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公开(公告)号：US20150299842A1
公开(公告)日：2015-10-22
申请号：US14376860
申请日：2013-02-01
IPC分类号： C23C14/22
CPC分类号： C23C14/221 , H01J37/3178 , H01J2237/31732 , H01J2237/31735
摘要： An object of the present invention is to provide: a wiring method in which wiring is performed in a vacuum chamber of a charged particle device without using gas deposition or the like; and a charged particle device.In order to achieve the above-described object, the present invention proposes: a wiring method in which a wiring line composed of an ionic liquid is formed by dropping an ionic liquid on a sample or preparing an ionic liquid on a sample table, on which a sample is placed in advance, and irradiating a wiring track between a wiring start point and a wiring end point with a charged particle beam; and a charged particle device. According to this configuration, wiring can be performed in a vacuum chamber of a charged particle device without using a gas deposition method or the like.
摘要翻译： 本发明的目的是提供一种布线方法，其中，在不使用气体沉积等的情况下，在带电粒子装置的真空室中进行布线; 和带电粒子装置。 为了实现上述目的，本发明提出：一种布线方法，其中通过将离子液体滴落在样品上或在样品台上制备离子液体形成由离子液体组成的布线，在该布线方法上， 预先放置样品，并用带电粒子束照射布线起点和布线终点之间的布线轨迹; 和带电粒子装置。 根据该结构，可以在不使用气相沉积法等的带电粒子装置的真空室中进行配线。
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公开(公告)号：US09963776B2
公开(公告)日：2018-05-08
申请号：US14376860
申请日：2013-02-01
IPC分类号： C23C14/22 , H01J37/317
CPC分类号： C23C14/221 , H01J37/3178 , H01J2237/31732 , H01J2237/31735
摘要： An object of the present invention is to provide: a wiring method in which wiring is performed in a vacuum chamber of a charged particle device without using gas deposition or the like; and a charged particle device.In order to achieve the above-described object, the present invention proposes: a wiring method in which a wiring line composed of an ionic liquid is formed by dropping an ionic liquid on a sample or preparing an ionic liquid on a sample table, on which a sample is placed in advance, and irradiating a wiring track between a wiring start point and a wiring end point with a charged particle beam; and a charged particle device. According to this configuration, wiring can be performed in a vacuum chamber of a charged particle device without using a gas deposition method or the like.
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公开(公告)号：US20190051489A1
公开(公告)日：2019-02-14
申请号：US16085743
申请日：2016-03-18
发明人： Kiyotaka Nakano , Eiko Nakazawa
IPC分类号： H01J37/28 , G01N23/04 , G01N23/225
摘要： A device for observing a specimen, such as a charged particle beam device exemplified by a scanning electron microscope and a transmission electron microscope in which an operator can specify minute bubbles with high contrast in a charged particle beam image of a liquid subjected to processing of generating bubbles, using a phenomenon in which contrast as high as an operator can specify minute bubbles is provided in a charged particle beam image of a specimen including an ionic liquid and a liquid subjected to processing of generating bubbles, thus making it possible to recognize minute bubbles in a liquid.
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公开(公告)号：US20180216223A1
公开(公告)日：2018-08-02
申请号：US15939689
申请日：2018-03-29
IPC分类号： C23C14/22 , H01J37/317
CPC分类号： C23C14/221 , H01J37/3178 , H01J2237/31732 , H01J2237/31735
摘要： An object of the present invention is to provide: a wiring method in which wiring is performed in a vacuum chamber of a charged particle device without using gas deposition or the like; and a charged particle device.In order to achieve the above-described object, the present invention proposes: a wiring method in which a wiring line composed of an ionic liquid is formed by dropping an ionic liquid on a sample or preparing an ionic liquid on a sample table, on which a sample is placed in advance, and irradiating a wiring track between a wiring start point and a wiring end point with a charged particle beam; and a charged particle device. According to this configuration, wiring can be performed in a vacuum chamber of a charged particle device without using a gas deposition method or the like.
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公开(公告)号：US09129772B2
公开(公告)日：2015-09-08
申请号：US14289092
申请日：2014-05-28
IPC分类号： G01N23/00 , G21K5/08 , H01J37/20 , G01N23/225 , H01J37/26 , G01N23/04 , G01N1/28 , G01N1/40 , H01J37/30
CPC分类号： H01J37/20 , G01N1/2813 , G01N23/04 , G01N23/2251 , G01N2001/4027 , H01J37/26 , H01J37/261 , H01J37/3007 , H01J2237/2002 , H01J2237/20214 , H01J2237/204 , H01J2237/206
摘要： Provided is means which enables observation of the shape of a specimen as it is without deforming the specimen. Observation is made by allowing a specimen-holding member having an opening (for example, microgrid and mesh) to hold an ionic liquid and charging a specimen thereto, to allow the specimen to suspend in the ionic liquid. Furthermore, in the proximity of the specimen-holding member, a mechanism of injecting an ionic liquid (ionic liquid introduction mechanism) and/or an electrode are provided. When a voltage is applied to the electrode, the specimen moves or deforms in the ionic liquid. How the specimen moves or deforms can be observed. Furthermore, in the proximity of specimen-holding member, an evaporation apparatus is provided to enable charge of the specimen into the ionic liquid while evaporating. Furthermore, in the proximity of the specimen-holding member, a microcapillary is provided to charge a liquid-state specimen into the ionic liquid. Note that the specimen-holding member is designed to be rotatable.
摘要翻译： 提供能够在不使样本变形的情况下观察样本的形状的装置。 通过允许具有开口的样本保持构件（例如，微网和网格）来保持离子液体并向其中充入试样以允许样品悬浮在离子液体中进行观察。 此外，在试样保持构件附近设置有注入离子液体（离子液体导入机构）和/或电极的机构。 当电极施加电压时，样品在离子液体中移动或变形。 可以观察样品移动或变形。 此外，在试样保持构件附近，设置蒸发装置，以使得能够在蒸发时将试样充入离子液体中。 此外，在样本保持部件附近，设置微毛细管，以将液态标本充入离子液体。 注意，试样保持构件被设计成可旋转。
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6.发明申请OBSERVATION SPECIMEN FOR USE IN ELECTRON MICROSCOPY, ELECTRON MICROSCOPY, ELECTRON MICROSCOPE, AND DEVICE FOR PRODUCING OBSERVATION SPECIMEN 有权用于电子显微镜，电子显微镜，电子显微镜和用于生产观察样本的装置的观察样本公开(公告)号：US20140264018A1
公开(公告)日：2014-09-18
申请号：US14354917
申请日：2012-10-16
发明人： Takafumi Miwa , Yoichi Ose , Eiko Nakazawa , Mami Konomi , Shunya Watanabe , Yoshinobu Kimura , Natsuki Tsuno
CPC分类号： H01J37/261 , G01B15/02 , G01N23/00 , H01J37/026 , H01J37/28 , H01J2237/0044 , Y10T428/24331 , Y10T428/261
摘要： The electrical charging by a primary electronic is inhibited to produce a clear edge contrast from an observation specimen (i.e., a specimen to be observed), whereby the shape of the surface of a sample can be measured with high accuracy. An observation specimen in which a liquid medium comprising an ionic liquid is formed in a thin-film-like or a webbing-film-like form on a sample is used. An electron microscopy using the observation specimen comprises: a step of measuring the thickness of a liquid medium comprising an ionic liquid on a sample; a step of controlling the conditions for irradiation with a primary electron on the basis of the thickness of the liquid medium comprising the ionic liquid; and a step of irradiating the sample with the primary electron under the above-mentioned primary electron irradiation conditions to form an image of the shape of the sample.
摘要翻译： 一次电子的充电被抑制，从观察样本（即待观察的样本）产生清晰的边缘对比度，从而可以高精度地测量样品的表面形状。 使用其中在样品上以薄膜状或织带膜状形成包含离子液体的液体介质的观察样本。 使用观察样品的电子显微镜包括：测量在样品上包含离子液体的液体介质的厚度的步骤; 基于包含离子液体的液体介质的厚度控制用一次电子照射的条件的步骤; 以及在上述一次电子照射条件下用一次电子照射样品以形成样品形状的步骤。
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7.发明授权Observation specimen for use in electron microscopy, electron microscopy, electron microscope, and device for producing observation specimen 有权用于电子显微镜，电子显微镜，电子显微镜和观察样品生产装置的观察标本公开(公告)号：US09202668B2
公开(公告)日：2015-12-01
申请号：US14354917
申请日：2012-10-16
发明人： Takafumi Miwa , Yoichi Ose , Eiko Nakazawa , Mami Konomi , Shunya Watanabe , Yoshinobu Kimura , Natsuki Tsuno
CPC分类号： H01J37/261 , G01B15/02 , G01N23/00 , H01J37/026 , H01J37/28 , H01J2237/0044 , Y10T428/24331 , Y10T428/261
摘要： The electrical charging by a primary electronic is inhibited to produce a clear edge contrast from an observation specimen (i.e., a specimen to be observed), whereby the shape of the surface of a sample can be measured with high accuracy. An observation specimen in which a liquid medium comprising an ionic liquid is formed in a thin-film-like or a webbing-film-like form on a sample is used. An electron microscopy using the observation specimen comprises: a step of measuring the thickness of a liquid medium comprising an ionic liquid on a sample; a step of controlling the conditions for irradiation with a primary electron on the basis of the thickness of the liquid medium comprising the ionic liquid; and a step of irradiating the sample with the primary electron under the above-mentioned primary electron irradiation conditions to form an image of the shape of the sample.
摘要翻译： 一次电子的充电被抑制，从观察样本（即待观察的样本）产生清晰的边缘对比度，从而可以高精度地测量样品的表面形状。 使用其中在样品上以薄膜状或织带膜状形成包含离子液体的液体介质的观察样本。 使用观察样品的电子显微镜包括：测量在样品上包含离子液体的液体介质的厚度的步骤; 基于包含离子液体的液体介质的厚度控制用一次电子照射的条件的步骤; 以及在上述一次电子照射条件下用一次电子照射样品以形成样品形状的步骤。
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