Plasma processing apparatus
    91.
    发明申请
    Plasma processing apparatus 审中-公开
    等离子体处理装置

    公开(公告)号:US20100186672A1

    公开(公告)日:2010-07-29

    申请号:US12379643

    申请日:2009-02-26

    IPC分类号: C23C16/00

    摘要: A plasma processing apparatus composed of a processing chamber in a vacuum vessel to which a gas is fed to form a plasma, a sample stage in which a channel for a heat exchange medium is formed, beams for supporting the sample stage in the horizontal direction, a cylindrical space at atmospheric pressure formed below the channel in the sample stage, coupling paths for communicating the inner wall of the cylindrical space with the exterior of the vacuum vessel, a piping conduit for medium formed in the coupling path, a drive mechanism to drive pins for a wafer, and metal blocks covering junctions between the piping conduits for medium and the sample stage, whereby a gas at high temperature is supplied to between the metal blocks and is exhausted through the coupling path.

    摘要翻译: 一种等离子体处理装置,由真空容器内的供给气体而形成等离子体的处理室,形成有热交换介质用通道的样品台,水平方向支撑样品台的光束, 大气压下形成的圆柱形空间,形成在样品台的通道下方,用于将圆柱形空间的内壁与真空容器的外部连通的连接路径,形成在联接路径中的介质的管道导管,驱动机构 用于晶片的引脚和覆盖用于介质和样品台的管道导管之间的接合处的金属块,由此将高温气体供应到金属块之间并通过耦合路径排出。

    Optical module device
    94.
    发明申请
    Optical module device 审中-公开
    光模块设备

    公开(公告)号:US20080253720A1

    公开(公告)日:2008-10-16

    申请号:US12068896

    申请日:2008-02-13

    IPC分类号: G02B6/26

    摘要: An optical module device includes an optical module having leads, a print substrate and a flexible substrate including a first region having a center and a peripheral areas, a second and a third region, the flexible substrate including first through-holes corresponding to the leads in the center area, a terminal and a metalized trace formed in the second and third regions respectively, and a protection layer formed on its surface at the peripheral area and in the third region, wherein the flexible substrate further includes two second through-holes in the peripheral area, which is a location close to the third region, wherein the flexible substrate is bent along a line coupling the two second through-holes, and wherein the flexible substrate at it first region is fixed to the second end member by adhesive material injected into the second through-holes.

    摘要翻译: 光学模块装置包括具有引线,印刷基板和柔性基板的光学模块,该基板包括具有中心和周边区域的第一区域,第二和第三区域,柔性基板包括与引线对应的第一通孔 分别形成在第二和第三区域的中心区域,端子和金属化迹线,以及在其周边区域和第三区域的其表面上形成的保护层,其中柔性基板还包括在第二区域中的两个第二通孔 周边区域,其是靠近第三区域的位置,其中柔性基板沿着连接两个第二通孔的线弯曲,并且其中在其第一区域处的柔性基板通过注入的粘合材料固定到第二端部构件 进入第二个通孔。

    Accessing device
    95.
    发明授权
    Accessing device 有权
    访问设备

    公开(公告)号:US07404029B2

    公开(公告)日:2008-07-22

    申请号:US11366944

    申请日:2006-03-02

    摘要: To provide an accessing device which allows reliable protection of important data. A memory accessing device has a file system device which manages a logical memory space and a driver device which maintains a correlation information between the logical memory space and a physical memory space and which physically accesses a flash memory based on the correlation information. The flash memory is physically divided into a plurality of strings. The file system device manages the memory space by dividing the memory space into a plurality of partitions each of which is set to one of RO and RW. The driver device specifies a permission type to write the data in a string by correlating each string to a single logical partition.

    摘要翻译: 提供允许可靠保护重要数据的访问设备。 存储器访问设备具有管理逻辑存储器空间的文件系统设备和维护逻辑存储器空间和物理存储器空间之间的相关信息并且基于相关信息物理地访问快闪存储器的驱动器设备。 闪存被物理地分成多个字符串。 文件系统装置通过将存储空间划分成多个分区来管理存储器空间,每个分区被设置为RO和RW之一。 驱动程序设备通过将每个字符串与单个逻辑分区相关联来指定将数据写入字符串的许可类型。

    Plasma processing apparatus capable of adjusting pressure within processing chamber
    96.
    发明申请
    Plasma processing apparatus capable of adjusting pressure within processing chamber 审中-公开
    能够调节处理室内的压力的等离子体处理装置

    公开(公告)号:US20080066859A1

    公开(公告)日:2008-03-20

    申请号:US11512124

    申请日:2006-08-30

    IPC分类号: H01L21/306

    CPC分类号: H01J37/3244 H01J37/32834

    摘要: A vacuum pump exhausts gas within the processing chamber from a lower portion of a sample so as to reduce pressure within a processing chamber. The vacuum pump includes a rotary vane and a fixed vane which are arranged within a case of the vacuum pump and have a plurality of impeller blades in a coaxial manner; an exhausting port for exhausting the gas exhausted from the rotary vane outside the case; and a conducting port arranged along a lower direction of the rotary vane, into which inert gas is conducted, which are provided on a circumference thereof. An MFC (flow rate adjusting device) is arranged between a gas storage unit of the inert gas and the conducting port, for adjusting an amount of the inert gas.

    摘要翻译: 真空泵从样品的下部排出处理室内的气体,以减少处理室内的压力。 所述真空泵包括旋转叶片和固定叶片,所述旋转叶片和固定叶片布置在所述真空泵的壳体内并具有同轴的多个叶轮叶片; 用于将从旋转叶片排出的气体排出外壳的排气口; 以及沿其旋转叶片的下方向布置的导电口,惰性气体被引导入其周围。 在惰性气体的气体存储单元和导电口之间设置MFC(流量调节装置),用于调节惰性气体的量。

    Data processor for processing pieces of data being successively sampled at intervals
    97.
    发明申请
    Data processor for processing pieces of data being successively sampled at intervals 有权
    用于处理数据的数据处理器以间隔连续取样

    公开(公告)号:US20080059045A1

    公开(公告)日:2008-03-06

    申请号:US11896940

    申请日:2007-09-06

    IPC分类号: G06F19/00

    摘要: In a data processor for processing pieces of input data successively sampled, a memory unit and a plurality of data transferring units for transferring data are provided. Each of the plurality of data transferring units has an upper limit number of data items successively transferable when activated. An activating unit is provided. The activating unit is configured to successively activate, within a predetermined time frame, the data transferring units without all of the data transferring units being deactivated within the predetermined time frame to thereby successively transfer the pieces of input data to the memory unit so as to store the pieces of input data therein.

    摘要翻译: 在用于处理连续采样的输入数据的数据处理器中,提供存储单元和用于传送数据的多个数据传送单元。 多个数据传送单元中的每一个具有当被激活时可连续传送的数据项的上限数目。 提供一个激活单元。 所述激活单元被配置为在预定时间帧内连续激活所述数据传送单元,而不在所述预定时间帧内停止所有数据传送单元,从而连续地将所述输入数据传送到所述存储器单元以便存储 其中的输入数据。

    X-ray tube control apparatus and x-ray tube control method
    99.
    发明授权
    X-ray tube control apparatus and x-ray tube control method 失效
    X射线管控制装置和X射线管控制方法

    公开(公告)号:US07286642B2

    公开(公告)日:2007-10-23

    申请号:US10510212

    申请日:2003-04-04

    IPC分类号: H05G1/54

    CPC分类号: H05G1/46

    摘要: A maximum tube voltage value setting module 240a, a warming-up module 240b, a limit tube voltage control module 240c, a limit tube current control module 240d and a focus grid electrode control module 240e of an operation program 240 which respectively correspond to different maximum tube voltage values are stored in storage sections 32a-e of an X-ray tube control apparatus 3. When the maximum tube voltage value of an X-ray tube 1 is changed, an extraction section 34 extracts each module of the operation program 240 which corresponds to the maximum tube voltage value after being changed from the storage sections 32a-e. A communications section 36 sends the operation program 240 comprised of each extracted module to an X-ray tube controller 2 and overwrites it in a memory section 24.

    摘要翻译: 操作程序240的最大管电压值设定模块240a,预热模块240b,极限管电压控制模块240c,极限管电流控制模块240d和焦点栅极电极控制模块240e 分别对应于不同的最大管电压值存储在X射线管控制装置3的存储部分32e中。 当X射线管1的最大管电压值改变时,提取部分34从存储部分32a-e中提取与改变后的最大管电压值相对应的操作程序240的每个模块。 通信部分36将由每个提取的模块组成的操作程序240发送到X射线管控制器2,并将其重写在存储器部分24中。

    Eddy current type sensor for detecting conductor
    100.
    发明申请
    Eddy current type sensor for detecting conductor 有权
    用于检测导体的涡流型传感器

    公开(公告)号:US20070200562A1

    公开(公告)日:2007-08-30

    申请号:US11711900

    申请日:2007-02-28

    IPC分类号: G01R33/14

    CPC分类号: G01V3/102

    摘要: An eddy current type sensor for detecting a conductor includes a LC circuit and an oscillator. The LC circuit has a coil and a capacitor connected in parallel with the coil. The oscillator supplies an alternating current of a predetermined oscillation frequency to the LC circuit. A signal voltage outputted from the LC circuit has a first voltage when the distance between the coil and the conductor is minimum and a second voltage when the distance between the coil and the conductor is maximum. A voltage difference between the first and second voltages has a first difference at a first temperature and has a second difference at a second temperature. The first and second differences become equal to each other at a first frequency and a second frequency. The oscillation frequency is set close to the first frequency or the second frequency.

    摘要翻译: 用于检测导体的涡流型传感器包括LC电路和振荡器。 LC电路具有与线圈并联连接的线圈和电容器。 振荡器向LC电路提供预定振荡频率的交流电。 当线圈和导体之间的距离最小时,从LC电路输出的信号电压具有第一电压,当线圈和导体之间的距离最大时,第二电压。 第一和第二电压之间的电压差在第一温度下具有第一差异,并且在第二温度下具有第二差。 第一和第二差异在第一频率和第二频率处彼此相等。 振荡频率设定为接近于第一频率或第二频率。