公开(公告)号：US06232218B1

公开(公告)日：2001-05-15

申请号：US09377100

申请日：1999-08-19

Applicant: David A. Cathey ,  J. Brett Rolfson ,  Valerie A. Ward ,  Karen M. Winchester

Inventor： David A. Cathey ,  J. Brett Rolfson ,  Valerie A. Ward ,  Karen M. Winchester

IPC: H01L4500

CPC classification number: H01L21/31116 ,  H01L21/3185 ,  Y10S438/97

Abstract: A etch stop layer for use in a silicon oxide dry fluorine etch process is made of silicon nitride with hydrogen incorporated in it either in the form of N—H bonds, O—H bonds, or entrapped free hydrogen. The etch stop layer is made by either increasing the NH3 flow, decreasing the SiH4 flow, decreasing the nitrogen flow, or all three, in a standard PECVD silicon nitride fabrication process. The etch stop can alternatively be made by pulsing the RF field in either a PECVD process or an LPCVD process.

Abstract translation: 用于氧化硅干氟蚀刻工艺中的蚀刻停止层由氮化物制成，其中以氢键结合在其中，其形式为N-H键，O-H键或截留的游离氢。 蚀刻停止层是通过在标准PECVD氮化硅制造工艺中增加NH 3流，降低SiH4流量，降低氮气流量或全部三种来制备的。 替代地，蚀刻停止可以通过在PECVD工艺或LPCVD工艺中脉冲RF场来制造。

公开(公告)号：US06201977B1

公开(公告)日：2001-03-13

申请号：US09066616

申请日：1998-04-24

Applicant: David A. Cathey ,  Kip A. Bedard ,  David A. Zimlich

Inventor： David A. Cathey ,  Kip A. Bedard ,  David A. Zimlich

IPC: H04M100

CPC classification number: H04W88/02 ,  H02J7/0063 ,  H02J2007/0067 ,  H04B1/3805 ,  H04W52/0277 ,  Y02D70/40

Abstract: Method and apparatus for ensuring that, in a portable, battery-powered communication package incorporating at least two communication devices, such as a combination cellular telephone and a pager, sufficient power is provided for extended operation of the communication device having the lowest continuous power consumption requirements when the device having a higher continuous power consumption rate has consumed a selected portion of the total power initially available to the combined devices. In the case of the aforestated exemplary device, cellular telephone function is disabled when a selected portion of the total power initially available is consumed. A first embodiment of the invention is implemented with a single electrochemical battery. The first embodiment of the invention may include a headroom-limited flyback power supply which powers the high-power consumption device. When headroom drops below a minimum set by a series-coupled diode string, power is cut off to the high-power-consumption device. The first embodiment of the invention may alternatively include a battery charge sense circuit which produces a digital signal, the digital signal corresponding to either a battery charge state that is above the predetermined voltage level or a battery charge state that is below the predetermined voltage level. For this alternate first embodiment, operation of the high-power-consumption device is disabled when the predetermined battery charge state is reached, thus permitting operation of the low-power consumption communication device for an extended period which, ideally, should be at least 24 hours. A second embodiment of the invention is implemented using a separate electrochemical power source (e.g., a single electrochemical cell or battery) to power the low-power consumption device.

Abstract translation: 提供一种用于确保在具有至少两个通信设备（诸如组合蜂窝电话和寻呼机）的便携式电池供电通信包中提供足够的功率以用于具有最低连续功耗的通信设备的扩展操作的方法和装置 当具有较高连续功率消耗率的设备已经消耗了组合设备最初可用的总功率的选定部分时的要求。 在上述示例性设备的情况下，当消耗最初可用的总功率的所选部分时，禁用蜂窝电话功能。 本发明的第一实施例用单个电化学电池实现。 本发明的第一实施例可以包括为大功率消耗装置供电的净空限制回扫电源。 当余量低于由串联二极管串设置的最小值时，电源将切断到高功耗器件。 本发明的第一实施例可以替代地包括产生数字信号的电池电荷感测电路，对应于高于预定电压电平的电池充电状态或低于预定电压电平的电池充电状态的数字信号。 对于该替代的第一实施例，当达到预定电池充电状态时，高功率消耗装置的操作被禁用，从而允许低功耗通信装置的操作延长的时间段，理想地应当是至少24 小时。 使用单独的电化学电源（例如，单个电化学电池或电池）来实现本发明的第二实施例以为低功率消耗装置供电。

公开(公告)号：US06183329B2

公开(公告)日：2001-02-06

申请号：US09014642

申请日：1998-01-28

Applicant: David A. Cathey ,  Charles M. Watkins ,  Darryl M. Stansbury ,  James J. Hofman ,  Robert T. Rasmussen ,  Surjit S. Chadha

Inventor： David A. Cathey ,  Charles M. Watkins ,  Darryl M. Stansbury ,  James J. Hofman ,  Robert T. Rasmussen ,  Surjit S. Chadha

IPC: H01J918

CPC classification number: H01J9/242 ,  H01J9/185 ,  H01J29/028 ,  H01J29/864 ,  H01J31/123 ,  H01J31/127 ,  H01J2329/8625 ,  H01J2329/863 ,  H01J2329/8635 ,  H01J2329/864 ,  H01J2329/8645 ,  H01J2329/866 ,  Y10T29/4981

Abstract: A process is provided for forming spacers useful in large area displays. The process comprises steps of: forming bundles or boules comprising fiber strands which are held together with a binder; slicing the bundles or boules into slices; adhering the slices on an electrode plate of the display; and removing the binder. In the step of forming bundles or boules comprising fiber strands, the function of the binder is initially or fully performed by glass tubings surrounding the glass fibers. The clad glass of the envelopes etches more readily than the core glass.

公开(公告)号：US6127777A

公开(公告)日：2000-10-03

申请号：US127013

申请日：1998-07-31

Applicant: Charles M. Watkins ,  David A. Cathey

Inventor： Charles M. Watkins ,  David A. Cathey

IPC: H01J7/18 ,  H01J9/38 ,  H01J29/94 ,  H01J17/24

CPC classification number: H01J9/38 ,  H01J29/94 ,  H01J7/186 ,  H01J2209/012 ,  H01J2209/385 ,  H01J2329/00

Abstract: The present invention provides an FED with a getter material deposited and activated on the substrates of the faceplate and the baseplate of the FED. In one embodiment of the invention, a large FED includes a faceplate, a baseplate, and an unactivated non-evaporable getter material. The faceplate has a transparent substrate with an inner surface, and a cathodoluminescent material disposed on a portion of the inner surface. The baseplate has a base substrate with a first surface and an emitter array formed on the first surface. The baseplate and the faceplate are coupled together to form a sealed vacuum space in which the inner surface and the first surface are juxtaposed to one another in a spaced-apart relationship across a vacuum gap. The unactivated non-evaporating getter material is deposited directly on the inner surface and/or the first surface. The unactivated non-evaporating getter material may alternatively be deposited on a thin film of bonding material that is disposed on the inner surface and/or the first surface.

Abstract translation: 本发明提供了一种FED，其具有在面板的基板和FED的基板上沉积并激活的吸气材料。 在本发明的一个实施例中，大的FED包括面板，底板和未活化的不可蒸发的吸气剂材料。 面板具有内表面的透明衬底和设置在内表面的一部分上的阴极发光材料。 底板具有形成在第一表面上的第一表面和发射极阵列的基底。 基板和面板联接在一起以形成密封的真空空间，其中内表面和第一表面以间隔的关系跨越真空间隙彼此并置。 未活化的非蒸发吸气剂材料直接沉积在内表面和/或第一表面上。 未活化的非蒸发吸气剂材料可以替代地沉积在设置在内表面和/或第一表面上的粘合材料的薄膜上。

公开(公告)号：US6126845A

公开(公告)日：2000-10-03

申请号：US354923

申请日：1999-07-15

Applicant: David A. Cathey ,  Kevin Tjaden

Inventor： David A. Cathey ,  Kevin Tjaden

IPC: H01J9/02 ,  B44C1/22 ,  H01J9/00

CPC classification number: H01J9/025 ,  H01J2201/30403

Abstract: A method for fabricating sharp asperities. A substrate is provided which has a mask layer disposed thereon, and a layer of micro-spheres is disposed superjacent the mask layer. The micro-spheres are for patterning the mask layer. Portions of the mask layer are selectively removed, thereby forming circular masks. The substrate is isotropically etched, thereby creating sharp asperities.

Abstract translation: 一种制造尖锐凹凸的方法。 提供了具有设置在其上的掩模层的基板，并且在该掩模层的上方布置一层微球。 微球用于图案化掩模层。 选择性地去除掩模层的一部分，从而形成圆形掩模。 基板被各向同性地蚀刻，从而产生尖锐的凹凸。

公开(公告)号：US6110394A

公开(公告)日：2000-08-29

申请号：US120558

申请日：1998-07-22

Applicant: David A. Cathey ,  Kevin Tjaden ,  James J. Alwan

Inventor： David A. Cathey ,  Kevin Tjaden ,  James J. Alwan

IPC: H01J9/02 ,  B05D1/04

CPC classification number: H01J9/025

Abstract: A substrate is placed on a charging surface, to which a first voltage is applied. Etch-resistant dry particles are placed in a cup in a nozzle to which a second voltage, less than the first voltage, is applied. A carrier gas is directed through the nozzle, which projects the dry particles out of the nozzle toward the substrate. The particles pick up a charge from the potential applied to the nozzle and are electrostatically attracted to the substrate. The particles adhere to the substrate, where they form an etch mask. The substrate is etched and the particles are removed. Emitter tips for a field emission display may be formed in the substrate.

Abstract translation: 将基板放置在施加第一电压的充电表面上。 将耐蚀刻干燥颗粒放置在喷嘴中的杯中，其中施加小于第一电压的第二电压。 载气被引导通过喷嘴，其将干燥颗粒从喷嘴向衬底投射。 颗粒从施加到喷嘴的电位拾取电荷，并被静电吸引到基板上。 颗粒粘附到基底上，在那里它们形成蚀刻掩模。 蚀刻基板并除去颗粒。 用于场致发射显示器的发射极尖端可以形成在衬底中。

公开(公告)号：US6095882A

公开(公告)日：2000-08-01

申请号：US250129

申请日：1999-02-12

Applicant: David H. Wells ,  David A. Cathey

Inventor： David H. Wells ,  David A. Cathey

IPC: H01J9/02

CPC classification number: H01J9/025

Abstract: A method for creating emitters of a field emission device is provided. First, a hardmask layer is deposited on a substrate used to form emitters. On the hardmask layer, a photoresist layer is deposited. Islands of photoresist are exposed by an exposing energy through holes in a mask layer. The mask layer is removed and the substrate soft-baked in an oven having an atmosphere of basic gas. Following the soft-bake, the substrate is flood exposed, and then developed using conventional means, leaving behind hardened islands of exposed and baked photoresist. The hardmask layer is etched using the hardened islands as an etching barrier, and the substrate etched with a chemical etchant using the etched hardmask layer as an etching barrier. The etching continues until the substrate material below the etched hardmask layer is formed into an array of points of substrate. Once these emitter sites are formed, a field emission display having uniform emitters can be created.

Abstract translation: 提供了一种用于产生场致发射装置的发射器的方法。 首先，硬掩模层沉积在用于形成发射体的衬底上。 在硬掩模层上沉积光致抗蚀剂层。 光致抗蚀剂岛通过曝光能量暴露在掩模层中的孔中。 去除掩模层，并将基板在具有碱性气体气氛的烘箱中软烘烤。 在软烘烤之后，基材被暴露，然后用常规方法显影，留下暴露和烘烤的光致抗蚀剂的硬化岛。 使用硬化的岛作为蚀刻阻挡层来蚀刻硬掩模层，并且使用蚀刻的硬掩模层作为蚀刻阻挡层用化学蚀刻剂蚀刻衬底。 蚀刻继续，直到被蚀刻的硬掩模层下方的衬底材料形成为衬底点的阵列。 一旦形成了这些发射极点，就可以产生具有均匀发射极的场发射显示。

公开(公告)号：US6093072A

公开(公告)日：2000-07-25

申请号：US84673

申请日：1998-05-26

Applicant: Dan Dynka ,  David A. Cathey

Inventor： Dan Dynka ,  David A. Cathey

IPC: H01J9/385 ,  H01J9/39 ,  H01J29/94

CPC classification number: H01J9/39 ,  H01J29/94 ,  H01J9/385 ,  H01J2329/00

Abstract: A pump is used to reduce the pressure in a field emission display package. The package is then filled with a gas or gas mixture, such as nitrogen and hydrogen. The package is then pumped again, to reduce the pressure in the package to the desired pressure and to obtain the desired partial pressure of the gas. Optionally, the process is then repeated, with a gas or gas mixture again inserted into the package and then the pressure reduced with a pump. After pumping, the package may be heated to cause outgassing and to activate a getter. The pumping is performed with a mechanical pump, an ion pump, or a combination of the two types of pumps.

Abstract translation: 泵用于降低场致发射显示包中的压力。 然后用气体或气体混合物（例如氮气和氢气）填充该包装。 然后再次泵送包装，以将包装中的压力降低至期望的压力并获得所需气体的分压。 任选地，然后重复该过程，同时将气体或气体混合物再次插入到包装中，然后用泵减压。 泵送后，包装可能被加热以引起排气并激活吸气剂。 泵送通过机械泵，离子泵或两种类型的泵的组合进行。

公开(公告)号：US6066507A

公开(公告)日：2000-05-23

申请号：US949931

申请日：1997-10-14

Applicant: J. Brett Rolfson ,  Kevin Tjaden ,  Trung T. Doan ,  Tyler A. Lowery ,  David A. Cathey

Inventor： J. Brett Rolfson ,  Kevin Tjaden ,  Trung T. Doan ,  Tyler A. Lowery ,  David A. Cathey

IPC: H01J9/02 ,  H01L21/3105 ,  H01L21/00

CPC classification number: H01L21/31053 ,  H01J9/025 ,  H01J2201/30426 ,  H01J2201/319 ,  H01J2209/0226

Abstract: A field emitter display having reduced surface leakage comprising at least one emitter tip surrounded by a dielectric region. The dielectric region is formed of a composite of insulative layers, at least one of which has fins extending toward the emitter tip. A conductive gate, for extracting electrons from the emitter tip, is disposed superjacent the dielectric region. The fins increase the length of the path that leaked electrical charge travels before impacting the gate.

Abstract translation: 具有减小的表面泄漏的场发射器显示器包括由电介质区域包围的至少一个发射极尖端。 电介质区域由绝缘层的复合体形成，其中至少一个具有朝向发射极尖端延伸的翅片。 用于从发射极尖端提取电子的导电栅极设置在电介质区域的上方。 在撞击门之前，翅片增加了泄漏电荷行进路径的长度。

公开(公告)号：US6049089A

公开(公告)日：2000-04-11

申请号：US161338

申请日：1998-09-25

Applicant: David A. Cathey

Inventor： David A. Cathey

IPC: H01J1/304 ,  H01J9/02 ,  H01J9/04

CPC classification number: H01J1/3044 ,  H01J1/3042 ,  H01J9/025 ,  H01J2201/30403 ,  Y10S148/116 ,  Y10S148/172 ,  Y10S438/978

Abstract: Electron emitters and a method of fabricating emitters which have a concentration gradient of impurities, such that the highest concentration of impurities is at the apex of the emitters, and decreases toward the base of the emitters. The method comprises the steps of doping, patterning, etching, and oxidizing the substrate, thereby forming the emitters having impurity gradients.