Process for forming a buried drain or collector region in monolithic
semiconductor devices
    122.
    发明授权
    Process for forming a buried drain or collector region in monolithic semiconductor devices 失效
    在单片半导体器件中形成埋漏或集电极区的工艺

    公开(公告)号:US5300451A

    公开(公告)日:1994-04-05

    申请号:US967553

    申请日:1992-10-27

    Abstract: The invention relates to a process for forming a buried drain or collector region in monolithic semiconductor devices comprising an integrated control circuit and one or more power transistors with vertical current flow integrated in the same chip. The process allows optimization of the current-carrying capacity and the series drain resistance of the power stage and operating voltage by the implantation of a buried gate region in a first epitaxial layer after the formation of said epitaxial layer. These buried gate regions high dopant concentrations where the dopants have low diffusion coefficients. These low diffusive dopants permit more accurate and form defined buried gate regions than current formation techniques utilizing formation of buried gate regions implemented in the substrate where these gate regions contain highly diffusive dopants.

    Abstract translation: 本发明涉及一种用于在单片半导体器件中形成埋地漏极或集电极区域的方法,其包括集成控制电路和集成在同一芯片中的垂直电流的一个或多个功率晶体管。 该过程允许通过在形成所述外延层之后在第一外延层中注入掩埋栅极区域来优化功率级的载流能力和串联漏极电阻和工作电压。 这些掩埋栅区具有高掺杂浓度,其中掺杂剂具有低扩散系数。 这些低扩散掺杂剂允许比当前形成技术更精确和形成定义的掩埋栅极区域,其利用在衬底中实现的掩埋栅极区域的形成,其中这些栅极区域包含高度漫射掺杂剂。

    Bank erasable, flash-EPROM memory
    123.
    发明授权
    Bank erasable, flash-EPROM memory 失效
    银行可擦除,闪存EPROM内存

    公开(公告)号:US5289423A

    公开(公告)日:1994-02-22

    申请号:US792478

    申请日:1991-11-15

    CPC classification number: H01L27/115

    Abstract: Each common source region of the cells of a row of a FLASH-EPROM matrix may be segmented and each segment is individually connected to a secondary source line patterned in a second level metal layer by a plurality of contacts between each common source region and patterned portions of a first level metal and through as many interconnection vias between the latter patterned portions of the first level of metal and the relative secondary source line patterned in the second metal layer. The secondary source lines are brought out of the matrix orthogonally to the bit lines and may be connected to a dedicated selection circuitry, thus permitting the erasing by groups or banks of cells of the FLASH-EPROM memory.

    Abstract translation: FLASH-EPROM矩阵的行的单元的每个公共源区域可以被分割,并且每个段通过每个公共源区域和图案化部分之间的多个接触单独地连接到由第二层金属层图案化的次级源极线 并且通过在第一金属级的后一图案化部分和在第二金属层中图案化的相对次级源极线之间的尽可能多的互连通孔。 次级源极线从矩阵垂直于位线引出,并且可以连接到专用选择电路,从而允许由FLASH-EPROM存储器的单元的组或块组擦除。

    Fast capacitive-load driving circuit particularly memories
    124.
    发明授权
    Fast capacitive-load driving circuit particularly memories 失效
    快速电容负载驱动电路特别是记忆

    公开(公告)号:US5283478A

    公开(公告)日:1994-02-01

    申请号:US811323

    申请日:1991-12-20

    CPC classification number: H03K17/163 H03K19/00361

    Abstract: A fast capacitive-load driving circuit for driving output nodes on an integrated circuit. This circuit reduces noise interference caused by parasitic inductance by lowering the inductance voltage on the power supply lines during the switching process. This invention includes a voltage ramp, a voltage-to-current converter, and an output buffer having at least one pull-down transistor. A further embodiment includes an output buffer possessing a pull-down and a pull-up transistor.

    Abstract translation: 一种用于驱动集成电路上的输出节点的快速电容负载驱动电路。 该电路通过在切换过程中降低电源线上的电感电压来减少由寄生电感引起的噪声干扰。 本发明包括电压斜坡,电压 - 电流转换器和具有至少一个下拉晶体管的输出缓冲器。 另一实施例包括具有下拉和上拉晶体管的输出缓冲器。

    Method for fabricating memory cell matrix having parallel source and
drain interconnection metal lines formed on the substrate and topped by
orthogonally oriented gate interconnection parallel metal lines
    125.
    发明授权
    Method for fabricating memory cell matrix having parallel source and drain interconnection metal lines formed on the substrate and topped by orthogonally oriented gate interconnection parallel metal lines 失效
    用于制造具有平行的源极和漏极互连金属线的存储单元矩阵的方法,所述金属线形成在所述衬底上并且由正交定向的栅极互连并行金属线

    公开(公告)号:US5279982A

    公开(公告)日:1994-01-18

    申请号:US734503

    申请日:1991-07-23

    Applicant: Pier L. Crotti

    Inventor: Pier L. Crotti

    CPC classification number: H01L27/115

    Abstract: A cell array for EPROM or ROM type memories has drain and source interconnection metal lines connecting in common drain and source regions, respectively, of the cells arranged on a same row of the array formed directly on the semiconductor substrate, superimposed at crossings to uninterrupted isolation strips formed on the semiconductor substrate for separating cells belonging to two adjacent columns of the array, and gate interconnection lines (WORD LINES), connecting the control gate electrodes of cells arranged on a same column, which run parallel to and between said isolation strips and superimposed at crossings to said underlying source and drain lines (BIT LINES). The array is markedly more compact than an array made according to the prior art though utilizing fabrication apparatuses with similar optical resolution, while maximizing the source and drain contact areas of the cells. In ROM devices, the customizing may advantageously take place during the final steps of the fabrication process by means of a gate contact mask having a reduced criticality in respect to a comparable drain contact mask used in prior art processes. The fabrication process employs self-alignment techniques and masks with a relatively low alignment criticality.

    Abstract translation: 用于EPROM或ROM型存储器的单元阵列具有分别连接在布置在直接形成在半导体衬底上的阵列的同一行上的单元的公共漏极和源极区域中的漏极和源极互连金属线,在交叉处叠加到不间断隔离 形成在半导体衬底上的用于分离属于阵列的两个相邻列的单元的栅极和栅极互连线(WORD LINES),栅极互连线(WORD LINES)连接布置在同一列上的单元的控制栅极电极,该栅极互连线平行于所述隔离带和 在交叉处叠加到所述底层源极和漏极线(BIT LINES)。 该阵列显着地比根据现有技术制成的阵列更紧凑,尽管利用具有类似光学分辨率的制造装置,同时使单元的源极和漏极接触面积最大化。 在ROM器件中,定制可以有利地在制造工艺的最后步骤期间通过相对于现有技术工艺中使用的类似漏极接触掩模具有降低的临界性的栅极接触掩模进行。 制造工艺采用自对准技术和具有较低对准关键性的掩模。

    Monostabilized dynamic programmable logic array in CMOS technology
    126.
    发明授权
    Monostabilized dynamic programmable logic array in CMOS technology 失效
    CMOS技术中的单稳态动态可编程逻辑阵列

    公开(公告)号:US5274282A

    公开(公告)日:1993-12-28

    申请号:US970609

    申请日:1992-10-30

    CPC classification number: H03K19/17716

    Abstract: The circuit includes an input register (RI); an output register (RU); an AND plane; and an OR plane. The AND plane has vertical lines (Y), which are controlled by the input register, and horizontal lines (L), which include transistors (TA) arranged in series and controlled by respective vertical lines. The horizontal lines are connected to ground by normally-off transistors (TV) and to the power supply by normally-on transistors (TP). These transistors (TV, TP) are controlled by a first clock signal (CK1.about.). The OR plane has horizontal lines (S) and vertical lines (U). The vertical lines (U) of the OR plane contain normally-off transistors (TO) which are controlled by respective horizontal lines of the OR plane. Horizontal lines of the AND plane and horizontal lines of the OR plane are connected by respective pairs of normally-on transistors (TB) and normally-off transistors (TC) arranged in series between the power supply and ground. In each pair, the normally-on transistor is controlled by a horizontal line of the AND plane, and the normally-off transistor is controlled by a second clock signal (CK2). A horizontal line of the OR plane is connected to the node between the pair. The vertical lines of the OR plane are connected to the power supply by respective transistors (TR), which are controlled by a third clock signal (CK2.about.), and to the output register by pass transistors (P), which are controlled by a fourth clock signal (CK3.about.).

    Abstract translation: 该电路包括一个输入寄存器(RI); 输出寄存器(RU); 一个AND平面; 和OR平面。 AND平面具有由输入寄存器控制的垂直线(Y)和包括串联布置并由相应垂直线控制的晶体管(TA)的水平线(L)。 水平线通过常闭晶体管(TV)连接到地,并通过常开晶体管(TP)连接到电源。 这些晶体管(TV,TP)由第一时钟信号(CK1 DIFFERENCE)控制。 OR平面具有水平线(S)和垂直线(U)。 OR平面的垂直线(U)包含由OR平面的相应水平线控制的常闭晶体管(TO)。 AND平面的水平线和OR平面的水平线通过串联布置在电源和地之间的各对正常导通晶体管(TB)和常关断晶体管(TC)连接。 在每对中,常通晶体管由AND平面的水平线控制,而常闭晶体管由第二时钟信号(CK2)控制。 OR平面的水平线连接到该对之间的节点。 OR平面的垂直线通过由第三时钟信号(CK2 DIFFERENCE)控制的相应晶体管(TR)连接到电源,并且由通过晶体管(P)控制的输出寄存器 第四个时钟信号(CK3 DIFFERENCE)。

    Tapering of holes through dielectric layers for forming contacts in
integrated devices
    129.
    发明授权
    Tapering of holes through dielectric layers for forming contacts in integrated devices 失效
    通过电介质层在形成联合装置中的接触处

    公开(公告)号:US5227014A

    公开(公告)日:1993-07-13

    申请号:US435890

    申请日:1989-11-14

    CPC classification number: H01L21/76804 H01L21/31116

    Abstract: Step coverage in contacts may be improved by forming a tapered hole through a dielectric layer by:a) plasma (RIE) etching through a "contact" mask the dielectric for a depth shorter than the thickness of the layer leaving a residual thickness of dielectric on the bottom of the etch;b) removing the residual masking material;c) conformally depositing a TEOS layer;d) etching the conformally deposited TEOS layer without a mask in (RIE) plasma until exposing the underlying silicon or polysilicon with which the contact must be established.The anisotropic etching of the TEOS layer, conformally deposited on the partially pre-etched dielectric layer, determines a "self-aligned" exposition of the underlying silicon or polysilicon and leaves a tapered TEOS residue on the vertical pre-etched hole's walls, thus providing a desired tapering of the contact hole. Photolithographic definition is no longer a critical factor.

    Device for regulating the battery charging voltage delivered by an
alternator
    130.
    发明授权
    Device for regulating the battery charging voltage delivered by an alternator 失效
    用于调节交流电源提供的电池充电电压的装置

    公开(公告)号:US5221886A

    公开(公告)日:1993-06-22

    申请号:US796687

    申请日:1991-11-25

    CPC classification number: H02J7/244

    Abstract: The invention relates to a regulator device for charging a battery by an alternator that delivers a rectified voltage including a ripple component. The device is of the type comprising a regulator circuit acting on the mean value of the rectified alternator voltage and a regulator circuit acting on the voltages of the positive peaks of the ripple component. The regulator circuits are powered by a stabilized voltage derived from the rectified alternator voltage and the device further comprises a power stage for controlling the excitation current of the alternator. According to the invention, the device further includes a regulator circuit acting on the values of the negative peaks of the ripple component. This regulator circuit is also powered by the stabilized voltage, and capable of causing the excitation current to be reduced whenever the voltage of the negative peaks falls below a given threshold.

    Abstract translation: 本发明涉及一种用于通过交流发电机对电池进行充电的调节器装置,该交流发电机提供包括纹波分量的整流电压。 该装置的类型包括作用于整流交流发电机电压的平均值的调节器电路和作用在波纹分量的正峰值的电压上的调节器电路。 调节器电路由来自整流交流发电机电压的稳定电压供电,并且该装置还包括用于控制交流发电机的激励电流的功率级。 根据本发明,该装置还包括作用于纹波分量的负峰值的调节器电路。 该调节器电路也由稳定的电压供电,并且能够在负峰值的电压下降到给定阈值以下时使激励电流降低。

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