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    Laser spectral engineering for lithographic process
    11.
    发明授权
    Laser spectral engineering for lithographic process 有权
    激光光谱工程用于光刻工艺

    公开(公告)号：US07298770B2

    公开(公告)日：2007-11-20

    申请号：US10912933

    申请日：2004-08-05

    申请人： Ronald L. Spangler ,  Jacob P. Lipcon ,  John A. Rule ,  Robert N. Jacques ,  Armen Kroyan ,  Ivan Lalovic ,  Igor V. Fomenkov ,  John M. Algots

    发明人： Ronald L. Spangler ,  Jacob P. Lipcon ,  John A. Rule ,  Robert N. Jacques ,  Armen Kroyan ,  Ivan Lalovic ,  Igor V. Fomenkov ,  John M. Algots

    IPC分类号： H01S3/22 ,  H01S3/223 ,  H01S3/10 ,  H01S3/13

    CPC分类号： G03F7/70575 ,  G03F7/70025 ,  G03F7/70041 ,  G03F7/70333 ,  G03F7/70933 ,  H01S3/036 ,  H01S3/038 ,  H01S3/0385 ,  H01S3/0404 ,  H01S3/041 ,  H01S3/08009 ,  H01S3/08036 ,  H01S3/0812 ,  H01S3/097 ,  H01S3/0971 ,  H01S3/0975 ,  H01S3/1024 ,  H01S3/104 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/13 ,  H01S3/1305 ,  H01S3/134 ,  H01S3/139 ,  H01S3/22 ,  H01S3/2207 ,  H01S3/223 ,  H01S3/225 ,  H01S3/2251 ,  H01S3/2256 ,  H01S3/2258

    摘要： An integrated circuit lithography technique called spectral engineering by Applicants, for bandwidth control of an electric discharge laser. In a preferred process, a computer model is used to model lithographic parameters to determine a desired laser spectrum needed to produce a desired lithographic result. A fast responding tuning mechanism is then used to adjust center wavelength of laser pulses in a burst of pulses to achieve an integrated spectrum for the burst of pulses approximating the desired laser spectrum. The laser beam bandwidth is controlled to produce an effective beam spectrum having at least two spectral peaks in order to produce improved pattern resolution in photo resist film. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection control system having a time response of less than about 2.0 millisecond. In a preferred embodiment, a wavelength tuning mirror is dithered at dither rates of more than 500 dithers per second in phase with the repetition rate of the laser. In one case, the piezoelectric drive was driven with a square wave signal and in a second case it was driven with a sine wave signal. In another embodiment, the maximum displacement was matched on a one-to-one basis with the laser pulses in order to produce a desired average spectrum with two peaks for a series of laser pulses. Other preferred embodiments utilize three separate wavelength tuning positions producing a spectrum with three separate peaks.

    摘要翻译： 一种称为光电工程的集成电路光刻技术，用于放电激光器的带宽控制。 在优选的方法中，使用计算机模型来模拟光刻参数以确定产生所需光刻结果所需的所需激光光谱。 然后使用快速响应的调谐机构来调整脉冲串中的激光脉冲的中心波长，以实现接近所需激光光谱的脉冲串的集成光谱。 控制激光束带宽以产生具有至少两个光谱峰值的有效光束光谱，以便在光致抗蚀剂膜中产生改进的图案分辨率。 提供了具有至少一个压电驱动器和具有小于约2.0毫秒的时间响应的快速带宽检测控制系统的线窄设备。 在优选实施例中，波长调谐镜以与激光器的重复频率相位的每秒超过500次抖动的抖动速率抖动。 在一种情况下，用方波信号驱动压电驱动，在第二种情况下，它是用正弦波信号驱动的。 在另一个实施例中，最大位移与激光脉冲在一对一的基础上匹配，以便为一系列激光脉冲产生具有两个峰值的所需平均光谱。 其它优选实施例利用三个独立的波长调谐位置，产生具有三个独立峰值的光谱。

    Method and apparatus for controlling the output of a gas discharge MOPA laser system
    12.
    发明授权
    Method and apparatus for controlling the output of a gas discharge MOPA laser system 有权
    用于控制气体放电MOPA激光系统的输出的方法和装置

    公开(公告)号：US07209507B2

    公开(公告)日：2007-04-24

    申请号：US10740659

    申请日：2003-12-18

    申请人： John A. Rule ,  Paolo Zambon

    发明人： John A. Rule ,  Paolo Zambon

    IPC分类号： H01S3/22

    CPC分类号： H01S3/225 ,  H01S3/134 ,  H01S3/2258 ,  H01S3/2308 ,  H01S3/2366

    摘要： A method and apparatus are disclosed for controlling the output of a two chamber gas discharge laser comprising an oscillator gas discharge laser and an amplifier gas discharge laser that may comprise establishing a multidimensional variable state space comprising a coordinate system having at least two coordinates, each coordinate comprising a selected variable representing an operating parameter of the oscillator or the amplifier; tracking a multidimensional operating point in the multidimensional variable state space according to the variation of the selected variables in either or both of the oscillator or the amplifier to determine the position of the multidimensional operating point in the multidimensional state space; determining from the position of the multidimensional operating point in the multidimensional operating space a region from a plurality of defined regions in the multidimensional operating space in which the multidimensional operating point is located and identifying the region.

    摘要翻译： 公开了一种用于控制包括振荡器气体放电激光器和放大器气体放电激光器的二腔气体放电激光器的输出的方法和装置，其可以包括建立包括具有至少两个坐标的坐标系的多维可变状态空间，每个坐标 包括表示振荡器或放大器的工作参数的选定变量; 根据所述振荡器或放大器中的任一个或两者中的所选变量的变化来跟踪所述多维可变状态空间中的多维工作点，以确定所述多维工作点在所述多维状态空间中的位置; 从所述多维操作空间中的所述多维操作区域中的所述多维操作区域中的所述多维操作区域中的所述多维操作区域的位置确定所述多维操作空间中的所述多维操作空间，并识别所述区域。