公开(公告)号：US20070138156A1

公开(公告)日：2007-06-21

申请号：US11635539

申请日：2006-12-08

申请人： Keiji Nomaru ,  Yasuomi Kaneuchi ,  Hiroshi Morikazu

发明人： Keiji Nomaru ,  Yasuomi Kaneuchi ,  Hiroshi Morikazu

IPC分类号： B23K26/06

CPC分类号： B23K26/0869 ,  B23K26/082 ,  B23K26/0853 ,  B23K2101/40

摘要： A laser beam processing machine comprising a chuck table for holding a workpiece, a laser beam application means for applying a laser beam to the workpiece held on the chuck table, a processing-feed means for moving the chuck table and the laser beam application means relative to each other in a processing-feed direction (X-axis direction), and an indexing-feed means for moving the chuck table and the laser beam application means relative to each other in an indexing-feed direction (Y-axis direction) perpendicular to the processing-feed direction (X-axis direction), wherein the laser beam application means comprises a laser oscillation means for oscillating a laser beam, a first acousto-optic deflection means for deflecting the optical axis of a laser beam oscillated by the laser beam oscillation means in the processing-feed direction (X-axis direction), and a second acousto-optic deflection means for deflecting the optical axis of a laser beam oscillated by the laser beam oscillation means in the indexing-feed direction (Y-axis direction).

摘要翻译： 一种激光束处理机，包括用于保持工件的卡盘台，用于将激光束施加到保持在卡盘台上的工件的激光束施加装置，用于使卡盘台和激光束施加装置相对移动的加工进给装置 （X轴方向）彼此相对移动夹具台和激光束施加机构的分度供给机构，使其相对于彼此垂直的分度方向（Y轴方向）相对移动 到处理供给方向（X轴方向），其中激光束施加装置包括用于振荡激光束的激光振荡装置，用于偏转激光振荡的激光束的光轴的第一声光偏转装置 光束振荡意味着处理进给方向（X轴方向），以及用于偏转由激光束振荡振荡的激光束的光轴的第二声光偏转装置 意味着分度进给方向（Y轴方向）。

公开(公告)号：US20060266744A1

公开(公告)日：2006-11-30

申请号：US11437675

申请日：2006-05-22

申请人： Keiji Nomaru

发明人： Keiji Nomaru

IPC分类号： B23K26/06

CPC分类号： B23K26/0665 ,  B23K26/064 ,  B23K26/0648 ,  B23K26/40 ,  B23K26/53 ,  B23K2101/40 ,  B23K2103/50

摘要： A laser beam processing machine comprising a chuck table for holding a workpiece, a laser beam application means for applying a laser beam capable of passing through the workpiece to the workpiece held on the chuck table, and a processing-feed means for moving the chuck table and the laser beam application means relative to each other, the laser beam application means comprising a laser beam oscillation means, an optical transmission means for transmitting a laser beam oscillated from the laser beam oscillation means and a condenser lens for converging a laser beam transmitted by the optical transmission means, wherein the optical transmission means comprises a birefringence lens for separating the laser beam oscillated from the laser beam oscillation means into normal light and abnormal light; and the condenser lens converges respectively the normal light and the abnormal light separated by the birefringence lens to form the focal point of the normal light and the focal point of the abnormal light.

摘要翻译： 一种激光束处理机，包括用于保持工件的卡盘台，用于将能够通过工件的激光束施加到保持在卡盘台上的工件的激光束施加装置，以及用于移动卡盘台的加工进给装置 和激光束施加装置相对于彼此，激光束施加装置包括激光束振荡装置，用于传输从激光束振荡装置振荡的激光束的光传输装置和用于会聚由 光传输装置，其中光传输装置包括用于将从激光束振荡装置振荡的激光束分离成正常光和异常光的双折射透镜; 并且聚光透镜分别收敛由双折射透镜分离的正常光和异常光，以形成正常光的焦点和异常光的焦点。

公开(公告)号：US20060201920A1

公开(公告)日：2006-09-14

申请号：US11369945

申请日：2006-03-08

申请人： Hiroshi Morikazu ,  Keiji Nomaru ,  Katsuharu Negishi

发明人： Hiroshi Morikazu ,  Keiji Nomaru ,  Katsuharu Negishi

IPC分类号： B23K26/08

CPC分类号： B23K37/0235 ,  B23K26/0622 ,  B23K26/0853 ,  B23K26/0876 ,  B23K26/40 ,  B23K37/0408 ,  B23K37/0435 ,  B23K2103/172 ,  B23K2103/50

摘要： A laser beam processing machine comprising a chuck table for holding a workpiece, a laser beam application means for applying a laser beam to the workpiece held on the chuck table, a processing-feed means for moving the chuck table and the laser beam application means relative to each other in a processing-feed direction (X), and an indexing-feed means for moving the chuck table and the laser beam application means relative to each other in an indexing-feed direction (Y) perpendicular to the processing-feed direction (X), wherein the machine further comprises a processing-feed amount detection means for detecting a processing-feed amount; an indexing-feed amount detection means for detecting an indexing-feed amount; and a control means, which has a storage means for storing the X and Y coordinate values of a minute hole to be formed in the workpiece, and controls the laser beam application means based on the X and Y coordinate values of the minute hole stored in the storage means and detection signals from the processing-feed amount detection means and the indexing-feed amount detection means.

摘要翻译： 一种激光束处理机，包括用于保持工件的卡盘台，用于将激光束施加到保持在卡盘台上的工件的激光束施加装置，用于使卡盘台和激光束施加装置相对移动的加工进给装置 以及分度供给装置，用于使卡盘台和激光束施加装置相对于垂直于加工供给方向的分度方向（Y）相对移动， （X），其中所述机器还包括用于检测加工进给量的加工进给量检测装置; 用于检测分度供给量的分度供给量检测单元; 以及控制装置，其具有用于存储要在工件中形成的微孔的X和Y坐标值的存储装置，并且基于存储在所述微孔的X和Y坐标值来控制激光束施加装置 存储装置和来自处理供给量检测装置和分度供给量检测装置的检测信号。

公开(公告)号：US09085046B2

公开(公告)日：2015-07-21

申请号：US13366728

申请日：2012-02-06

申请人： Keiji Nomaru

发明人： Keiji Nomaru

IPC分类号： B23K26/16 ,  B23K26/06 ,  B23K26/067

CPC分类号： B23K26/40 ,  B23K26/0626 ,  B23K26/064 ,  B23K26/0643 ,  B23K26/0652 ,  B23K26/067 ,  B23K2103/50

摘要： A laser beam applying mechanism has a power adjusting unit provided between a laser beam oscillator and a focusing lens. The power adjusting unit includes a half-wave plate, a prism having a first polarization beam splitter film and a second polarization beam splitter film. The optical path is adjusted by a piezoelectric actuator opposed to the first polarization beam splitter film, and a polarized light components synthesizer opposed to the second polarization beam splitter film generates a phase difference (β) between an S polarized light component and a P polarized light component. The phase difference (β) between the S polarized light component and the P polarized light component of the laser beam obtained by the polarized light components synthesizer is in the range of 0° to 180°.

摘要翻译： 激光束施加机构具有设置在激光束振荡器和聚焦透镜之间的功率调节单元。 功率调整单元包括半波片，具有第一偏振分束膜和第二偏振分束膜的棱镜。 通过与第一偏振分束膜相对的压电致动器调节光路，与第二偏振分束膜相对的偏振光分量合成器在S偏振光分量和P偏振光分量膜之间产生相位差（＆amp; bgr） 光分量。 由偏振光分量合成器获得的S偏振光分量和激光束的P偏振光分量之间的相位差（＆bgr）在0°至180°的范围内。

公开(公告)号：US08404999B2

公开(公告)日：2013-03-26

申请号：US12899757

申请日：2010-10-07

申请人： Ken Togashi ,  Keiji Nomaru ,  Hiroshi Morikazu

发明人： Ken Togashi ,  Keiji Nomaru ,  Hiroshi Morikazu

IPC分类号： B23K26/38 ,  B23K26/067

CPC分类号： B23K26/0853 ,  B23K26/0673 ,  C03B33/0222

摘要： A laser processing apparatus including a laser applying unit. The laser applying unit includes a first laser oscillating unit, a second laser oscillating unit, a first laser branching unit for branching a laser beam oscillated from the first laser oscillating unit into three optical paths, a second laser branching unit for branching a laser beam oscillated from the second laser oscillating unit into three optical paths, three first focusing units for respectively focusing the laser beams through the three optical paths obtained by the first laser branching unit toward a glass substrate, and three second focusing units for respectively focusing the laser beams through the three optical paths obtained by the second laser branching unit. The first focusing units and the second focusing units are alternately arranged in a line in an indexing direction.

摘要翻译： 一种激光加工设备，包括激光施加单元。 激光施加单元包括第一激光振荡单元，第二激光振荡单元，用于将从第一激光振荡单元振荡的激光束分支为三个光路的第一激光分支单元，用于分支激光束振荡的第二激光分支单元 从第二激光振荡单元到三个光路中，三个第一聚焦单元，用于分别将激光束通过由第一激光分支单元获得的三个光路聚焦到玻璃基板，以及三个第二聚焦单元，用于分别聚焦激光束 由第二激光分支单元获得的三个光路。 第一聚焦单元和第二聚焦单元沿分度方向交替布置成一行。

公开(公告)号：US20120312793A1

公开(公告)日：2012-12-13

申请号：US13494745

申请日：2012-06-12

申请人： Keiji Nomaru

发明人： Keiji Nomaru

IPC分类号： B23K26/02

CPC分类号： B23K26/0006 ,  B23K26/046 ,  B23K26/0648 ,  B23K26/0853 ,  B23K26/53 ,  B23K2103/56

摘要： A laser processing apparatus including a pulsed laser oscillator for oscillating a pulsed laser beam, a focusing objective lens for focusing the pulsed laser beam, and a varifocal lens provided between the pulsed laser oscillator and the focusing objective lens. The varifocal lens has a piezoelectric device to change its focal length according to the period of radio-frequency waves produced by the piezoelectric device. A repetition frequency adjusting unit is connected to the pulsed laser oscillator, and a radio-frequency current frequency adjusting unit is connected to the piezoelectric device. The laser processing apparatus further includes a controller for controlling the repetition frequency adjusting unit and the radio-frequency current frequency adjusting unit so as to produce a phase difference between the repetition frequency of the pulsed laser beam and the frequency of the radio-frequency current to be applied to the piezoelectric device of the varifocal lens.

摘要翻译： 一种激光加工装置，包括用于振荡脉冲激光束的脉冲激光振荡器，用于聚焦脉冲激光束的聚焦物镜和设置在脉冲激光振荡器和聚焦物镜之间的变焦透镜。 变焦透镜具有根据由压电器件产生的射频周期来改变其焦距的压电器件。 重复频率调整单元连接到脉冲激光振荡器，并且射频电流频率调节单元连接到压电器件。 激光处理装置还包括控制器，用于控制重复频率调整单元和射频电流频率调节单元，以产生脉冲激光束的重复频率与射频电流的频率之间的相位差 应用于变焦透镜的压电元件。

公开(公告)号：US20120298636A1

公开(公告)日：2012-11-29

申请号：US13477851

申请日：2012-05-22

申请人： Keiji Nomaru ,  Hiroshi Morikazu ,  Yoko Nishino

发明人： Keiji Nomaru ,  Hiroshi Morikazu ,  Yoko Nishino

IPC分类号： B23K26/00

CPC分类号： B23K26/032 ,  B23K26/0622 ,  B23K26/0643 ,  B23K26/0861 ,  B23K26/0876 ,  B23K26/382 ,  B23K26/40 ,  B23K2101/40 ,  B23K2103/50

摘要： A laser processing apparatus includes a chuck table for holding a workpiece and a laser beam applying unit for applying a laser beam to the workpiece. A laser beam oscillating unit oscillates a laser beam and a focusing unit focuses the laser beam onto the workpiece. A reflecting unit is provided on the optical axis of the focusing unit. A wavelength detecting unit detects the wavelength of the plasma light reflected by the reflecting unit, and a controller determines the material of the workpiece according to a detection signal from the wavelength detecting unit, to control the laser beam applying unit.

摘要翻译： 激光加工装置包括用于保持工件的卡盘台和用于将激光束施加到工件的激光束施加单元。 激光束振荡单元振荡激光束并且聚焦单元将激光束聚焦到工件上。 反射单元设置在聚焦单元的光轴上。 波长检测单元检测由反射单元反射的等离子体光的波长，并且控制器根据来自波长检测单元的检测信号来确定工件的材料，以控制激光束施加单元。

公开(公告)号：US20120292297A1

公开(公告)日：2012-11-22

申请号：US13473824

申请日：2012-05-17

申请人： Hiroshi Morikazu ,  Keiji Nomaru ,  Yoko Nishino

发明人： Hiroshi Morikazu ,  Keiji Nomaru ,  Yoko Nishino

IPC分类号： B23K26/00

CPC分类号： B23K26/3584 ,  B23K26/0613 ,  B23K26/0622 ,  B23K26/064 ,  B23K26/0648 ,  B23K26/0853 ,  B23K26/36 ,  B23K26/364 ,  B23K26/40 ,  B23K26/402 ,  B23K26/60 ,  B23K2101/40 ,  B23K2103/50 ,  H01L33/0095

摘要： A laser processing method of applying a pulsed laser beam to a workpiece formed from a transparent member, thereby performing laser processing to the workpiece. The laser processing method includes a first laser processing step of applying a first pulsed laser beam to a subject area of the workpiece to roughen the subject area and a second laser processing step of applying a second pulsed laser beam to the subject area roughened by the application of the first pulsed laser beam immediately after performing the first laser processing step, thereby forming a recess in the subject area. The first laser processing step and the second laser processing step are repeated to thereby form a continuous groove in the subject area.

摘要翻译： 一种将脉冲激光束施加到由透明构件形成的工件上的激光加工方法，从而对工件进行激光加工。 激光加工方法包括：第一激光加工步骤，将第一脉冲激光束施加到工件的主体区域以粗糙化对象区域;以及第二激光加工步骤，将第二脉冲激光束施加到由应用程序粗糙化的对象区域 在第一激光加工步骤之后立即进行第一脉冲激光束，从而在主体区域中形成凹陷。 重复第一激光加工步骤和第二激光加工步骤，从而在主体区域中形成连续的凹槽。

公开(公告)号：US20120103952A1

公开(公告)日：2012-05-03

申请号：US13281984

申请日：2011-10-26

申请人： Keiji Nomaru

发明人： Keiji Nomaru

IPC分类号： B23K26/06

CPC分类号： B23K26/02 ,  B23K26/06 ,  B23K26/0624 ,  B23K26/0853 ,  B23K26/0876 ,  B23K26/364 ,  B23K26/40 ,  B23K37/0211 ,  B23K2101/40 ,  B23K2103/50 ,  H01L21/268 ,  H01S3/00

摘要： An optical transmitting unit transmits a pulsed laser beam oscillated by a pulsed laser beam oscillator to a focusing unit in a laser processing apparatus. A wavelength band expanding unit expands the wavelength band of the pulsed laser beam, and a pulse width expanding unit increases the pulse width of the expanded pulsed laser beam. A focusing lens focuses the expanded pulsed laser beam. An optical fiber transmits the focused pulsed laser beam through a collimating lens and a pulse width compressing unit compresses the pulse width of the collimated pulsed laser beam to restore the original pulse width for transmission.

摘要翻译： 光发射单元将由脉冲激光束振荡器振荡的脉冲激光束发射到激光加工设备中的聚焦单元。 波长带扩展单元扩大脉冲激光束的波长带，并且脉冲宽度扩展单元增加扩展脉冲激光束的脉冲宽度。 聚焦透镜聚焦扩展的脉冲激光束。 光纤通过准直透镜传输聚焦的脉冲激光束，并且脉冲宽度压缩单元压缩准直脉冲激光束的脉冲宽度以恢复原始脉冲宽度以进行传输。

公开(公告)号：US07544587B2

公开(公告)日：2009-06-09

申请号：US11650503

申请日：2007-01-08

申请人： Yosuke Watanabe ,  Keiji Nomaru ,  Nobumori Ogoshi ,  Koichi Mitani ,  Taizo Kise ,  Kohei Matsumoto ,  Tatsuya Inaoka ,  Masaru Nakamura

发明人： Yosuke Watanabe ,  Keiji Nomaru ,  Nobumori Ogoshi ,  Koichi Mitani ,  Taizo Kise ,  Kohei Matsumoto ,  Tatsuya Inaoka ,  Masaru Nakamura

IPC分类号： H01L21/301

CPC分类号： B26F3/002 ,  B23K26/40 ,  B23K2103/50 ,  B26D7/10 ,  B28D5/0011 ,  B28D5/0052 ,  Y10T225/325

摘要： A method of dividing, along lattice pattern-like dividing lines, a wafer which has the lattice pattern-like dividing lines and a polymer film on the front surface of a substrate and is processed to allow for division along the dividing lines, the method comprising a frame holding step for putting the wafer on the surface of an adhesive tape mounted on an annular frame; a wafer cooling step for cooling the wafer that is affixed to the surface of the adhesive tape mounted on the annular frame; and a diving step for dividing the wafer along the dividing lines by expanding the adhesive tape to which the cooled wafer is affixed.

摘要翻译： 沿着格子状分割线将具有格子状分割线的晶片和在基板的前表面上的聚合物膜分割的方法，其被处理以允许沿着分割线分割，所述方法包括 框架保持步骤，用于将晶片放置在安装在环形框架上的胶带的表面上; 用于冷却固定到安装在环形框架上的胶带的表面的晶片的晶片冷却步骤; 以及用于通过使粘附有冷却晶片的粘合带膨胀而沿着分割线分割晶片的潜水步骤。