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公开(公告)号：US20200026065A1
公开(公告)日：2020-01-23
申请号：US16042898
申请日：2018-07-23
Applicant: Microvision, Inc.
Inventor： P. Selvan Viswanathan , Matthieu Saracco , Roger F. Johnson , Ian Blanch
Abstract: An angular velocity correcting optical device receives a sinusoidally swept input light beam and outputs a non-sinusoidally swept output beam. The output beam may have a constant angular velocity. The output beam may have a constant pitch on a target surface for a constant periodicity pulsed light beam. Optical surfaces may be freeform surfaces specified by polynomials.
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公开(公告)号：US10474248B2
公开(公告)日：2019-11-12
申请号：US15894708
申请日：2018-02-12
Applicant: Microvision, Inc.
Inventor： P. Selvan Viswanathan , Jari Honkanen
Abstract: A scanned beam 3D sensing system includes smart infrared pulsing to detect objects in a field of view. Infrared laser light pulses are emitted at a first density in a field of view and reflections are detected. Times of flight of the infrared laser light pulses are measured to determine if an object is in the field of view. The density of the infrared pulses may be increased based on various factors. The higher density infrared pulses may be scanned in a region of interest that is a subset of the field of view. Power consumption is reduced by reducing the density of laser pulses when possible.
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公开(公告)号：US20190331774A1
公开(公告)日：2019-10-31
申请号：US15962924
申请日：2018-04-25
Applicant: Microvision, Inc.
Inventor： Robert James Jackson
Abstract: A scanning light detection and ranging (LIDAR) system includes a scanning apparatus that scans laser light pulses sinusoidally in a vertical direction, and quasi-statically through angular extents in a horizontal direction. Multiple light sensors, each with a substantially nonoverlapping field of view, are multiplexed during the scan of the laser light pulses. Multiple scanning LIDAR systems may be combined to increase the effective horizontal angular extents.
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公开(公告)号：US20190250721A1
公开(公告)日：2019-08-15
申请号：US15894708
申请日：2018-02-12
Applicant: Microvision, Inc.
Inventor： P. Selvan Viswanathan , Jari Honkanen
Abstract: A scanned beam 3D sensing system includes smart infrared pulsing to detect objects in a field of view. Infrared laser light pulses are emitted at a first density in a field of view and reflections are detected. Times of flight of the infrared laser light pulses are measured to determine if an object is in the field of view. The density of the infrared pulses may be increased based on various factors. The higher density infrared pulses may be scanned in a region of interest that is a subset of the field of view. Power consumption is reduced by reducing the density of laser pulses when possible.
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公开(公告)号：US10380731B1
公开(公告)日：2019-08-13
申请号：US14697066
申请日：2015-04-27
Applicant: Hermes Microvision Inc.
IPC: H01J37/28 , G06T7/00 , H01J37/22 , G01N23/2251
Abstract: A method and system for inspecting defects saves scanned raw data as an original image so as to save time for repeated scanning and achieve faster defect inspection and lower false rate by reviewing suspicious defects and other regions of interest in the original image by using the same or different image-processing algorithm with the same or different parameters.
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Patent Agency Ranking
公开(公告)号：US20190214225A1
公开(公告)日：2019-07-11
申请号：US16241910
申请日：2019-01-07
Applicant: Hermes Microvision, Inc.
Inventor： Hsuan-Bin HUANG , Chun-Liang LU , Chin-Fa TU , Wen-Sheng LIN , Youjin WANG
Abstract: A load lock system for charged particle beam imaging with a particle shielding plate, a bottom seal plate and a plurality of sensor units is provided. The sensor units are located above the wafer, the shield plate is designed to have a few number of screws, and the bottom seal plate contains no cable, no contact sensors and fewer screws used. In the invention, the system is designed to improve the contamination particles from components in the load lock system of charged particle beam inspection tool and also to simplify its assembly.
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公开(公告)号：US20190170671A1
公开(公告)日：2019-06-06
申请号：US16147277
申请日：2018-09-28
Applicant: Hermes Microvision, Inc.
Inventor： Guochong WENG , Youjin WANG , Chiyan KUAN , Chung-Shih PAN
IPC: G01N23/2251 , H05F3/02 , H01J37/28 , H01J37/02 , H01J37/20
CPC classification number: G01N23/2251 , H01J37/026 , H01J37/20 , H01J37/28 , H01J2237/004 , H01J2237/0041 , H01J2237/0044 , H01J2237/2007 , H01J2237/2008 , H01J2237/202 , H01J2237/2448 , H01J2237/2602 , H01J2237/2811 , H01J2237/2813 , H05F3/02
Abstract: A structure for grounding an extreme ultraviolet mask (EUV mask) is provided to discharge the EUV mask during the inspection by an electron beam inspection tool. The structure for grounding an EUV mask includes at least one grounding pin to contact conductive areas on the EUV mask, wherein the EUV mask may have further conductive layer on sidewalls or/and back side. The inspection quality of the EUV mask is enhanced by using the electron beam inspection system because the accumulated charging on the EUV mask is grounded. The reflective surface of the EUV mask on a continuously moving stage is scanned by using the electron beam simultaneously. The moving direction of the stage is perpendicular to the scanning direction of the electron beam.
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公开(公告)号：US10286607B1
公开(公告)日：2019-05-14
申请号：US15846701
申请日：2017-12-19
Applicant: Microvision, Inc.
Inventor： Naili Yue , Thomas Byeman , Sumit Sharma , Nara Va
Abstract: The embodiments described herein provide improved techniques for laser welding. These techniques can provide improved weld strength while reducing the potential for damage at the welding surface. In general, the techniques use a mask to selectively block a portion of the laser beam during welding. Specifically, the mask is made to include at least one laser light blocking feature and at least one laser light passing feature. The mask is positioned to be in contact with the plastic bodies that are to be welded together, with the laser light blocking feature and laser light passing feature proximate to the area that is to be welded. Then during welding the laser beam is operated to simultaneously impact the laser light blocking feature and pass through the laser light passing feature.
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公开(公告)号：US20190074157A1
公开(公告)日：2019-03-07
申请号：US16174146
申请日：2018-10-29
Applicant: Hermes Microvision, Inc.
Inventor： Xuedong LIU , Weiming REN , Shuai LI , Zhongwei CHEN
IPC: H01J37/147 , H01J37/04 , H01J37/28 , H01J37/153
CPC classification number: H01J37/147 , H01J37/04 , H01J37/153 , H01J37/28 , H01J2237/061 , H01J2237/083 , H01J2237/1532 , H01J2237/1534 , H01J2237/2817
Abstract: One modified source-conversion unit and one method to reduce the Coulomb Effect in a multi-beam apparatus are proposed. In the modified source-conversion unit, the aberration-compensation function is carried out after the image-forming function has changed each beamlet to be on-axis locally, and therefore avoids undesired aberrations due to the beamlet tilting/shifting. A Coulomb-effect-reduction means with plural Coulomb-effect-reduction openings is placed close to the single electron source of the apparatus and therefore the electrons not in use can be cut off as early as possible.
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公开(公告)号：US10108022B2
公开(公告)日：2018-10-23
申请号：US15984717
申请日：2018-05-21
Applicant: Microvision, Inc.
Inventor： Matthieu Saracco , Roeland Collet , Alga Lloyd Northern, III
Abstract: Devices and methods are described herein that use a first solid figure element, a polarizing beam splitter, and a second solid figure element or array of mirrors to reduce speckle in projected images. Specifically, laser light is generated and split into two portions having orthogonal polarizations. The first portion of laser light is reflected in the second solid figure element or the array of mirrors and is then spatially recombined with the second portion of laser light in the first solid figure element. The difference in path length followed by the two portions generates a temporal incoherence in the recombined laser light beam, and that temporal incoherence reduces speckle in the projected image.
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