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679 条记录 (耗时 0.018 秒)

    Run-out velocity acceleration tester with direct velocity measurement
    92.
    发明授权
    Run-out velocity acceleration tester with direct velocity measurement 失效
    跑速加速度测试仪，直接测速

    公开(公告)号：US5504571A

    公开(公告)日：1996-04-02

    申请号：US78969

    申请日：1993-06-17

    申请人： Jim Eckerman ,  Ian Freeman ,  Richard N. Hunt

    发明人： Jim Eckerman ,  Ian Freeman ,  Richard N. Hunt

    IPC分类号： G01B7/34 ,  G01B21/30 ,  G01P3/36 ,  G01P15/16 ,  G01S17/58 ,  G11B3/90

    CPC分类号： G01B7/345 ,  G01B21/30 ,  G01P15/16 ,  G01P3/36 ,  G01S17/58

    摘要： A Runout, Velocity, Acceleration includes direct measurement of velocity by use of a Doppler laser, and determines runout by integration of the velocity information while determining acceleration by differentiating the velocity information, with appropriate correction for sources of error. A menu driven system permits the user to select from a variety of options for testing of rotating objects and manipulation, storage and display of the data. A novel windowing technique permits the display of multiple child windows, each having its own set of pull down menus for use in connection with that child window.

    摘要翻译： 跳动，速度，加速度包括通过使用多普勒激光直接测量速度，并通过对速度信息进行积分来确定速度信息的跳动，同时通过对速度信息进行微分来确定加速度，并对误差源进行适当的校正。 菜单驱动系统允许用户从旋转对象的测试和数据的操作，存储和显示的各种选项中进行选择。 一种新颖的窗口技术允许显示多个子窗口，每个子窗口具有其自己的一组下拉菜单，用于与该子窗口相关联。

    Electrochemical identification of molecules in a scanning probe microscope
    93.
    发明授权
    Electrochemical identification of molecules in a scanning probe microscope 失效
    扫描探针显微镜中分子的电化学鉴定

    公开(公告)号：US5495109A

    公开(公告)日：1996-02-27

    申请号：US399968

    申请日：1995-03-07

    申请人： Stuart M. Lindsay ,  Tianwei Jing

    发明人： Stuart M. Lindsay ,  Tianwei Jing

    IPC分类号： G01B21/30 ,  G01N27/416 ,  G01Q20/02 ,  G01Q30/12 ,  G01Q60/04 ,  G01Q60/10 ,  G01Q60/24 ,  G01Q60/40 ,  H01J37/252

    CPC分类号： G01Q60/04 ,  B82Y35/00 ,  G01Q20/02 ,  G01Q30/14 ,  G01Q60/38 ,  G01Q60/60 ,  Y10S977/852 ,  Y10S977/859 ,  Y10S977/86 ,  Y10S977/861 ,  Y10S977/873

    摘要： A method and apparatus for high resolution mapping of the chemical composition of a thin film utilizes scanning probe microscopy techniques. The sample to be studied is prepared as a thin film disposed on a conductive backing electrode. A sensitive electrometer is connected to the backing electrode to detect current passing through it. According to a first aspect of the invention, a force sensing cantilever is scanned relative to the sample surface a plurality of times. Topographic information about the sample surface is obtained in a conventional manner by studying deflections of the cantilever or feedback current used to minimize deflections of the cantilever. Simultaneously, a voltage is applied to the probe tip. This voltage, through a tunneling current to the backing electrode, causes reduction and/or oxidation reactions in the sample surface. On successive scans, different voltages may be used. In this way, the tunneling current at each of a number of different voltages for each location in the sample surface is obtained. Because specific oxidation and reduction reactions take place only at well defined voltages, it is possible, from the current measured at a certain location and a certain applied voltage at that location, to deduce what the chemical located at that location is. According to a second aspect of the invention, a scanning tunneling microscope mechanism may be used instead of a force sensing mechanism.

    摘要翻译： 用于薄膜化学成分的高分辨率测绘的方法和装置利用扫描探针显微镜技术。 要研究的样品被准备为设置在导电背衬电极上的薄膜。 敏感静电计连接到背面电极以检测通过它的电流。 根据本发明的第一方面，多次对相对于样品表面扫描力感测悬臂。 通过研究用于使悬臂的偏转最小化的悬臂或反馈电流的偏转，以常规方式获得关于样品表面的地形信息。 同时，对探针尖端施加电压。 该电压通过到背衬电极的隧道电流引起样品表面的还原和/或氧化反应。 在连续扫描中，可以使用不同的电压。 以这种方式，获得样品表面中每个位置的多个不同电压中的每一个处的隧穿电流。 因为特定的氧化和还原反应仅在明确定义的电压下进行，所以可以从在某一位置测量的电流和该位置的某一施加电压来推断位于该位置的化学物质。 根据本发明的第二方面，可以使用扫描隧道显微镜机构来代替力感测机构。

    Cantilever for atomic force microscope and method of manufacturing the cantilever
    94.
    发明授权
    Cantilever for atomic force microscope and method of manufacturing the cantilever 失效
    用于原子力显微镜的悬臂和制造悬臂的方法

    公开(公告)号：US5469733A

    公开(公告)日：1995-11-28

    申请号：US194169

    申请日：1994-02-09

    申请人： Takao Yasue ,  Tadashi Nishioka

    发明人： Takao Yasue ,  Tadashi Nishioka

    IPC分类号： G01B21/30 ,  G01B5/28 ,  G01Q60/28 ,  G01Q60/38 ,  G01Q60/42 ,  H01J9/14 ,  H01J37/26 ,  H01J37/28

    CPC分类号： G01Q60/38 ,  B82Y35/00 ,  Y10S977/879

    摘要： A cantilever for an atomic force microscope includes a probe and a cantilever body supporting the probe, the probe deflecting in response to an atomic force between said probe and a sample, at least the surface of the probe including one of a resist film and a sputtered film. One method of manufacturing the cantilever includes selectively etching the surface of a silicon substrate to form an etch pit, forming a resist film in at least the etch pit, forming a nitride film on the resist film, forming a glass base plate on the nitride film in a predetermined area not including the etch pit, and removing the silicon substrate. An atomic force microscope is also provided in which the cantilever is used to measure an atomic force between a sample and the probe having a desired film on a surface. A sample surface evaluating method is further provided by which the adhesion between the desired film or substance and the sample surface can be evaluated quantitatively from the measured atomic force without damaging the sample surface.

    摘要翻译： 用于原子力显微镜的悬臂包括探针和支撑探针的悬臂体，所述探针响应于所述探针和样品之间的原子力而偏转，所述探针的至少所述表面包括抗蚀剂膜和溅射中的一种 电影。 制造悬臂的一种方法包括选择性地蚀刻硅衬底的表面以形成蚀刻坑，在至少蚀刻坑中形成抗蚀剂膜，在抗蚀剂膜上形成氮化物膜，在氮化物膜上形成玻璃基板 在不包括蚀刻坑的预定区域中，以及去除硅衬底。 还提供了一种原子力显微镜，其中悬臂用于测量样品和具有表面上所需膜的探针之间的原子力。 还提供了一种样品表面评价方法，通过该样品表面评估方法，可以从所测量的原子力定量地评价所需的膜或物质与样品表面之间的粘附性而不损害样品表面。

    Method of and apparatus for inspection of external appearance of a circuit substrate, and for displaying abnormality information thereof
    96.
    发明授权
    Method of and apparatus for inspection of external appearance of a circuit substrate, and for displaying abnormality information thereof 失效
    检查电路基板外观的方法和装置，以及显示其异常信息

    公开(公告)号：US5440649A

    公开(公告)日：1995-08-08

    申请号：US930346

    申请日：1992-08-17

    申请人： Senya Kiyasu ,  Takanori Ninomiya

    发明人： Senya Kiyasu ,  Takanori Ninomiya

    IPC分类号： G01B21/30 ,  B23Q17/20 ,  G01N21/88 ,  G01N21/94 ,  G06T1/00 ,  G06T7/00 ,  H05K3/00 ,  G06K9/62

    CPC分类号： G01N21/8851 ,  G06T7/001 ,  G06T2207/30141

    摘要： An apparatus for visual inspection detects defects on an object to be inspected, stores the defects, calculates the distance between two detected defects from the positions of the two detected defects, and judges the two detected defects to be different portions of a single actual defect when the distance between the two defects is less than a predetermined threshold value. The apparatus also stores the actual defects, as well as class-of-actual-defect inference rules necessary for inferring the class of the actual defects from the class of each detected defect. The class of the actual defect is judged from the class of each detected defect on the basis of the class-of-actual-defect inference rules, and the class of the actual defect is then stored. A method of visual inspection and a method of removing the cause of an abnormality are also disclosed.

    摘要翻译： 用于目视检查的装置检测待检查物体的缺陷，存储缺陷，从两个检测到的缺陷的位置计算两个检测到的缺陷之间的距离，并将两个检测到的缺陷判断为单个实际缺陷的不同部分，当 两个缺陷之间的距离小于预定的阈值。 该装置还存储实际缺陷以及从每个检测到的缺陷的类别推断实际缺陷的类别所必需的实际类别缺陷推理规则。 根据实际缺陷推理规则，从每个检测到的缺陷的类别判断实际缺陷的类别，然后存储实际缺陷的类别。 还公开了目视检查方法和消除异常原因的方法。

    Methods of operating atomic force microscopes to measure friction
    97.
    发明授权
    Methods of operating atomic force microscopes to measure friction 失效
    操作原子力显微镜测量摩擦的方法

    公开(公告)号：US5400647A

    公开(公告)日：1995-03-28

    申请号：US974603

    申请日：1992-11-12

    申请人： Virgil B. Elings

    发明人： Virgil B. Elings

    IPC分类号： G01B7/34 ,  G01B21/30 ,  G01Q10/06 ,  G01Q20/02 ,  G01Q60/24 ,  G01Q60/26 ,  G01Q60/38 ,  G01N19/02

    CPC分类号： G01Q10/06 ,  B82Y35/00 ,  G01Q20/02 ,  G01Q60/26 ,  Y10S977/851 ,  Y10S977/852

    摘要： A method of operating an atomic force microscope having a probe tip attached to a free end of a lever which is fixed at its other, wherein the probe tip is scanned in forward and reverse directions in a common scanline across the surface of a sample and either the deflection of the lever or the height of the sample is detected during the forward and reverse scans. The difference between the deflection of the lever or the sample height in the forward and reverse scans is determined as a relative measure of friction. A signal relating to the normal force applied to the sample, can be determined and based thereon, a coefficient of friction of the simple is determined. The signal relating to normal force is derived either from a force curve, or by scanning the probe at different force setpoints. To enhance accuracy of topographical data, the scanning angle is varied in order to minimize differences between the probe deflection (or sample height) during scanning in the forward and reverse directions. Once it is determined which angle results in minimum difference in data obtained during scanning in the forward and reverse directions in a common scanline, topographical data is obtained by scanning the sample at that angle. Frictional data is obtained by scanning at that angle which maximizes the difference between data obtained in forward and reverse scanning directions in a common scanline.

    摘要翻译： 一种操作原子力显微镜的方法，所述原子力显微镜具有附接到杆的自由端的探针尖端，所述探针尖端固定在另一个杆上，其中所述探针尖端在共同的扫描线中沿着样品的表面沿正向和反向扫描， 在前进和反向扫描期间检测到杠杆的偏转或样品的高度。 杠杆的偏转或正向和反向扫描中的样品高度之间的差异被确定为摩擦的相对测量值。 可以确定与施加到样品的法向力有关的信号，并且基于此确定简单的摩擦系数。 与法向力相关的信号来自于力曲线，或者通过以不同的力设定点扫描探头。 为了提高地形数据的准确性，扫描角度是变化的，以便最小化在正向和反向扫描期间的探针偏转（或样品高度）之间的差异。 一旦确定哪个角度导致在公共扫描线中在正向和反向扫描期间获得的数据的最小差异，则通过以该角度扫描样本来获得形貌数据。 通过在该角度扫描获得摩擦数据，该角度使在公共扫描线中在正向和反向扫描方向上获得的数据之间的差最大化。

    Compound type microscope
    100.
    发明授权
    Compound type microscope 失效
    复合型显微镜

    公开(公告)号：US5360977A

    公开(公告)日：1994-11-01

    申请号：US921129

    申请日：1992-07-29

    申请人： Tetsuji Onuki ,  Masatoshi Suzuki ,  Hiroyuki Matsushiro

    发明人： Tetsuji Onuki ,  Masatoshi Suzuki ,  Hiroyuki Matsushiro

    IPC分类号： G01B21/30 ,  G01B7/34 ,  G01N37/00 ,  G01Q20/02 ,  G01Q30/02 ,  G01Q60/24 ,  G02B21/00 ,  H01J37/28 ,  H01J37/26

    CPC分类号： G01Q60/16 ,  B82Y35/00 ,  G01Q30/025 ,  G01Q60/04 ,  G01Q60/38 ,  G02B21/00 ,  B82Y20/00 ,  Y10S977/869

    摘要： A compound type microscope is provided which can observe the measurement sample of an atomic force microscope (AFM) by means of an optical microscope. This compound type microscope is comprised of an optical microscope having an objective and an observation optical system, a cantilever having a reflecting surface and detecting an atomic force, an irradiating optical system for applying a spotlight to the cantilver, a detector for detecting the displacement of reflected light caused by the displacement of the cantilever, and a sample stage for placing a sample thereon. The arrangement can be designed to accommodate the use of a scanning tunnel type microscope (STM) interchangeably with the AFM so that the sample can be measured by the STM instead of by the AFM. To this end, the probe of the STM can be detachably mountable coaxially with respect to the objective of the optical microscope, whereby the probe of the STM and the cantilever of the AFM can be selectively disposed below the objective.

    摘要翻译： 提供一种复合型显微镜，可以通过光学显微镜观察原子力显微镜（AFM）的测量样品。 该复合型显微镜由具有物镜和观察光学系统的光学显微镜，具有反射面的悬臂和检测原子力组成，用于将光束施加到悬臂的照射光学系统，用于检测位移的检测器 由悬臂的位移引起的反射光和用于在其上放置样品的样品台。 可以将该装置设计成可以与AFM互换地使用扫描隧道型显微镜（STM），以便可以通过STM而不是AFM来测量样品。 为此，STM的探针可以相对于光学显微镜的目的可同轴地可拆卸地安装，由此STM的探针和AFM的悬臂可以选择性地设置在物镜下方。