Abstract:
Disclosed herein are systems, methods and apparatuses for dissociating a non-activated gas through a disc-shaped plasma in a remote plasma source. Two inductive elements, one on either side of the disc-shaped plasma, generate a magnetic field that induces electric fields that sustain the disc-shaped plasma. The inductive elements can be coiled conductors having any number of loops and can be arranged in planar or vertical coils or a combination of planar and vertical coils. Additionally, the ratio of inductive element radius to gap distance between the two inductive elements can be configured to achieve a desired vertical plasma confinement.
Abstract:
An apparatus and associated methodology providing a data storage system including a memory having a first addressable storage space and a second differently addressable storage space. A controller selectively accesses stored instructions that when executed store a first amount of a user data set to the first addressable storage space and store a different second amount of the user data set to the second addressable storage space. The controller subsequently calculates an address increment between the stored first and second amounts, and then shifts one of the stored first and second amounts by the address increment.
Abstract:
An apparatus and associated methodology providing a data storage system including a memory having a first addressable storage space and a second differently addressable storage space. A controller selectively accesses stored instructions that when executed store a first amount of a user data set to the first addressable storage space and store a different second amount of the user data set to the second addressable storage space. The controller subsequently calculates an address increment between the stored first and second amounts, and then shifts one of the stored first and second amounts by the address increment.
Abstract:
Provided is a system and method for a storage system response. The system includes a first storage system adapted to be linked in communication with at least one client and with a second storage system, the second storage system retaining a plurality of digital assets. An asset map is adapted to track where in the first storage system or the second storage system each of the plurality of digital assets is retained. A migrator is also provided and structured and arranged to migrate each of the plurality of digital assets from the second storage system to the first storage system, the migrator further adapted to update the asset map regarding a status of migration for each of the plurality of digital assets. A server structured and arranged to fulfill digital asset requests received by the first storage system from the at least one client, the server structured and arranged to consult the asset map to determine where the requested digital assets resides. An associated method is also provided.
Abstract:
Systems, methods and apparatus for regulating ion energies in a plasma chamber and chucking a substrate to a substrate support are disclosed. An exemplary method includes placing a substrate in a plasma chamber, forming a plasma in the plasma chamber, controllably switching power to the substrate so as to apply a periodic voltage function (or a modified periodic voltage function) to the substrate, and modulating, over multiple cycles of the periodic voltage function, the periodic voltage function responsive to a defined distribution of energies of ions at the surface of the substrate so as to effectuate the defined distribution of ion energies on a time-averaged basis.
Abstract:
This disclosure describes systems, methods, and apparatus for capacitively coupling energy into a plasma to ignite and sustain the plasma within a remote plasma source. The power is provided by a first electrode that at least partially surrounds or is surrounded by a second electrode. The second electrode can be grounded or floating. First and second dielectric components can be arranged to separate one or both of the electrodes from the plasma and thereby DC isolate the plasma from one or both of the electrodes.