公开(公告)号：US06232601B1

公开(公告)日：2001-05-15

申请号：US09274665

申请日：1999-03-23

Applicant: Reinhold Schmitt ,  Jürgen Frosien ,  Stefan Lanio ,  Gerald Schonecker

Inventor： Reinhold Schmitt ,  Jürgen Frosien ,  Stefan Lanio ,  Gerald Schonecker

IPC: H01J37145

CPC classification number: H01J37/21 ,  H01J37/28

Abstract: The invention relates to a charged particle beam device and a method for inspecting a specimen, comprising a source for generating a charged particle beam, an objective lens with an optical axis for focussing said charged particle beam on a specimen, which consists of a magnetic lens and a superimposed electrostatic lens having at least two electrodes, deflection means for deflecting said charged particle beam on said specimen and detector means for detecting charged particles released at said specimen. The invention is further characterized by control means co-acting with said deflection means and one of the electrodes of the electrostatic lens for applying a dynamic voltage to said electrode, the amount of the voltage being dependent on the distance of said charged particle beam from said optical axis at the specimen, in order to increase the efficiency of detecting said charged particles released at image areas being located on the specimen with distance from the optical axis.

Abstract translation: 本发明涉及一种带电粒子束装置和一种用于检查样本的方法，包括用于产生带电粒子束的源，具有用于将所述带电粒子束聚焦在样本上的光轴的物镜，该物镜由磁性透镜 以及具有至少两个电极的叠加的静电透镜，用于使所述带电粒子束偏转在所述样本上的偏转装置和用于检测在所述样本上释放的带电粒子的检测器装置。 本发明的特征还在于与所述偏转装置和静电透镜的一个电极共同作用的控制装置，用于向所述电极施加动态电压，所述电压的量取决于所述带电粒子束与所述电极的距离 以提高在与光轴的距离处位于样品上的图像区域处释放的带电粒子的检测效率。

公开(公告)号：US6107633A

公开(公告)日：2000-08-22

申请号：US113048

申请日：1998-07-09

Applicant: Jurgen Frosien ,  Stefan Lanio ,  Gerald Schonecker

Inventor： Jurgen Frosien ,  Stefan Lanio ,  Gerald Schonecker

IPC: H01J37/20 ,  H01J37/141 ,  H01J37/145 ,  H01J37/244 ,  G21K1/08 ,  H01J3/14 ,  H01J3/26

CPC classification number: H01J37/145 ,  H01J37/141

Abstract: An electron beam lens has a magnetic lens provided with first and second pole pieces for influencing an electron beam and forming a magnetic field between the two pole pieces. A third pole piece is provided, but is not in magnetic contact with the two other pole pieces. The third pole piece is immersed in the magnetic field formed between the first and second pole pieces and extracts a part of such magnetic field. Also disclosed is a cathode lens and an electron beam device for use with such an electron beam lens.

Abstract translation: 电子束透镜具有设置有用于影响电子束并在两个极片之间形成磁场的第一和第二极片的磁性透镜。 提供第三极靴，但不与另外两个极片磁接触。 第三极片浸入形成在第一和第二极片之间的磁场中，并提取这种磁场的一部分。 还公开了一种用于这种电子束透镜的阴极透镜和电子束装置。

公开(公告)号：US4794306A

公开(公告)日：1988-12-27

申请号：US933405

申请日：1986-11-20

Applicant: Kurt-Manfred Tischer ,  Harald Rose ,  Rainer Spehr ,  Gerald Schonecker

Inventor： Kurt-Manfred Tischer ,  Harald Rose ,  Rainer Spehr ,  Gerald Schonecker

IPC: H01J31/12 ,  G09G3/10

CPC classification number: H01J31/126

Abstract: In a flat picture-reproducing device having a phosphor-coated faceplate (1) and a tray-shaped rear housing (2), a cathode formed by a periodic array of heating wires (7) is provided. This heating-wire array is followed by layers of focusing wires (8) and attracting wires (9) and by a perforated anode (5). A segmented counterelectrode (6) is located behind the heating wires (7).

Abstract translation: 在具有荧光体涂覆面板（1）和托盘状后壳体（2）的平面图像再现装置中，设置由周期性排列的加热丝（7）形成的阴极。 该加热线阵列之后是聚焦线（8）和吸引线（9）和穿孔阳极（5）的层。 分段对电极（6）位于加热线（7）的后面。

公开(公告)号：US6104034A

公开(公告)日：2000-08-15

申请号：US112953

申请日：1998-07-09

Applicant: Jurgen Frosien ,  Stefan Lanio ,  Gerald Schonecker

Inventor： Jurgen Frosien ,  Stefan Lanio ,  Gerald Schonecker

IPC: H01J37/141 ,  H01J37/145 ,  G21K1/08 ,  H01J3/14 ,  H01J3/26

CPC classification number: H01J37/145

Abstract: The invention relates to an objective lens for influencing a particle beam, particularly an electron beam with a magnetic single-pole lens and an electrostatic lens having a first and a second electrode which can be supplied with different potentials. The objective lens is characterized in that the electrostatic lens is disposed after the magnetic single-pole lens in the direction of the particle beam.

Abstract translation: 本发明涉及一种用于影响粒子束的物镜，特别是具有磁性单极透镜的电子束和具有可提供不同电位的第一和第二电极的静电透镜。 物镜的特征在于，静电透镜沿着粒子束的方向设置在磁性单极透镜之后。

公开(公告)号：US6051838A

公开(公告)日：2000-04-18

申请号：US947226

申请日：1997-10-08

Applicant: Jurgen Frosien ,  Stefan Lanio ,  Reinhold Schmitt ,  Gerald Schonecker

Inventor： Jurgen Frosien ,  Stefan Lanio ,  Reinhold Schmitt ,  Gerald Schonecker

IPC: G21K1/087 ,  H01J37/12 ,  H01J3/18

CPC classification number: H01J37/12 ,  H01J2237/1207

Abstract: An optical unit having an electrostatic lens for influencing a particle beam wherein the lens has at least one first and one second electrode downstream of one another in the direction of the particle beam, each of the electrodes being chargeable with a potential and in electrical contact with a high-resistance body having a channel therethrough for the particle beam. A further component is provided for influencing the particle beam in the region of the electrostatic lens.

Abstract translation: 一种具有用于影响粒子束的静电透镜的光学单元，其中所述透镜在所述粒子束的方向上具有至少一个第一和第二电极，所述至少一个第一和第二电极在所述粒子束的方向上彼此下游，每个所述电极可被充电并且与电接触 具有用于粒子束的通道的高电阻体。 提供了另一个组件来影响静电透镜区域中的粒子束。

公开(公告)号：US5895919A

公开(公告)日：1999-04-20

申请号：US991681

申请日：1997-12-16

Applicant: Jurgen Frosien ,  Stefan Lanio ,  Gerald Schonecker

Inventor： Jurgen Frosien ,  Stefan Lanio ,  Gerald Schonecker

IPC: H01J37/06 ,  H01J3/02 ,  H01J37/063 ,  H01J37/073 ,  H01J37/145 ,  G21K1/08

CPC classification number: H01J3/029 ,  H01J37/063

Abstract: The invention relates to a gun lens for generating a particle beam with a cathode, an extraction electrode, an anode and a condenser lens, wherein a deceleration field is generated between the extraction electrode and the anode and the condenser lens produces a magnetic field which is superimposed on both the cathode, the extraction electrode and the anode.

Abstract translation: 本发明涉及一种用于产生具有阴极，提取电极，阳极和聚光透镜的粒子束的枪式透镜，其中在引出电极和阳极之间产生减速场，聚光透镜产生磁场， 叠加在阴极，引出电极和阳极上。

公开(公告)号：US20070158561A1

公开(公告)日：2007-07-12

申请号：US10571345

申请日：2004-09-02

Applicant: Jurgen Frosien ,  Ralf Degenhardt ,  Stefan Lanio ,  Gerald Schonecker

Inventor： Jurgen Frosien ,  Ralf Degenhardt ,  Stefan Lanio ,  Gerald Schonecker

IPC: G21K7/00

CPC classification number: H01J37/153 ,  H01J49/288 ,  H01J49/466 ,  H01J2237/057 ,  H01J2237/1534 ,  H01J2237/2801

Abstract: The present invention provides a charged particle beam device. The device comprises a first lens (101; 510) generating a crossover a second lens (102; 512) positioned after the crossover and a element acting in a focusing and dispersive manner in an x-z-plane with a center of the element having essentially same z-position as the crossover. Further, a multipole element, which acts in the x-z-plane and a y-z-plane is provided. A first charged particle selection element and a second charged particle selection element are used for selecting a portion of the charged particles. Thereby, e.g. the energy width of the charged particle beam can be reduced.

Abstract translation: 本发明提供一种带电粒子束装置。 所述装置包括产生交叉的第一透镜（101; 510），所述第二透镜位于所述交叉之后，所述第二透镜（102; 512）位于所述交叉之后，并且所述元件以聚焦和分散方式作用在xz平面中，所述元件的中心具有基本相同 z位置作为交叉。 此外，提供了作用于x-z平面和y-z平面的多极元件。 第一带电粒子选择元件和第二带电粒子选择元件用于选择一部分带电粒子。 因此，例如 可以减少带电粒子束的能量宽度。

公开(公告)号：US5895917A

公开(公告)日：1999-04-20

申请号：US877601

申请日：1997-06-18

Applicant: Koshi Ueda ,  Toshimichi Iwai ,  Gerald Schonecker ,  Jurgen Frosien

Inventor： Koshi Ueda ,  Toshimichi Iwai ,  Gerald Schonecker ,  Jurgen Frosien

IPC: H01J37/141 ,  H01J37/145 ,  H01J37/12

CPC classification number: H01J37/145 ,  H01J2237/2594

Abstract: The invention relates to a detector objective lens and a charged particle am device with such a detector objective lens containing a main lens for focussing a charged particle beam on a specimen, which consists of a magnetic lens (60) and an electrostatic lens (61) and a detector (62) disposed in front of the magnetic lens (60) in the direction of the charged particle beam (2) for detecting the charged particles released at the specimen (8). An additional lens is provided for influencing the released charged particles, which generates an electrostatic and/or magnetic field and is disposed between the main lens and the detector, the fields of the main lens and said additional lens being substantially separated from each other.

Abstract translation: 本发明涉及一种具有这种检测器物镜的检测器物镜和带电粒子束装置，该检测器物镜包含用于将带电粒子束聚焦在由磁性透镜（60）和静电透镜（61）组成的样本上的主透镜， 以及检测器（62），其沿着带电粒子束（2）的方向设置在磁性透镜（60）的前方，用于检测在样本（8）处释放的带电粒子。 提供了附加透镜来影响释放的带电粒子，其产生静电场和/或磁场，并且设置在主透镜和检测器之间，主透镜和所述附加透镜的场基本上彼此分离。

公开(公告)号：US5780859A

公开(公告)日：1998-07-14

申请号：US791091

申请日：1997-01-29

Applicant: Hans-Peter Feuerbaum ,  Jurgen Frosien ,  Koshi Ueda ,  Toshimichi Iwai ,  Gerald Schonecker

Inventor： Hans-Peter Feuerbaum ,  Jurgen Frosien ,  Koshi Ueda ,  Toshimichi Iwai ,  Gerald Schonecker

IPC: H01J37/145 ,  G01Q30/20 ,  H01J49/06

CPC classification number: H01J37/145 ,  H01J49/067 ,  H01J2237/2594

Abstract: An electrostatic-magnetic lens arrangement is for focusing charged particles as well as a charged particle beam device with such a lens arrangement which has a magnetic lens and an electrostatic lens incorporated into the magnetic lens, the magnetic lens being constructed as a single-pole lens.

Abstract translation: 静电磁性透镜装置用于聚焦带电粒子以及具有这种透镜装置的带电粒子束装置，该透镜装置具有并入到磁性透镜中的磁性透镜和静电透镜，该磁性透镜被构造为单极透镜 。