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148 条记录 (耗时 0.056 秒)

    Electric discharge laser with active wavelength chirp correction
    92.
    发明授权
    Electric discharge laser with active wavelength chirp correction 有权
    具有有源波长啁啾校正的放电激光器

    公开(公告)号：US06621846B1

    公开(公告)日：2003-09-16

    申请号：US09501160

    申请日：2000-02-09

    申请人： Richard L. Sandstrom ,  Palash P. Das ,  George J. Everage ,  Frederick G. Erie ,  William N. Partlo ,  Igor V. Fomenkov

    发明人： Richard L. Sandstrom ,  Palash P. Das ,  George J. Everage ,  Frederick G. Erie ,  William N. Partlo ,  Igor V. Fomenkov

    IPC分类号： H01S322

    CPC分类号： H01S3/104 ,  G03F7/70025 ,  G03F7/70333 ,  G03F7/70575 ,  G03F7/708 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0381 ,  H01S3/0382 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/13 ,  H01S3/134 ,  H01S3/225

    摘要： Electric discharge laser with active chirp correction. This application discloses techniques for moderating and dispensing these pressure waves. In some lasers small predictable patterns remain which can be substantially corrected with active wavelength control using relatively slow wavelength control instruments of the prior art. In a preferred embodiment a simple learning algorithm is described to allow advance tuning mirror adjustment in anticipation of the learned chirp pattern. Embodiments include stepper motors having very fine adjustments so that size of tuning steps are substantially reduced for more precise tuning. However, complete elimination of wavelength chirp is normally not feasible with structural changes in the laser chamber and advance tuning; therefore, Applicants have developed equipment and techniques for very fast active chirp correction. Improved techniques include a combination of a relatively slow stepper motor and a very fast piezoelectric driver. In another preferred embodiment chirp correction is made on a pulse-to-pulse basis where the wavelength of one pulse is measured and the wavelength of the next pulse is corrected based on the measurement. This correction technique is able to function at repetition rates as rapid as 2000 Hz and greater.

    摘要翻译： 具有主动啁啾校正的放电激光器。 本申请公开了用于调节和分配这些压力波的技术。 在一些激光器中，可以使用现有技术的相对较慢的波长控制装置的主动波长控制基本上校正了小的可预测的图案。 在优选实施例中，描述了一种简单的学习算法，以便在预期学习的啁啾模式中允许预调谐镜调节。 实施例包括具有非常精细调节的步进电动机，使得调节步骤的尺寸被显着减小以便更精确的调谐。 然而，完全消除波长啁啾通常不可行，在激光室的结构变化和提前调谐; 因此，申请人已经开发了用于非常快的主动啁啾校正的设备和技术。 改进的技术包括相对较慢的步进电机和非常快的压电驱动器的组合。 在另一个优选实施例中，在脉冲对脉冲基础上进行啁啾校正，其中测量一个脉冲的波长，并且基于测量校正下一个脉冲的波长。 该校正技术能够以2000Hz及更高​​的重复速率工作。

    Magnetic modulator voltage and temperature timing compensation circuit
    94.
    发明授权
    Magnetic modulator voltage and temperature timing compensation circuit 失效
    磁调制器电压和温度定时补偿电路

    公开(公告)号：US6016325A

    公开(公告)日：2000-01-18

    申请号：US69019

    申请日：1998-04-27

    申请人： Richard M. Ness ,  William N. Partlo ,  Richard L. Sandstrom

    发明人： Richard M. Ness ,  William N. Partlo ,  Richard L. Sandstrom

    IPC分类号： H01S3/097 ,  H01S3/038 ,  H02M3/00 ,  H02M3/157 ,  H03K3/45 ,  H03K5/13 ,  H01S3/00

    CPC分类号： H03K5/131 ,  H01S3/038

    摘要： An improvement over prior art voltage timing compensation circuits is achieved by incorporating a function generator to provide a more accurate non-linear compensation to pulse timing delay, which is typically a non-linear function of voltage. An improvement over prior art temperature timing compensation circuits is achieved by providing for actual temperature measurements to be made and used to drive the timing compensation circuitry for a more accurate temperature timing compensation than provided by prior art temperature synthesis, while still using a relatively simple compensating circuit. In some embodiments a timing compensation circuit combines both voltage and temperature timing compensation.

    摘要翻译： 通过结合功能发生器来提供对脉冲定时延迟的更精确的非线性补偿来实现现有技术的电压定时补偿电路的改进，脉冲定时延迟通常是电压的非线性函数。 通过提供实际的温度测量来实现对现有技术的温度定时补偿电路的改进，并且用于驱动定时补偿电路以获得比现有技术的温度合成提供的更精确的温度定时补偿，同时仍然使用相对简单的补偿 电路。 在一些实施例中，定时补偿电路组合电压和温度定时补偿。

    REGENERATIVE RING RESONATOR
    95.
    发明申请
    REGENERATIVE RING RESONATOR 有权
    再生环谐振器

    公开(公告)号：US20110069733A1

    公开(公告)日：2011-03-24

    申请号：US12724681

    申请日：2010-03-16

    申请人： Hong Ye ,  Richard L. Sandstrom ,  Slava Rokitski ,  Daniel J.W. Brown ,  Robert J. Rafac

    发明人： Hong Ye ,  Richard L. Sandstrom ,  Slava Rokitski ,  Daniel J.W. Brown ,  Robert J. Rafac

    IPC分类号： H01S3/08

    CPC分类号： H01S3/225 ,  H01S3/02 ,  H01S3/0804 ,  H01S3/0805 ,  H01S3/08059 ,  H01S3/08072 ,  H01S3/08081 ,  H01S3/0835 ,  H01S3/10092 ,  H01S3/1053 ,  H01S3/235 ,  H01S3/2366

    摘要： A laser includes a regenerative ring resonator that includes a discharge chamber having electrodes and a gain medium between the electrodes for producing a laser beam; a partially-reflective optical coupler, and a beam modification optical system in the path of the laser beam. The beam modification optical system transversely expands a profile of the laser beam such that the near field laser beam profile uniformly fills each aperture within the laser and such that the regenerative ring resonator remains either conditionally stable or marginally unstable when operating the laser at powers that induce thermal lenses in optical elements inside the regenerative ring resonator.

    摘要翻译： 激光器包括再生环形谐振器，其包括具有电极的放电室和用于产生激光束的电极之间的增益介质; 部分反射光耦合器，以及激光束路径中的光束修改光学系统。 光束修改光学系统横向扩展激光束的轮廓，使得近场激光束轮廓均匀地填充激光器内的每个孔径，使得再生环形谐振器在以诱导的功率操作激光器时保持条件稳定或边缘不稳定 再生环形谐振器内的光学元件的热透镜。

    High power seed/amplifier laser system with beam shaping intermediate the seed and amplifier
    96.
    发明申请
    High power seed/amplifier laser system with beam shaping intermediate the seed and amplifier 有权
    大功率种子/放大器激光系统，具有光束成形中间种子和放大器

    公开(公告)号：US20090116530A1

    公开(公告)日：2009-05-07

    申请号：US12284031

    申请日：2008-09-17

    申请人： Richard L. Sandstrom ,  Daniel J. W. Brown ,  Thomas Hofmann ,  Jason D. Robinson ,  Craig W. Unick

    发明人： Richard L. Sandstrom ,  Daniel J. W. Brown ,  Thomas Hofmann ,  Jason D. Robinson ,  Craig W. Unick

    IPC分类号： H01S3/22

    CPC分类号： C30B13/24 ,  B23K26/0622 ,  B23K26/0738 ,  C30B29/06 ,  H01L21/67115

    摘要： An apparatus and method of operation for a high power broad band elongated thin beam laser annealing light source, which may comprise a gas discharge seed laser oscillator having a resonance cavity, providing a seed laser output pulse; a gas discharge amplifier laser amplifying the seed laser output pulse to provide an amplified seed laser pulse output; a divergence correcting multi-optical element optical assembly intermediate the seed laser and the amplifier laser. The divergence correcting optical assembly may adjust the size and/or shape of the seed laser output pulse within a discharge region of the amplifier laser in order to adjust an output parameter of the amplified seed laser pulse output. The divergence correcting optical assembly may comprise a telescope with an adjustable focus. The adjustable telescope may comprise an active feedback-controlled actuator based upon a sensed parameter of the amplified seed laser output from the amplifier laser.

    摘要翻译： 一种用于大功率宽带细长光束激光退火光源的装置和方法，其可以包括具有谐振腔的气体放电种子激光振荡器，提供种子激光输出脉冲; 气体放电放大器激光器，放大种子激光输出脉冲，以提供放大的种子激光脉冲输出; 种子激光器和放大器激光器之间的发散校正多光学元件光学组件。 发散校正光学组件可以在放大器激光器的放电区域内调整种子激光器输出脉冲的尺寸和/或形状，以便调节放大的种子激光脉冲输出的输出参数。 发散校正光学组件可以包括具有可调焦点的望远镜。 可调节望远镜可以包括基于从放大器激光器输出的放大的种子激光器的感测参数的主动反馈控制致动器。

    SYSTEMS AND METHODS FOR IMPLEMENTING AN INTERACTION BETWEEN A LASER SHAPED AS LINE BEAM AND A FILM DEPOSITED ON A SUBSTRATE
    98.
    发明申请
    SYSTEMS AND METHODS FOR IMPLEMENTING AN INTERACTION BETWEEN A LASER SHAPED AS LINE BEAM AND A FILM DEPOSITED ON A SUBSTRATE 有权
    用于实现激光形成的线束与基板上沉积的膜之间的相互作用的系统和方法

    公开(公告)号：US20120298838A1

    公开(公告)日：2012-11-29

    申请号：US13571129

    申请日：2012-08-09

    申请人： Palash P. Das ,  Thomas Hofmann ,  Jesse D. Davis ,  Richard L. Sandstrom

    发明人： Palash P. Das ,  Thomas Hofmann ,  Jesse D. Davis ,  Richard L. Sandstrom

    IPC分类号： G01J1/16

    CPC分类号： B23K26/043 ,  B23K26/04 ,  B23K26/0622 ,  B23K26/0738 ,  C30B1/023 ,  C30B13/24

    摘要： A laser crystallization apparatus and method are disclosed for selectively melting a film such as amorphous silicon that is deposited on a substrate. The apparatus may comprise an optical system for producing stretched laser pulses for use in melting the film. In still another aspect of an embodiment of the present invention, a system and method are provided for stretching a laser pulse. In another aspect, a system is provided for maintaining a divergence of a pulsed laser beam (stretched or non-stretched) at a location along a beam path within a predetermined range. In another aspect, a system may be provided for maintaining the energy density at a film within a predetermined range during an interaction of the film with a shaped line beam.

    摘要翻译： 公开了一种激光结晶装置和方法，用于选择性地熔融沉积在基底上的诸如非晶硅的膜。 该装置可以包括用于产生用于熔化膜的拉伸激光脉冲的光学系统。 在本发明实施例的另一方面，提供一种用于拉伸激光脉冲的系统和方法。 在另一方面，提供了一种系统，用于在预定范围内沿着光束路径的位置维持脉冲激光束的发散（拉伸或未拉伸）。 在另一方面，可以提供一种系统，用于在膜与成形线束的相互作用期间将膜处的能量密度保持在预定范围内。

    Multi-Pass Optical Apparatus
    99.
    发明申请
    Multi-Pass Optical Apparatus 有权
    多通道光学仪器

    公开(公告)号：US20120170112A1

    公开(公告)日：2012-07-05

    申请号：US12980939

    申请日：2010-12-29

    申请人： Richard L. Sandstrom

    发明人： Richard L. Sandstrom

    IPC分类号： H01S3/081 ,  G02B5/10 ,  H01S3/086 ,  G02B5/08

    CPC分类号： G02B17/004 ,  G02B7/1815 ,  G02B7/1825 ,  H01S3/076 ,  H01S3/2325

    摘要： An apparatus includes a first plurality of concave reflecting surfaces; a second plurality of reflecting surfaces facing the first plurality of concave reflecting surfaces such that a region is defined between the first and second pluralities; and an input for an optical beam to enter the region and an output for the optical beam to exit the region. The first and second pluralities of reflecting surfaces are arranged relative to each other so that the optical beam is re-imaged at a reflecting surface of one of the pluralities after only one reflection from a reflecting surface of the other of the pluralities and so that overlap of two or more optical beams on each of the reflecting surfaces is avoided.

    摘要翻译： 一种装置包括：第一多个凹面反射面; 面对所述第一多个凹反射表面的第二多个反射表面，使得在所述第一和第二多个之间限定区域; 以及用于进入该区域的光束的输入和用于使光束离开该区域的输出。 第一和第二多个反射表面相对于彼此布置，使得光束在仅一次反射之后的多个反射表面中从多个另一个的反射表面重新成像，并且重叠 避免了在每个反射表面上的两个或更多个光束。

    Systems and methods for implementing an interaction between a laser shaped as line beam and a film deposited on a substrate
    100.
    发明申请
    Systems and methods for implementing an interaction between a laser shaped as line beam and a film deposited on a substrate 有权
    用于实现激光成形为线束和沉积在基底上的膜之间的相互作用的系统和方法

    公开(公告)号：US20090256057A1

    公开(公告)日：2009-10-15

    申请号：US12386771

    申请日：2009-04-21

    申请人： Palash P. Das ,  Thomas Hofmann ,  Jesse D. Davis ,  Richard L. Sandstrom

    发明人： Palash P. Das ,  Thomas Hofmann ,  Jesse D. Davis ,  Richard L. Sandstrom

    IPC分类号： G02B27/40 ,  G01B9/00

    CPC分类号： B23K26/043 ,  B23K26/04 ,  B23K26/0622 ,  B23K26/0738 ,  C30B1/023 ,  C30B13/24

    摘要： A laser crystallization apparatus and method are disclosed for selectively melting a film such as amorphous silicon that is deposited on a substrate. The apparatus may comprise an optical system for producing stretched laser pulses for use in melting the film. In still another aspect of an embodiment of the present invention, a system and method are provided for stretching a laser pulse. In another aspect, a system is provided for maintaining a divergence of a pulsed laser beam (stretched or non-stretched) at a location along a beam path within a predetermined range. In another aspect, a system may be provided for maintaining the energy density at a film within a predetermined range during an interaction of the film with a shaped line beam.

    摘要翻译： 公开了一种激光结晶装置和方法，用于选择性地熔融沉积在基底上的诸如非晶硅的膜。 该装置可以包括用于产生用于熔化膜的拉伸激光脉冲的光学系统。 在本发明实施例的另一方面，提供一种用于拉伸激光脉冲的系统和方法。 在另一方面，提供了一种系统，用于在预定范围内沿着光束路径的位置维持脉冲激光束的发散（拉伸或未拉伸）。 在另一方面，可以提供一种系统，用于在膜与成形线束的相互作用期间将膜处的能量密度保持在预定范围内。