公开(公告)号：US20070116475A1

公开(公告)日：2007-05-24

申请号：US11625535

申请日：2007-01-22

Applicant: Gregory McBrien ,  Karl Kissa ,  Glen Drake ,  Kate Versprille

Inventor： Gregory McBrien ,  Karl Kissa ,  Glen Drake ,  Kate Versprille

IPC: H04B10/00

CPC classification number: G02F1/0356 ,  G02F1/2255 ,  G02F2201/07 ,  G02F2203/21

Abstract: The invention relates to an electro-optic modulator structure containing an additional set of bias electrodes buried within the device for applying bias to set the operating point. Thus the RF electrodes used to modulate incoming optical signals can be operated with zero DC bias, reducing electrode corrosion by galvanic and other effects that can be present in non-hermetic packages. The buried bias electrodes are also advantageous in controlling charge build-up with consequent improvement in drift characteristics. The bias electrode material is useful for routing bias signals inside the device, in particular to external terminals, as well as forming encapsulating layers to permit operation in non-hermetic environments, thereby lowering manufacturing costs. Embodiments using both X-cut and Z-cut lithium niobate (LiNbO3) are presented. For the latter, the bias electrodes can be split along their axis to avoid optical losses

Abstract translation: 本发明涉及一种电光调制器结构，其包含埋在该装置内的附加一组偏置电极，用于施加偏压以设定工作点。 因此，用于调制输入光信号的RF电极可以以零直流偏压工作，减少电极腐蚀以及可能存在于非密封封装中的电流和其他影响。 掩埋偏置电极在控制电荷积聚方面也是有利的，随之而来的是漂移特性的改善。 偏置电极材料可用于布置装置内的偏置信号，特别是外部端子，以及形成封装层，以允许在非密封环境中操作，从而降低制造成本。 提出了使用X切割和Z切割的铌酸锂（LiNbO 3 3）的实施例。 对于后者，偏置电极可以沿其轴线分开以避免光损耗

公开(公告)号：US20070007676A1

公开(公告)日：2007-01-11

申请号：US11521124

申请日：2006-09-14

Applicant: Masahiro Sato

Inventor： Masahiro Sato

IPC: B29D11/00

CPC classification number: G02F1/035 ,  G02F1/225 ,  G02F2001/212 ,  G02F2201/07 ,  G02F2203/21

Abstract: An electro-optic modulator includes a substrate made of a material which has an electro-optic effect and a pyroelectric effect. In the substrate, an optical waveguide is formed to have at least a pair of optical paths. On the substrate and on the optical waveguide, a transparent buffer layer is formed to cover the optical waveguide. On the buffer layer, first and second electrodes are formed so that the first and the second electrodes are arranged to cause refractive index changes in the pair of optical paths in response to electrical fields surrounding the electro-optic modulator. The buffer layer is a mutual diffusion layer. The mutual diffusion layer is made from laminated films having at least one transparent insulator film and at least one transparent conductor film but has no clear boundary between the transparent insulator film and the transparent conductor film.

Abstract translation: 电光调制器包括由具有电光效应和热电效应的材料制成的基板。 在基板中，光波导形成为具有至少一对光路。 在基板和光波导上，形成透明缓冲层以覆盖光波导。 在缓冲层上，第一和第二电极被形成为使得第一和第二电极被布置成响应于围绕电光调制器的电场而导致该对光路中的折射率变化。 缓冲层是相互扩散层。 互扩散层由具有至少一个透明绝缘膜和至少一个透明导体膜的层压膜制成，但在透明绝缘膜和透明导体膜之间没有明确的边界。

公开(公告)号：US20050115491A1

公开(公告)日：2005-06-02

申请号：US10919695

申请日：2004-08-16

Applicant: Lee Burrows

Inventor： Lee Burrows

IPC: C30B15/00 ,  C30B33/00 ,  G02B6/12 ,  G02B6/134 ,  G02F1/035 ,  C30B1/00 ,  C30B3/00 ,  C30B5/00 ,  C30B28/02 ,  G02B6/10

CPC classification number: G02F1/035 ,  C30B15/00 ,  C30B29/30 ,  C30B33/00 ,  G02B6/1345 ,  G02B2006/12169 ,  G02F2201/066 ,  G02F2201/07 ,  G02F2202/20 ,  Y10S117/91

Abstract: A method for fabricating ion exchange waveguides, such as lithium niobate or lithium tantalate waveguides in optical modulators and other optical waveguide devices, utilizes pressurized annealing to further diffuse and limit exchange of the ions and includes ion exchanging the crystalline substrate with a source of ions and annealing the substrate by pressurizing a gas atmosphere containing the lithium niobate or lithium tantalate substrate above normal atmospheric pressure, heating the substrate to a temperature ranging from about 150 degrees Celsius to about 1000 degrees Celsius, maintaining pressure and temperature to effect greater ion diffusion and limit exchange, and cooling the structure to an ambient temperature at an appropriate ramp down rate. In another aspect of the invention a powder of the same chemical composition as the crystalline substrate is introduced into the anneal process chamber to limit the crystalline substrate from outgassing alkaline earth metal oxide during the anneal period. In yet another aspect of the invention an anneal container is provided that allows for crystalline substrates to be annealed in the presence of powder without contaminating the substrate with the powder during the anneal process. Waveguides manufactured in accordance with the method exhibit superior drift performance.

Abstract translation: 用于制造离子交换波导的方法，如光调制器和其它光波导器件中的铌酸锂或钽酸锂波导，利用加压退火来进一步扩散和限制离子的交换，并且包括使晶体衬底与离子源离子交换， 通过将含有铌酸锂或钽酸锂衬底的气体气氛加压到正常大气压下来对衬底进行退火，将衬底加热至约150摄氏度至约1000摄氏度的温度，保持压力和温度以实现更大的离子扩散和限制 交换，并以适当的降速率将结构冷却至环境温度。 在本发明的另一方面，将与结晶基底相同的化学组成的粉末引入退火处理室中，以在退火期间限制结晶底物从脱气碱土金属氧化物。 在本发明的另一方面，提供一种退火容器，其允许结晶基材在粉末存在下进行退火，而不会在退火过程中用粉末污染基材。 根据该方法制造的波导显示出优异的漂移性能。

公开(公告)号：US06806113B2

公开(公告)日：2004-10-19

申请号：US09959156

申请日：2002-05-06

Applicant: Yasuyuki Miyama ,  Hirotoshi Nagata ,  Toshihiro Sakamoto ,  Tetsuya Fujino

Inventor： Yasuyuki Miyama ,  Hirotoshi Nagata ,  Toshihiro Sakamoto ,  Tetsuya Fujino

IPC: G02B627

CPC classification number: G02F1/035 ,  G02F1/225 ,  G02F2001/212 ,  G02F2201/07 ,  G02F2203/07

Abstract: An optical waveguide is formed on a substrate made of a material with an electro-optic effect. Then, an intermediate layer is fabricated, on the main surface of the substrate, by a dielectric material selected from the group consisting of AOx, B2Oy, COz (A: divalent element, B: trivalent element, C: quadrivalent element, 0

Abstract translation: 在由具有电光效应的材料制成的基板上形成光波导。 然后，通过选自AOx，B2Oy，COz（A：二价元素，B：三价元素，C：四价元素，0

公开(公告)号：US20040113296A1

公开(公告)日：2004-06-17

申请号：US10633955

申请日：2003-08-04

Inventor： Louis J. Bintz ,  Raluca Dinu ,  Danliang Jin

IPC: B29D011/00

CPC classification number: G02F1/3558 ,  G02B6/132 ,  G02B6/138 ,  G02B2006/121 ,  G02F1/065 ,  G02F1/365 ,  G02F2201/07 ,  G02F2202/07 ,  G02F2202/38

Abstract: A method of fabricating a polymer waveguide, comprising (a) forming a first polymer film in proximity to a substrate, the first polymer film comprising a nonlinear optical chromophore; (b) poling and crosslinking the first polymer film to provide a crosslinked first electro-optic polymer film; (c) forming a second polymer film comprising a nonlinear optical chromophore in proximity to the first electro-optic polymer film; and (d) poling the second polymer film to provide a second electro-optic polymer film.

Abstract translation: 一种制造聚合物波导的方法，包括：（a）在基底附近形成第一聚合物膜，所述第一聚合物膜包含非线性光学发色团; （b）使第一聚合物膜极化和交联以提供交联的第一电光聚合物膜; （c）在第一电光聚合物膜附近形成包含非线性光学发色团的第二聚合物膜; 和（d）极化第二聚合物膜以提供第二电光聚合物膜。

公开(公告)号：US20030133638A1

公开(公告)日：2003-07-17

申请号：US10050656

申请日：2002-01-16

Inventor： Sungho Jin ,  Yiu-Man Wong ,  Wei Zhu ,  Christopher A. Bower

IPC: G02F001/035

CPC classification number: G02F1/0356 ,  G02F2001/212 ,  G02F2201/07 ,  G02F2202/20 ,  G02F2203/21

Abstract: An electrooptic device and method for making the same, including one or more of substrate, a buffer layer, a charge dissipation layer, and electrodes are disclosed. Active ions, such as Fnull ions, are implanted the buffer layer. The active ions react with positive ions, such as Linull from the substrate to form stable compounds such as LiF. The reduced number of mobile Linull ions reduces the DC drift of the associated electrooptic device. The profile of the implanted ions may be adjusted to control and/or optimize the properties of the electrooptic device. Fluorine is particularly advantageous because it also lowers the dielectric constant, thereby facilitating higher frequency operation.

Abstract translation: 公开了一种电光装置及其制造方法，包括一个或多个衬底，缓冲层，电荷耗散层和电极。 活性离子如F离子注入缓冲层。 活性离子与正离子反应，例如来自底物的Li +，形成稳定的化合物如LiF。 减少移动Li +离子的数量减少了相关电光器件的直流漂移。 可以调整注入离子的轮廓以控制和/或优化电光装置的性质。 氟是特别有利的，因为它也降低介电常数，从而有助于更高频率的操作。

公开(公告)号：US20030128930A1

公开(公告)日：2003-07-10

申请号：US10035193

申请日：2002-01-04

Applicant: Codeon Corporation

Inventor： Williams K. Burns ,  Larry A. Hess ,  Vishal Agarwal

IPC: G02B006/26 ,  G02B006/10 ,  G02F001/035

CPC classification number: G02F1/035 ,  G02F1/225 ,  G02F2201/07 ,  G02F2203/21

Abstract: An optical waveguide device including an electro-optical crystal substrate having a top surface and a bottom surface; an optical waveguide path formed within a surface of the electro-optical crystal substrate; at least one electrode positioned above the optical waveguide path for applying an electric field to the optical waveguide path; and a silicon titanium oxynitride layer and a connecting layer for interconnecting the silicon titanium oxynitride layer to another surface of the electro-optical crystal substrate that is opposite to the surface in which the optical waveguide path is formed.

公开(公告)号：US20030123130A1

公开(公告)日：2003-07-03

申请号：US10302222

申请日：2002-11-22

Inventor： Tsuyoshi Kouchi ,  Takashi Mitsuma

IPC: G02F001/03 ,  G02F001/07 ,  G02F001/00

CPC classification number: G02F1/025 ,  G02F2201/066 ,  G02F2201/07

Abstract: There is provided an optical modulator in which positive holes produced in the valence band are not piled up, the electrostatic capacity can be decreased, the frequency response characteristic is improved, and which is capable of operating at a high speed. In an optical modulator comprising: an n-type clad layer; a stripe-like modulation layer elongated in the direction of light propagation and formed on the top surface of the n-type clad layer; a buffer layer formed on the top surface of the modulation layer; and a p-type clad layer formed on the top surface of the buffer layer, the buffer layer has its composition the band gap energy of which is higher by an energy due to a p-type acceptor level than that of the modulation layer, thereby to remove a difference in band gap energy between the modulation layer and the buffer layer.

Abstract translation: 提供了一种光电调制器，其中在价带中产生的空穴不堆积，可以降低静电容量，提高频率响应特性，并且能够高速运行。 一种光学调制器，包括：n型覆盖层; 在光传播方向上延伸并形成在n型覆盖层的顶表面上的条状调制层; 形成在调制层的上表面上的缓冲层; 以及形成在缓冲层顶表面上的p型覆盖层，缓冲层的组成是由于与受调制层的p型受主电平相比由于p型受主电平而产生的能量较高的带隙能量，因此 以去除调制层和缓冲层之间的带隙能量的差异。

公开(公告)号：US06473547B2

公开(公告)日：2002-10-29

申请号：US09775024

申请日：2001-01-31

Applicant: Roberto Longone

Inventor： Roberto Longone

IPC: G02B626

CPC classification number: G02F1/0356 ,  G02F1/035 ,  G02F1/225 ,  G02F1/3136 ,  G02F2001/212 ,  G02F2201/07 ,  G02F2201/121

Abstract: An optical component, such as, for example, a Mach-Zehnder modulator, in which the ground electrodes are formed directly on a surface of a substrate, that is, without the intermediary of or presence of conventional buffer dielectric layers. Forming the optical component without a dielectric layer between the ground electrodes and the substrate allows for a reduction in the drive voltage in the operation of the modulator.

Abstract translation: 一种光学部件，例如马赫 - 曾德尔（Mach-Zehnder）调制器，其中接地电极直接形成在基板的表面上，即不存在传统的缓冲介电层。 在接地电极和基板之间形成没有电介质层的光学部件允许在调制器的操作中降低驱动电压。

公开(公告)号：US06372284B1

公开(公告)日：2002-04-16

申请号：US09095694

申请日：1998-06-11

Applicant: Larry A. Hess ,  William C. Imes

Inventor： Larry A. Hess ,  William C. Imes

IPC: B05D512

CPC classification number: G02F1/035 ,  G02B2006/1204 ,  G02B2006/12169 ,  G02F2201/07

Abstract: An integrated optical device is made starting with a substrate of lithium niobate. A fluoropolymer solution is applied to coat at least part of the substrate. The substrate having fluoropolymer coat is prepared such that a metal film will adhere to the fluoropolymer coating. Next, an electrode is created by applying a metal film to the fluoropolymer coat. The preparing step is preferably accomplished by heating the substrate with the fluoropolymer coating on it such that the fluoropolymer coating is annealed, the annealing of the fluoropolymer coating improving the adhesion of the metal film to the fluoropolymer coating. Alternately, the preparing of the substrate having fluoropolymer coating includes, simultaneously with the application of the metal film, cooling the substrate with the fluoropolymer coating by contacting a thermal sink with the substrate with the fluoropolymer coating.

Abstract translation: 由铌酸锂基材开始制成集成光学元件。 施加含氟聚合物溶液以涂覆至少部分基材。 制备具有含氟聚合物涂层的基材，使得金属膜将粘附到含氟聚合物涂层上。 接下来，通过将金属膜施加到含氟聚合物涂层来产生电极。 制备步骤优选通过在其上加热含氟聚合物涂层的基底来实现，使得氟聚合物涂层退火，氟聚合物涂层的退火改善了金属膜与含氟聚合物涂层的粘合性。 或者，制备具有含氟聚合物涂层的基材包括与金属膜一起施加的同时，通过使氟聚合物涂层与基底的热沉接触接触来用含氟聚合物涂层冷却基底。