公开(公告)号：US11805645B2

公开(公告)日：2023-10-31

申请号：US16542645

申请日：2019-08-16

Applicant: Micron Technology, Inc.

Inventor： Nicholas R. Tapias ,  Andrew Li ,  Adam W. Saxler ,  Kunal Shrotri ,  Erik R. Byers ,  Matthew J. King ,  Diem Thy N. Tran ,  Wei Yeeng Ng ,  Anish A. Khandekar

IPC: H10B43/27 ,  H01L21/02 ,  H01L21/285 ,  H10B41/27

CPC classification number: H10B43/27 ,  H01L21/0217 ,  H01L21/02164 ,  H01L21/02532 ,  H01L21/02631 ,  H01L21/02636 ,  H01L21/28568 ,  H10B41/27

Abstract: Some embodiments include a structure having an opening extending into an integrated configuration. A first material is within the opening, and is configured to create an undulating topography relative to a sidewall of the opening. The undulating topography has a surface roughness characterized by a mean roughness parameter Rmean which is the mean peak-to-valley distance along the undulating topography. The Rmean is at least about 4 nm. A second material is within the opening and along at least a portion of the undulating topography. The first and second materials are compositionally different from one another. Some embodiments include integrated assemblies. Some embodiments include methods of forming integrated assemblies.

公开(公告)号：US11004494B2

公开(公告)日：2021-05-11

申请号：US16267087

申请日：2019-02-04

Applicant: Micron Technology, Inc.

Inventor： Sanh D. Tang ,  Kuo-Chen Wang ,  Martin C. Roberts ,  Diem Thy N. Tran ,  Hideki Gomi ,  Fredrick D. Fishburn ,  Srinivas Pulugurtha ,  Michel Koopmans ,  Eiji Hasunuma

IPC: G11C11/24 ,  G11C11/402 ,  H01L27/108 ,  G11C5/06 ,  G11C11/4097 ,  G11C5/02 ,  G11C8/14

Abstract: Some embodiments include an assembly having active material structures arranged in an array having rows and columns. Each of the active material structures has a first side which includes a bit contact region, and has a second side which includes a cell contact region. Each of the bit contact regions is coupled with a first redistribution pad. Each of the cell contact regions is coupled with a second redistribution pad. The first redistribution pads are coupled with bitlines, and the second redistribution pads are coupled with programmable devices. Some embodiments include methods of forming memory arrays.

公开(公告)号：US10978553B2

公开(公告)日：2021-04-13

申请号：US16259131

申请日：2019-01-28

Applicant: Micron Technology, Inc.

Inventor： Diem Thy N. Tran ,  Devesh Dadhich Shreeram ,  Sanjeev Sapra

IPC: H01L49/02 ,  H01L27/108 ,  H01G4/08

Abstract: Methods, apparatuses, and systems related to forming a capacitor using a hard mask material are described. An example method includes patterning a surface to have a first silicate material, a first nitride material on the first silicate material, a second silicate material on the first nitride material, a second nitride material on the second silicate material, and a sacrificial material on the second nitride material. The method further includes forming a hard mask material on the sacrificial material. The method further includes forming a capacitor material in an opening through the first silicate material, the first nitride material, the second silicate material, the second nitride material, the sacrificial material, and the hard mask material. The method further includes removing the sacrificial material and the hard mask material.

公开(公告)号：US10157926B2

公开(公告)日：2018-12-18

申请号：US15664161

申请日：2017-07-31

Applicant: Micron Technology, Inc.

Inventor： Gloria Yang ,  Suraj J. Mathew ,  Raghunath Singanamalla ,  Vinay Nair ,  Scott J. Derner ,  Michael Amiel Shore ,  Brent Keeth ,  Fatma Arzum Simsek-Ege ,  Diem Thy N. Tran

IPC: H01L27/108 ,  H01L49/02 ,  H01L29/423 ,  H01L29/78 ,  G11C11/403 ,  H01L23/528 ,  H01L27/06 ,  H01L29/08 ,  H01L29/10

Abstract: Some embodiments include a memory cell having first and second transistors, and a capacitor vertically displaced relative to the first and second transistors. The capacitor has a first node electrically coupled with a source/drain region of the first transistor, a second node electrically coupled with a source/drain region of the second transistor, and capacitor dielectric material between the first and second nodes. Some embodiments include a memory cell having first and second transistors vertically displaced relative to one another, and a capacitor between the first and second transistors. The capacitor has a first node electrically coupled with a source/drain region of the first transistor, a second node electrically coupled with a source/drain region of the second transistor, and capacitor dielectric material between the first and second nodes.

公开(公告)号：US10361204B2

公开(公告)日：2019-07-23

申请号：US16006301

申请日：2018-06-12

Applicant: Micron Technology, Inc.

Inventor： Suraj J. Mathew ,  Raghunath Singanamalla ,  Fawad Ahmed ,  Kris K. Brown ,  Vinay Nair ,  Gloria Yang ,  Fatma Arzum Slmsek-Ege ,  Diem Thy N. Tran

IPC: H01L27/108 ,  G11C5/06 ,  G11C11/405 ,  G11C11/401

Abstract: Some embodiments include a memory cell having first, second and third transistors, with the second and third transistors being vertically displaced relative to one another. The memory cell has a semiconductor pillar extending along the second and third transistors, with the semiconductor pillar containing channel regions and source/drain regions of the second and third transistors. A capacitor may be electrically coupled between a source/drain region of the first transistor and a gate of the second transistor.

公开(公告)号：US20190088652A1

公开(公告)日：2019-03-21

申请号：US16183468

申请日：2018-11-07

Applicant: Micron Technology, Inc.

Inventor： Gloria Yang ,  Suraj J. Mathew ,  Raghunath Singanamalla ,  Vinay Nair ,  Scott J. Derner ,  Michael Amiel Shore ,  Brent Keeth ,  Fatma Arzum Simsek-Ege ,  Diem Thy N. Tran

IPC: H01L27/108 ,  H01L49/02 ,  H01L29/423 ,  G11C11/403 ,  H01L29/78 ,  H01L29/10 ,  H01L27/06 ,  H01L29/08 ,  H01L23/528

Abstract: Some embodiments include a memory cell having first and second transistors, and a capacitor vertically displaced relative to the first and second transistors. The capacitor has a first node electrically coupled with a source/drain region of the first transistor, a second node electrically coupled with a source/drain region of the second transistor, and capacitor dielectric material between the first and second nodes. Some embodiments include a memory cell having first and second transistors vertically displaced relative to one another, and a capacitor between the first and second transistors. The capacitor has a first node electrically coupled with a source/drain region of the first transistor, a second node electrically coupled with a source/drain region of the second transistor, and capacitor dielectric material between the first and second nodes.

公开(公告)号：US20180331107A1

公开(公告)日：2018-11-15

申请号：US16033377

申请日：2018-07-12

Applicant: Micron Technology, Inc.

Inventor： Suraj J. Mathew ,  Kris K. Brown ,  Raghunath Singanamalla ,  Vinay Nair ,  Fawad Ahmed ,  Fatma Arzum Simsek-Ege ,  Diem Thy N. Tran

IPC: H01L27/108 ,  H01L29/94 ,  H01L27/06

CPC classification number: H01L27/108 ,  H01L23/528 ,  H01L27/0207 ,  H01L27/0688 ,  H01L27/10841 ,  H01L27/10864 ,  H01L28/60 ,  H01L29/0847 ,  H01L29/1037 ,  H01L29/7827 ,  H01L29/945

Abstract: Some embodiments include a memory cell having a first transistor supported by a semiconductor base, and having second and third transistors above the first transistor and vertically stacked one atop the other. Some embodiments include a memory cell having first, second and third transistors. The third transistor is above the second transistor, and the second and third transistors are above the first transistor. The first transistor has first and second source/drain regions, the second transistor has third and fourth source/drain regions, and the third transistor has fifth and sixth source/drain regions. A read bitline is coupled with the sixth source/drain region. A write bitline is coupled with the first source/drain region. A write wordline includes a gate of the first transistor. A read wordline includes a gate of the third transistor. A capacitor is coupled with the second source/drain region and with a gate of the second transistor.

公开(公告)号：US20180061837A1

公开(公告)日：2018-03-01

申请号：US15664217

申请日：2017-07-31

Applicant: Micron Technology, Inc.

Inventor： Suraj J. Mathew ,  Kris K. Brown ,  Raghunath Singanamalla ,  Vinay Nair ,  Fawad Ahmed ,  Fatma Arzum Simsek-Ege ,  Diem Thy N. Tran

IPC: H01L27/108 ,  H01L27/06 ,  H01L29/78 ,  H01L29/10 ,  H01L49/02 ,  H01L27/02

CPC classification number: H01L27/108 ,  H01L23/528 ,  H01L27/0207 ,  H01L27/0688 ,  H01L27/10841 ,  H01L27/10864 ,  H01L28/60 ,  H01L29/0847 ,  H01L29/1037 ,  H01L29/7827 ,  H01L29/945

Abstract: Some embodiments include a memory cell having a first transistor supported by a semiconductor base, and having second and third transistors above the first transistor and vertically stacked one atop the other. Some embodiments include a memory cell having first, second and third transistors. The third transistor is above the second transistor, and the second and third transistors are above the first transistor. The first transistor has first and second source/drain regions, the second transistor has third and fourth source/drain regions, and the third transistor has fifth and sixth source/drain regions. A read bitline is coupled with the sixth source/drain region. A write bitline is coupled with the first source/drain region. A write wordline includes a gate of the first transistor. A read wordline includes a gate of the third transistor. A capacitor is coupled with the second source/drain region and with a gate of the second transistor.

公开(公告)号：US20200243640A1

公开(公告)日：2020-07-30

申请号：US16259131

申请日：2019-01-28

Applicant: Micron Technology, Inc.

Inventor： Diem Thy N. Tran ,  Devesh Dadhich Shreeram ,  Sanjeev Sapra

IPC: H01L49/02 ,  H01L27/108 ,  H01G4/08

Abstract: Methods, apparatuses, and systems related to forming a capacitor using a hard mask material are described. An example method includes patterning a surface to have a first silicate material, a first nitride material on the first silicate material, a second silicate material on the first nitride material, a second nitride material on the second silicate material, and a sacrificial material on the second nitride material. The method further includes forming a hard mask material on the sacrificial material. The method further includes forming a capacitor material in an opening through the first silicate material, the first nitride material, the second silicate material, the second nitride material, the sacrificial material, and the hard mask material. The method further includes removing the sacrificial material and the hard mask material.

公开(公告)号：US20190326292A1

公开(公告)日：2019-10-24

申请号：US16459956

申请日：2019-07-02

Applicant: Micron Technology, Inc.

Inventor： Suraj J. Mathew ,  Raghunath Singanamalla ,  Fawad Ahmed ,  Kris K. Brown ,  Vinay Nair ,  Gloria Yang ,  Fatma Arzum Simsek-Ege ,  Diem Thy N. Tran

IPC: H01L27/108 ,  G11C11/405 ,  G11C5/06

Abstract: Some embodiments include a memory cell having first, second and third transistors, with the second and third transistors being vertically displaced relative to one another. The memory cell has a semiconductor pillar extending along the second and third transistors, with the semiconductor pillar containing channel regions and source/drain regions of the second and third transistors. A capacitor may be electrically coupled between a source/drain region of the first transistor and a gate of the second transistor.