公开(公告)号：US20060281212A1

公开(公告)日：2006-12-14

申请号：US10565621

申请日：2004-07-15

Applicant: Hubert Moriceau ,  Bernard Aspar ,  Jacques Margail

Inventor： Hubert Moriceau ,  Bernard Aspar ,  Jacques Margail

IPC: H01L21/00

CPC classification number: B81B3/001 ,  B81C2201/112 ,  H01L21/76251 ,  H01L21/76256

Abstract: The invention relates to a method of producing a stacked structure. The inventive method comprises the following steps consisting in: a) using a first plate (1) which is, for example, made from silicon, and a second plate (5) which is also, for example, made from silicon, such that at least one of said first (1) and second (5) plates has, at least in part, a surface (2; 7) that cannot bond to the other plate; b) providing a surface layer (3; 8), which is, for example, made from silicon oxide, on at least one part of the surface (2) of the first plate and/or the surface (7) of the second plate (5); and c) bonding the two plates (1; 5) to one another. The aforementioned bonding incompatibility can, for example, result from the physicochemical nature of the surface or of a coating applied thereto, or from a roughness value (r′2, r′7) which is greater than a predetermined threshold. The invention also relates to a stacked structure produced using the inventive method.

Abstract translation: 本发明涉及一种堆叠结构的制造方法。 本发明的方法包括以下步骤：a）使用例如由硅制成的第一板（1）和例如由硅制成的第二板（5），使得在 至少部分地，所述第一（1）和第二（5）板中的至少一个具有不能结合到另一个板的表面（2; 7） b）在第一板的表面（2）和/或第二板的表面（7）的至少一部分上提供例如由氧化硅制成的表面层（3; 8） （5）; 和c）将两个板（1; 5）彼此粘合。 上述粘合不相容性例如可以由表面或施加于其上的涂层的物理化学性质或由粗糙度值（r'2，r'7 >）大于预定阈值。 本发明还涉及使用本发明方法制造的堆叠结构。

公开(公告)号：US06958123B2

公开(公告)日：2005-10-25

申请号：US10167272

申请日：2002-06-10

Applicant: Jason S. Reid ,  Nungavaram S. Viswanathan

Inventor： Jason S. Reid ,  Nungavaram S. Viswanathan

IPC: B81B3/00 ,  C23F1/00 ,  H01L21/00

CPC classification number: B81C1/00476 ,  B81B2201/045 ,  B81C2201/0108 ,  B81C2201/112 ,  B81C2201/117 ,  B82Y30/00

Abstract: A method comprises depositing an organic material on a substrate; depositing additional material different from the organic material after depositing the organic material; and removing the organic material with a compressed fluid. Also disclosed is a method comprising: providing an organic layer on a substrate; after providing the organic layer, providing one or more layers of a material different than the organic material of the organic layer; removing the organic layer with a compressed fluid; and providing an anti-stiction agent with a compressed fluid to material remaining after removal of the organic layer.

Abstract translation: 一种方法包括在衬底上沉积有机材料; 在沉积有机材料之后沉积与有机材料不同的附加材料; 并用压缩流体除去有机材料。 还公开了一种方法，包括：在衬底上提供有机层; 在提供有机层之后，提供与有机层的有机材料不同的一层或多层材料; 用压缩流体去除有机层; 并且在去除有机层之后向剩余的材料提供具有压缩流体的抗静电剂。

公开(公告)号：US06938485B2

公开(公告)日：2005-09-06

申请号：US10774688

申请日：2004-02-10

Applicant: Heikki Kuisma ,  Juha Lahdenperä ,  Risto Mutikainen

Inventor： Heikki Kuisma ,  Juha Lahdenperä ,  Risto Mutikainen

IPC: B81B3/00 ,  B81C1/00 ,  G01P15/08 ,  G01P15/125 ,  H01G7/00

CPC classification number: G01P15/125 ,  B81B3/0013 ,  B81B2201/0235 ,  B81C1/0096 ,  B81C2201/112 ,  G01P15/08 ,  G01P15/0802

Abstract: The invention relates to measuring devices used for the measuring of acceleration, and specifically to capacitive acceleration sensors. The capacitive acceleration sensor according to the present invention comprises a pair of electrodes composed of a movable electrode (4) and a stationary electrode (5), and, related to the pair of electrodes, an isolator protrusion having a special coating. The invention provides an improved, more durable sensor structure, which withstands wear caused by overload situations better than earlier structures.

Abstract translation: 本发明涉及用于测量加速度的测量装置，具体涉及电容式加速度传感器。 根据本发明的电容式加速度传感器包括由可动电极（4）和固定电极（5）组成的一对电极，并且与该对电极相关联，具有特殊涂层的隔离突起。 本发明提供了一种改进的，更耐用的传感器结构，其能够承受比过去结构更好的过载情况下的磨损。

公开(公告)号：US20050164127A1

公开(公告)日：2005-07-28

申请号：US11041834

申请日：2005-01-24

Applicant: Jason Reid ,  Nungavaram Viswanathan

Inventor： Jason Reid ,  Nungavaram Viswanathan

IPC: B81B3/00 ,  G03C5/00

CPC classification number: B81C1/00476 ,  B81B2201/045 ,  B81C2201/0108 ,  B81C2201/112 ,  B81C2201/117 ,  B82Y30/00

Abstract: A method comprises depositing an organic material on a substrate; depositing additional material different from the organic material after depositing the organic material; and removing the organic material with a compressed fluid. Also disclosed is a method comprising: providing an organic layer on a substrate; after providing the organic layer, providing one or more layers of a material different than the organic material of the organic layer; removing the organic layer with a compressed fluid; and providing an anti-stiction agent with a compressed fluid to material remaining after removal of the organic layer.

公开(公告)号：US20050147750A1

公开(公告)日：2005-07-07

申请号：US11031655

申请日：2005-01-05

Applicant: Simon Jacobs ,  Seth Miller

Inventor： Simon Jacobs ,  Seth Miller

IPC: C23C16/00

CPC classification number: B81B3/0005 ,  B81B2201/042 ,  B81C2201/112 ,  B82Y30/00

Abstract: Phosphonate surfactants are employed to passivate the surfaces of MEMS devices, such as digital micromirror devices. The surfactants are adsorbed from vapor or solution to form self-assembled monolayers at the device surface. The higher binding energy of the phosphonate end groups (as compared to carboxylate surfactants) improves the thermal stability of the resulting layer.

Abstract translation: 磷酸盐表面活性剂用于钝化MEMS器件的表面，例如数字微镜器件。 表面活性剂从蒸气或溶液中吸附，在器件表面形成自组装单层。 膦酸酯端基（与羧酸酯表面活性剂相比）的较高的结合能改善了所得层的热稳定性。

公开(公告)号：US20050145961A1

公开(公告)日：2005-07-07

申请号：US11029985

申请日：2005-01-05

Applicant: Simon Jacobs ,  Seth Miller

Inventor： Simon Jacobs ,  Seth Miller

IPC: B81B3/00 ,  B81C1/00 ,  H01L21/00 ,  H01L27/14 ,  H01L29/08 ,  H01L35/24 ,  H01L51/00

CPC classification number: G02B1/14 ,  B81B3/0005 ,  B81C1/0096 ,  B81C2201/112 ,  B82Y30/00 ,  G02B1/105 ,  G02B26/0833 ,  H01L23/26 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Organic surfactants are employed to passivate the surfaces of MEMS devices, such as digital micromirrors. The binding of these surfactants to the surface is improved by first associating with the surface transition metal atoms or ions from Groups IVB, VB, and IVB of the periodic table.

Abstract translation: 有机表面活性剂用于钝化MEMS器件的表面，例如数字微镜。 这些表面活性剂与表面的结合通过首先与周期表的IVB，VB和IVB族元素的表面过渡金属原子或离子缔合而得到改善。

公开(公告)号：US20050106774A1

公开(公告)日：2005-05-19

申请号：US10713671

申请日：2003-11-13

Applicant: Dmitri Simonian ,  John Porter

Inventor： Dmitri Simonian ,  John Porter

IPC: B81B3/00 ,  B81C1/00 ,  G02B26/08 ,  H01L21/306 ,  H01L21/312 ,  H01L21/00 ,  H01L21/302 ,  H01L21/461

CPC classification number: B81B3/0005 ,  B81B2201/042 ,  B81C1/0096 ,  B81C2201/112 ,  G02B26/0833 ,  H01L21/02046 ,  H01L21/3121

Abstract: A method for altering surfaces of a microstructure is disclosed. The modification comprises cleaning the surfaces using an ozone-containing cleaning agent. The modification may also comprise coating the surfaces of the microstructure using a vapor phase coating agent that reacts chemically with the surface. The modification may also comprise coating the surfaces of the microstructure using a lubricant that interacts physically with the surface. The modification can be performed after removal of sacrificial materials of the microstructure during the fabrication process. In particular, the modification method is applicable during the packaging stage for the microstructure.

Abstract translation: 公开了一种改变微结构表面的方法。 修改包括使用含臭氧的清洁剂清洁表面。 修改还可以包括使用与表面化学反应的气相涂层剂涂覆微结构的表面。 修改还可以包括使用与表面物理相互作用的润滑剂涂覆微结构的表面。 可以在制造过程中去除显微组织的牺牲材料之后进行修改。 特别地，该修改方法适用于微结构的包装阶段。

公开(公告)号：US06876046B2

公开(公告)日：2005-04-05

申请号：US10072656

申请日：2002-02-07

Applicant: Eric M. Prophet

Inventor： Eric M. Prophet

IPC: B81B3/00 ,  H01L21/334 ,  H01L29/82 ,  H01L21/00

CPC classification number: B81B3/001 ,  B81C2201/112 ,  H01L29/66181

Abstract: The present invention alleviates stiction between a suspended beam or microstructure and an underlying substrate by providing a patterned passivation layer on the substrate underneath the beam. The passivation layer is patterned to provide a substrate surface that differs substantially from the bottom surface of the beam. The difference between these two surfaces reduces the potential contact area between the beam and the substrate when the beam is pulled down, thereby reducing adhesive forces between the beam and the substrate and reducing the likelihood of stiction. In one embodiment, the passivation layer is patterned to form a substrate surface comprising a plurality of protuberances. In another embodiment, the passivation layer is patterned to form a substrate surface having a mesh pattern.

Abstract translation: 本发明通过在光束下方的衬底上提供图案化的钝化层来减轻悬挂梁或微结构和下层衬底之间的粘结。 钝化层被图案化以提供基本上与梁的底表面不同的衬底表面。 这两个表面之间的差异减小了当光束被拉下时光束和基板之间的潜在接触面积，从而减小光束与基板之间的粘合力，并降低粘结的可能性。 在一个实施例中，钝化层被图案化以形成包括多个突起的衬底表面。 在另一个实施例中，对钝化层进行图案化以形成具有网格图案的衬底表面。

公开(公告)号：US06830950B2

公开(公告)日：2004-12-14

申请号：US10300970

申请日：2002-11-20

Applicant: Jeffrey D. Chinn ,  Rolf A. Guenther ,  Michael B. Rattner ,  James A. Cooper ,  Toi Yue Becky Leung

Inventor： Jeffrey D. Chinn ,  Rolf A. Guenther ,  Michael B. Rattner ,  James A. Cooper ,  Toi Yue Becky Leung

IPC: H01L2100

CPC classification number: B81C1/0096 ,  B81B3/0005 ,  B81C2201/0176 ,  B81C2201/112 ,  B82Y30/00

Abstract: Disclosed herein is a method of improving the adhesion of a hydrophobic self-assembled monolayer (SAM) coating to a surface of a MEMS structure, for the purpose of preventing stiction. The method comprises pretreating surfaces of the MEMS structure with a plasma generated from a source gas comprising oxygen and, optionally, hydrogen. The treatment oxidizes the surfaces, which are then reacted with hydrogen to form bonded OH groups on the surfaces. The hydrogen source may be present as part of the plasma source gas, so that the bonded OH groups are created during treatment of the surfaces with the plasma. Also disclosed herein is an integrated method for release and passivation of MEMS structures.

Abstract translation: 本文公开了一种改进疏水性自组装单层（SAM）涂层到MEMS结构表面的粘附性的方法，以防止粘结。 该方法包括用包含氧气和任选的氢气的源气体产生的等离子体来预处理MEMS结构的表面。 处理氧化表面，然后与氢气反应以在表面上形成键合的OH基团。 氢源可以作为等离子体源气体的一部分存在，使得在用等离子体处理表面期间产生结合的OH基团。 本文还公开了一种用于MEMS结构的释放和钝化的集成方法。

公开(公告)号：US20040226374A1

公开(公告)日：2004-11-18

申请号：US10774688

申请日：2004-02-10

Inventor： Heikki Kuisma ,  Juha Lahdenpera ,  Risto Mutikainen

IPC: G01P015/125

CPC classification number: G01P15/125 ,  B81B3/0013 ,  B81B2201/0235 ,  B81C1/0096 ,  B81C2201/112 ,  G01P15/08 ,  G01P15/0802

Abstract: The invention relates to measuring devices used for the measuring of acceleration, and specifically to capacitive acceleration sensors. The capacitive acceleration sensor according to the present invention comprises a pair of electrodes composed of a movable electrode (4) and a stationary electrode (5), and, related to the pair of electrodes, an isolator protrusion having a special coating. The invention provides an improved, more durable sensor structure, which withstands wear caused by overload situations better than earlier structures.

Abstract translation: 本发明涉及用于测量加速度的测量装置，具体涉及电容式加速度传感器。 根据本发明的电容式加速度传感器包括由可动电极（4）和固定电极（5）组成的一对电极，并且与该对电极相关联，具有特殊涂层的隔离突起。 本发明提供了一种改进的，更耐用的传感器结构，其能够承受比过去结构更好的过载情况下的磨损。