Gas incinerator system
    1.
    发明授权

    公开(公告)号:US12117170B2

    公开(公告)日:2024-10-15

    申请号:US17436806

    申请日:2019-08-12

    IPC分类号: F23G5/32 F23C5/32 F23G7/06

    摘要: An incinerator comprising a cylindrical housing and a plurality of burners is provided. Each burner is oriented to emit gas at an upward and radially inward angle such that the burners collectively generate an upward, helical gas flow. A method for incinerating gas in a cylindrical housing is provided. Flowing gas through a first burner, oriented at an angle, generates an upward, helical gas flow within the cylindrical housing and draws a gas flow through a second burner.

    INLET NOZZLE ASSEMBLY FOR AN ABATEMENT APPARATUS

    公开(公告)号:US20240318816A1

    公开(公告)日:2024-09-26

    申请号:US18577906

    申请日:2022-07-07

    申请人: Edwards Limited

    IPC分类号: F23G7/06 B01D53/70 F23D14/58

    摘要: An inlet nozzle assembly, an abatement apparatus and a method are disclosed. The inlet nozzle assembly is for an abatement apparatus for treating an effluent stream from a semiconductor processing tool, the inlet nozzle assembly comprises: an inlet nozzle configured to deliver the effluent stream into an abatement chamber; a head defining an aperture for receiving the inlet nozzle; and an insulating mount configured to retain the inlet nozzle within the aperture. In this way, the thermal path between the inlet nozzle and the head is interrupted by the insulating mount which helps to prevent the inlet nozzle being cooled by the head, which helps to prevent condensates gathering as powder or particulates on the inlet nozzle.

    CYLINDRICAL HEATING UNIT AND EXHAUST GAS PROCESSING DEVICE INCLUDING THE CYLINDRICAL HEATING UNIT

    公开(公告)号:US20240082777A1

    公开(公告)日:2024-03-14

    申请号:US18247127

    申请日:2022-01-28

    IPC分类号: B01D53/00 F23G7/06

    摘要: A cylindrical heating unit of an exhaust gas processing device is installed in a reactor. The cylindrical heating unit is provided with an exhaust gas introduction port provided in an insertion base part and a heated exhaust gas outlet provided at insertion end. The cylindrical heating unit includes a hollow cylinder, insulators, electric heaters, and holding members. The hollow cylinder has a double structure with an inner cylinder and an outer cylinder made of metal. A plurality of the insulators surround the inner cylinder and are provided at intervals from each other in a heater installation space between the inner cylinder and the outer cylinder. Electric heaters are mounted to the insulators. The holding members are attached to one of the inner cylinder and the outer cylinder or both and hold the insulators in the heater installation space.