公开(公告)号：US5590170A

公开(公告)日：1996-12-31

申请号：US328465

申请日：1994-10-25

申请人： Gilbert Zweig

发明人： Gilbert Zweig

IPC分类号： G01N23/04 ,  G01R31/302

CPC分类号： G01N23/043 ,  G01R31/302

摘要： This invention relates to a high resolution X-ray imaging device for congruently combining an optical image from a video system with a fluoroscopic X-ray image from a fluoroscopic imaging system. An X-ray beam is directed towards a predetermined position of an object to be inspected and an X-ray image is received at the fluoroscopic imaging system for generating the fluoroscopic X-ray image. A mirror is positioned between the fluoroscopic imaging system and the X-ray beam. The X-ray beam passes substantially unattenuated through the mirror. Preferably, the mirror is formed of a composition having elements with an atomic number of less than 14. An optical image of the predetermined location of the object is reflected off of the mirror. The optical image and the fluoroscopic X-ray image can be combined into a superimposed image.

摘要翻译： 本发明涉及一种将来自视频系统的光学图像与荧光镜成像系统的荧光X射线图像一体地组合的高分辨率X射线成像装置。 X射线束被引导到待检查对象的预定位置，并且在荧光镜成像系统处接收X射线图像以产生荧光透视X射线图像。 镜子位于荧光镜成像系统和X射线束之间。 X射线束通过反射镜基本上未衰减。 优选地，反射镜由具有原子序数小于14的元素的组合物形成。物体的预定位置的光学图像被反射离开反射镜。 光学图像和荧光X射线图像可以组合成叠加图像。

公开(公告)号：US5521516A

公开(公告)日：1996-05-28

申请号：US354088

申请日：1994-12-06

申请人： Yasuko Hanagama ,  Toyokazu Nakamura ,  Kiyoshi Nikawa ,  Tohru Tsujide

发明人： Yasuko Hanagama ,  Toyokazu Nakamura ,  Kiyoshi Nikawa ,  Tohru Tsujide

IPC分类号： G01R31/302 ,  G01R31/307 ,  H01L21/66 ,  G01R1/04

CPC分类号： G01R31/307

摘要： A semiconductor integrated circuit fault analyzing apparatus includes an electron beam tester and controller. The electron beam tester includes an electron gun assembly for generating a primary electron beam and forms a voltage contrast image on the basis of a detection amount of secondary electrons obtained by irradiating the primary electron beam from the electron gun assembly onto a semiconductor integrated circuit serving as a target to be tested and supplied with a test pattern signal, thereby specifying a faulty circuit portion of the semiconductor integrated circuit using the formed voltage contrast image. The controller sets, immediately before the test pattern signal is supplied to the semiconductor integrated circuit, at least one of a power and a signal which are supplied to the semiconductor integrated circuit to be a voltage different from a voltage obtained in the presence of the test pattern signal to cause the electron beam tester to acquire a voltage contrast image free from charge-up phenomena in synchronism with the start of supplying the test pattern signal.

摘要翻译： 半导体集成电路故障分析装置包括电子束测试器和控制器。 该电子束测试器包括一个用于产生一次电子束的电子枪组件，并且基于通过将来自电子枪组件的一次电子束照射到半导体集成电路而获得的二次电子的检测量形成电压对比图像， 要测试并提供测试图案信号的目标，从而使用形成的电压对比图像指定半导体集成电路的故障电路部分。 控制器将紧接在测试图案信号提供给半导体集成电路之前，将提供给半导体集成电路的功率和信号中的至少一个设置为与存在测试时获得的电压不同的电压 模式信号使电子束测试仪与开始提供测试图案信号同步地获取没有充电现象的电压对比图像。

公开(公告)号：US5498964A

公开(公告)日：1996-03-12

申请号：US308236

申请日：1994-09-19

申请人： Ronald K. Kerschner ,  David T. Crook ,  Lisa M. Kent

发明人： Ronald K. Kerschner ,  David T. Crook ,  Lisa M. Kent

IPC分类号： G01R1/06 ,  G01R31/02 ,  G01R31/28 ,  G01R31/302 ,  G01R31/312 ,  G01R31/08

CPC分类号： G01R31/2812 ,  G01R31/312

摘要： Disclosed is a system that determines whether input and output leads of semiconductor components are present and properly soldered to a printed circuit board. The system includes a signal source which is connected to a wiring trace on the printed circuit board, which is soldered to the lead being tested. A capacitive test probe is placed on top of the component and connected to a capacitance measuring device. The signal source signal is capacitively coupled through the lead of the integrated circuit package being tested to the capacitive test probe, so if a predetermined capacitance is measured by the capacitance measuring device, the lead is connected to the circuit assembly. As the capacitances being measured are small, the capacitive test probe may include an amplifier, a shield or a buffer circuit to reduce stray capacitance.

摘要翻译： 公开了一种确定半导体部件的输入和输出引线是否存在并被适当地焊接到印刷电路板的系统。 该系统包括一个信号源，该信号源连接到印刷电路板上的布线，焊接到待测试的引线上。 将电容测试探头放置在组件的顶部并连接到电容测量装置。 信号源信号通过被测试的集成电路封装的引线电容耦合到电容测试探针，因此如果由电容测量装置测量预定的电容，则引线连接到电路组件。 由于测量的电容很小，电容测试探头可以包括放大器，屏蔽或缓冲电路，以减少杂散电容。

公开(公告)号：US5498874A

公开(公告)日：1996-03-12

申请号：US362942

申请日：1994-12-23

申请人： Motosuke Miyoshi ,  Katsuya Okumura

发明人： Motosuke Miyoshi ,  Katsuya Okumura

IPC分类号： G01N23/225 ,  G01R31/302 ,  G21K5/04 ,  H01J37/04 ,  H01L21/66

CPC分类号： H01J37/04 ,  H01J2237/0835 ,  H01J2237/2817

摘要： The fault detecting apparatus comprises an electro optical lens-barrel having a rectangular cathode (101), three four-pole lenses (117, 119, 121), and a deflector (129). The four-pole lenses are controlled to form such a rectangular beam that a ratio of a reduction ratio at the sample surface of an electron beam locus along a longitudinal direction of the rectangular cathode to a reduction ratio at the sample surface of an electron beam locus along a lateral direction of the rectangular cathode becomes equal to a ratio of a length to a width of the rectangular cathode and in addition a width of the beam is equal to a required minimum fault detection width. Further, the deflector (129) is controlled by a deflection controller (130) in such a way that the rectangular beam can be scanned (raster scanning) by moving the rectangular beam at every scanning stroke corresponding to the minimum fault detection width in both the longitudinal and lateral directions of the rectangular beam.

摘要翻译： 故障检测装置包括具有矩形阴极（101），三个四极透镜（117,119,121）和偏转器（129）的电光镜镜筒。 控制四极透镜以形成这样的矩形光束，使得沿着矩形阴极的纵向方向的电子束轨迹的样品表面处的减小率与电子束轨迹的样品表面处的压下率的比率 沿着矩形阴极的横向方向变得等于矩形阴极的长度与宽度的比率，此外，光束的宽度等于所需的最小故障检测宽度。 此外，偏转器（129）由偏转控制器（130）控制，使得可以通过在对应于最小故障检测宽度的每个扫描行程中移动矩形束来扫描矩形束（光栅扫描） 矩形梁的纵向和横向方向。

公开(公告)号：US5459394A

公开(公告)日：1995-10-17

申请号：US113535

申请日：1993-08-27

申请人： Cornelis G. C. M. De Kort ,  Joris J. Vrehen ,  Gert W. t Hooft

发明人： Cornelis G. C. M. De Kort ,  Joris J. Vrehen ,  Gert W. t Hooft

IPC分类号： G01R15/22 ,  G01R1/07 ,  G01R31/302 ,  G01R31/308 ,  G01R31/319 ,  G01R31/00

CPC分类号： G01R31/308 ,  G01R1/071

摘要： An electro-optical measurement device for the sampling of an electric signal (SI) in an electronic component by means of a radiation beam. Special embodiments of the electro-optic measurement device are described. An electro-optic sensor element is provided with an electrically conductive tip at one side and with an electrode at the other side, so that an absolute and calibrated measurement is possible. The measurement beam can be high-frequency pulsed with a pulse (Lp) per period of the test signal (SI). The pulse series is low-frequency modulated and the pulses exhibit, relative to the test signal, a constant phase relationship during the first half periods of the modulation signal and a varying phase relationship during the second half periods so that accurate and reliable measurement is possible.

摘要翻译： 一种用于通过辐射束对电子部件中的电信号（SI）进行采样的电光测量装置。 描述电光测量装置的特殊实施例。 电光传感器元件在一侧设置有导电尖端，并且在另一侧设置有电极，使得绝对和校准的测量是可能的。 测量光束可以在每个测试信号（SI）的周期内用脉冲（Lp）进行高频脉冲。 脉冲序列是低频调制的，相对于测试信号，脉冲在调制信号的前半个周期期间呈现恒定的相位关系，并且在后半个周期期间呈现出改变的相位关系，从而可以进行准确可靠的测量 。

公开(公告)号：US5432461A

公开(公告)日：1995-07-11

申请号：US722963

申请日：1991-06-28

申请人： Francois J. Henley

发明人： Francois J. Henley

IPC分类号： G01R31/00 ,  G01R31/02 ,  G01R31/28 ,  G01R31/311 ,  G02F1/13 ,  G02F1/1333 ,  G02F1/136 ,  G02F1/1368 ,  G09G3/00 ,  G01R31/302

CPC分类号： G09G3/006 ,  G01R31/311 ,  G01N2021/9513 ,  G02F1/1309 ,  Y10S345/904

摘要： A testing method for active matrix liquid crystal display substrates having thin film transistors provided with a plurality of pixel electrodes, a plurality of source lines, and a plurality of gate lines formed on a substrate. A high resolution electro-optical element whose optical properties change when an electrical field is impressed on it is disposed above the active matrix liquid crystal display substrate and separated therefrom by an extremely small gap. Electric current is caused to flow between the pixel electrodes on the active matrix liquid crystal display substrate and the transparent thin film electrodes on the surface of the electro-optical element, creating an electrical field in the electro-optical element. By detecting local changes in the optical properties of the electro-optical element, defects in the pixels of the active matrix liquid crystal display substrate can be detected.

摘要翻译： 一种具有薄膜晶体管的有源矩阵液晶显示基板的测试方法，该薄膜晶体管设置有形成在基板上的多个像素电极，多个源极线和多个栅极线。 当在其上施加电场时光学特性改变的高分辨率电光元件设置在有源矩阵液晶显示器基板上方并且以非常小的间隙与其分离。 使电流在有源矩阵液晶显示基板上的像素电极和电光元件的表面上的透明薄膜电极之间流动，从而在电光元件中产生电场。 通过检测电光元件的光学特性的局部变化，可以检测有源矩阵液晶显示器基板的像素缺陷。

公开(公告)号：US5300880A

公开(公告)日：1994-04-05

申请号：US854531

申请日：1992-03-19

申请人： Kazuo Okubo ,  Akio Ito ,  Takayuki Anbe ,  Hironori Teguri

发明人： Kazuo Okubo ,  Akio Ito ,  Takayuki Anbe ,  Hironori Teguri

IPC分类号： G01R19/00 ,  G01R31/302 ,  G01R31/305 ,  H01L21/66 ,  G01R31/00 ,  G01N23/00

CPC分类号： G01R31/305

摘要： A method of measuring a voltage with an electron beam apparatus considers a change in a convergence factor due to a change in an S curve, as well as an error in a secondary electron signal level with a phase of measurement being scanned at random, to accurately measure the voltage. The method measures the voltage of a voltage measuring spot on a sample, prepares an analytic voltage by superimposing a probe voltage having an average of 0 V and no correlation with the measured voltage on the measured voltage, measures a secondary electron signal level with the analytic voltage, computes a convergence factor around a slice level set on the S curve according to a correlation between the secondary electron signal level and the probe voltage and according to an autocorrelation of the probe voltage, and updates the analytic voltage according to the convergence factor, thereby updating the measured voltage.

摘要翻译： 用电子束装置测量电压的方法考虑到S曲线的变化引起的会聚因子的变化以及随机扫描测量相位的二次电子信号电平的误差，以准确地 测量电压。 该方法测量样品上的电压测量点的电压，通过将平均值为0 V的探针电压叠加在测量电压上与测量电压无关，准备分析电压，用分析仪测量二次电子信号电平 根据二次电子信号电平和探针电压之间的相关关系，根据探头电压的自相关计算S曲线周围设置的限幅电平周围的收敛系数，并根据收敛因数更新分析电压， 从而更新测量的电压。

公开(公告)号：US5248947A

公开(公告)日：1993-09-28

申请号：US871704

申请日：1992-04-21

申请人： Nobuo Shiga

发明人： Nobuo Shiga

IPC分类号： G01R31/00 ,  G01R31/304 ,  H01Q3/26 ,  H03B5/00 ,  H03B5/18 ,  G01R31/302

CPC分类号： H01Q3/267 ,  G01R31/304 ,  H03B5/1841 ,  H03B5/1852

摘要： An oscillating apparatus comprising: an oscillator unit for oscillating in the microwave band; an output unit electromagnetically coupled to the outputting unit of the oscillator unit for taking an oscillation output outside; and an antenna element electromagnetically coupled to a part of the outputting unit, or a part of the output unit for radiating part of the oscillation output in an electromagnetic wave.

公开(公告)号：US5218433A

公开(公告)日：1993-06-08

申请号：US646756

申请日：1991-03-08

申请人： John V. Ward ,  Robert C. McNamee

发明人： John V. Ward ,  Robert C. McNamee

IPC分类号： G01R19/00 ,  G01R31/302 ,  G09G1/28 ,  G09G5/00 ,  G09G5/02 ,  G09G5/18 ,  H01J37/22 ,  H04N7/18 ,  H04N9/67

CPC分类号： H04N9/67

摘要： A real-time signal processing circuit includes circuitry for receiving input signals generated by a scanning device, and circuitry for obtaining a synchronizing signal and a first blanking signal from the receiving circuitry. The signal-processing circuit has an input stage and a processing stage which selectively generates color output signals from the input signals, each color output signal being derived from one or a combination of the input signals. The circuit also has an output stage for including a blanking output signal in the color output signals in response to the first blanking signal and outputting the color signals and the synchronizing signal.

摘要翻译： PCT No.PCT / AU89 / 00294 Sec。 371日期1991年3月8日 102（e）1991年3月8日PCT PCT。1989年7月7日PCT公布。 出版物WO90 / 00849 日期1990年1月25日。实时信号处理电路包括用于接收由扫描装置产生的输入信号的电路，以及用于从接收电路获得同步信号和第一消隐信号的电路。 信号处理电路具有从输入信号选择性地生成颜色输出信号的输入级和处理级，每种颜色输出信号从输入信号的一个或组合导出。 电路还具有输出级，用于响应于第一消隐信号而在彩色输出信号中包括消隐输出信号，并输出彩色信号和同步信号。

公开(公告)号：US5212374A

公开(公告)日：1993-05-18

申请号：US804257

申请日：1991-12-04

申请人： James C. Speedy ,  Francois J. Henley ,  Hee-June Choi ,  Michael J. Miller ,  Ying-Moh Liu

发明人： James C. Speedy ,  Francois J. Henley ,  Hee-June Choi ,  Michael J. Miller ,  Ying-Moh Liu

IPC分类号： G01R31/302 ,  G01R19/00 ,  G01R31/308 ,  G02F1/13 ,  G09G3/00 ,  H01L21/66

CPC分类号： G09G3/006 ,  G01R31/308 ,  G02F1/1309

摘要： An imaging method creates a two-dimensional image of a voltage distribution or a capacitance distribution across a surface of a substrate under test using an electro-optic modulator which is positioned and biased with respect to the surface of the substrate. The method involves a first coarse offsite calibrating step to compensate for nonuniformities in the light emerging from the modulator. Then, for each successive portion of the substrate over which the modulator is to detect characteristics of the substrate, the system undergoes a modulator relocating step, a modulator levelling step, a modulator gapping step, a fine onsite calibrating step, and a measuring step. An apparatus is disclosed for levelling the bottom surface of a modulator into a substantially coplanar spacial relationship with a portion of top surface of the underlying substrate being tested monitors light emerging from at least three regions on the top surface of the modulator in order to determine the relative distances of three corresponding regions of the bottom surface of the modulator from the underlying top surface of the substrate being tested. In one embodiment, three transducers are used to control the spacial orientation of the modulator. The method and apparatus see special application in detecting defects in LCD display panels.

摘要翻译： 成像方法使用相对于衬底的表面定位和偏置的电光调制器产生跨越被测衬底的表面的电压分布或电容分布的二维图像。 该方法涉及第一粗糙非现场校准步骤以补偿从调制器出射的光的不均匀性。 然后，对于调制器要在其上检测衬底的特性的衬底的每个连续部分，系统经历调制器重定位步骤，调制器调平步骤，调制器间隔步骤，精细现场校准步骤和测量步骤。 公开了一种用于将调制器的底表面平整为与待测试的下层基底的顶表面的一部分基本上共面的空间关系，监测从调制器顶表面上的至少三个区域出射的光，以便确定 调制器底表面的三个对应区域与正在测试的衬底的下表面之间的相对距离。 在一个实施例中，使用三个换能器来控制调制器的空间取向。 该方法和装置在液晶显示面板检测缺陷方面具有特殊应用。