Abstract:
The present invention provides a method for fabricating a capacitor constituted with double hafnium oxide layers through a plasma enhanced chemical vapor deposition (PECVD) process and a low pressure chemical vapor deposition (LPCVD) process. The method for fabricating the capacitor constituted with the double hafnium oxide layers includes: forming a lower electrode layer over a semiconductor substrate; performing a heat treatment with the lower electrode; forming a first HfO2 layer over the first HfO2 layer by using a plasma enhanced chemical vapor deposition (PECVD) method; forming a second HfO2 layer over the first HfO2 layer by using a low pressure chemical vapor deposition (LPCVD) method; and performing a plasma treatment process at a high temperature; and forming an upper electrode over the second HfO2 layer.
Abstract:
An apparatus for controlling exhaust noise in an internal combustion engine uses the length difference between the exhaust pipe and the bypass pipe. The apparatus includes an exhaust pipe for outwardly releasing exhaust gas from the engine; a bypass pipe variable in length which diverges from said exhaust pipe with a distance and has U-shaped and reverse U-shaped sections formed alternately; an actuator having an actuating rod connected to the bypass pipe to vary the length of the bypass pipe; and a control unit for controlling the actuator. The bypass pipe has the U-shaped and reverse U-shaped sections arranged alternately so that the variable length of the bypass pipe can be extended while minimizing the space for installing the bypass pipe, and thereby noise in the low frequency band can be suitably reduced. Also, the exhaust pipe is additionally provided with a device for adjusting the length to increase the length difference with the bypass pipe so that noise in a wider band can be controlled.
Abstract:
A method for forming a Ta2O5 dielectric layer using plasma enhanced atomic layer deposition, which can improve the quality of a layer and its electric property by forming a Ta2O5 dielectric layer using a plasma enhanced atomic layer deposition. The method for forming a Ta2O5 dielectric layer using plasma enhanced atomic layer deposition, comprising the steps of: a) flowing Ta(OC2H5)5 source gas in a chamber and generating plasma; b) depositing a Ta2O5 layer by using the plasma; c) purging the chamber; d) repeatedly performing the steps a) to c) in order to form a Ta2O5 dielectric layer; e) thermally treating the surface of the Ta2O5 dielectric layer in an oxygen atmosphere; and f) crystallizing the Ta2O5 dielectric layer.
Abstract:
A lithium secondary battery having a bi-cell type battery cell consisting of an anode plate, a separator fixed to both surfaces of the anode plate and a cathode plate fixed to either outer surface of the separator, wherein the cathode plate includes a cathode current collector, a front cathode sheet fixed to one surface of the cathode current collector, which is adjacent to the anode plate, and a rear cathode sheet fixed to the other surface of the cathode current collector and having a thickness different from that of the front cathode sheet.
Abstract:
A vertical memory device includes a substrate, a plurality of channels on the substrate and extending in a first direction that is vertical to a top surface of the substrate, a plurality of gate lines stacked on top of each other on the substrate, a plurality of wiring over the gate lines and electrically connected to the gate lines, and an identification pattern on the substrate at the same level as a level of at least one of the wirings. The gate lines surround the channels. The gate lines are spaced apart from each other along the first direction.
Abstract:
A detection and tracking radar includes a hazardous zone set within a preset radius based on a main body having a radar, a plurality of detection and tracking sectors configured to detect a high speed mobile approaching the main body within detection areas, the detection areas being defined by diving the hazardous zone based on an azimuth angle, and a controller configured to recognize the high speed mobile as a target based upon signals received from the detection and tracking sectors and track the target. Accordingly, rapid detection and tracking of the high speed mobile can be allowed. Also, since the detection and tracking sectors can be independently run, expansion of a radar system can be free by virtue of addition of the detection and tracking sectors.
Abstract:
A washing machine according to an exemplary embodiment of the present invention includes a washing tub that washes laundry; a storage drawer provided under the washing tub; a detergent bottle seat provided inside of the storage drawer, a detachable detergent bottle containing a liquid detergent being seated on the detergent bottle seat; a detergent bottle connecting part connected to the detergent bottle, the liquid detergent flowing into through the detergent bottle connecting part; and a detergent pump that supplies the liquid detergent to the washing tub.
Abstract:
A liquid crystal display includes a plurality of pixels, a plurality of data lines connected to the plurality of pixels, and a data driver connected to the plurality of data lines, where the data driver supplies data voltage to the plurality of data lines, where the data driver includes a data latch which outputs input image data in response to image data corresponding to the plurality of pixels, wherein the data latch rearranges a sequence of the image data, and a digital-to-analog converting unit which includes a positive digital-to-analog converter which generates a positive data voltage in response to the input image data, and a negative digital-to-analog converter which generates a negative data voltage in response to the input image data.
Abstract:
An electronic relay includes: a housing having an interior space therein and a lateral side and a lower side of which are opened, a board installation part being formed along a periphery of the opened side of the housing; a printed circuit board a periphery of which is inserted into and installed in the board installation part of the housing, for shielding the opened side of the housing and performing a switching function; a lower cover for shielding a lower side of the housing, one side edge of the printed circuit board being fixed to the lower cover; and terminals ends of which are electrically connected to the printed circuit board and opposite ends of which pass through the lower cover to protrude to the outside.
Abstract:
A fuel preprocess system for a coal combustion boiler is disclosed. The fuel preprocess system for a coal combustion boiler that dries biomass or refuse-derived fuel in accordance with the present invention can include: a dryer configured to dry the biomass or refuse-derived fuel by use of flue gas generated after combustion in the boiler; and a torrefier configured to devolatilize a fibrous component contained in the dried fuel from the fuel dried in the dryer by use of primary air that is heat-exchanged after the combustion in the boiler.