LENS SYSTEM
    4.
    发明申请
    LENS SYSTEM 审中-公开
    镜头系统

    公开(公告)号:US20090116125A1

    公开(公告)日:2009-05-07

    申请号:US12302049

    申请日:2007-05-25

    IPC分类号: G02B9/00 G02B17/00 G01J5/08

    摘要: The present invention concerns a lens system. More specifically, it concerns a lens system comprising a first lens (3), a deflection element (5) and a second lens (6), wherein the deflection element (5) is arranged between the first lens (3) and the second lens (6). The deflection element comprises at least a first annular zone and a second annular zone, the annular zones being arranged in a concentric fashion and wherein the deflection angle of each annular zone is different from the deflection angle of every other annular zone. Furthermore, the present invention concerns a temperature analysis system comprising a lens system and the use of a temperature analysis system.

    摘要翻译: 本发明涉及一种透镜系统。 更具体地,涉及一种包括第一透镜(3),偏转元件(5)和第二透镜(6)的透镜系统,其中偏转元件(5)布置在第一透镜(3)和第二透镜 (6)。 偏转元件至少包括第一环形区域和第二环形区域,环形区域以同心方式布置,并且其中每个环形区域的偏转角度与每隔一个环形区域的偏转角度不同。 此外,本发明涉及包括透镜系统和使用温度分析系统的温度分析系统。

    LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
    9.
    发明申请
    LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD 有权
    LITHOGRAPHIC装置和装置制造方法

    公开(公告)号:US20100182576A1

    公开(公告)日:2010-07-22

    申请号:US12727456

    申请日:2010-03-19

    IPC分类号: G03B27/52

    CPC分类号: G03F7/70866 G03F7/70341

    摘要: A liquid supply system for an immersion lithographic projection apparatus is disclosed in which a space is defined between the projection system, a barrier member and a substrate. The barrier member is not sealed such that, during use, immersion liquid is allowed to flow out the space and between the barrier member and the substrate.

    摘要翻译: 公开了一种用于浸没式光刻投影装置的液体供应系统,其中在投影系统,阻挡构件和基板之间限定空间。 阻挡构件不被密封,使得在使用期间,允许浸没液体流出空间以及阻挡构件和基底之间。