摘要:
A two-dimensional, position-sensitive sensor-based system for positioning an object having six degrees of freedom in space, used for positioning of a silicon table and mask table of a lithography machine. The system comprises mainly a semiconductor laser 1, an optical fiber collimator 2, optical fibers 3, 7, 10, and 13, an optical fiber splitter 4, filter plates 6, 9, and 12, three PSD sensors 5, 8, and 11, and a signal processing system. Laser emitted by the semiconductor laser 1 is irradiated onto the optical fiber collimator 2, then transmitted respectively via three paths, and received by the PSD sensors 5, 8, and 11 after having background light filtered out by the filter plates 6, 9, and 12, while the positions of laser spots on the three PSD sensors 5, 8, and 11 are processed by the signal processing system to acquire the position and orientation.
摘要:
The claimed subject matter provides systems and/or techniques that identify service dependencies in enterprise networks. The system can include devices that, based on received network data packets, identify packets with common five tuples, aggregate the identified packets to form transactions associated with individual hosts, and determine delay distributions between one or more services solicited from or in response to the individual hosts. Based on the delay distributions, the system differentiates between dependent service pairs and independent service pairs and thereafter assembles and outputs dependency graphs that include dependency relationships between services from the perspective of a client-side and a server-side.
摘要:
A plurality of network addresses from a distributed client is obtained, at least a first portion of the obtained network addresses including resolved network address responses to distributed client requests for resolved network addresses corresponding to one or more network location indicators associated with a first web service. Test content is obtained, based on one or more of the network addresses included in the first portion. It is determined whether the obtained test content includes unauthorized content.
摘要:
The present invention provides maspin-related compositions and methods of use thereof. In particular, the present invention provides maspin-related compositions, and methods or use thereof, for the promotion of cell adhesion.
摘要:
Wafer-level processing of wafer assemblies with transducers is described herein. A method in accordance with some embodiments includes forming a solid state transducer device by forming one or more trenches to define solid state radiation transducers. An etching media is delivered in to the trenches to release the transducers from a growth substrate used to fabricate the transducers. A pad can hold the radiation transducers and promote distribution of the etching media through the trenches to underetch and release the transducers.
摘要:
Methods and apparatus relating to disabling one or more cache portions during low voltage operations are described. In some embodiments, one or more extra bits may be used for a portion of a cache that indicate whether the portion of the cache is capable at operating at or below Vccmin levels. Other embodiments are also described and claimed.
摘要:
Systems and methods are provided for scaling IPv4 networks for large data centers to reach hosts in a directly connected subnet. ToRs may be dynamically selected in a load balanced manner to ensure that any host may deliver packets to any other host in two or less hops.
摘要:
Wafer-level processing of wafer assemblies with transducers is described herein. A method in accordance with some embodiments includes forming a solid state transducer device by forming one or more trenches to define solid state radiation transducers. An etching media is delivered in to the trenches to release the transducers from a growth substrate used to fabricate the transducers. A pad can hold the radiation transducers and promote distribution of the etching media through the trenches to underetch and release the transducers.
摘要:
A nanometer precision six-DOF magnetic suspension micro-stage and the application thereof are provided which are mainly used in semiconductor photolithography devices. The micro-stage includes a cross support and four two-DOF actuators. Each 2-DOF actuator comprises a vertically polarized permanent magnet, a horizontal force coil and a vertical force coil; the permanent magnet being mounted on an end of the cross support, the horizontal force coil and the vertical force coil being arranged on a side of and below the permanent magnet respectively and being spaced apart from the permanent magnet; the cross support and four vertically polarized permanent magnets constitute a mover of the micro-stage; the horizontal force coil and the vertical force coil being fixed by a coil framework respectively and constituting a stator of the micro-stage; and the stator being mounted on a base of the micro-stage. A dual-wafer table positioning system of a photolithography machine may be constructed by two said micro-stages in combination with a two-DOF large stroke linear motor. The present invention features simple structure, large driving force, small mass and absence of cable disturbance, and is possible to realize high precision, high acceleration six-DOF micro-motion.