Apparatus for generating light in the extreme ultraviolet and use in a light source for extreme ultraviolet lithography
    92.
    发明授权
    Apparatus for generating light in the extreme ultraviolet and use in a light source for extreme ultraviolet lithography 失效
    用于在极紫外光中产生光并用于用于极紫外光刻的光源的装置

    公开(公告)号:US07399981B2

    公开(公告)日:2008-07-15

    申请号:US11151696

    申请日:2005-06-13

    IPC分类号: H05G2/00

    摘要: The device comprises a device (2) for creating an essentially linear target (4) in an evacuated space where laser beams (1) are focused, the target being suitable for interacting with the focused laser beams (1) to emit a plasma emitting radiation in the extreme ultraviolet. A receiver device (3) receives the target (4) after it has interacted with the focused laser beams (1), and a collector device (110) collects the EUV radiation emitted by the target (4). The focusing elements (11) for focusing the laser beams on the target (4) are arranged in such a manner that the laser beams (1) are focused on the target (4) laterally, being situated in a common half-space relative to the target (4) and being inclined at a determined angle lying in the range about 60° to about 90° relative to a mean collection axis (6) perpendicular to the target (4). The collector device (110) is disposed symmetrically about the mean collection axis (6) in the half-space containing the laser beams (1) focused on the target (4) and inside a conical space (8) centered on the mean collection axis (6) with a vertex situated at the target (4) and a half-angle at the vertex that is less than the angle of inclination of the focused laser beams (1) relative to the mean collection axis (6). The device is suitable for use as a source for EUV radiation in lithography for fabricating integrated circuits.

    摘要翻译: 该装置包括用于在激光束(1)被聚焦的抽空空间中产生基本上线性的目标(4)的装置(2),所述目标适合于与聚焦的激光束(1)相互作用以发射等离子体发射辐射 在极紫外线。 接收机装置(3)在与聚焦激光束(1)相互作用后接收目标(4),并且收集装置(110)收集目标(4)发射的EUV辐射。 用于将激光束聚焦在靶(4)上的聚焦元件(11)以这样一种方式被布置,使得激光束(1)横向聚焦在靶(4)上,相对于 目标(4)并相对于垂直于目标(4)的平均收集轴线(6)以确定的角度倾斜在约60°至约90°的范围内。 收集器装置(110)围绕包含聚焦在目标(4)上的激光束(1)的半空间中的平均收集轴线(6)对称地设置在以平均收集轴线为中心的锥形空间(8)内部 (6)具有位于目标(4)处的顶点,并且在顶点处的半角小于聚焦激光束(1)相对于平均收集轴线(6)的倾斜角度。 该器件适合用作光刻用于制造集成电路的EUV辐射源。

    Device for an axially slidable cable in a connector housing
    93.
    发明授权
    Device for an axially slidable cable in a connector housing 有权
    用于连接器壳体中的可轴向滑动的电缆的装置

    公开(公告)号:US07399208B2

    公开(公告)日:2008-07-15

    申请号:US11559218

    申请日:2006-11-13

    申请人: Martin Schmidt

    发明人: Martin Schmidt

    IPC分类号: H01R13/62

    CPC分类号: H01R13/6273 H01R13/6315

    摘要: In order to realize a connector housing (10) that is tightly sealed relative to the environment, there is provided a device for an axially slidable connector-ended cable (5) because a contact holder (20) connected to the connector-ended cable can be displaced by a defined axial distance (C) within the connector housing, wherein a constant pressure is exerted upon the contact holder (35) of a corresponding female connector (3) by means of an integrated pressure spring (40).

    摘要翻译: 为了实现相对于环境紧密密封的连接器壳体(10),提供了一种用于轴向可滑动的连接器端电缆(5)的装置,因为连接到连接器端电缆的接触保持器(20)可以 在连接器壳体内被限定的轴向距离(C)移位,其中通过一体的压力弹簧(40)将恒定的压力施加到相应的母连接器(3)的接触保持器(35)上。

    SEAT-BELT RETRACTOR
    94.
    发明申请
    SEAT-BELT RETRACTOR 有权
    座椅背带

    公开(公告)号:US20080135665A1

    公开(公告)日:2008-06-12

    申请号:US11963797

    申请日:2007-12-22

    IPC分类号: B60R22/40

    CPC分类号: B60R22/40 B60R2022/402

    摘要: In at least one embodiment of the present invention a seat-belt retractor is provided. The seat-belt retractor comprises a locking system that is controlled by means of at least one vehicle-sensitive sensor. The sensor has an alignment mass for autonomous alignment and is configured to pivot on the seat-belt retractor when the angular installation position of the seat-belt retractor is changed and when the seat-belt is extended, the sensor can be fixed in position by a blocking device. The blocking device is friction-controlled by the rotation of the belt shaft in the extension direction. The blocking device includes a rotatably mounted blocking lever which can be displaced into a release position for the sensor by a control lever that is coupled to the belt shaft by a friction coupling when the belt shaft rotates in a retraction direction.

    摘要翻译: 在本发明的至少一个实施例中,提供了一种安全带卷收器。 座椅安全带卷收器包括通过至少一个车辆敏感传感器控制的锁定系统。 传感器具有用于自主对准的对准质量,并且当安全带卷收器的角度安装位置改变时,构造成在安全带卷收器上枢转,并且当座椅安全带延伸时,传感器可以通过 阻塞装置。 阻挡装置通过带轴沿延伸方向的旋转来摩擦控制。 阻挡装置包括可旋转地安装的阻挡杆,其可以通过控制杆移动到用于传感器的释放位置,当控制杆沿回缩方向旋转时,该控制杆通过摩擦联接器联接到带轴上。

    Method and Device for Producing Extreme Ultraviolet Radiation or Soft X-Ray Radiation
    95.
    发明申请
    Method and Device for Producing Extreme Ultraviolet Radiation or Soft X-Ray Radiation 有权
    用于产生极紫外辐射或软X射线辐射的方法和装置

    公开(公告)号:US20080116400A1

    公开(公告)日:2008-05-22

    申请号:US10562496

    申请日:2003-06-27

    IPC分类号: H05G2/00 H01J35/14

    CPC分类号: H05G2/008 H05G2/003 H05G2/005

    摘要: A device for generating extreme ultraviolet (EUV) or soft X-ray radiation comprising: a laser source for producing a laser radiation which is focused to intensities beyond 106 W/cm2 onto a target to produce a plasma; and said electrodes located around the path of the plasma produced by the laser source; and said electrodes being combined with components for producing a rapid electric discharge in the plasma with a characteristic time constant which is less than the time constant of the laser produced plasma expansion time.

    摘要翻译: 一种用于产生极紫外(EUV)或软X射线辐射的装置,包括:用于产生激光辐射的激光源,其被聚焦到超过10 6 / W 2 / >到目标上以产生等离子体; 并且所述电极位于由激光源产生的等离子体的路径周围; 并且所述电极与用于在等离子体中产生快速放电的部件组合,其特征时间常数小于激光产生的等离子体膨胀时间的时间常数。

    Coupling System Between Pre-Tensioning Wheel and Seat Belt Retainer Spool
    96.
    发明申请
    Coupling System Between Pre-Tensioning Wheel and Seat Belt Retainer Spool 有权
    预张紧轮和安全带保持器轴套之间的耦合系统

    公开(公告)号:US20080042001A1

    公开(公告)日:2008-02-21

    申请号:US11596643

    申请日:2005-04-22

    IPC分类号: B60R22/34

    摘要: A combination of belt retractor and belt pre-tensioner in which the pre-tensioning device is coupled to the belt shaft by means of the vehicle-sensitive or belt strap sensitive locking system of the belt retractor, is characterised in that a lever (16) entrained by the drive wheel (10) on its rotation in the pre-tensioning direction is mounted pivotally on the housing and on its pivoting movement effected by the rotation of the drive wheel (10) its free end (18) comes into engagement with the control disc (12) and in so doing, over part of its pivoting movement, drives the control disc (12) for its relative rotation relatively to the belt shaft and after the lever (16) has passed through its pivoting path serving to drive the control disc (12) it is released from the control disc (12) and the drive wheel (10).

    摘要翻译: 皮带卷收器和皮带预张紧器的组合,其中预张紧装置通过带卷收器的车辆敏感或带束带敏感锁定系统联接到皮带轴,其特征在于,杆(16) 驱动轮(10)在其预张紧方向上的旋转被夹紧,其枢转地安装在壳体上,并且由于驱动轮(10)的旋转而产生的枢转运动,其自由端(18)与 控制盘(12),并且在这样做的过程中,在其枢转运动的一部分上,驱动控制盘(12)相对于皮带轴的相对转动,并且在杠杆(16)已经通过其枢转路径以驱动 控制盘(12)从控制盘(12)和驱动轮(10)释放。

    Method and instrument for surgical navigation
    98.
    发明申请
    Method and instrument for surgical navigation 有权
    手术导航方法和仪器

    公开(公告)号:US20060122516A1

    公开(公告)日:2006-06-08

    申请号:US10516297

    申请日:2003-06-11

    IPC分类号: A61B6/00

    摘要: The invention relates to a method for positional optimisation in navigation, in particular neural navigation in surgery with an operation microscope and at least one optoelectronic image detector which may be connected to the microscope and also a computer system. The data obtained from the at least one image detector which lie in the microscope field-of-view for the operator, contain information on the position of an operation instrument, in particular the instrument tip. The actual position of the instrument in the x- and y-direction as well as in the z-direction of a three-dimensional coordinate system is continuously or intermittently determined from the relevant positional data. A separation determination is carried out for the positional determination in the z-direction by means of depth of focus evaluation and/or stereoscopic image analysis. The invention further relates to a navigation instrument, using marking, close to the instrument tip, lying within the field of view of the microscope during use thereof.

    摘要翻译: 本发明涉及一种用于导航中的位置优化的方法,特别是具有操作显微镜的外科手术中的神经导航和可连接到显微镜以及计算机系统的至少一个光电图像检测器。 从操作者的显微镜视场中的至少一个图像检测器获得的数据包含关于操作仪器的位置,特别是仪器尖端的信息。 仪器在三维坐标系的x方向和y方向以及z方向上的实际位置是根据相关位置数据连续或间歇地确定的。 通过深度评估和/或立体图像分析,对z方向的位置确定进行分离确定。 本发明还涉及一种导航仪器,其在使用期间使用位于显微镜视野内的靠近仪器尖端的标记。

    Sensor design and process
    100.
    发明申请
    Sensor design and process 有权
    传感器设计和工艺

    公开(公告)号:US20050277219A1

    公开(公告)日:2005-12-15

    申请号:US11209164

    申请日:2005-08-22

    摘要: An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes a top cap press frame recess (405) and a bottom cap press frame recess (420) for isolating bonding pressures to specified regions of the accelerometer (305). The accelerometer (305) is vacuum-sealed and includes a balanced metal pattern (730) to prevent degradation of the performance of the accelerometer (305). A dicing process is performed on the accelerometer (305) to isolate the electrical leads of the accelerometer (305). The accelerometer (305) further includes overshock protection bumpers (720) and patterned metal electrodes to reduce stiction during the operation of the accelerometer (305).

    摘要翻译: 一种用于测量地震数据的加速度计(305)。 加速度计(305)包括用于在真空密封过程中使用的集成通气孔以及用于减小盖晶片弯曲的平衡金属图案。 加速度计(305)还包括用于将结合压力隔离到加速度计(305)的特定区域的顶盖压制框架凹部(405)和底盖压制框架凹部(420)。 加速度计(305)被真空密封并且包括平衡的金属图案(730),以防止加速度计(305)的性能的劣化。 在加速度计(305)上执行切割处理以隔离加速度计(305)的电引线。 加速度计(305)还包括过冲保护缓冲器(720)和图案化的金属电极,以在加速度计(305)的操作期间减小静摩擦力。