Substrate Processing Apparatus
    12.
    发明申请
    Substrate Processing Apparatus 审中-公开
    基板加工装置

    公开(公告)号:US20130036970A1

    公开(公告)日:2013-02-14

    申请号:US13641694

    申请日:2011-04-14

    Abstract: A substrate processing apparatus for deposition on a water seated therein is disclosed. The substrate processing apparatus includes a chamber having a reaction space, a lid provided on the chamber to selectively open or close the reaction space, a main disc accommodated in the chamber, on which at least one wafer is placed, and a drive device including a drive shaft to selectively rotate the main disc and a drive unit to drive the drive shaft. The drive shaft is separably coupled to the main disc to transmit drive force. When the lid is opened to expose the reaction space, the main disc is separated from the drive shaft and is discharged to the outside of the chamber in a state in which the wafer is placed thereon.

    Abstract translation: 公开了一种用于沉积在其上的水上的基板处理装置。 基板处理装置包括具有反应空间的室,设置在室上的盖,以选择性地打开或关闭反应空间;容纳在室中的主盘,其上放置至少一个晶片;以及驱动装置, 驱动轴以选择性地旋转主盘和驱动单元以驱动驱动轴。 驱动轴可分离地联接到主盘以传递驱动力。 当盖打开以暴露反应空间时,主盘与驱动轴分离,并且在晶片被放置在其上的状态下被排出到室外。

    Photoresist coating composition and method for forming fine pattern using the same
    13.
    发明授权
    Photoresist coating composition and method for forming fine pattern using the same 有权
    光刻胶涂料组合物和使用其形成精细图案的方法

    公开(公告)号:US07615338B2

    公开(公告)日:2009-11-10

    申请号:US11298385

    申请日:2005-12-08

    CPC classification number: G03F7/40

    Abstract: A photoresist coating composition that includes a compound represented by Formula 1 and an aqueous solvent, and a method for forming a fine pattern by coating the composition on a photoresist pattern to effectively reduce a size of a photoresist contact hole and a space, which can be applied to all semiconductor processes.

    Abstract translation: 包括由式1表示的化合物和水性溶剂的光致抗蚀剂涂料组合物,以及通过在光致抗蚀剂图案上涂覆该组合物以有效地减小光致抗蚀剂接触孔的尺寸和空间来形成精细图案的方法,其可以是 适用于所有半导体工艺。

    Data input/output (I/O) apparatus for use in memory device
    15.
    发明授权
    Data input/output (I/O) apparatus for use in memory device 有权
    用于存储设备的数据输入/输出(I / O)设备

    公开(公告)号:US07161847B2

    公开(公告)日:2007-01-09

    申请号:US11030784

    申请日:2005-01-07

    Applicant: Seung Hun Lee

    Inventor: Seung Hun Lee

    Abstract: A data I/O apparatus for use in a memory device. The data I/O apparatus for use in the memory device performs data transmission using the same polarity when neighbor global I/O lines have opposite polarities to reduce coupling noise generated between global I/O lines acting as data I/O lines of a memory device, performs data recovery, and basically deletes the coupling noise, such that it reduces the failure rate of the memory device.

    Abstract translation: 一种用于存储装置的数据I / O装置。 当相邻全局I / O线具有相反的极性时,用于存储装置的数据I / O装置使用相同的极性执行数据传输,以减少作为充当存储器的数据I / O线的全局I / O线之间产生的耦合噪声 设备,执行数据恢复,并基本上删除耦合噪声,从而降低存储器件的故障率。

    Data input/output sensing circuit of semiconductor memory device
    18.
    发明授权
    Data input/output sensing circuit of semiconductor memory device 失效
    半导体存储器件的数据输入/输出检测电路

    公开(公告)号:US5598371A

    公开(公告)日:1997-01-28

    申请号:US565292

    申请日:1995-11-30

    CPC classification number: G11C7/1057 G11C7/1051 G11C7/1078

    Abstract: A data input/output sensing circuit of a semiconductor memory device including a plurality of memory cells, the circuit comprises: input/output lines of the memory cell; data input/output terminals connected to outside of the memory cells; a single data input/output line connected between the input/output lines and the data input/output terminals; a sensing unit for sensing whether or not effective data is provided in the data input/output lines to thereby generate a sensing signal; an output driving unit for transmitting data of the data input/output lines to the data input/output terminals in response to the sensing signal; and a writing driving unit for inputting data of the data input/output terminals in response to the sensing signal.

    Abstract translation: 一种包括多个存储单元的半导体存储器件的数据输入/输出感测电路,该电路包括:存储单元的输入/输出线; 连接到存储单元外部的数据输入/输出端子; 连接在输入/输出线路和数据输入/输出端子之间的单个数据输入/输出线路; 感测单元,用于检测数据输入/输出线中是否提供有效数据,从而产生感测信号; 输出驱动单元,用于响应于感测信号将数据输入/输出线的数据发送到数据输入/输出端; 以及写入驱动单元,用于响应于感测信号输入数据输入/输出端子的数据。

    METAL-COLORED AND NON-CONDUCTIVE TRANSFER FILM
    20.
    发明申请
    METAL-COLORED AND NON-CONDUCTIVE TRANSFER FILM 有权
    金色和非导电传输膜

    公开(公告)号:US20130295348A1

    公开(公告)日:2013-11-07

    申请号:US13979312

    申请日:2012-01-11

    Abstract: Disclosed is a transfer film which is transferred to an injection molding product. The transfer film includes a protective layer a printing layer which is stacked on the protective layer; a metal deposition layer which is deposited on the printing layer so as to have an island structure and thus to provide non-conductive property; and adhesive layer which is deposited on the metal deposition layer, thereby providing metal color and non-conductive property.

    Abstract translation: 公开了转移到注射成型产品的转移膜。 转印膜包括保护层,层叠在保护层上的印刷层; 金属沉积层,其沉积在印刷层上以具有岛状结构,从而提供非导电性; 以及沉积在金属沉积层上的粘合剂层,从而提供金属颜色和非导电性。

Patent Agency Ranking