Semiconductor substrate planarization apparatus and planarization method
    152.
    发明授权
    Semiconductor substrate planarization apparatus and planarization method 失效
    半导体衬底平面化装置和平面化方法

    公开(公告)号:US08366514B2

    公开(公告)日:2013-02-05

    申请号:US12748109

    申请日:2010-03-26

    IPC分类号: B24B1/00 B24B5/02

    CPC分类号: B24B37/00

    摘要: A planarization apparatus and method that thins and planarizes a substrate by grinding and polishing the rear surface of the substrate with high throughput, and that fabricates a semiconductor substrate with reduced adhered contaminants. A planarization apparatus that houses various mechanism elements in semiconductor substrate loading/unloading stage chamber, a rear-surface polishing stage chamber, and a rear-surface grinding stage chamber. The throughput time of the rear-surface polishing stage that simultaneously polishes two substrates is typically about double the throughput time of the rear-surface grinding stage that grinds one substrate.

    摘要翻译: 一种平面化装置和方法,其通过以高生产量研磨和抛光衬底的后表面来使衬底平坦化,并且制造具有减少的附着污染物的半导体衬底。 一种在半导体衬底装载/放电室中容纳各种机构元件的平面化装置,后表面抛光台室和后表面研磨台室。 同时抛光两个基材的后表面抛光阶段的生产时间通常是研磨一个基板的后表面研磨阶段的生产时间的两倍。

    Method of manufacturing a semiconductor device
    153.
    发明授权
    Method of manufacturing a semiconductor device 失效
    制造半导体器件的方法

    公开(公告)号:US08236707B2

    公开(公告)日:2012-08-07

    申请号:US12882746

    申请日:2010-09-15

    申请人: Kazuo Kobayashi

    发明人: Kazuo Kobayashi

    IPC分类号: H01L21/31

    摘要: A method of manufacturing a semiconductor device according to the present invention includes the steps of: (a) introducing hydrogen and oxygen on a SiC substrate; and (b) subjecting the hydrogen and the oxygen to a combustion reaction on the SiC substrate to form a gate oxide film being a silicon oxide film on a surface of the SiC substrate by the combustion reaction.

    摘要翻译: 根据本发明的制造半导体器件的方法包括以下步骤:(a)在SiC衬底上引入氢和氧; 和(b)使所述氢和氧在所述SiC衬底上进行燃烧反应,以通过所述燃烧反应在所述SiC衬底的表面上形成氧化硅膜的栅极氧化膜。

    Silicone rubber powder and method of manufacturing thereof
    154.
    发明授权
    Silicone rubber powder and method of manufacturing thereof 有权
    硅橡胶粉及其制造方法

    公开(公告)号:US08217122B2

    公开(公告)日:2012-07-10

    申请号:US12675508

    申请日:2008-08-19

    IPC分类号: C08J3/24 C08G77/12

    摘要: A silicone rubber powder obtained by curing a condensation-curable silicone rubber composition in a dispersed state in water, having an epoxy equivalent measured by a titration method equal to or lower than 3,000 and an average particle size in the range of 0.1 to 100 μm; and a method of manufacturing a silicone rubber powder comprising the steps of dispersing in water a silicone rubber composition comprising at least components (A) through (C) listed below; adding component (D); and curing the mixture: (A) a diorganopolysiloxane capped at both molecular terminals with silanol groups and having in one molecule 30 or less silicon atoms; (B) an organopolysiloxane having in one molecule at least two silicon-bonded hydrogen atoms; (C) an epoxy-containing alkoxysilane; and (D) a condensation-reaction catalyst. The silicone rubber powder has low epoxy equivalent and possesses excellent dispersibility in organic resins, and the method is efficient in manufacturing of the aforementioned powder.

    摘要翻译: 将分散状态的可缩合固化硅橡胶组合物在水中固化,通过滴定法测定的环氧当量为3000以下,平均粒径为0.1〜100μm的方法得到的硅橡胶粉末; 和一种制造硅橡胶粉末的方法,包括以下步骤:在水中分散包含至少包含以下列出的组分(A)至(C)的硅橡胶组合物; 添加组分(D); 并固化该混合物:(A)在两个分子末端用硅烷醇基封端并且在一个分子中具有30个或更少硅原子的二有机聚硅氧烷; (B)在一个分子中具有至少两个与硅键合的氢原子的有机聚硅氧烷; (C)含环氧基的烷氧基硅烷; 和(D)缩合反应催化剂。 硅橡胶粉末具有低环氧当量,并且在有机树脂中具有优异的分散性,并且该方法在制备上述粉末中是有效的。

    Substrate flat grinding device
    155.
    发明授权
    Substrate flat grinding device 有权
    基材平面研磨装置

    公开(公告)号:US08047897B2

    公开(公告)日:2011-11-01

    申请号:US12356793

    申请日:2009-01-21

    IPC分类号: B24B49/00

    CPC分类号: B24B7/228 B24B41/047

    摘要: To provide a high-rigidity flat grinding device, a substrate flat grinding device has three fastening plate lifting-and-lowering mechanisms that have kinematic couplings and a cylinder rod that move the fastening plate upward or downward. Being a high-rigidity grinding device in which the load of the fastening plate 6 also is a load on the grindstone 14 that does the grinding, there is little deflection in the thickness distribution of the substrates that are obtained, even if they are semiconductor substrates having a large substrate diameter of 450 mm.

    摘要翻译: 为了提供高刚性的平面研磨装置,基板平面磨削装置具有三个具有运动联接的紧固板提升和降低机构以及将紧固板向上或向下移动的气缸杆。 作为紧固板6的负载也是进行研磨的磨石14的载荷的高刚性研磨装置,即使是半导体基板,也可以获得所获得的基板的厚度分布的偏转小 具有450mm的大的基材直径。

    INTERPOSER, SEMICONDUCTOR CHIP MOUNTED SUB-BOARD, AND SEMICONDUCTOR PACKAGE
    156.
    发明申请
    INTERPOSER, SEMICONDUCTOR CHIP MOUNTED SUB-BOARD, AND SEMICONDUCTOR PACKAGE 有权
    插件,半导体芯片安装子板和半导体封装

    公开(公告)号:US20110074045A2

    公开(公告)日:2011-03-31

    申请号:US12164503

    申请日:2008-06-30

    IPC分类号: H01L23/49

    摘要: A semiconductor device can be manufactured with a high non-defect ratio, making it possible to easily guarantee the KGD (Known-Good-Die) of semiconductor chips, when configuring one packaged semiconductor device on which a plurality of semiconductor chips is mounted. Utilizing each semiconductor chip is made possible without limits on terminal position, pitch, signal arrangement, and so on. Protrusions provided to a semiconductor chip mounted sealing sub-board are attached to a package substrate. A plurality of semiconductor bare chips is disposed in a space formed between the semiconductor chip mounted sealing sub-board and the package substrate, making wiring possible.

    摘要翻译: 可以制造具有高无缺陷率的半导体器件,使得可以在配置其上安装有多个半导体芯片的一个封装的半导体器件时容易地保证半导体芯片的KGD(已知好裸芯片)。 使得每个半导体芯片可以在终端位置,间距,信号布置等方面没有限制。 提供给半导体芯片安装的密封子板的突起附接到封装基板。 多个半导体裸芯片设置在形成在半导体芯片安装密封子板和封装基板之间的空间中,使得布线成为可能。

    Silicone Rubber Powder And Method Of Manufacturing Thereof
    158.
    发明申请
    Silicone Rubber Powder And Method Of Manufacturing Thereof 有权
    硅橡胶粉及其制造方法

    公开(公告)号:US20100216952A1

    公开(公告)日:2010-08-26

    申请号:US12675508

    申请日:2008-08-19

    IPC分类号: C08J3/24 C08G77/12

    摘要: A silicone rubber powder obtained by curing a condensation-curable silicone rubber composition in a dispersed state in water, having an epoxy equivalent measured by a titration method equal to or lower than 3,000 and an average particle size in the range of 0.1 to 100 μm; and a method of manufacturing a silicone rubber powder comprising the steps of dispersing in water a silicone rubber composition comprising at least components (A) through (C) listed below; adding component (D); and curing the mixture: (A) a diorganopolysiloxane capped at both molecular terminals with silanol groups and having in one molecule 30 or less silicon atoms; (B) an organopolysiloxane having in one molecule at least two silicon-bonded hydrogen atoms; (C) an epoxy-containing alkoxysilane; and (D) a condensation-reaction catalyst. The silicone rubber powder has low epoxy equivalent and possesses excellent dispersibility in organic resins, and the method is efficient in manufacturing of the aforementioned powder.

    摘要翻译: 将分散状态的可缩合固化硅橡胶组合物在水中固化,通过滴定法测定的环氧当量为3000以下,平均粒径为0.1〜100μm的方法得到的硅橡胶粉末; 和一种制造硅橡胶粉末的方法,包括以下步骤:在水中分散包含至少包含以下列出的组分(A)至(C)的硅橡胶组合物; 添加组分(D); 并固化该混合物:(A)在两个分子末端用硅烷醇基封端并且在一个分子中具有30个或更少硅原子的二有机聚硅氧烷; (B)在一个分子中具有至少两个与硅键合的氢原子的有机聚硅氧烷; (C)含环氧基的烷氧基硅烷; 和(D)缩合反应催化剂。 硅橡胶粉末具有低环氧当量,并且在有机树脂中具有优异的分散性,并且该方法在制备上述粉末中是有效的。

    Glycoprotein and process for producing the same
    160.
    发明授权
    Glycoprotein and process for producing the same 失效
    糖蛋白及其制备方法

    公开(公告)号:US07579166B2

    公开(公告)日:2009-08-25

    申请号:US10480790

    申请日:2002-06-14

    摘要: A process for producing a lysosomal enzyme having a mannose-6-phosphate-containing acidic sugar chain, wherein the process comprising: culturing in a medium yeast cells obtained by introducing a lysosomal enzyme gene into a sugar chain biosynthetic enzyme gene mutant strain of yeast, collecting a lysosomal enzyme having a phosphate-containing sugar chain from the culture, and then treating the enzyme with α-mannosidase; and pharmaceutical compositions for treatment of human lysosomal enzyme deficiencies produced by the process. The genetic engineering technique using the yeast according to the present invention allows large-amount and high-purity production of a glycoprotein having a phosphate-containing acidic sugar chain which can serve as a labeling marker for transporting into lysosomes in cells of mammals such as human. The glycoprotein having a phosphate-containing acidic sugar chain according to the invention may be utilized as a drug effective in treatment of human lysosomal enzyme deficiencies, etc.

    摘要翻译: 一种生产含有甘露糖-6-磷酸的酸性糖链的溶酶体酶的方法,其中所述方法包括:在通过将溶酶体酶基因导入酵母的糖链生物合成酶基因突变菌株获得的培养基中培养酵母, 从培养物中收集含有含磷酸盐糖链的溶酶体酶,然后用α-甘露糖苷酶处理酶; 以及用于治疗由该方法产生的人溶酶体酶缺陷的药物组合物。 使用根据本发明的酵母的基因工程技术允许大量和高纯度产生具有含磷酸盐的酸性糖链的糖蛋白,其可以用作在诸如人类的哺乳动物的细胞中输送到溶酶体的标记标记 。 具有根据本发明的含磷酸盐酸性糖链的糖蛋白可以用作治疗人溶酶体酶缺陷等的药物。