公开(公告)号：US09884715B2

公开(公告)日：2018-02-06

申请号：US13116920

申请日：2011-05-26

Applicant: Romano Hoofman ,  Roel Daamen ,  Youri Victorovitch Ponomarev ,  Fotopoulou Kyriaki ,  Matthias Merz ,  Gilberto Curatola ,  Anton Tombeur

Inventor： Romano Hoofman ,  Roel Daamen ,  Youri Victorovitch Ponomarev ,  Fotopoulou Kyriaki ,  Matthias Merz ,  Gilberto Curatola ,  Anton Tombeur

IPC: H04Q5/22 ,  B65D79/02 ,  G01N33/00 ,  G01N33/02

CPC classification number: B65D79/02 ,  B65D2203/10 ,  G01N33/0062 ,  G01N33/02

Abstract: A container for containing a perishable substance has a container wall with an inner side and an outer side. The wall has an electrically conductive layer extending between the inner side and the outer side. The inner side faces the space containing the substance. The container comprises electronic circuitry having a sensor for sensing a physical property or condition of the substance, and an antenna for communicating an RF signal to a receiver, external to the container. The RF signal is indicative of the physical property or condition sensed. The sensor is positioned so as to be exposed to the space containing the substance in operational use of the container. The antenna is positioned at the outer side, or between the outer side and the electrically conductive layer, and is electrically isolated from the electrically conductive layer.

公开(公告)号：US09632049B2

公开(公告)日：2017-04-25

申请号：US12962460

申请日：2010-12-07

Applicant: Matthias Merz ,  Roel Daamen ,  Aurelie Humbert ,  Youri Victorovitch Ponomarev

Inventor： Matthias Merz ,  Roel Daamen ,  Aurelie Humbert ,  Youri Victorovitch Ponomarev

IPC: G08B21/00 ,  G01R27/26 ,  G01R27/08 ,  G01N27/12 ,  G01M3/04 ,  G01N27/06

CPC classification number: G01N27/121 ,  G01M3/045 ,  G01N27/06

Abstract: Disclosed is an integrated circuit comprising an electrode arrangement for detecting the presence of a liquid, said electrode arrangement comprising a first electrode and a second electrode, wherein, prior to exposure of the electrode arrangement to said liquid, a surface of at least one of the first electrode and second electrode is at least partially covered by a compound that is soluble in the liquid; the electrical properties of the electrode arrangement being dependent on the amount of the compound covering said surface. An package and electronic device comprising such an IC and a method of manufacturing such an IC are also disclosed.

公开(公告)号：US09281239B2

公开(公告)日：2016-03-08

申请号：US13126057

申请日：2009-10-26

Applicant: Roel Daamen ,  Matthias Merz

Inventor： Roel Daamen ,  Matthias Merz

IPC: H01L21/4763 ,  H01L21/768 ,  H01L21/3213

CPC classification number: H01L21/76849 ,  H01L21/32134 ,  H01L21/7684 ,  H01L21/76883

Abstract: A biocompatible electrode is manufactured by depositing filling metal 36 and etching back the filling metal to the surface of the surrounding insulator 30. Then, a further etch forms a recess 38 at the top of the via 32. An electrode metal 40 is then deposited and etched back to fill the recess 38 and form biocompatible electrode 42. In this way, a planar biocompatible electrode is achieved. The step of etching to form the recess may be carried out in the same CMP tool as is used to etch back the filling metal 36. A hydrogen peroxide etch may be used.

Abstract translation: 通过沉积填充金属36并将填充金属蚀刻回到周围绝缘体30的表面来制造生物相容性电极。然后，另外的蚀刻在通孔32的顶部形成凹部38.然后沉积电极金属40， 回蚀以填充凹部38并形成生物相容性电极42.以这种方式，实现平面生物相容性电极。 蚀刻形成凹部的步骤可以在与用于回填填充金属36相同的CMP工具中进行。可以使用过氧化氢蚀刻。

公开(公告)号：US09034637B2

公开(公告)日：2015-05-19

申请号：US12595090

申请日：2008-04-05

Applicant: Matthias Merz ,  Youri V. Ponomarev ,  Gilberto Curatola

Inventor： Matthias Merz ,  Youri V. Ponomarev ,  Gilberto Curatola

IPC: C12M1/34 ,  C12M1/00 ,  C12M3/00 ,  G01R31/26 ,  H01L21/66 ,  G01N33/487 ,  C12Q1/68 ,  G01N27/414

CPC classification number: G01N33/48721 ,  C12Q1/6869 ,  G01N27/414 ,  C12Q2565/631

Abstract: A detector device comprises a substrate (50), a source region (S) and a drain region (D), and a channel region (65) between the source and drain regions. A nanopore (54) passes through the channel region, and connects fluid chambers (56,58) on opposite sides of the substrate. A voltage bias is provided between the fluid chambers, the source and drain regions and a charge flow between the source and drain regions is sensed. The device uses a nanopore for the confinement of a sample under test (for example nucleotides) close to a sensor. The size of the sensor can be made similar to the spacing of adjacent nucleotides in a DNA strand. In this way, the disadvantages of PCR based techniques for DNA sequencing are avoided, and single nucleotide resolution can be attained.

Abstract translation: 检测器装置包括衬底（50），源极区（S）和漏极区（D）以及在源极和漏极区之间的沟道区（65）。 纳米孔（54）穿过沟道区域，并且连接在衬底的相对侧上的流体室（56,58）。 在流体室，源极和漏极区之间提供电压偏置，并且感测源区和漏区之间的电荷流。 该装置使用纳米孔来限制待测样品（例如核苷酸）靠近传感器。 可以使传感器的尺寸与DNA链中相邻核苷酸的间隔相似。 以这种方式，避免了基于PCR的DNA测序技术的缺点，可以实现单核苷酸分辨率。

公开(公告)号：US08957687B2

公开(公告)日：2015-02-17

申请号：US13457072

申请日：2012-04-26

Applicant: Axel Nackaerts ,  Matthias Merz ,  Youri Victorovitch Ponomarev

Inventor： Axel Nackaerts ,  Matthias Merz ,  Youri Victorovitch Ponomarev

IPC: G01R27/28 ,  G01N27/414

CPC classification number: G01N27/414 ,  G01N27/4148

Abstract: The invention relates to an electrochemical sensor integrated on a substrate, the electrochemical sensor including: a field effect transistor integrated on the substrate and having a source, gate and drain connections, said gate of the field effect transistor including: a sensing gate conductively coupled to a sensing electrode; and a bias gate, wherein the sensing gate is capacitively coupled to the bias gate and the bias gate is capacitively coupled to the substrate.

Abstract translation: 本发明涉及集成在基板上的电化学传感器，该电化学传感器包括：集成在基板上并具有源极，栅极和漏极连接的场效应晶体管，场效应晶体管的所述栅极包括：感测栅极，导电耦合到 感测电极; 以及偏置栅极，其中所述感测栅极电容耦合到所述偏置栅极，并且所述偏置栅极电容耦合到所述衬底。

公开(公告)号：US08866239B2

公开(公告)日：2014-10-21

申请号：US13289063

申请日：2011-11-04

Applicant: Marcus Van Dal ,  Aurelie Humbert ,  Matthias Merz ,  Youri Victorovitch Ponomarev

Inventor： Marcus Van Dal ,  Aurelie Humbert ,  Matthias Merz ,  Youri Victorovitch Ponomarev

IPC: H01L27/14 ,  H01L29/66 ,  H01L23/34

CPC classification number: B81B7/0012 ,  B81B2201/0214 ,  B81B2207/015 ,  B81C2201/016

Abstract: A method of manufacturing an integrated circuit having a substrate comprising a plurality of components and a metallization stack over the components, the metallization stack comprising a first sensing element and a second sensing element adjacent to the first sensing element.

Abstract translation: 一种制造集成电路的方法，所述集成电路具有包括多个部件的基板和在所述部件上的金属化叠层，所述金属化堆叠包括第一感测元件和与所述第一感测元件相邻的第二感测元件。

公开(公告)号：US08742470B2

公开(公告)日：2014-06-03

申请号：US13600385

申请日：2012-08-31

Applicant: Matthias Merz ,  Coenraad Cornelis Tak ,  Romano Hoofman

Inventor： Matthias Merz ,  Coenraad Cornelis Tak ,  Romano Hoofman

IPC: G01N27/403

CPC classification number: G01N27/302 ,  G01N27/4148 ,  G01N27/4167 ,  G01N33/02 ,  G01N33/04 ,  G01N33/12 ,  H01L2224/48091 ,  H01L2924/1815 ,  Y10T29/49002 ,  H01L2924/00014

Abstract: Disclosed is a pH sensor comprising a carrier (10) comprising a plurality of conductive tracks and an exposed conductive area (40) defining a reference electrode connected to one of said conductive tracks; a sensing device (30) mounted on the carrier and connected at least one other of said conductive tracks; an encapsulation (20) covering the carrier, said encapsulation comprising a first cavity (22) exposing a surface (32) of the sensing device and a second cavity (24) exposing the exposed conductive area, said second cavity comprising a reference electrode material (42) and an ion reservoir material (44) sharing at least one ion type with said reference electrode material, the reference electrode material being sandwiched between the exposed conductive area and the ion reservoir material. A method of manufacturing such a pH sensor is also disclosed.

Abstract translation: 公开了一种pH传感器，其包括包括多个导电轨道的载体（10）和限定连接到所述导电轨道之一的参考电极的暴露导电区域（40） 感测装置（30），其安装在所述载体上并且连接至少另一个所述导电轨道; 覆盖所述载体的封装（20），所述封装包括暴露所述感测装置的表面（32）的第一空腔（22）和暴露所述暴露的导电区域的第二空腔（24），所述第二空腔包括参考电极材料 42）和与所述参考电极材料共享至少一种离子型离子储存器材料（44），所述参考电极材料夹在所述暴露的导电区域和所述离子储存器材料之间。 还公开了制造这种pH传感器的方法。

公开(公告)号：US08707781B2

公开(公告)日：2014-04-29

申请号：US13063325

申请日：2009-09-10

Applicant: Aurelie Humbert ,  Matthias Merz

Inventor： Aurelie Humbert ,  Matthias Merz

IPC: G01N27/22

CPC classification number: G01N27/223

Abstract: A sensor senses a magnitude of a physical parameter of the sensor's environment. The sensor has first and second electrodes, and a material layer between them. The material has an electrical property, e.g., capacitance or resistance, whose value depends on the magnitude of the physical parameter. The first electrode is formed in a first layer, and the second electrode is formed in a second layer, different from the first layer. The first layer has a trench and an elevation next to the trench. The trench has a bottom wall and a side wall. The material is positioned on the bottom wall and on the side wall and on top of the elevation. The trench accommodates at least a part of the second electrode. The second electrode leaves exposed the material formed on top of the elevation.

Abstract translation: 传感器感测传感器环境的物理参数的大小。 传感器具有第一和第二电极以及它们之间的材料层。 该材料具有电性能，例如电容或电阻，其值取决于物理参数的大小。 第一电极形成在第一层中，并且第二电极形成在与第一层不同的第二层中。 第一层在沟槽旁边具有沟槽和高度。 沟槽具有底壁和侧壁。 材料位于底壁和侧壁上以及高度的顶部。 沟槽容纳至少一部分第二电极。 第二个电极离开了形成在高程顶部的材料。

公开(公告)号：US08683861B2

公开(公告)日：2014-04-01

申请号：US12670715

申请日：2008-07-30

Applicant: Aurelie Humbert ,  Youri Victorovitch Ponomarev ,  Matthias Merz ,  Romano Hoofman

Inventor： Aurelie Humbert ,  Youri Victorovitch Ponomarev ,  Matthias Merz ,  Romano Hoofman

IPC: G01N19/00

CPC classification number: G01N17/04

Abstract: A sensor senses a characteristic of an environment, e.g., humidity. The sensor has a substrate with strips of material that is sensitive to corrosion as a result of the characteristic. The strips are configured to respond differently to the characteristic. By means of repeatedly measuring the resistances of the strips, the environment can be monitored in terms of accumulated exposure to the characteristic. The strips are manufactured in a semiconductor technology so as to generate accurate sensors that behave predictably.

Abstract translation: 传感器感测环境的特性，例如湿度。 传感器具有由于特性而对腐蚀敏感的材料条带的基板。 条带被配置为对特性做出不同的响应。 通过重复测量条的电阻，可以根据特征的累积暴露来监测环境。 这些条以半导体技术制造，以便产生可预测地行为的精确传感器。

公开(公告)号：US20120286803A1

公开(公告)日：2012-11-15

申请号：US13457072

申请日：2012-04-26

Applicant: Axel Nackaerts ,  Matthias Merz ,  Youri Victorovitch Ponomarev

Inventor： Axel Nackaerts ,  Matthias Merz ,  Youri Victorovitch Ponomarev

IPC: G01R27/28 ,  H01L29/78

CPC classification number: G01N27/414 ,  G01N27/4148

Abstract: The invention relates to an electrochemical sensor integrated on a substrate, the electrochemical sensor comprising: a field effect transistor integrated on the substrate and having a source, gate and drain connections, said gate of the field effect transistor comprising: a sensing gate conductively coupled to a sensing electrode; and a bias gate, wherein the sensing gate is capacitively coupled to the bias gate and the bias gate is capacitively coupled to the substrate.

Abstract translation: 本发明涉及集成在衬底上的电化学传感器，该电化学传感器包括：集成在衬底上并具有源极，栅极和漏极连接的场效应晶体管，场效应晶体管的所述栅极包括：传感栅极，其传导耦合到 感测电极; 以及偏置栅极，其中所述感测栅极电容耦合到所述偏置栅极，并且所述偏置栅极电容耦合到所述衬底。