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公开(公告)号：US20110235663A1
公开(公告)日：2011-09-29
申请号：US12730506
申请日：2010-03-24
申请人： Robert P. Akins , Richard L. Sandstrom , Daniel J.W. Brown , Matthew R. Graham , Kevin W. Zhang , Patrick L. Nelissen
发明人： Robert P. Akins , Richard L. Sandstrom , Daniel J.W. Brown , Matthew R. Graham , Kevin W. Zhang , Patrick L. Nelissen
IPC分类号： H01S3/10
CPC分类号： H01S3/0014 , G03F7/70025 , G03F7/70533 , G03F7/70975 , H01S3/134 , H01S3/225
摘要： A laser light source experiencing an EOL condition, which might otherwise cause an unscheduled shutdown, is instead operated in a diminished capacity in one or more predetermined or calculated increments. Operating in such diminished capacity continues until the laser system can undergo appropriate maintenance either during a regularly scheduled shutdown or a newly scheduled shutdown. In the meantime, the diminished capacity of the laser system is accommodated by the utilization tool, as appropriate.
摘要翻译： 经历EOL状态的激光光源（否则可能导致非计划关机）反而以一个或多个预定或计算的增量以减小的容量运行。 在这种减少的能力下运行，直到激光系统在定期关机或新计划停机期间才能进行适当的维护。 同时，适当的情况下，利用工具可以适应激光系统的能力下降。
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公开(公告)号：US5033055A
公开(公告)日：1991-07-16
申请号：US550658
申请日：1990-07-10
IPC分类号： H01S3/03 , H01S3/036 , H01S3/0971 , H01S3/225
CPC分类号： H01S3/0305 , H01S3/036 , H01S3/0971 , H01S3/225
摘要： A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure an with the other electrode mounted on a main insulator member. The main insulator member is formed of ceramic material and is located intermediate to the one wall of the housing and the other electrode but is spaced from the one wall of the housing to have the main insulator member floating relative to the housing structure. The main ceramic insulator member is compressively supported at a central position of the member and extends outward from this central position without any additional support to have the floating main insulator respond to any bending forces within the laser without any constraint other than the central support.
摘要翻译： 一种紧凑型准分子激光器，包括具有形成内部激光腔的多个壁的壳体结构。 气体位于激光腔内，气体能够起激光作用。 一对间隔开的电极位于激光器腔内，并形成电极之间的放电区域，用于根据电极之间的放电来刺激放电区域内的气体以产生激光作用。 一对电极中的一个位于腔内的中心位置并且接地到壳体结构。 一对电极中的另一个位于与壳体结构的一个壁相邻但间隔开的位置，另一个电极安装在主绝缘体构件上。 主绝缘体构件由陶瓷材料形成，并且位于壳体的一个壁和另一个电极的中间，但与壳体的一个壁间隔开，以使主绝缘构件相对于壳体结构浮动。 主陶瓷绝缘体部件被压缩地支撑在构件的中心位置处，并且从该中心位置向外延伸，而没有任何额外的支撑，以使浮动主绝缘体对激光器内的任何弯曲力作出响应，而不受中央支架之外的任何限制。
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公开(公告)号：US5023884A
公开(公告)日：1991-06-11
申请号：US550657
申请日：1990-07-10
IPC分类号： H01S3/03 , H01S3/036 , H01S3/0971 , H01S3/225
CPC分类号： H01S3/0305 , H01S3/036 , H01S3/0971 , H01S3/225
摘要： A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure and with the other electrode mounted on a main insulator member. The main insulator member is formed of ceramic material and is located intermediate to the one wall of the housing and the other electrode but is spaced from the one wall of the housing to have the main insulator member floating relative the housing structure. The main ceramic insulator member is compressively supported at a central position of the member and extends outward from this central position without any additional support to have the floating main insulator respond to any bending forces within the laser without any constraint other than the central support.
摘要翻译： 一种紧凑型准分子激光器，包括具有形成内部激光腔的多个壁的壳体结构。 气体位于激光腔内，气体能够起激光作用。 一对间隔开的电极位于激光器腔内，并形成电极之间的放电区域，用于根据电极之间的放电来刺激放电区域内的气体以产生激光作用。 一对电极中的一个位于腔内的中心位置并且接地到壳体结构。 一对电极中的另一个位于与壳体结构的一个壁相邻但间隔开的位置，另一个电极安装在主绝缘体构件上。 主绝缘体构件由陶瓷材料形成，并且位于壳体的一个壁的中间和另一个电极之间，但是与壳体的一个壁间隔开，以使主绝缘体构件相对于壳体结构浮动。 主陶瓷绝缘体构件被压缩地支撑在构件的中心位置处，并且从该中心位置向外延伸，而没有任何附加的支撑，以使浮动主绝缘体对激光器内的任何弯曲力作出反应，而不受中央支架之外的任何限制。
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公开(公告)号：US5018162A
公开(公告)日：1991-05-21
申请号：US550660
申请日：1990-07-10
IPC分类号： H01S3/03 , H01S3/036 , H01S3/0971 , H01S3/225
CPC分类号： H01S3/0305 , H01S3/036 , H01S3/0971 , H01S3/225
摘要： A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure and with the other electrode mounted on a main insulator member. The main insulator member is formed of ceramic material and is located intermediate to the one wall of the housing and the other electrode but is spaced from the one wall of the housing to have the main insulator member floating relative to the housing structure. The main ceramic insulator member is compressively supported at a central position of the member and extends outward from this central position without any additional support to have the floating main insulator respond to any bending forces within the laser without any constraint other than the central support.
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公开(公告)号：US5018161A
公开(公告)日：1991-05-21
申请号：US550666
申请日：1990-07-10
IPC分类号： H01S3/03 , H01S3/036 , H01S3/0971 , H01S3/225
CPC分类号： H01S3/0305 , H01S3/036 , H01S3/0971 , H01S3/225
摘要： A compact excimer laser, including a housing structure having a plurality of walls forming an internal laser cavity. A gas is located within the laser cavity and with the gas capable of lasing action. A pair of spaced electrodes are located within the laser cavity and form an electrical discharge area between the electrodes for stimulating gas within the discharge area to lasing action in accordance with an electrical discharge between the electrodes. One of the pair of electrodes is located along a central position within the cavity and is grounded to the housing structure. The other of the pair of electrodes is located adjacent to but spaced from one of the walls of the housing structure and with the other electrode mounted on a main insulator member. The main insulator member is formed of ceramic material and is located intermediate to the one wall of the housing and the other electrode but is spaced from the one wall of the housing to have the main insulator member floating relative to the housing structure. The main ceramic insulator member is compressively supported at a central position of the member and extends outward from this central position without any additional support to have the floating main insulator respond to any bending forces within the laser without any constraint other than the central support.
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106.发明申请SYSTEMS AND METHODS FOR IMPLEMENTING AN INTERACTION BETWEEN A LASER SHAPED AS LINE BEAM AND A FILM DEPOSITED ON A SUBSTRATE 有权用于实现激光形成的线束与基板上沉积的膜之间的相互作用的系统和方法公开(公告)号：US20120298838A1
公开(公告)日：2012-11-29
申请号：US13571129
申请日：2012-08-09
IPC分类号： G01J1/16
CPC分类号： B23K26/043 , B23K26/04 , B23K26/0622 , B23K26/0738 , C30B1/023 , C30B13/24
摘要： A laser crystallization apparatus and method are disclosed for selectively melting a film such as amorphous silicon that is deposited on a substrate. The apparatus may comprise an optical system for producing stretched laser pulses for use in melting the film. In still another aspect of an embodiment of the present invention, a system and method are provided for stretching a laser pulse. In another aspect, a system is provided for maintaining a divergence of a pulsed laser beam (stretched or non-stretched) at a location along a beam path within a predetermined range. In another aspect, a system may be provided for maintaining the energy density at a film within a predetermined range during an interaction of the film with a shaped line beam.
摘要翻译： 公开了一种激光结晶装置和方法，用于选择性地熔融沉积在基底上的诸如非晶硅的膜。 该装置可以包括用于产生用于熔化膜的拉伸激光脉冲的光学系统。 在本发明实施例的另一方面，提供一种用于拉伸激光脉冲的系统和方法。 在另一方面，提供了一种系统，用于在预定范围内沿着光束路径的位置维持脉冲激光束的发散（拉伸或未拉伸）。 在另一方面，可以提供一种系统，用于在膜与成形线束的相互作用期间将膜处的能量密度保持在预定范围内。
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公开(公告)号：US20120170112A1
公开(公告)日：2012-07-05
申请号：US12980939
申请日：2010-12-29
申请人： Richard L. Sandstrom
发明人： Richard L. Sandstrom
CPC分类号： G02B17/004 , G02B7/1815 , G02B7/1825 , H01S3/076 , H01S3/2325
摘要： An apparatus includes a first plurality of concave reflecting surfaces; a second plurality of reflecting surfaces facing the first plurality of concave reflecting surfaces such that a region is defined between the first and second pluralities; and an input for an optical beam to enter the region and an output for the optical beam to exit the region. The first and second pluralities of reflecting surfaces are arranged relative to each other so that the optical beam is re-imaged at a reflecting surface of one of the pluralities after only one reflection from a reflecting surface of the other of the pluralities and so that overlap of two or more optical beams on each of the reflecting surfaces is avoided.
摘要翻译： 一种装置包括：第一多个凹面反射面; 面对所述第一多个凹反射表面的第二多个反射表面，使得在所述第一和第二多个之间限定区域; 以及用于进入该区域的光束的输入和用于使光束离开该区域的输出。 第一和第二多个反射表面相对于彼此布置，使得光束在仅一次反射之后的多个反射表面中从多个另一个的反射表面重新成像，并且重叠 避免了在每个反射表面上的两个或更多个光束。
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108.发明申请Systems and methods for implementing an interaction between a laser shaped as line beam and a film deposited on a substrate 有权用于实现激光成形为线束和沉积在基底上的膜之间的相互作用的系统和方法公开(公告)号：US20090256057A1
公开(公告)日：2009-10-15
申请号：US12386771
申请日：2009-04-21
CPC分类号： B23K26/043 , B23K26/04 , B23K26/0622 , B23K26/0738 , C30B1/023 , C30B13/24
摘要： A laser crystallization apparatus and method are disclosed for selectively melting a film such as amorphous silicon that is deposited on a substrate. The apparatus may comprise an optical system for producing stretched laser pulses for use in melting the film. In still another aspect of an embodiment of the present invention, a system and method are provided for stretching a laser pulse. In another aspect, a system is provided for maintaining a divergence of a pulsed laser beam (stretched or non-stretched) at a location along a beam path within a predetermined range. In another aspect, a system may be provided for maintaining the energy density at a film within a predetermined range during an interaction of the film with a shaped line beam.
摘要翻译： 公开了一种激光结晶装置和方法，用于选择性地熔融沉积在基底上的诸如非晶硅的膜。 该装置可以包括用于产生用于熔化膜的拉伸激光脉冲的光学系统。 在本发明实施例的另一方面，提供一种用于拉伸激光脉冲的系统和方法。 在另一方面，提供了一种系统，用于在预定范围内沿着光束路径的位置维持脉冲激光束的发散（拉伸或未拉伸）。 在另一方面，可以提供一种系统，用于在膜与成形线束的相互作用期间将膜处的能量密度保持在预定范围内。
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公开(公告)号：US06704339B2
公开(公告)日：2004-03-09
申请号：US10233253
申请日：2002-08-30
申请人： Leonard Lublin , David J. Warkentin , Palash P. Das , Brian C. Klene , R. Kyle Webb , Herve A. Besaucele , Ronald L. Spangler , Richard L. Sandstrom , Alexander I. Ershov , Shahryar Rokni
发明人： Leonard Lublin , David J. Warkentin , Palash P. Das , Brian C. Klene , R. Kyle Webb , Herve A. Besaucele , Ronald L. Spangler , Richard L. Sandstrom , Alexander I. Ershov , Shahryar Rokni
IPC分类号： H01S3101
CPC分类号： H01S3/005 , G03F7/70025 , G03F7/70041 , G03F7/7055 , G03F7/70575 , G03F7/70933 , H01S3/0057 , H01S3/0071 , H01S3/02 , H01S3/03 , H01S3/036 , H01S3/038 , H01S3/0385 , H01S3/0404 , H01S3/041 , H01S3/08004 , H01S3/08009 , H01S3/0943 , H01S3/097 , H01S3/09705 , H01S3/0971 , H01S3/0975 , H01S3/104 , H01S3/105 , H01S3/11 , H01S3/1305 , H01S3/134 , H01S3/139 , H01S3/22 , H01S3/2207 , H01S3/223 , H01S3/225 , H01S3/2251 , H01S3/2256 , H01S3/2258 , H01S3/2333 , H01S3/2366
摘要： The present invention provides a modular high repetition rate ultraviolet gas discharge laser light source for a production line machine. The system includes an enclosed and purged beam path with beam pointing control for delivery the laser beam to a desired location such as the entrance port of the production line machine. In preferred embodiments, the production line machine is a lithography machine and two separate discharge chambers are provided, one of which is a part of a master oscillator producing a very narrow band seed beam which is amplified in the second discharge chamber. This MOPA system is capable of output pulse energies approximately double the comparable single chamber laser system with greatly improved beam quality. A pulse stretcher more than doubles the output pulse length resulting in a reduction in pulse power (mJ/ns) as compared to prior art laser systems. This preferred embodiment is capable of providing illumination at a lithography system wafer plane which is approximately constant throughout the operating life of the lithography system, despite substantial degradation of optical components.
摘要翻译： 本发明提供一种用于生产线机器的模块化高重复率紫外线气体放电激光源。 该系统包括具有光束指向控制的封闭和清除的光束路径，用于将激光束传送到期望的位置，例如生产线机器的入口。 在优选实施例中，生产线机器是光刻机，并且提供两个单独的放电室，其中之一是主振荡器的一部分，其产生在第二放电室中放大的非常窄的带状晶体束。 该MOPA系统能够以大大提高的光束质量将输出脉冲能量大约增加到相当的单室激光器系统的两倍。 与现有技术的激光系统相比，脉冲放大器使输出脉冲长度加倍，导致脉冲功率（mJ / ns）的降低。 该优选实施例能够在光刻系统晶片平面处提供照明，其在光刻系统的整个使用寿命期间大致恒定，尽管光学部件的实质性劣化。
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公开(公告)号：US06603549B2
公开(公告)日：2003-08-05
申请号：US09931726
申请日：2001-08-16
IPC分类号： G01J318
CPC分类号： G01J3/26 , G01J1/4257 , G01J3/02 , G01J3/027 , G01J3/12 , G01J3/1809 , G01J3/22 , G01J3/28 , G01J9/02
摘要： A simple, reliable, easy to use method for calculating bandwidth data of very narrow band laser beams based on bandwidth data obtained with a spectrometer in circumstances where the laser bandwidths are not large compared to the slit function of the spectrometer. The slit function of the spectrometer is determined. Spectral data of the laser beam is measured with the spectrometer to produce a measured laser beam spectrum which represents a convolution of the laser beam spectrum and the spectrometer slit function. This measured laser spectrum is then mathematically convolved with the slit function of the spectrometer to produce a doubly convolved spectrum. Bandwidth values representing true laser bandwidths are determined from measured laser spectrum and the doubly convolved spectrum. Preferably the true laser bandwidths are calculated by determining the difference between “twice a measured laser bandwidth” and a corresponding “doubly convolved bandwidth”. This method provides an excellent estimate of the true laser bandwidth because “twice the measured laser bandwidth” represents two laser bandwidths and two spectrometer slit function bandwidths and the “doubly convolved bandwidth” represents one laser bandwidth and two spectrometer slit function bandwidths. Thus, the difference is a representation of the true laser bandwidth. In a preferred embodiment the bandwidth parameters measured are the full width half-maximum bandwidth and the 95% integral bandwidth.
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