利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

23 条记录 (耗时 0.018 秒)

    Apparatus for measuring outgassing of volatile materials from an object
    4.
    发明授权
    Apparatus for measuring outgassing of volatile materials from an object 失效
    用于测量物体中挥发性物质的放气的装置

    公开(公告)号：US6125687A

    公开(公告)日：2000-10-03

    申请号：US137353

    申请日：1998-08-20

    申请人： Gary M. McClelland ,  Charles T. Rettner

    发明人： Gary M. McClelland ,  Charles T. Rettner

    IPC分类号： G01N5/00 ,  G01N7/14 ,  G01N1/00

    CPC分类号： G01N5/00 ,  G01N7/14

    摘要： An apparatus for measuring material outgassed from an object. The apparatus has a chamber containing the object, a condensed material detector (e.g. a quartz microbalance), a heater for heating the object and chamber, and a cooler for cooling the detector. The chamber is sealed from the ambient atmosphere and the detector is located within the chamber. The chamber may contain a vacuum or a gas at ambient atmospheric pressure. Material outgassed from the object is distributed throughout the chamber by vapor transport and is incident upon the detector, where it condenses. Since the detector is the only cooled surface in contact with the vapors, it collects nearly all the outgassed material. This provides high sensitivity to outgassing. The chamber may also include a mechanical stirring device for aiding vapor transport, or may be oriented so that a thermal convection current is established. Preferably, the chamber includes a snout for thermally isolating the detector and chamber so that a steep temperature gradient exists close to the detector surface. Alternatively, the detector has a coating with a high affinity for outgassed materials of interest. The chamber, detector, and object are at nearly the same temperature and the outgassed materials preferentially condense on the detector due to the high affinity of the coating for the outgassed materials.

    摘要翻译： 一种用于测量从物体排出的物质的装置。 该装置具有容纳物体的室，冷凝材料检测器（例如石英微量天平），用于加热物体和室的加热器和用于冷却检测器的冷却器。 该室与环境大气密封，检测器位于室内。 室可以在环境大气压下容纳真空或气体。 从物体排出的物质通过蒸气传输分布在整个室中，并入射到检测器上，在那里冷凝。 由于检测器是与蒸气接触的唯一冷却表面，因此几乎可以收集所有脱气的物质。 这为除气提供了高灵敏度。 腔室还可以包括用于辅助蒸汽输送的机械搅拌装置，或者可以被定向成使得形成热对流。 优选地，腔室包括用于热隔离检测器和腔室的鼻孔，使得靠近检测器表面存在陡峭的温度梯度。 或者，检测器具有对所关注出气的材料具有高亲和力的涂层。 室，检测器和物体处于几乎相同的温度，由于涂层对脱气材料的高亲合力，脱气材料优先冷凝在检测器上。

    Method of Forming Self-Assembled Patterns Using Block Copolymers, and Articles Thereof
    5.
    发明申请
    Method of Forming Self-Assembled Patterns Using Block Copolymers, and Articles Thereof 有权
    使用嵌段共聚物形成自组装图案的方法及其制品

    公开(公告)号：US20110059299A1

    公开(公告)日：2011-03-10

    申请号：US12554175

    申请日：2009-09-04

    申请人： Ho-Cheol Kim ,  Sang-min Park ,  Charles T. Rettner

    发明人： Ho-Cheol Kim ,  Sang-min Park ,  Charles T. Rettner

    IPC分类号： B32B3/00 ,  B05D3/02 ,  B44C1/22

    CPC分类号： H01L29/0657 ,  B81C1/00031 ,  B81C2201/0149 ,  G03F7/0002 ,  Y10T428/24479 ,  Y10T428/24521 ,  Y10T428/2457 ,  Y10T428/24612 ,  Y10T428/24802

    摘要： A method of forming a block copolymer pattern comprises providing a substrate comprising a topographic pre-pattern comprising a ridge surface separated by a height, h, greater than 0 nanometers from a trench surface; disposing a block copolymer comprising two or more block components on the topographic pre-pattern to form a layer having a thickness of more than 0 nanometers over the ridge surface and the trench surface; and annealing the layer to form a block copolymer pattern having a periodicity of the topographic pre-pattern, the block copolymer pattern comprising microdomains of self-assembled block copolymer disposed on the ridge surface and the trench surface, wherein the microdomains disposed on the ridge surface have a different orientation compared to the microdomains disposed on the trench surface.

    摘要翻译： 形成嵌段共聚物图案的方法包括提供包括地形预图案的基材，所述地貌预图案包括从沟槽表面分开高度h，大于0纳米的脊表面; 在所述地形预图案上设置包含两个或更多个嵌段组分的嵌段共聚物，以在所述脊表面和所述沟槽表面上形成厚度大于0纳米的层; 并退火所述层以形成具有所述地形预图案的周期性的嵌段共聚物图案，所述嵌段共聚物图案包括设置在所述脊表面上的自组装嵌段共聚物的微区域和所述沟槽表面，其中所述微区域设置在所述脊表面上 与设置在沟槽表面上的微区域相比具有不同的取向。

    METHOD OF USE OF EPOXY-CONTAINING CYCLOALIPHATIC ACRYLIC POLYMERS AS ORIENTATION CONTROL LAYERS FOR BLOCK COPOLYMER THIN FILMS
    6.
    发明申请
    METHOD OF USE OF EPOXY-CONTAINING CYCLOALIPHATIC ACRYLIC POLYMERS AS ORIENTATION CONTROL LAYERS FOR BLOCK COPOLYMER THIN FILMS 有权
    使用环氧基丙烯酸聚合物作为块状共聚物薄膜的方向控制层的方法

    公开(公告)号：US20090179001A1

    公开(公告)日：2009-07-16

    申请号：US12013444

    申请日：2008-01-12

    申请人： Joy Cheng ,  Ho-Cheol Kim ,  Charles T. Rettner ,  Daniel P. Sanders ,  Ratnam Sooriyakumaran ,  Linda Sundberg

    发明人： Joy Cheng ,  Ho-Cheol Kim ,  Charles T. Rettner ,  Daniel P. Sanders ,  Ratnam Sooriyakumaran ,  Linda Sundberg

    IPC分类号： B32B37/14 ,  B32B38/10

    CPC分类号： B05D5/00 ,  B05D7/14 ,  B05D7/52 ,  C08L53/00 ,  C09D125/14 ,  C09D153/00

    摘要： Disclosed herein is a method of controlling the orientation of microphase-separated domains in a block copolymer film, comprising forming an orientation control layer comprising an epoxy-containing cycloaliphatic acrylic polymer on a surface of a substrate, irradiating and/or heating the substrate to crosslink the orientation control layer, and forming a block copolymer assembly layer comprising block copolymers which form microphase-separated domains, on a surface of the orientation control layer opposite the substrate. The orientation control layer can be selectively cross-linked to expose regions of the substrate, or the orientation control layer can be patterned without removing the layer, to provide selective patterning on the orientation control layer. In further embodiments, bilayer and trilayer imaging schemes are disclosed.

    摘要翻译： 本文公开了一种控制嵌段共聚物膜中微相分离的区域的取向的方法，包括在基材的表面上形成包含含环氧基的脂环族丙烯酸聚合物的取向控制层，照射和/或加热该基材以交联 取向控制层，并且在与衬底相对的取向控制层的表面上形成包含形成微相分离结构域的嵌段共聚物的嵌段共聚物组合层。 取向控制层可以选择性地交联以暴露衬底的区域，或者可以将取向控制层图案化而不去除该层，以在取向控制层上提供选择性图案化。 在另外的实施方案中，公开了双层和三层成像方案。

    Method of forming polymer features by directed self-assembly of block copolymers
    7.
    发明授权
    Method of forming polymer features by directed self-assembly of block copolymers 有权
    通过嵌段共聚物的定向自组装形成聚合物特征的方法

    公开(公告)号：US07521094B1

    公开(公告)日：2009-04-21

    申请号：US12013957

    申请日：2008-01-14

    申请人： Joy Cheng ,  William D. Hinsberg ,  Ho-Cheol Kim ,  Charles T. Rettner ,  Daniel P. Sanders

    发明人： Joy Cheng ,  William D. Hinsberg ,  Ho-Cheol Kim ,  Charles T. Rettner ,  Daniel P. Sanders

    IPC分类号： B05D3/00

    CPC分类号： G03F7/0002 ,  B82Y10/00 ,  B82Y40/00

    摘要： Disclosed herein is a method of forming polymer structures comprising applying a solution of a diblock copolymer assembly comprising at least one diblock copolymer that forms lamellae, to a neutral surface of a substrate having a chemical pattern thereon, the chemical pattern comprising alternating pinning and neutral regions that are chemically distinct and which have a chemical pattern spatial frequency given by the number of paired sets of pinning and neutral regions along a given direction on the substrate; and forming domains comprising blocks of the diblock copolymer. The domains form by lateral segregation of the blocks. At least one domain has an affinity for the pinning regions and forms on the pinning region, the domains so formed on the pinning region are aligned with the underlying chemical pattern, and domains that do not form on the pinning region form adjacent to and are aligned with the domains formed on the pinning regions. In this way, a structure comprising repeating sets of domains is formed on the chemical pattern with a spatial frequency given by the number of repeating sets of domains in the given direction, that is at least twice that of the chemical pattern spatial frequency. Methods of forming the chemical patterns, and pattern transfer methods using patterned domains, are also disclosed.

    摘要翻译： 本文公开了形成聚合物结构的方法，包括将包含至少一种形成薄片的二嵌段共聚物的二嵌段共聚物组合物的溶液施加到其上具有化学图案的基材的中性表面上，所述化学图案包括交替的钉扎和中性区域 其在化学上是不同的，并且具有由沿着衬底上的给定方向的成套组的钉扎和中性区域的数量给出的化学图案空间频率; 以及形成包含二嵌段共聚物嵌段的畴。 这些区域由块的横向偏析形成。 至少一个结构域对钉扎区域的钉扎区域和形成具有亲和性，因此形成在钉扎区域上的区域与下面的化学图案对准，并且不在钉扎区域上形成的区域形成为邻近并对齐 其中所述域形成在钉扎区域上。 以这种方式，在化学图案上形成包括重复的畴集合的结构，其空间频率由给定方向上的重复域集合的数量给出，即至少是化学图案空间频率的两倍。 还公开了形成化学图案的方法和使用图案域的图案转印方法。

    System for gated detection of optical pulses containing a small number of photons using an avalanche photodiode
    8.
    发明授权
    System for gated detection of optical pulses containing a small number of photons using an avalanche photodiode 有权
    用于使用雪崩光电二极管包含少量光子的光脉冲进行门控检测的系统

    公开(公告)号：US06218657B1

    公开(公告)日：2001-04-17

    申请号：US09172759

    申请日：1998-10-15

    申请人： Donald S. Bethune ,  Ralph G. Devoe ,  Christian Kurtsiefer ,  Charles T. Rettner ,  William P. Risk

    发明人： Donald S. Bethune ,  Ralph G. Devoe ,  Christian Kurtsiefer ,  Charles T. Rettner ,  William P. Risk

    IPC分类号： H01J4014

    CPC分类号： G01J1/46

    摘要： An avalanche-type detector circuit includes an avalanche-type photon detector device, a coupling capacitor, a bias network, a first transmission line and a second transmission line. The coupling capacitor has a first terminal that is coupled to a first terminal of the avalanche-type photon detector device. A first terminal of the bias network is coupled to the first terminal of the avalanche-type photon detector device, while a second terminal of the bias network is coupled to a bias voltage so that the avalanche-type photon detector device is reverse biased. A first end of the first transmission line is coupled to a second terminal of the coupling capacitor, and second end of the first transmission line is terminated by an open-circuit termination. A first end of the second transmission line is coupled to a second terminal of the avalanche-type photon detector device. The second end of the second transmission line is terminated by a short-circuit termination. A bias pulse voltage Vpulse is coupled to the second terminal of the coupling capacitor such that the bias pulse voltage reverse biases the avalanche-type photon detector device to be greater than a reverse breakdown voltage Vbr of the avalanche-type photon detector device during a duration of the bias pulse voltage Vpulse. A round-trip propagation delay along the first transmission line is substantially equal to a round-trip propagation delay along the second transmission line.

    摘要翻译： 雪崩型检测器电路包括雪崩型光子检测器装置，耦合电容器，偏置网络，第一传输线和第二传输线。 耦合电容器具有耦合到雪崩型光子检测器装置的第一端子的第一端子。 偏置网络的第一端子耦合到雪崩型光子检测器装置的第一端子，而偏置网络的第二端子耦合到偏置电压，使得雪崩型光子检测器装置被反向偏置。 第一传输线的第一端耦合到耦合电容器的第二端，并且第一传输线的第二端由开路端接终止。 第二传输线的第一端耦合到雪崩型光子检测器装置的第二端。 第二传输线的第二端由短路端接终止。 偏置脉冲电压Vpulse耦合到耦合电容器的第二端子，使得偏置脉冲电压在雪橇型光子检测器装置的持续时间内将雪崩型光子检测器装置反向偏置为大于雪崩型光子检测器装置的反向击穿电压Vbr 的偏置脉冲电压Vpulse。 沿着第一传输线的往返传播延迟基本上等于沿着第二传输线的往返传播延迟。

    METHODS OF FORMING TOPOGRAPHICAL FEATURES USING SEGREGATING POLYMER MIXTURES
    10.
    发明申请
    METHODS OF FORMING TOPOGRAPHICAL FEATURES USING SEGREGATING POLYMER MIXTURES 有权
    使用分散聚合物混合物形成地形特征的方法

    公开(公告)号：US20120135146A1

    公开(公告)日：2012-05-31

    申请号：US12957008

    申请日：2010-11-30

    申请人： Joy Cheng ,  Hayato Namai ,  Charles T. Rettner ,  Daniel P. Sanders ,  Ratnam Sooriyakumaran

    发明人： Joy Cheng ,  Hayato Namai ,  Charles T. Rettner ,  Daniel P. Sanders ,  Ratnam Sooriyakumaran

    IPC分类号： B05D3/12

    CPC分类号： B81C1/00031 ,  B81C2201/0149 ,  H01L21/0337 ,  H01L21/0338

    摘要： Methods are disclosed for forming topographical features. In one method, a pre-patterned structure is provided which comprises i) a support member having a surface and ii) an element for topographically guiding segregation of a polymer mixture including a first polymer and a second polymer, the element comprising a feature having a sidewall adjoined to the surface. The polymer mixture is disposed on the pre-patterned structure, wherein the disposed polymer mixture has contact with the sidewall and the surface. The first polymer and the second polymer are segregated in a plane parallel to the surface, thereby forming a segregated structure comprising a first polymer domain and a second polymer domain. The first polymer domain and/or the second polymer domain are lithographically patterned, thereby forming topographical features comprising at least one of i) a first feature comprising a lithographically patterned first polymer domain and ii) a second feature comprising a lithographically patterned second polymer domain.

    摘要翻译： 公开了形成形貌特征的方法。 在一种方法中，提供预先图案化的结构，其包括i）具有表面的支撑构件和ii）用于拓扑地引导包括第一聚合物和第二聚合物的聚合物混合物的偏析的元件，所述元件包括具有 侧壁与表面相邻。 聚合物混合物设置在预图案化结构上，其中所设置的聚合物混合物与侧壁和表面接触。 第一聚合物和第二聚合物在平行于表面的平面中分离，从而形成包含第一聚合物结构域和第二聚合物结构域的分离结构。 第一聚合物结构域和/或第二聚合物结构域被光刻图案化，从而形成包括以下至少一个的拓扑特征：i）包含光刻图案化的第一聚合物结构域的第一特征和ii）包含光刻图案化的第二聚合物结构域的第二特征。