Horn switch for a steering wheel
    121.
    发明授权
    Horn switch for a steering wheel 有权
    方向盘的喇叭开关

    公开(公告)号:US06508485B2

    公开(公告)日:2003-01-21

    申请号:US09852143

    申请日:2001-05-10

    IPC分类号: B60R2116

    CPC分类号: B60R21/2037 B60Q5/003

    摘要: A horn switch includes a stationary member, a movable member, a spring and a connecting bolt. The stationary member has a stationary contact and is supported on a steering wheel body The movable member has a movable contact and is arranged above the stationary member. The connecting bolt allows downward movements of the movable member and prescribes a distance of the movable contact from the stationary contact. The connecting bolt is provided with a head and a shank. The head abuts against an underside of the stationary member. The shank extends upward from the head to be fastened to a threaded hole in the movable member. Prior to fastening, the connecting bolt is temporarily fixed to the stationary member by latch legs. The latch legs latch a lower surface of the head in a manner to permit the connecting bolt to be fastened to the movable member.

    摘要翻译: 喇叭开关包括固定构件,可动构件,弹簧和连接螺栓。 固定构件具有固定接触件并且被支撑在方向盘主体上。可移动构件具有可动触头并且布置在固定构件上方。 连接螺栓允许可动构件的向下运动,并且规定可动触头与固定触点的距离。 连接螺栓设置有头部和柄部。 头部抵靠固定构件的下侧。 柄从头部向上延伸以被紧固到可动构件中的螺纹孔。 在紧固之前,连接螺栓通过闩锁腿临时固定到固定构件。 闩锁腿以允许连接螺栓紧固到可动构件的方式闩住头部的下表面。

    Electrostatic deflector, for electron beam exposure apparatus, with reduced charge-up
    123.
    发明授权
    Electrostatic deflector, for electron beam exposure apparatus, with reduced charge-up 失效
    静电偏转器,用于电子束曝光设备,具有减小的充电

    公开(公告)号:US06268606B1

    公开(公告)日:2001-07-31

    申请号:US09337795

    申请日:1999-06-22

    IPC分类号: H01J3700

    摘要: An electrostatic deflector of an electron beam exposure apparatus is disclosed. A cylindrical holding member is made of an insulating material. An electrode including a plurality of electrode members fixedly arranged in spaced relationship to each other and having at least a portion of the surface thereof grown with a metal film is disposed inside the holding member. The electrode members each formed with a metal film on the surface thereof are made of a conductive ceramic having a resistivity selected at least in the range of 0.001 &OHgr;•cm to 1000 &OHgr;•cm.

    摘要翻译: 公开了电子束曝光设备的静电偏转器。 圆柱形保持构件由绝缘材料制成。 一种电极,其包括以彼此间隔开的关系固定地布置并且其表面的至少一部分由金属膜生长的多个电极部件设置在保持部件的内部。 每个在其表面上由金属膜形成的电极构件由电阻率选择为至少在0.001欧姆·厘米到1000欧姆·厘米的范围内的导电陶瓷制成。

    Electron gun used in an electron beam exposure apparatus
    124.
    发明授权
    Electron gun used in an electron beam exposure apparatus 有权
    用于电子束曝光装置的电子枪

    公开(公告)号:US06252344B1

    公开(公告)日:2001-06-26

    申请号:US09335398

    申请日:1999-06-17

    IPC分类号: H01J2976

    CPC分类号: H01J37/241 H01J2237/3175

    摘要: An electron gun, preferably a four-pole electron gun, used in an electron beam exposure apparatus is formed by: a cathode for emitting an electron beam when supplying a negative and high-accelerated voltage; a first grid provided downstream of the cathode for focusing a crossover image of the electron beam when supplying a voltage which becomes a reverse bias for the cathode, and the cathode and the first grid being arranged at a high voltage side of a high voltage insulator; an anode for collecting the electron beam which passes through the first grid, and being arranged at a low voltage side of the high voltage insulator; and a second grid provided at the high voltage side of the high voltage insulator and between the first grid and the anode, and having an aperture for limiting an amount of the electron beam passing therethrough. A voltage which becomes a forward bias for the cathode is supplied to the second grid, and the crossover image is focused at the aperture of the second grid.

    摘要翻译: 电子束曝光装置中使用的优选四极电子枪的电子枪是通过以下方式形成的:用于在提供负高和高加速电压时发射电子束的阴极; 设置在阴极的下游的第一栅极,用于在提供成为阴极的反向偏压的电压时使聚焦电子束的交叉图像,并且阴极和第一栅极布置在高压绝缘体的高压侧; 用于收集通过第一栅格的电子束并且布置在高压绝缘体的低电压侧的阳极; 以及设置在高压绝缘子的高压侧和第一栅极与阳极之间的第二栅极,并且具有用于限制通过其中的电子束的量的孔。 成为阴极的正向偏压的电压被提供给第二栅极,并且交叉图像聚焦在第二栅极的孔径处。

    Side airbag device
    126.
    发明授权
    Side airbag device 失效
    侧面安全气囊装置

    公开(公告)号:US6082761A

    公开(公告)日:2000-07-04

    申请号:US8503

    申请日:1998-01-16

    摘要: A side air bag device has an air bag and a substantially cylindrical inflator for supplying inflation gas to the air bag. The air bag includes a cloth bag and is installed in a vehicle interior in a folded state along the edge of a door opening. The air bag deploys so as to cover the door opening when it inflates. The air bag has a substantially cylindrical tubular gas inflow portion. This gas inflow portion is connected to the inflator so that it covers the inflator. The gas inflow portion is clamped to the outer circumferential surface of the inflator. With a side air bag device according to the invention it is not necessary to use a long pipe that from the inflator and it is possible to increase the freedom of installation of the device and also reduce its weight and cost.

    摘要翻译: 侧气囊装置具有气囊和用于向气囊供给充气气体的大致圆筒形的充气机。 安全气囊包括布袋,并且沿着门开口的边缘以折叠状态安装在车辆内部。 气囊展开,以便在充气时遮盖门开口。 气囊具有大致圆筒状的管状气体流入部。 该气体流入部分连接到充气机,以便它覆盖充气机。 气体流入部被夹持在充气机的外周面。 利用根据本发明的侧气囊装置,不需要使用来自充气机的长管,并且可以增加装置的安装自由度并且还减少其重量和成本。

    Charged particle beam exposure method and apparatus therefor
    127.
    发明授权
    Charged particle beam exposure method and apparatus therefor 失效
    带电粒子束曝光方法及其装置

    公开(公告)号:US5981960A

    公开(公告)日:1999-11-09

    申请号:US724954

    申请日:1996-10-02

    摘要: A charged particle beam exposure method and apparatus, in which a charged particle beam is shaped based on pattern data and the shaped charged particle beam is irradiated to a desired location on a sample. The method and apparatus includes introducing ozone gas into a chamber through which the charged particle beam is passed, shaped and deflected, to be irradiated to the desired location while the charged particle beam is irradiated through the chamber. The ozone gas concentration in the chamber is maintained so that the concentration downstream along the beam is higher than the concentration upstream along the beam. A charge-up drift due to a contamination material from a resist on a wafer can be avoided by the ozone self cleaning. The ozone oxidation does not occur at the upstream chamber where there is a lower ozone concentration and lower contamination.

    摘要翻译: 带电粒子束曝光方法和装置,其中基于图案数据对带电粒子束进行成形,并将成形的带电粒子束照射到样品上的期望位置。 所述方法和装置包括将臭氧气体引入室中,带电粒子束通过该腔通过,成形和偏转,以照射到期望位置,同时通过室照射带电粒子束。 保持室中的臭氧气体浓度,使得沿着光束的下游的浓度高于沿着光束的上游的浓度。 通过臭氧自清洁可以避免由于晶片上的抗蚀剂引起的污染物质的充电漂移。 臭氧氧化不会发生在臭氧浓度较低和污染较低的上游室。

    Method and system for changed particle beam exposure
    130.
    发明授权
    Method and system for changed particle beam exposure 失效
    带电粒子束曝光的方法和系统

    公开(公告)号:US5910658A

    公开(公告)日:1999-06-08

    申请号:US27470

    申请日:1998-02-20

    摘要: Adjusting variable delay circuit 311, receiving signal S1, is connected to the input of drive circuit 312. A time point t1, when the output potential of drive circuit 312 traverses reference potential VA between the potential Va of traveling wave V1F of the output potential and 0 V, is detected by comparator 52 for detecting the front edge of V1F, detecting variable delay circuit 50 for delaying signal S1 and D flip-flop 51 for holding the output of comparator 52 at the timing of front edge of the signal outputted from delay circuit 50. A time point t2, when the output potential of drive circuit 312 traverses reference potential VB between the superimposed potential of traveling wave V1F and reflected wave V1B and VA, is detected by comparator 62 for detecting the front edge of V1B, detecting variable delay circuit 60 for delaying signal S1 and D flip-flop 61 for holding the output of comparator 62 at the timing of front edge of the signal outputted from delay circuit 60. The delay time of adjusting variable delay circuit 311 is set so that value {t1+(t2-t1)/2} becomes substantially same as to all the output potentials of drive circuit 31 and so on.

    摘要翻译: 调节可变延迟电路311,接收信号S1连接到驱动电路312的输入端。时间点t1,当驱动电路312的输出电位在输出电位的行波V1F的电位Va和 0 V被比较器52检测,用于检测V1F的前沿,检测可变延迟电路50用于延迟信号S1和D触发器51,用于保持比较器52的输出在从延迟输出的信号的前沿的定时 当驱动电路312的输出电位在行波V1F和反射波V1B与VA之间的叠加电位之间经过参考电位VB时,由比较器62检测V1B的前沿,检测变量 延迟电路60,用于在从延迟电路60输出的信号的前沿的定时处延迟用于保持比较器62的输出的信号S1和D触发器61.延迟时间 设定调节可变延迟电路311的e值使得值{t1 +(t2-t1)/ 2}与驱动电路31的所有输出电位等基本相同。