STATIC ELECTRICITY DISTRIBUTION MEASURING DEVICE

    公开(公告)号:US20190120887A1

    公开(公告)日:2019-04-25

    申请号:US16092540

    申请日:2017-02-27

    Inventor: Kazuya KIKUNAGA

    Abstract: With prior art static electricity distribution measuring devices, there has been the problem that it has not been possible to measure the amount of electrostatic charge over a wide range at high spatial resolution and quickly.In the present invention, there are provided: a detection unit 20 in which a plurality of sensors, provided upon a surface, move relatively along the surface of an electrostatically charged subject 100 to be measured, and detect potential changes generated by the distance to the surface of the measurement subject being changed; a reference distance measuring unit that measures the distance between the surface of the measurement subject and the surface of the detection unit; a distance adjustment unit that adjusts that distance so that it becomes a reference distance that is determined in advance; and a vibrating unit that causes the distance between the surface of the measurement subject and the surface of the detection unit to change upon a predetermined cycle.

    Free access floor structure, and manufacturing apparatus and carrier apparatus adapted for floor structure

    公开(公告)号:US10240350B2

    公开(公告)日:2019-03-26

    申请号:US15101603

    申请日:2014-12-02

    Abstract: A free access floor structure to install a manufacturing apparatus such as a semiconductor manufacturing apparatus, in a short time, and a manufacturing apparatus and a carrier apparatus adapted for the floor structure. An embodiment of the manufacturing apparatus includes an apparatus-side connector which is provided, facing downward, to a bottom plate of a manufacturing apparatus. A floor structure of an embodiment includes a floor plate to be worked into a floor surface. The floor structure includes a floor-side connector which is provided, facing upward, to the floor plate so as to be connected with the apparatus-side connector according to a lowering operation of the manufacturing apparatus. An installation step (mounting step, piping/wiring step) of the manufacturing apparatus may thereby be performed in one step. As a result, the labor and the time required to install the manufacturing apparatus may be saved.

    THERMOPHYSICAL PROPERTY MEASUREMENT METHOD AND THERMOPHYSICAL PROPERTY MEASUREMENT APPARATUS

    公开(公告)号:US20190086346A1

    公开(公告)日:2019-03-21

    申请号:US16086691

    申请日:2017-02-28

    Abstract: Thermophysical property measurement method and apparatus are provided that make it possible to simply and conveniently obtain a highly precise absolute thermoelectric power and thermal conductivity.Embodiments of the present invention provides a thermophysical property measurement method, including a first step of applying a DC voltage or a DC current at both ends of a metal to which a temperature gradient is applied to measure a first temperature at a center of the metal; a second step of applying DC voltages or DC currents of different polarities at both ends of the metal to measure a second temperature at the center of the metal; a third step of calculating a Thomson coefficient of the metal using the first and second temperatures measured in the first and second steps; and a fourth step of calculating at least one of absolute thermoelectric power and thermal conductivity of the metal using the Thomson coefficient calculated in the third step, the third step including: calculating an average value of a difference between the first temperature and the second temperature; calculating an average value of a sum of the first temperature and the second temperature; and dividing a product of a magnitude of a current that flows through the metal, electrical resistance of the metal, and the average value of the difference by the average value of the sum and the difference between the first temperature and the second temperature.

    Particle size measuring method and device

    公开(公告)号:US10234370B2

    公开(公告)日:2019-03-19

    申请号:US15561269

    申请日:2016-03-30

    Abstract: To provide a particle size measuring device that enables simple in-line measurement of the particle size even in a case of nano-sized particles during dispersion. Provided is a particle size measuring device which measures the particle size of particles that perform Brownian motion in a dispersion medium. The particle size measuring device includes a transparent column which accommodates a dispersion medium therein; a laser light irradiating unit which irradiates the dispersion medium in the column with laser light; an imaging unit which includes a camera that images the dispersion medium in the column; an image analyzing unit which acquires a displacement of corresponding particles from at least a plurality of images captured at a predetermined time interval Δt; and a calculating unit which calculates the particle size based on the fact that a root mean square value of the displacement is proportional to kBT/3πηd where kB represents a Boltzmann constant, T represents an absolute temperature, η represents a viscosity coefficient of the dispersion medium, and d represents the particle size.

    Viscoelasticity measurement method and viscoelasticity measurement device

    公开(公告)号:US10180382B2

    公开(公告)日:2019-01-15

    申请号:US14374783

    申请日:2013-01-25

    Abstract: A linear elastic modulus measurement method and a linear elastic modulus measurement device can reduce external disturbances such as oscillation and electrical noise, and accurately and stably measure the linear elastic modulus of a linear elastic body even in the case where damping due to viscous stress is large. The measurement device computes the oscillation velocity (dx/dt) of an oscillator from the displacement of the oscillator brought into contact with the linear elastic body, and multiplies dx/dt by a linear velocity feedback gain to generate a feedback control signal. The measurement device applies, to the oscillator, a force proportional to the oscillation velocity of the oscillator by the feedback control signal, to cause the oscillator to self-oscillate. The measurement device computes the linear elastic modulus of the linear elastic body from the frequency when the self-oscillation of the oscillator is detected and the mass of the oscillator.

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