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公开(公告)号：US08884525B2
公开(公告)日：2014-11-11
申请号：US13425159
申请日：2012-03-20
CPC分类号： H05H1/46 , H05H2001/4652
摘要： Disclosed herein are systems, methods and apparatuses for dissociating a non-activated gas through a disc-shaped plasma in a remote plasma source. Two inductive elements, one on either side of the disc-shaped plasma, generate a magnetic field that induces electric fields that sustain the disc-shaped plasma. The inductive elements can be coiled conductors having any number of loops and can be arranged in planar or vertical coils or a combination of planar and vertical coils. Additionally, the ratio of inductive element radius to gap distance between the two inductive elements can be configured to achieve a desired vertical plasma confinement.
摘要翻译： 本文公开了用于通过远程等离子体源中的盘形等离子体解离非活化气体的系统，方法和装置。 两个感应元件，一个在盘形等离子体的两侧，产生一个磁场，其诱导维持盘形等离子体的电场。 电感元件可以是具有任何数量的环的线圈导体，并且可以布置在平面或垂直线圈中或平面和垂直线圈的组合。 此外，电感元件半径与两个感应元件之间的间隙距离的比可以被配置成实现期望的垂直等离子体约束。
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公开(公告)号：US20120187844A1
公开(公告)日：2012-07-26
申请号：US13356546
申请日：2012-01-23
IPC分类号： H05H1/46
CPC分类号： H01J37/32541 , H01J37/32091 , H01J37/32183 , H01J37/32357 , H01J37/3244 , H01J37/32568 , H01J2237/327 , H05H1/46 , H05H2001/4675
摘要： This disclosure describes systems, methods, and apparatus for capacitively coupling energy into a plasma to ignite and sustain the plasma within a remote plasma source. The power is provided by a first electrode that at least partially surrounds or is surrounded by a second electrode. The second electrode can be grounded or floating. First and second dielectric components can be arranged to separate one or both of the electrodes from the plasma and thereby DC isolate the plasma from one or both of the electrodes.
摘要翻译： 本公开描述了用于将能量电容耦合到等离子体中以点燃和维持远程等离子体源内的等离子体的系统，方法和装置。 功率由至少部分地围绕或被第二电极围绕的第一电极提供。 第二个电极可以接地或浮动。 可以布置第一和第二介电部件以将电极中的一个或两个与等离子体分开，从而将等离子体与一个或两个电极隔离。
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公开(公告)号：US10225919B2
公开(公告)日：2019-03-05
申请号：US13173752
申请日：2011-06-30
IPC分类号： C23C16/50 , C23C16/517 , H01J37/32 , H05H1/46
摘要： This disclosure describes systems, methods, and apparatuses for generating an ionizing electromagnetic field via a remote plasma source such that the field controllably extends through a field projection portion where the field attenuates, to a plasma processing portion where the field is attenuated but still strong enough to sustain a plasma. The plasma has a low voltage and RF energy and can be used for a variety of semiconductor and thin film processing operations including chamber cleaning via radical generation, etching, and deposition.
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公开(公告)号：US08723423B2
公开(公告)日：2014-05-13
申请号：US13356546
申请日：2012-01-23
IPC分类号： H05H1/46
CPC分类号： H01J37/32541 , H01J37/32091 , H01J37/32183 , H01J37/32357 , H01J37/3244 , H01J37/32568 , H01J2237/327 , H05H1/46 , H05H2001/4675
摘要： This disclosure describes systems, methods, and apparatus for capacitively coupling energy into a plasma to ignite and sustain the plasma within a remote plasma source. The power is provided by a first electrode that at least partially surrounds or is surrounded by a second electrode. The second electrode can be grounded or floating. First and second dielectric components can be arranged to separate one or both of the electrodes from the plasma and thereby DC isolate the plasma from one or both of the electrodes.
摘要翻译： 本公开描述了用于将能量电容耦合到等离子体中以点燃和维持远程等离子体源内的等离子体的系统，方法和装置。 功率由至少部分地围绕或被第二电极围绕的第一电极提供。 第二个电极可以接地或浮动。 可以布置第一和第二介电部件以将电极中的一个或两个与等离子体分开，从而将等离子体与一个或两个电极隔离。
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公开(公告)号：US20120242229A1
公开(公告)日：2012-09-27
申请号：US13425159
申请日：2012-03-20
IPC分类号： H05H1/46
CPC分类号： H05H1/46 , H05H2001/4652
摘要： Disclosed herein are systems, methods and apparatuses for dissociating a non-activated gas through a disc-shaped plasma in a remote plasma source. Two inductive elements, one on either side of the disc-shaped plasma, generate a magnetic field that induces electric fields that sustain the disc-shaped plasma. The inductive elements can be coiled conductors having any number of loops and can be arranged in planar or vertical coils or a combination of planar and vertical coils. Additionally, the ratio of inductive element radius to gap distance between the two inductive elements can be configured to achieve a desired vertical plasma confinement.
摘要翻译： 本文公开了用于通过远程等离子体源中的盘形等离子体解离非活化气体的系统，方法和装置。 两个感应元件，一个在盘形等离子体的两侧，产生一个磁场，其诱导维持盘形等离子体的电场。 电感元件可以是具有任何数量的环的线圈导体，并且可以布置在平面或垂直线圈中或平面和垂直线圈的组合。 此外，电感元件半径与两个感应元件之间的间隙距离的比可以被配置成实现期望的垂直等离子体约束。
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公开(公告)号：US20130001196A1
公开(公告)日：2013-01-03
申请号：US13173752
申请日：2011-06-30
申请人： Daniel J. Hoffman , Daniel Carter , Karen Peterson , Randy Grilly
发明人： Daniel J. Hoffman , Daniel Carter , Karen Peterson , Randy Grilly
CPC分类号： H05H1/46 , C23C16/50 , C23C16/517 , H01J37/32357 , H01J37/32422 , H01J37/3266 , H01J37/32697 , H01J37/32862
摘要： This disclosure describes systems, methods, and apparatuses for generating an ionizing electromagnetic field via a remote plasma source such that the field controllably extends through a field projection portion where the field attenuates, to a plasma processing portion where the field is attenuated but still strong enough to sustain a plasma. The plasma has a low voltage and RF energy and can be used for a variety of semiconductor and thin film processing operations including chamber cleaning via radical generation, etching, and deposition.
摘要翻译： 本公开描述了用于通过远程等离子体源产生电离电磁场的系统，方法和装置，使得场可控地延伸通过场场衰减的场投射部分到等离子体处理部分，其中场被衰减但仍然足够强 维持等离子体。 等离子体具有低电压和RF能量，并且可用于各种半导体和薄膜加工操作，包括通过自由基生成，蚀刻和沉积的腔室清洁。
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公开(公告)号：US20070043781A1
公开(公告)日：2007-02-22
申请号：US11588003
申请日：2006-10-26
申请人： Yuri Basin , Michael Beirne , James Peterson , Karen Peterson
发明人： Yuri Basin , Michael Beirne , James Peterson , Karen Peterson
IPC分类号： G06F17/30
CPC分类号： G06F16/1744 , G06F11/1451 , H03M7/30 , H04L67/16 , H04L69/329 , Y10S707/99931 , Y10S707/99942 , Y10S707/99943 , Y10S707/99953
摘要： A computer program for managing and manipulating archive zip files of a computer. The program includes a system and method for opening, creating, and modifying, and extracting zip archive files. The program is fully integrated into Microsoft Windows Explorer and is accessed via Explorer menus, toolbars, and/or drag and drop operations. An important feature of the program is the archive manager which may be used to open a zip file, create a new zip file, extract zip files, modify zip files, etc. The program is integrated into Microsoft Windows Explorer using the shell name space extension application program interface developed by Microsoft.
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8.发明申请Acidic detergent and a method of cleaning articles in a dish machine using an acidic detergent 审中-公开酸性洗涤剂和使用酸性洗涤剂在洗碗机中清洁物品的方法公开(公告)号：US20050137105A1
公开(公告)日：2005-06-23
申请号：US10739922
申请日：2003-12-18
CPC分类号： C11D3/042 , C11D1/72 , C11D3/2075 , C11D11/0023
摘要： An acidic detergent composition can be used for removing soils on articles in a dish machine. The acidic detergent composition may be inserted into a dish machine dispenser and a use solution may be formed that contacts a soil on an article and removes the soil on the article. The composition comprises an acid and a surfactant. The composition may be a solid, liquid, gel, paste or pellet.
摘要翻译： 酸性洗涤剂组合物可用于去除洗碗机中的物品上的污垢。 酸性洗涤剂组合物可以插入到洗碗机分配器中，并且可以形成接触物品上的土壤并去除物品上的污垢的使用溶液。 组合物包含酸和表面活性剂。 组合物可以是固体，液体，凝胶，糊剂或丸剂。
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公开(公告)号：US20070043782A1
公开(公告)日：2007-02-22
申请号：US11588006
申请日：2006-10-26
申请人： Yuri Basin , Michael Beirne , James Peterson , Karen Peterson
发明人： Yuri Basin , Michael Beirne , James Peterson , Karen Peterson
CPC分类号： G06F16/1744 , G06F11/1451 , H03M7/30 , H04L67/16 , H04L69/329 , Y10S707/99931 , Y10S707/99942 , Y10S707/99943 , Y10S707/99953
摘要： A computer program for managing and manipulating archive zip files of a computer. The program includes a system and method for opening, creating, and modifying, and extracting zip archive files. The program is fully integrated into Microsoft Windows Explorer and is accessed via Explorer menus, toolbars, and/or drag and drop operations. An important feature of the program is the archive manager which may be used to open a zip file, create a new zip file, extract zip files, modify zip files, etc. The program is integrated into Microsoft Windows Explorer using the shell name space extension application program interface developed by Microsoft.
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公开(公告)号：US20060143251A1
公开(公告)日：2006-06-29
申请号：US11358533
申请日：2006-02-21
申请人： James Peterson , Karen Peterson , Yuri Basin , Michael Beime
发明人： James Peterson , Karen Peterson , Yuri Basin , Michael Beime
IPC分类号： G06F17/30
CPC分类号： H03M7/30 , G06F17/30153 , H04L9/3231 , H04L9/3263 , H04L67/16 , H04L69/329 , H04L2209/30
摘要： Certain embodiments of the present invention provide an archive management application that operates within a host application to provide access to an archive and/or allow access to and/or modification of files in an archive using the host application's interface, instead of operating as a separate standalone archive management application. In an embodiment of the present invention, a file archiving system may include a user interface component, a file management component and a compression/extraction engine component. The user interface component may include an enhanced user interface of a host application that provides an interface for a user. The file management component may include a central directory that provides a representation of the contents of an archive. The compression/extraction engine component may include a file size module and/or a security module. The file size module may be used to compress and/or decompress a file in an archive. The security module may be used to encrypt, decrypt, digitally sign and/or authenticate a file in an archive.
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