cu 其量为0.5质量％至20质量％; 铬酸盐膜层的Cr附着量为1.0mg / m 2〜40mg / m 2。
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3.发明申请SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE 有权基板加工装置及制造半导体装置的方法公开(公告)号：US20110311339A1
公开(公告)日：2011-12-22
申请号：US13163165
申请日：2011-06-17
IPC分类号： H01L21/677
CPC分类号： H01L21/67196 , H01J37/32743 , H01J37/32788 , H01J37/32889 , H01J37/32899 , H01L21/67201
摘要： Reduction in cooling rate of a substrate having a lower temperature is suppressed because the substrate having a lower temperature is not affected by radiant heat of a substrate having a higher temperature while cooling a plurality of substrates in a cooling chamber. The substrate processing apparatus includes a load lock chamber configured to accommodate stacked substrates; a first transfer mechanism having a first transfer arm provided with a first end effector, and configured to transfer the substrates into/from the load lock chamber at a first side of the load lock chamber; a second transfer mechanism having a second transfer arm provided with a second end effector, and configured to transfer the substrates into/from the load lock chamber at a second side of the load lock chamber; a barrier installed between the substrates to be spaced apart from the substrates supported by a substrate support provided in the load lock chamber; and a barrier auxiliary unit installed between the substrate support and the barrier, wherein the barrier auxiliary unit is installed at places other than standby spaces of the end effectors.
摘要翻译： 由于具有较低温度的基板在冷却室中冷却多个基板的同时不受具有较高温度的基板的辐射热的影响，因此抑制了具有较低温度的基板的冷却速率的降低。 基板处理装置包括：负载锁定室，被配置为容纳堆叠的基板; 第一传送机构，其具有设置有第一端部执行器的第一传送臂，并且被配置为在所述负载锁定室的第一侧将所述基板传送到所述负载锁定室中或从所述负载锁定室传送; 第二传送机构，具有设置有第二端部执行器的第二传送臂，并且被配置为在所述负载锁定室的第二侧将所述基板传送到所述负载锁定室中或从所述负载锁定室传送; 安装在基板之间的屏障，其与由设置在负载锁定室中的基板支撑件支撑的基板间隔开; 以及安装在基板支撑件和屏障之间的屏障辅助单元，其中屏障辅助单元安装在末端执行器的备用空间以外的位置。
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4.发明申请公开(公告)号：US20100044539A1
公开(公告)日：2010-02-25
申请号：US12608784
申请日：2009-10-29
申请人： Minoru IIDA , Makoto Kawabata , Fumio Hara
发明人： Minoru IIDA , Makoto Kawabata , Fumio Hara
IPC分类号： F16B47/00
CPC分类号： F16B47/00 , B29C45/1615 , B29C45/1676 , B29K2105/0061
摘要： A suction cup includes a suction cup main body, an attachment surface and a gel layer. The surface of the gel layer serves as a suction surface. In a method of manufacturing a suction cup, a cavity is formed in the inside of a common mold and a primary mold. Next, a synthetic resin material is injected into the cavity, to mold the suction cup main body. Subsequently, the primary mold is opened, to obtain the suction cup main body. Next, a secondary mold is mated to the common mold, whereby a cavity is formed in the inside of the common mold and the secondary mold. Subsequently, a gel is injected into the cavity, to mold the gel layer. Next, the secondary mold is opened, to obtain a suction cup composed of the gel layer and the suction cup main body, on the common mold.
摘要翻译： 吸盘包括吸盘主体，附接表面和凝胶层。 凝胶层的表面用作吸附表面。 在制造吸盘的方法中，在共模和内模中形成空腔。 接下来，将合成树脂材料注入到空腔中，以模制吸盘主体。 随后，打开主模具，以获得吸盘主体。 接下来，将二次模具配合到共模上，由此在共模和二次模的内侧形成空腔。 随后，将凝胶注入空腔中以模制凝胶层。 接下来，打开二次模具，以在共模上获得由凝胶层和吸盘主体构成的吸盘。
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公开(公告)号：US20090194651A1
公开(公告)日：2009-08-06
申请号：US12413218
申请日：2009-03-27
IPC分类号： F16B47/00
CPC分类号： F16B47/00
摘要： Herein disclosed a suction cup including: a suction cup body having at least one surface having a gel, the surface being a suction surface; and an elastically deformable spring element provided in or on the suction cup body, having a concave shape so as to make the suction surface have a concave shape, and energizing a central part of the suction surface away from a surface to be sucked in the condition where the suction surface is in suction contact with the surface to be sucked, wherein the spring element is formed from a material having a modulus of elasticity higher than those of natural rubber and synthetic rubbers.
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公开(公告)号：US20080048083A1
公开(公告)日：2008-02-28
申请号：US11840734
申请日：2007-08-17
IPC分类号： F16B47/00
CPC分类号： F16B47/00
摘要： Herein disclosed a suction cup including: a suction cup body formed from an elastic material and having a surface on one side in the thickness direction thereof as a concave suction surface; and a spring element provided as a part of the suction cup body, having a concave shape along the suction surface, and capable of elastic deformation such as to energize a central part of the suction surface away from a surface to be sucked in the condition where the suction surface is in suction contact with the surface to be sucked.
摘要翻译： 这里公开了一种吸盘，其包括：由弹性材料形成并且在其厚度方向上的一侧的表面作为凹吸入面形成的吸盘体; 以及作为吸盘体的一部分设置的弹簧元件，其具有沿着吸附面的凹形形状，并且能够弹性变形，以使吸力表面的中心部分远离待吸附的表面激励， 吸力表面与要吸附的表面进行吸力接触。
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公开(公告)号：US07002839B2
公开(公告)日：2006-02-21
申请号：US10827366
申请日：2004-04-20
申请人： Makoto Kawabata , Kazuya Harii , Eiji Saitoh , Hideki Miyajima
发明人： Makoto Kawabata , Kazuya Harii , Eiji Saitoh , Hideki Miyajima
IPC分类号： G11C11/00
CPC分类号： G11C11/155
摘要： The present invention relates to a magnetic ring unit and a magnetic memory device; an object of the invention is to control the direction of rotation of the magnetic flux freely and with high reproducibility in a simple structure without using a thermal process such as pinning; and a magnetic ring unit is formed of a magnetic ring in eccentric ring form where the center of the inner diameter is located at a decentered position relative to the center of the outer diameter.
摘要翻译： 本发明涉及磁环单元和磁存储器件; 本发明的目的是在不使用诸如钉扎的热处理的情况下以简单的结构自由地且以高重现性自由地控制磁通量的旋转方向; 并且磁环单元由偏心环形式的磁环形成，其中内径的中心位于相对于外径中心的偏心位置。
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公开(公告)号：US08387932B2
公开(公告)日：2013-03-05
申请号：US12047919
申请日：2008-03-13
CPC分类号： F16B47/006
摘要： Disclosed herein is a suction cup, including: a suction cup body formed from gel and having at least one flat or convex face serving as a suction face; a shape retaining member provided on the suction cup body and having elasticity for restoring, when the suction cup body is deformed, the suction cup body so as to restore an original shape; and a center stem connected to the suction cup body and projecting from a portion of the suction cup body positioned remotely from a location of the suction cup body at which the suction face is provided in a direction intersecting with the center of the suction face.
摘要翻译： 本发明公开了一种吸盘，包括：由凝胶形成并具有至少一个平面或凸面用作抽吸面的吸盘体; 形状保持构件，其设置在吸盘体上，具有弹性，用于当吸盘体变形时使吸盘体恢复原状; 以及中心杆，其连接到所述吸盘体并且从所述吸盘体的远离所述吸盘体的位置的部分突出，所述吸入口体的所述吸力面设置在与所述吸力面的中心相交的方向上。
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公开(公告)号：US20120087536A1
公开(公告)日：2012-04-12
申请号：US13238186
申请日：2011-09-21
申请人： Kouji Miyata , Makoto Kawabata
发明人： Kouji Miyata , Makoto Kawabata
IPC分类号： H04R1/00
CPC分类号： H04R9/02 , H04R9/06 , H04R2205/021
摘要： A speaker unit performing sound output in proportion to electric current by current driving includes: a frame having an opening; a magnet arranged inside the frame and formed in an annular shape; a yoke including a shaft-shaped insertion arrangement portion which is inserted into a center of the magnet; a coil bobbin formed in a cylindrical shape; a coil wound around an outer peripheral surface of the coil bobbin; a damper having elasticity and connected between the frame and the coil bobbin; and a cone connected to the coil bobbin at an inner peripheral portion and fixed to an opening edge of the opening of the frame at an outer peripheral portion, which vibrates with movement of the coil bobbin, wherein a communicating hole communicating the inside to the outside is formed at the frame, and a portion of the communicating hole is blocked by an attachment member.
摘要翻译： 通过电流驱动与电流成比例地进行声音输出的扬声器单元包括：具有开口的框架; 布置在框架内部并形成为环形的磁体; 磁轭，其包括插入到所述磁体的中心的轴状插入装置部; 形成为圆筒形状的线圈架; 缠绕在线圈架的外周面的线圈; 具有弹性并连接在框架和线圈架之间的阻尼器; 以及在内周部连接到线圈架的锥体，并且在外周部分处固定到框架的开口的开口边缘处，该外周部分随着线圈架的运动而振动，其中连通内部与外部的连通孔 形成在框架上，并且连通孔的一部分被附接构件阻挡。
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公开(公告)号：US20090184220A1
公开(公告)日：2009-07-23
申请号：US12413191
申请日：2009-03-27
IPC分类号： A47B96/06
CPC分类号： F16B47/00
摘要： Herein disclosed a suction cup including: a suction cup body having at least one surface having a gel, the surface being a suction surface; and an elastically deformable spring element provided in or on the suction cup body, having a concave shape so as to make the suction surface have a concave shape, and energizing a central part of the suction surface away from a surface to be sucked in the condition where the suction surface is in suction contact with the surface to be sucked, wherein the spring element is formed from a material having a modulus of elasticity higher than those of natural rubber and synthetic rubbers.
摘要翻译： 这里公开了一种吸盘，其包括：吸杯体，其具有至少一个具有凝胶的表面，所述表面是吸力表面; 以及设置在吸盘主体内或上的可弹性变形的弹簧元件，其具有凹形，以使吸引表面具有凹形，并且使抽吸表面的中心部分远离待吸附表面的状态 其中吸入表面与待吸附的表面进行吸力接触，其中弹性元件由弹性模量高于天然橡胶和合成橡胶的材料形成。
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