公开(公告)号：US5220403A

公开(公告)日：1993-06-15

申请号：US954282

申请日：1992-09-30

Applicant: John S. Batchelder ,  Philip C. D. Hobbs ,  Marc A. Taubenblatt

Inventor： John S. Batchelder ,  Philip C. D. Hobbs ,  Marc A. Taubenblatt

IPC: G01J3/42 ,  G01J3/44 ,  G01J9/02 ,  G01N21/35 ,  G01N21/95 ,  G02B3/00 ,  G02B21/00

CPC classification number: G01N21/9505 ,  G02B21/0016 ,  G02B3/00 ,  G01J2003/421 ,  G01J2009/0207 ,  G01J3/44 ,  G01N2021/1725 ,  G01N2021/1782 ,  G01N2021/8822 ,  G01N21/3563 ,  G01N21/359 ,  G01N2201/0638 ,  G01N2201/1087

Abstract: Apparatus and a method for performing high resolution optical imaging in the near infrared of internal features of semiconductor wafers uses an optical device made from a material having a high index of refraction and held in very close proximity to the wafer. The optical device may either be a prism or a plano-convex lens. The plano-convex lens may be held in contact with the wafer or separated from the wafer via an air bearing or an optical coupling fluid to allow the sample to be navigated beneath the lens. The lens may be used in a number of optical instruments such as a bright field microscope, a Schlieren microscope, a dark field microscope, a Linnik interferometer, a Raman spectroscope and an absorption spectroscope.

Abstract translation: 在半导体晶片的内部特征的近红外线中执行高分辨率光学成像的装置和方法使用由具有高折射率的材料制成的光学装置，并且保持非常靠近晶片。 光学器件可以是棱镜或平凸透镜。 平凸透镜可以保持与晶片接触或通过空气轴承或光耦合流体与晶片分离，以允许样品在透镜下面导航。 透镜可以用于许多光学仪器，例如明视野显微镜，Schlieren显微镜，暗视野显微镜，Linnik干涉仪，拉曼光谱仪和吸收光谱仪。

公开(公告)号：US07853105B2

公开(公告)日：2010-12-14

申请号：US12424833

申请日：2009-04-16

Applicant: Russell A. Budd ,  Punit Chiniwalla ,  Philip C. D. Hobbs ,  Frank R. Libsch

Inventor： Russell A. Budd ,  Punit Chiniwalla ,  Philip C. D. Hobbs ,  Frank R. Libsch

IPC: G02B6/26 ,  G02B6/42 ,  G02B6/10

CPC classification number: G02B6/42 ,  G02B6/30 ,  G02B6/3885 ,  G02B6/4214 ,  G02B6/423 ,  G02B6/4292

Abstract: An optical assembly includes a waveguide assembly and an optical coupling element. The waveguide assembly includes a core, a cladding portion, and, preferably, at least two waveguide core fiducials, the at least two waveguide core fiducials and the core being lithographically formed substantially simultaneously in a substantially coplanar layer. The core and the at least two waveguide core fiducials are formed in a predetermined relationship with the cladding portion. The optical coupling element (for example, a lens array or mechanical transfer (MT) ferrule), includes an optical element and, preferably, at least two alignment features associated with the optical element, the at least two alignment features being mated with the at least two waveguide core fiducials to accurately position the optical element with respect to the core in an X-Y plane. A method of alignment is also provided.

Abstract translation: 光学组件包括波导组件和光耦合元件。 波导组件包括芯，包层部分，并且优选地至少两个波导芯基准，所述至少两个波导芯基准和芯基本上在基本共面的层中基本上同时地形成。 芯和至少两个波导芯基准与包层部分形成预定的关系。 光学耦合元件（例如，透镜阵列或机械转移（MT）套圈）包括光学元件，并且优选地包括与光学元件相关联的至少两个对准特征，所述至少两个对准特征与所述光学元件配合 至少两个波导芯基准准确地将光学元件相对于芯在XY平面中定位。 还提供了一种对准方法。

公开(公告)号：US07542643B2

公开(公告)日：2009-06-02

申请号：US12141556

申请日：2008-06-18

Applicant: Russell A. Budd ,  Punit Chiniwalla ,  Philip C. D. Hobbs ,  Frank R. Libsch

Inventor： Russell A. Budd ,  Punit Chiniwalla ,  Philip C. D. Hobbs ,  Frank R. Libsch

IPC: G02B6/26 ,  G02B6/42 ,  G02B6/10

CPC classification number: G02B6/42 ,  G02B6/30 ,  G02B6/3885 ,  G02B6/4214 ,  G02B6/423 ,  G02B6/4292

Abstract: An optical assembly includes a waveguide assembly and an optical coupling element. The waveguide assembly includes a core, a cladding portion, and, preferably, at least two waveguide core fiducials, the at least two waveguide core fiducials and the core being lithographically formed substantially simultaneously in a substantially coplanar layer. The core and the at least two waveguide core fiducials are formed in a predetermined relationship with the cladding portion. The optical coupling element (for example, a lens array or mechanical transfer (MT) ferrule), includes an optical element and, preferably, at least two alignment features associated with the optical element, the at least two alignment features being mated with the at least two waveguide core fiducials to accurately position the optical element with respect to the core in an X-Y plane A method of alignment is also provided.

Abstract translation: 光学组件包括波导组件和光耦合元件。 波导组件包括芯，包层部分，并且优选地至少两个波导芯基准，所述至少两个波导芯基准和芯基本上在基本共面的层中基本上同时地形成。 芯和至少两个波导芯基准与包层部分形成预定的关系。 光学耦合元件（例如，透镜阵列或机械转移（MT）套圈）包括光学元件，并且优选地包括与光学元件相关联的至少两个对准特征，所述至少两个对准特征与所述光学元件配合 至少两个波导芯基准，以在XY平面中相对于芯精确地定位光学元件还提供了对准方法。

公开(公告)号：US07421160B1

公开(公告)日：2008-09-02

申请号：US11733406

申请日：2007-04-10

Applicant: Russell A. Budd ,  Punit Chiniwalla ,  Philip C. D. Hobbs ,  Frank R. Libsch

Inventor： Russell A. Budd ,  Punit Chiniwalla ,  Philip C. D. Hobbs ,  Frank R. Libsch

IPC: G02B6/32 ,  G02B6/26 ,  G02B6/42 ,  G02B6/10

CPC classification number: G02B6/42 ,  G02B6/30 ,  G02B6/3885 ,  G02B6/4214 ,  G02B6/423 ,  G02B6/4292

Abstract: An optical assembly includes a waveguide assembly and an optical coupling element. The waveguide assembly includes a core, a cladding portion, and, preferably, at least two waveguide core fiducials, the at least two waveguide core fiducials and the core being lithographically formed substantially simultaneously in a substantially coplanar layer. The core and the at least two waveguide core fiducials are formed in a predetermined relationship with the cladding portion. The optical coupling element (for example, a lens array or mechanical transfer (MT) ferrule), includes an optical element and, preferably, at least two alignment features associated with the optical element, the at least two alignment features being mated with the at least two waveguide core fiducials to accurately position the optical element with respect to the core in an X-Y plane. A method of alignment is also provided.

Abstract translation: 光学组件包括波导组件和光耦合元件。 波导组件包括芯，包层部分，并且优选地至少两个波导芯基准，所述至少两个波导芯基准和芯基本上在基本共面的层中基本上同时地形成。 芯和至少两个波导芯基准与包层部分形成预定的关系。 光学耦合元件（例如，透镜阵列或机械转移（MT）套圈）包括光学元件，并且优选地包括与光学元件相关联的至少两个对准特征，所述至少两个对准特征与所述光学元件配合 至少两个波导芯基准准确地将光学元件相对于芯在XY平面中定位。 还提供了一种对准方法。

公开(公告)号：US20080180340A1

公开(公告)日：2008-07-31

申请号：US11669267

申请日：2007-01-31

Applicant: Philip C. D. Hobbs ,  Frank R. Libsch

Inventor： Philip C. D. Hobbs ,  Frank R. Libsch

IPC: H01Q13/00 ,  G01B9/02

CPC classification number: G02B6/107 ,  G02B6/12004

Abstract: An optoelectronic device includes a substrate having a surface, a metallic coupling structure deposited on the surface of the substrate, the metallic coupling structure having a port and a waveguide interface portion with at least two waveguide interface portion sides, and a dielectric waveguide, the dielectric waveguide having a coupling interface portion deposited adjacent the at least two waveguide interface portion sides of the waveguide interface portion of the metallic coupling structure. It is possible to form high speed, CMOS-process-compatible, low power optical-electrical and electrical-optical conversion devices (i.e. optical detectors, modulators, and frequency mixer's) on the top of the semiconductor chip, after the rest of the wiling has been laid down.

Abstract translation: 光电器件包括具有表面的基片，沉积在基片表面上的金属耦合结构，具有端口的金属耦合结构和具有至少两个波导接口部分侧面的波导接口部分和介质波导，介电波导 波导，其具有与金属耦合结构的波导接口部分的至少两个波导界面部分侧相邻地沉积的耦合界面部分。 在半导体芯片的顶部可以形成高速，CMOS工艺兼容的低功率光电和电光转换器件（即光检测器，调制器和混频器） 已经下定决心

公开(公告)号：US06449382B1

公开(公告)日：2002-09-10

申请号：US09300999

申请日：1999-04-28

Applicant: Arthur Charles Ciccolo ,  Philip C. D. Hobbs ,  Howard E. Sachar

Inventor： Arthur Charles Ciccolo ,  Philip C. D. Hobbs ,  Howard E. Sachar

IPC: G06K900

CPC classification number: G06K9/32 ,  G06K9/209 ,  G06T7/292 ,  G06T2207/30241

Abstract: The present invention is in the field of sensor fusion, and discloses in one embodiment a method for extracting the trajectories of moving objects from an assembly of low-resolution sensors, whose spatial relationships are initially unknown, except that their fields of view are known to overlap so as to form a continuous coverage region, which may be much larger than the field of view of any individual sensor. Segments of object trajectories may be extracted from the data of each sensor, and then stitched together to reconstruct the trajectories of the objects. The stitching process also allows determination of the spatial relationships between the sensors, so that from initially knowing little or nothing about the sensor arrangement or the paths of the objects, both may be reconstructed unambiguously.

Abstract translation: 本发明在传感器融合领域，并且在一个实施例中公开了一种用于从空间关系最初未知的低分辨率传感器的组件中提取移动物体的轨迹的方法，除了它们的视野已知 重叠以便形成连续的覆盖区域，其可以比任何单个传感器的视场大得多。 可以从每个传感器的数据中提取物体轨迹的部分，然后缝合在一起以重建对象的轨迹。 缝合过程还允许确定传感器之间的空间关系，使得从关于传感器布置或物体的路径的初步了解很少或没有知道，两者可以被明确地重建。

公开(公告)号：US6118518A

公开(公告)日：2000-09-12

申请号：US256535

申请日：1999-02-24

Applicant: Philip C. D. Hobbs

Inventor： Philip C. D. Hobbs

IPC: G01B9/02 ,  G01B11/00 ,  G01S17/08 ,  G01S17/87 ,  G01S17/89

CPC classification number: G01S17/08 ,  G01B11/00 ,  G01B9/02003 ,  G01B9/02004 ,  G01S17/89 ,  G01B2290/45 ,  G01B2290/65 ,  G01B2290/70 ,  G01S17/87

Abstract: An assembly comprising a 3-D scanner and suitable for capturing at least one of objects, or textures, or documents. The assembly preferably can be developed as a pocket page scanner having dimensions approximately the size of a chalkboard eraser. The assembly preferably utilizes an alignment-insensitive diode laser interferometer. In operation, the assembly enables a user to scan any page-sized area in e.g., a half of second, store a hundred or so of them, then play them back into a PC infrared port for OCR, printing, archival storage, or further processing.

Abstract translation: 一种包括3-D扫描器并且适于捕获至少一个对象或纹理或文档的组件。 该组件优选地可以被开发成具有大约为黑板橡皮擦尺寸的尺寸的口袋式扫描器。 组件优选地使用对准不敏感的二极管激光干涉仪。 在操作中，组件使得用户可以扫描例如二分之一秒的任何页面大小的区域，存储其中的一百个，然后将其回放到用于OCR，打印，归档存储或更进一步的PC红外端口 处理。

公开(公告)号：US5432670A

公开(公告)日：1995-07-11

申请号：US166509

申请日：1993-12-13

Applicant: John S. Batchelder ,  Vaughn P. Gross ,  Robert A. Gruver ,  Philip C. D. Hobbs ,  Kenneth D. Murray

Inventor： John S. Batchelder ,  Vaughn P. Gross ,  Robert A. Gruver ,  Philip C. D. Hobbs ,  Kenneth D. Murray

IPC: B01J19/00 ,  B01J19/12 ,  H01L21/00 ,  H01L21/304 ,  H05F3/06

CPC classification number: H01L21/67028 ,  H05F3/06 ,  Y10S430/138 ,  Y10S438/909

Abstract: Ionization of air without the use of corona discharge tips, thereby to avoid the generation of particulates from corrosion of the corona tips, is accomplished by use of a laser beam focussed to a small focal volume of intense electric field adjacent a semiconductor chip. The electric field is sufficiently intense to ionize air. In the manufacture of a semiconductor circuit chip, during those steps which are conducted in an air environment, opportunity exists to remove from a surface of a chip, or wafer, charge acquired during the manufacturing process. The ionized air is passed along the chip surface. Ions in the air discharge local regions of the chip surface which have become charged by steps of a manufacturing process. By way of further embodiment of the invention, the ionization may be produced by injection of molecules of water into the air, which molecules are subsequently ionized by a laser beam and directed toward the chip via a light shield with the aid of a magnetic field.

Abstract translation: 通过使用聚焦于与半导体芯片相邻的强电场的小焦点体积的激光束来实现空气的离子化，而不使用电晕放电尖端，从而避免由于电晕尖端的腐蚀而产生微粒。 电场足够强以使空气电离。 在半导体电路芯片的制造中，在空气环境中进行的那些步骤中，存在从制造过程中获取的芯片或晶片的表面去除电荷的机会。 电离空气沿芯片表面通过。 芯片表面的空气放电局部区域中的离子通过制造过程的步骤而被充电。 通过本发明的进一步的实施方式，电离可以通过将水分子注入到空气中来产生，该分子随后通过激光束被电离，并借助于磁场通过光屏指向芯片。

公开(公告)号：US5192870A

公开(公告)日：1993-03-09

申请号：US820709

申请日：1992-01-14

Applicant: John S. Batchelder ,  Donald M. DeCain ,  Philip C. D. Hobbs

Inventor： John S. Batchelder ,  Donald M. DeCain ,  Philip C. D. Hobbs

IPC: G01N15/10 ,  G01N15/02 ,  G01N15/14 ,  G01N21/21 ,  G01N21/47 ,  G01N21/94

CPC classification number: G01N15/0205 ,  G01N21/94 ,  G01N15/1434 ,  G01N2015/0238 ,  G01N2015/145

Abstract: A particle detector that determines the presence of particles in an enclosed volume includes a laser that directs a coherent optical beam to a beam splitter that produces first and second divergent beams. An optical system images the point of origin of the two divergent beams within the beam splitter into the enclosed volume, whereby the first and second beams are caused to intersect and interfere at an inspection region within the volume. A detector is positioned adjacent the volume and is responsive to light scattered from one of the beams, as a result of a particle passing through the inspection region, to produce an electrical signal indicative of the intensity of the scattered light. A signal processor analyzes the electrical signals and to determine the presence of the particle. An embodiment of the invention includes an acousto-optic modulator to enable one of the beams to be frequency shifted from the other beam so as to enable the presence of a carrier signal on which a particle's Doppler frequency is modulated. Another embodiment relies upon the Doppler modulation of a reflected optical beam to create an interference pattern at a detector.

公开(公告)号：US5116583A

公开(公告)日：1992-05-26

申请号：US696308

申请日：1991-04-29

Applicant: John S. Batchelder ,  Vaughn P. Gross ,  Philip C. D. Hobbs ,  Robert J. Miller ,  Kenneth D. Murray

Inventor： John S. Batchelder ,  Vaughn P. Gross ,  Philip C. D. Hobbs ,  Robert J. Miller ,  Kenneth D. Murray

IPC: H01T23/00

CPC classification number: H01T23/00

Abstract: A clean non-hydrogen-containing dry gas flows through the corona points of a clean room corona air ionizer in order to suppress the generation of particles.

Abstract translation: 清洁的不含氢的干燥气体流过洁净室电晕空气离子发生器的电晕点，以抑制颗粒的产生。