INFRARED SENSOR ARRAY BASED TEMPERATURE MONITORING SYSTEMS FOR DATA CENTERS AND RELATED METHODS
    92.
    发明申请
    INFRARED SENSOR ARRAY BASED TEMPERATURE MONITORING SYSTEMS FOR DATA CENTERS AND RELATED METHODS 有权
    基于红外传感器阵列的数据中心温度监测系统及相关方法

    公开(公告)号:US20150123562A1

    公开(公告)日:2015-05-07

    申请号:US14520563

    申请日:2014-10-22

    Abstract: Temperature monitoring systems for data centers include a plurality of ceiling-mounted infrared sensor arrays. Each infrared sensor array includes a two-dimensional array of infrared emission sensors, and at least some of the infrared emission sensors have field of view patterns that project onto aisle faces of equipment racks that are mounted in rows in the data center. These systems may further include a controller that is remote from at least some of the infrared sensor arrays and that is in communications with the infrared sensor arrays, the controller configured to provide a two-dimensional thermal map of the aisle faces of the equipment racks based at least in part on temperature data received from the infrared sensor arrays.

    Abstract translation: 用于数据中心的温度监测系统包括多个天花板安装的红外传感器阵列。 每个红外传感器阵列包括二维阵列的红​​外发射传感器,并且至少一些红外发射传感器具有投影到安装在数据中心行中的设备机架的通道面上的视野图案。 这些系统还可以包括远离至少一些红外传感器阵列并且与红外传感器阵列通信的控制器,该控制器被配置为提供设备机架的通道面的二维热图 至少部分地基于从红外传感器阵列接收的温度数据。

    POLISHING METHOD AND POLISHING APPARATUS
    94.
    发明申请
    POLISHING METHOD AND POLISHING APPARATUS 有权
    抛光方法和抛光装置

    公开(公告)号:US20150079881A1

    公开(公告)日:2015-03-19

    申请号:US14465792

    申请日:2014-08-21

    Abstract: A polishing method and a polishing apparatus which can increase a polishing rate and can control a polishing profile of a substrate being polished by adjusting a surface temperature of a polishing pad are disclosed. The polishing method for polishing a substrate by pressing the substrate against a polishing pad on a polishing table includes a pad temperature adjustment step of adjusting a surface temperature of the polishing pad, and a polishing step of polishing the substrate by pressing the substrate against the polishing pad having the adjusted surface temperature. In the pad temperature adjustment step, the surface temperature of a part of an area of the polishing pad, the area being to be brought in contact with the substrate, is adjusted during the polishing step so that the rate of temperature change of a temperature profile in a radial direction of the surface of the polishing pad becomes constant in the radial direction of the polishing pad.

    Abstract translation: 公开了一种抛光方法和抛光装置,其可以通过调整抛光垫的表面温度来提高抛光速率并且可以控制待抛光的基板的抛光轮廓。 通过将基板压在研磨台上的抛光垫上来研磨基板的抛光方法包括调整抛光垫的表面温度的焊盘温度调节步骤和通过将衬底压在抛光物上来研磨衬底的抛光步骤 垫具有调整的表面温度。 在焊盘温度调节步骤中,在抛光步骤期间调整研磨垫的与衬底接触的区域的一部分区域的表面温度,使得温度曲线的温度变化率 在抛光垫的表面的径向上在抛光垫的径向方向上变得恒定。

    Three-dimensional hot spot localization
    95.
    发明授权
    Three-dimensional hot spot localization 有权
    三维热点定位

    公开(公告)号:US08742347B2

    公开(公告)日:2014-06-03

    申请号:US13156289

    申请日:2011-06-08

    Abstract: A non-destructive approach for the 3D localization of buried hot spots in electronic device architectures by use of Lock-in Thermography (LIT). The 3D analysis is based on the principles of thermal wave propagation through different material layers and the resulting phase shift/thermal time delay. With more complex multi level stacked die architectures it is necessary to acquire multiple LIT results at different excitation frequencies for precise hot spot depth localization. Additionally, the use of multiple time-resolved thermal waveforms, measured in a minimized field of view on top of the hot spot location, can be used to speed up the data acquisition. The shape of the resulting waveforms can be analyzed to further increase the detection accuracy and confidence level.

    Abstract translation: 通过使用锁定热成像(LIT)在电子设备架构中对埋藏热点的3D定位的非破坏性方法。 3D分析基于通过不同材料层的热波传播的原理以及由此产生的相移/热时间延迟。 使用更复杂的多级堆叠管芯结构,需要在不同的激发频率下获取多个LIT结果,以实现精确的热点深度定位。 此外,可以使用在热点位置顶部的最小视场内测量的多个时间分辨热波形来加速数据采集。 可以分析所得波形的形状,以进一步提高检测精度和置信度。

    AIRFLOW-ORGANIZATION TESTING METHOD FOR A CLEAN ROOM AND SYSTEM USING THE SAME METHOD
    96.
    发明申请
    AIRFLOW-ORGANIZATION TESTING METHOD FOR A CLEAN ROOM AND SYSTEM USING THE SAME METHOD 有权
    使用相同方法的清洁室和系统的气流组织测试方法

    公开(公告)号:US20140061471A1

    公开(公告)日:2014-03-06

    申请号:US13704363

    申请日:2012-09-21

    Applicant: Li Li Wanshi Jin

    Inventor: Li Li Wanshi Jin

    Abstract: The present invention discloses an airflow-organization testing method for a clean room and a system using the same method, which are designed to solve the defects such as poor precision in the existing visual testing method. The airflow-organization testing method for a clean room according to the present invention uses a thermal imaging device to detect a sample gas-flow formed by a sample gas in the clean room, and the sample gas is a kind of gas, such as liquid nitrogen, dry ice or water vapor, with temperature difference from ambient air. The airflow-organization testing system for a clean room according to the present invention comprises a sample gas supplier and a thermal imaging device, wherein the thermal imaging device can continuously detect a spatial position of the sample gas and display it on a display. The airflow-organization testing method for a clean room according to the present invention has more accurate testing results and avoids contamination brought into the clean room; and, the detection devices employ mature technologies as well as high testing precision. The airflow-organization testing system for a clean room according to the present invention uses a sample gas supplier and a temperature detection device, thereby improving detection precision and expanding detection range.

    Abstract translation: 本发明公开了一种洁净室的气流组织试验方法和采用相同方法的系统,其设计用于解决现有视觉检测方法的精度差等缺陷。 根据本发明的洁净室的气流组织测试方法使用热成像装置来检测在洁净室中由样品气体形成的样品气流,并且样品气体是一种气体,例如液体 氮气,干冰或水蒸气,与环境空气的温度差。 根据本发明的洁净室的气流组织测试系统包括样品气体供应器和热成像装置,其中热成像装置可以连续地检测样品气体的空间位置并将其显示在显示器上。 根据本发明的洁净室的气流组织测试方法具有更准确的测试结果,并避免了进入洁净室的污染物; 检测装置采用成熟的技术,测试精度高。 根据本发明的洁净室的气流组织测试系统使用样品气体供应商和温度检测装置,从而提高检测精度并扩大检测范围。

    Automated Object Classification Using Temperature Profiles
    97.
    发明申请
    Automated Object Classification Using Temperature Profiles 有权
    使用温度曲线自动对象分类

    公开(公告)号:US20130311406A1

    公开(公告)日:2013-11-21

    申请号:US13475086

    申请日:2012-05-18

    CPC classification number: G01J5/0003 G01J2005/0085 G06N3/08

    Abstract: Methods and apparatus are provided for automated object classification using temperature profiles. An object in an environment (such as an exemplary data center) is classified by obtaining a surface temperature profile of the object; and classifying the object as a particular type of equipment based on the obtained surface temperature profile. The surface temperature profile of the object can be compared to a plurality of predefined characteristic surface temperature profiles each associated with a given type of equipment.

    Abstract translation: 提供了使用温度曲线自动对象分类的方法和装置。 环境(例如示例性数据中心)中的对象通过获得对象的表面温度分布来分类; 并根据获得的表面温度曲线将物体分类为特定类型的设备。 可以将物体的表面温度分布与各自与给定类型的设备相关联的多个预定义的特征表面温度曲线进行比较。

    Method and apparatus for measuring the temperature of a sheet material
    98.
    发明授权
    Method and apparatus for measuring the temperature of a sheet material 有权
    用于测量片材温度的方法和装置

    公开(公告)号:US08536514B2

    公开(公告)日:2013-09-17

    申请号:US12848038

    申请日:2010-07-30

    Abstract: A method of measuring the temperature of a sheet material in which the sheet material is arranged such that it forms at least one side of a cavity so as to enhance the effective emissivity of the sheet material in the vicinity of the cavity. The method involves a) generating a thermal image of at least part of the inside of the cavity using a thermal imaging device to detect radiation emitted by the cavity, the thermal image comprising a plurality of pixels each having a pixel value representative of radiation emitted by a respective region of the cavity; b) identifying a first subset of the plurality of pixels whose pixel values meet predetermined criteria; c) using the identified first subset of pixels to determine a line on the thermal image representative of optimal emissivity enhancement in the cavity; and d) selecting a second subset of the plurality of pixels based on the determined line and generating a temperature profile along the determined line derived from the pixel values associated with each of the second subset of pixels.

    Abstract translation: 一种测量片状材料的温度的方法,其中片材被布置成使得其形成空腔的至少一侧,以便提高片材在空腔附近的有效辐射率。 该方法包括:a)使用热成像装置产生腔内部的至少一部分的热图像,以检测腔体发射的辐射,该热图像包括多个像素,每个像素具有代表由 空腔的相应区域; b)识别其像素值满足预定标准的多个像素的第一子集; c)使用所识别的第一子像素来确定表示所述空腔中的最佳发射率增强的热图像上的线; 以及d)基于所确定的线选择所述多个像素的第二子集,并且沿着与所述第二子像素中的每一个相关联的像素值导出的所确定的线产生温度曲线。

    CALCULATING ENERGY DISSIPATION IN AN IR IMAGE
    99.
    发明申请
    CALCULATING ENERGY DISSIPATION IN AN IR IMAGE 有权
    计算IR图像中的能量消耗

    公开(公告)号:US20130162836A1

    公开(公告)日:2013-06-27

    申请号:US13774870

    申请日:2013-02-22

    Abstract: An IR camera comprises: a thermal radiation capturing arrangement for capturing thermal radiation of an imaged view in response to input control unit(s) receiving user inputs from a user of the IR camera; a processing unit arranged to process the thermal radiation data in order for the thermal radiation data to be displayed by an IR camera display as thermal images; and a IR camera display arranged to display thermal images to a user of the IR camera. The IR camera is characterized in that the processing unit is further arranged to: determine at least one temperature reference value representing the temperature of the surrounding environment of the imaged view; and calculate at least one output power value indicative of an amount of energy dissipated in a part of the imaged view by using the temperature value of the thermal radiation data corresponding to said part of the imaged view and the at least one determined temperature reference value.

    Abstract translation: IR摄像机包括:热辐射捕获装置,用于响应于从IR摄像机的用户接收用户输入的输入控制单元捕获成像视图的热辐射; 处理单元,其被设置为处理所述热辐射数据,以使所述热辐射数据由IR相机显示器显示为热图像; 以及IR相机显示器,被布置为向IR相机的用户显示热图像。 IR摄像机的特征在于,处理单元还被布置成:确定表示成像视图的周围环境的温度的至少一个温度参考值; 并且通过使用与所述成像视图的所述部分对应的热辐射数据的温度值和所述至少一个确定的温度参考值来计算指示在成像视图的一部分中消散的能量的量的至少一个输出功率值。

    TEMPERATURE MEASUREMENT APPARATUS, METHOD OF MEASURING TEMPERATURE PROFILE, RECORDING MEDIUM AND HEAT TREATMENT APPARATUS
    100.
    发明申请
    TEMPERATURE MEASUREMENT APPARATUS, METHOD OF MEASURING TEMPERATURE PROFILE, RECORDING MEDIUM AND HEAT TREATMENT APPARATUS 有权
    温度测量装置,测量温度曲线,记录介质和热处理装置的方法

    公开(公告)号:US20120303313A1

    公开(公告)日:2012-11-29

    申请号:US13478325

    申请日:2012-05-23

    Abstract: A temperature measurement apparatus for measuring a temperature profile of a substrate mounted on a rotating table, including a radiation temperature measurement unit configured to measure the temperature of plural temperature measurement areas on a surface of the rotating table in a radius direction of the rotating table by scanning the surface of the rotating table in the radius direction; a temperature map generating unit that specifies the address of the temperature measurement area based on the number of the temperature measurement areas measured by the radiation temperature measurement unit for each of the scanning operations in the radius direction of the rotating table, and the rotating speed of the rotating table, and stores the temperature in correspondence with the corresponding address in a storing unit; and a temperature data display processing unit that displays a temperature profile of the rotating table.

    Abstract translation: 一种用于测量安装在旋转台上的基板的温度分布的温度测量装置,包括辐射温度测量单元,其被配置为通过旋转台的半径方向测量旋转台的表面上的多个温度测量区域的温度 在半径方向上扫描旋转台的表面; 温度映射生成单元,其基于由所述辐射温度测量单元测量的针对所述旋转台的半径方向上的每个扫描操作的温度测量区域的数量来指定所述温度测量区域的地址,以及所述温度测量区域的旋转速度 旋转台,并将与对应的地址对应的温度存储在存储单元中; 以及温度数据显示处理单元,其显示所述旋转台的温度分布。

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