公开(公告)号：US06452169B1

公开(公告)日：2002-09-17

申请号：US09582247

申请日：2000-06-21

Applicant: Hindrik Willem Mook

Inventor： Hindrik Willem Mook

IPC: H01J4946

CPC classification number: H01J37/05 ,  H01J49/466

Abstract: The invention relates to a Wien filter provided with electrodes for generating an electric field, and magnetic poles for generating a magnetic field, said electrodes and magnetic poles being positioned around and having a finite length along a filter axis, and being positioned around the filter axis such that electric and magnetic forces induced by the respective fields and exerted on an electrically charged particle moving substantially along the fileter axis at a certain velocity, take substantially an opposite direction to one another and are directed substantially perpendicular to the particle's direction of movement through the filter, said filter having along its axis two ends determined by the finite length of the electrodes and magnetic poles, and said ends both being terminated by a closing plate which is positioned substantially transversely to the filter axis and is provided with an aperture around the filter axis to allow the particle to enter into an exit from the filter. The closing plates are made from a material of low electric and magnetic resistance, and the distance from the closing plates to a plane halfway along and perpendicular to the filter axis is at most approximately equal to the shortest distance from the filter axis to the electrodes and/or magnetic poles.

Abstract translation: 本发明涉及一种维恩滤波器，其具有用于产生电场的电极和用于产生磁场的磁极，所述电极和磁极位于沿滤光器轴线周围并具有有限长度并沿着滤光器轴线定位 使得由相应的场感应并施加在基本沿着歪斜轴线以一定速度运动的带电粒子上的电和磁力基本上彼此相反的方向，并且基本上垂直于粒子的移动方向被引导通过 过滤器，所述过滤器沿其轴线由电极和磁极的有限长度确定两端，并且所述端部由基本上横向于过滤器轴线定位的封闭板端接，并且在过滤器周围设置有孔 轴以允许颗粒进入过滤器的出口。 封闭板由低电阻和低磁阻的材料制成，并且从封闭板到平行于滤光器轴线的中心的平面的距离至多近似等于从滤光器轴线到电极的最短距离， /或磁极。

公开(公告)号：US4019989A

公开(公告)日：1977-04-26

申请号：US624579

申请日：1975-10-22

Applicant: Nicolaas Hazewindus ,  Jacob Maria VAN Nieuwland

Inventor： Nicolaas Hazewindus ,  Jacob Maria VAN Nieuwland

IPC: H01J49/26 ,  H01J49/28 ,  H01J49/46 ,  H01J39/36

CPC classification number: H01J49/288 ,  H01J49/466

Abstract: A Wien filter for selecting particles having a given velocity from a beam of charged particles. Such a Wien filter comprises means to maintain an electric field and a magnetic field, which fields extend at right angles to each other and each at right angles to the axis of the particle beam. By providing a gradient in the magnetic field by means of two coils which are present on either side of the said beam and the axes of which are substantially parallel to the electric field and in which the magnetic field strengths produced in the coils are directed substantially opposite to each other, both a focus of the particle beam in a more favorable place is obtained and a stigmatic reproduction is effected so that velocity separation is considerably simplified.

Abstract translation: 用于从带电粒子束选择具有给定速度的颗粒的维恩滤波器。 这样的维恩滤波器包括维持电场和磁场的装置，这些磁场彼此成直角地延伸，每个与粒子束的轴线成直角。 通过借助于存在于所述光束的任一侧并且其轴基本上平行于电场的两个线圈在磁场中提供梯度，并且其中在线圈中产生的磁场强度基本相反 相互之间，获得了更有利的位置的粒子束的焦点，并实现了一种连续的再现，从而大大简化了速度分离。

公开(公告)号：US07468517B2

公开(公告)日：2008-12-23

申请号：US10571345

申请日：2004-09-02

Applicant: Jürgen Frosien ,  Ralf Degenhardt ,  Stefan Lanio ,  Gerald Schönecker

Inventor： Jürgen Frosien ,  Ralf Degenhardt ,  Stefan Lanio ,  Gerald Schönecker

IPC: G21K1/08 ,  H01J37/21 ,  H01J37/20

CPC classification number: H01J37/153 ,  H01J49/288 ,  H01J49/466 ,  H01J2237/057 ,  H01J2237/1534 ,  H01J2237/2801

Abstract: The present invention provides a charged particle beam device. The device comprises a first lens generating a crossover a second lens positioned after the crossover and an element acting in a focusing and dispersive manner in an x-z-plane with a center of the element having essentially same z-position as the crossover. Further, a multipole element, which acts in the x-z-plane and a y-z-plane is provided. A first charged particle selection element and a second charged particle selection element are used for selecting a portion of the charged particles. Thereby, e.g. the energy width of the charged particle beam can be reduced.

Abstract translation: 本发明提供一种带电粒子束装置。 该装置包括产生交叉的第一透镜，位于交叉后的第二透镜和以聚焦和分散方式作用在x-z平面中的元件，其中元件的中心具有与交叉点基本相同的z位置。 此外，提供了作用于x-z平面和y-z平面的多极元件。 第一带电粒子选择元件和第二带电粒子选择元件用于选择一部分带电粒子。 因此，例如 可以减少带电粒子束的能量宽度。

公开(公告)号：US06410924B1

公开(公告)日：2002-06-25

申请号：US09440985

申请日：1999-11-16

Applicant: Li Wang

Inventor： Li Wang

IPC: H01J4948

CPC classification number: H01J49/466 ,  H01J37/05 ,  H01J37/153 ,  H01J2237/303

Abstract: The resolution of a charged particle beam, such as a focused ion beam (FIB), is optimized by providing an energy filter in the ion beam stream. The energy filter permits ions having a desired energy range to pass while dispersing and filtering out any ions outside the desired energy range. By reducing the energy spread of the ion beam, the chromatic aberration of the ion beam is reduced. Consequently, the current density of the ion beam is increased. The energy filter may be, e.g., a Wien type filter that is optimized as an energy filter as opposed to a mass filter. For example, to achieve useful dispersion the energy filter may use a quadrupole structure between two magnetic pole pieces thereby producing a combined quadrupole electric field and dipole electric field within a magnetic field.

Abstract translation: 通过在离子束流中提供能量过滤器来优化带电粒子束（例如聚焦离子束（FIB））的分辨率。 能量过滤器允许具有期望能量范围的离子通过，同时分散和滤出任何离开所需能量范围之外的离子。 通过减小离子束的能量扩散，离子束的色差减小。 因此，离子束的电流密度增加。 能量过滤器可以是例如与质量过滤器相反优化为能量过滤器的维恩型过滤器。 例如，为了实现有用的分散，能量过滤器可以在两个磁极片之间使用四极结构，从而在磁场内产生组合的四极电场和偶极电场。

公开(公告)号：US5321262A

公开(公告)日：1994-06-14

申请号：US954950

申请日：1992-09-30

Applicant: David W. Turner

Inventor： David W. Turner

IPC: G01Q30/00 ,  G01Q30/02 ,  H01J37/05 ,  H01J49/26 ,  H01J49/46

CPC classification number: H01J49/466 ,  H01J37/05 ,  H01J49/46

Abstract: A low pass filter for use in an image band pass filter of a photoelectron spectromicroscope incorporating a virtual potential surface for reflecting electrons below a particular energy and a special charged particle trap or super dump for unwanted electrons. The filter construction with the super dump reduces the proportion of elastically and inelastically scattered high energy electron escaping the filter.

Abstract translation: 一种用于光电子显微镜的图像带通滤波器的低通滤波器，其包含用于反射电子低于特定能量的虚拟电位表面，以及用于不需要的电子的特殊带电粒子阱或超级倾倒。 具有超级倾倒的过滤器结构减少了弹性和非弹性散射的高能电子逸出过滤器的比例。

公开(公告)号：US5166519A

公开(公告)日：1992-11-24

申请号：US634878

申请日：1991-03-11

Applicant: David W. Turner

Inventor： David W. Turner

IPC: G01Q30/00 ,  G01Q30/02 ,  H01J37/05 ,  H01J49/26 ,  H01J49/46

CPC classification number: H01J49/466 ,  H01J37/05 ,  H01J49/46

Abstract: A low pass filter for use in an image band pass filter of a photoelectron spectromicroscope incorporating a virtual potential surface for reflecting electrons below a particular energy and a special charged particle trap or super dump for unwanted electrons. The filter construction with the super dump reduces the proportion of elastically and inelastically scattered high energy electron escaping the filter.

Abstract translation: PCT No.PCT / GB89 / 00784 Sec。 371日期1991年3月11日 102（e）1991年3月11日PCT PCT。1989年7月10日PCT公布。 第WO90 / 00810号公报 日期1990年1月25日。一种用于光电子显微镜的图像带通滤波器的低通滤波器，其包含用于反射特定能量以下的电子的虚拟电位表面和用于不需要的电子的特殊带电粒子阱或超级倾倒。 具有超级倾倒的过滤器结构减少了弹性和非弹性散射的高能电子逸出过滤器的比例。

公开(公告)号：US3096438A

公开(公告)日：1963-07-02

申请号：US10524461

申请日：1961-04-24

Applicant: NEIDIGH RODGER V

Inventor： NEIDIGH RODGER V

IPC: H01J49/46

CPC classification number: H01J49/466

公开(公告)号：US07560691B1

公开(公告)日：2009-07-14

申请号：US11716891

申请日：2007-03-12

Applicant: Alexander J. Gubbens

Inventor： Alexander J. Gubbens

IPC: H01J49/48

CPC classification number: H01J49/466 ,  G01N23/2276

Abstract: One embodiment relates to a high-resolution Auger electron spectrometer in a scanning electron beam apparatus. An electron source generates a primary electron beam, and an immersion objective lens is configured to focus the primary electron beam onto a surface of a target substrate. A Wien filter is configured within the immersion objective lens and to deflect and disperse secondary electrons from the surface. A position sensitive detector is configured to receive the secondary electrons so as to detect an Auger electron spectrum. A first electron-optical lens may be positioned after the Wien filter so as to transfer a minimal-dispersion plane to an aperture plane. A second electron-optical lens may be positioned after the aperture so as to transfer a virtual focused-spectrum plane to a detector plane. Other embodiments, aspects and features are also disclosed.

Abstract translation: 一个实施例涉及扫描电子束装置中的高分辨率俄歇电子能谱仪。 电子源产生一次电子束，并且浸入式物镜被配置为将一次电子束聚焦到目标衬底的表面上。 Wien滤波器配置在浸没物镜内，并使二次电子从表面偏转和分散。 位置敏感检测器被配置为接收二次电子以便检测俄歇电子频谱。 第一电子 - 光学透镜可以位于维恩滤波器之后，以将最小色散平面传送到孔径平面。 第二电子光学透镜可以位于孔之后，以将虚拟聚焦光谱平面传送到检测器平面。 还公开了其它实施例，方面和特征。

公开(公告)号：US20070158561A1

公开(公告)日：2007-07-12

申请号：US10571345

申请日：2004-09-02

Applicant: Jurgen Frosien ,  Ralf Degenhardt ,  Stefan Lanio ,  Gerald Schonecker

Inventor： Jurgen Frosien ,  Ralf Degenhardt ,  Stefan Lanio ,  Gerald Schonecker

IPC: G21K7/00

CPC classification number: H01J37/153 ,  H01J49/288 ,  H01J49/466 ,  H01J2237/057 ,  H01J2237/1534 ,  H01J2237/2801

Abstract: The present invention provides a charged particle beam device. The device comprises a first lens (101; 510) generating a crossover a second lens (102; 512) positioned after the crossover and a element acting in a focusing and dispersive manner in an x-z-plane with a center of the element having essentially same z-position as the crossover. Further, a multipole element, which acts in the x-z-plane and a y-z-plane is provided. A first charged particle selection element and a second charged particle selection element are used for selecting a portion of the charged particles. Thereby, e.g. the energy width of the charged particle beam can be reduced.

Abstract translation: 本发明提供一种带电粒子束装置。 所述装置包括产生交叉的第一透镜（101; 510），所述第二透镜位于所述交叉之后，所述第二透镜（102; 512）位于所述交叉之后，并且所述元件以聚焦和分散方式作用在xz平面中，所述元件的中心具有基本相同 z位置作为交叉。 此外，提供了作用于x-z平面和y-z平面的多极元件。 第一带电粒子选择元件和第二带电粒子选择元件用于选择一部分带电粒子。 因此，例如 可以减少带电粒子束的能量宽度。

公开(公告)号：US3585383A

公开(公告)日：1971-06-15

申请号：US3585383D

申请日：1966-01-03

Applicant: CENTRE NAT RECH SCIENT ,  CSF

Inventor： CASTAING RAYMOND ,  SLODZIAN GEORGES

IPC: G01N23/225 ,  G01Q10/00 ,  G01Q30/02 ,  H01J37/05 ,  H01J37/252 ,  H01J49/14 ,  H01J49/28 ,  H01J49/46 ,  H01J49/48 ,  G01N23/00 ,  H01J37/00

CPC classification number: H01J49/48 ,  H01J37/05 ,  H01J37/252 ,  H01J49/142 ,  H01J49/286 ,  H01J49/466

Abstract: The present invention relates to microanalysers and more particularly to microanalysers making use of the secondary ion emission for producing, by means of a corpuscular optical system which combines ion optics and mass spectrography, ''''characteristic images'''' of the surface of the sample which indicate the map of distribution of its various elements or isotopes.