Abstract:
The present invention is to provide a storing container wherein Si does not drop onto a single crystal SiC substrate, and Si pressure distribution in an internal space can be made uniform. This storing container stores therein a single crystal SiC substrate to be etched by means of a heat treatment under Si vapor pressure. The storing container is formed of a tantalum metal, and has a tantalum carbide layer provided on an internal space side, and a tantalum silicide layer provided on the side further toward the internal space side than the tantalum carbide layer. The tantalum silicide layer supplies Si to the internal space. Furthermore, the tantalum silicide layer is different from adhered Si, and does not melt and drop.
Abstract:
This method for estimating the depth of latent scratches in SiC substrates includes an etching step, a measurement step, and an estimation step. In the etching step, a SiC substrate in which at least the surface is formed from single crystal SiC, and which has been subjected to machining, is subjected to heat treatment under Si atmosphere to etch the surface of the SiC substrate. In the measurement step, the surface roughness or the residual stress of the SiC substrate which has been subjected to the etching step is measured. In the estimation step, the depth of latent scratches or the presence or absence of latent scratches in the SiC substrate before the etching step are estimated on the basis of the results obtained in the measurement step.
Abstract:
A porous carbon material, in which a total pore volume is 1 mL/g or more, and in which a ratio of a mesopore volume to the total pore volume is 50% or more; a method of producing the same; and an electric double-layer capacitor containing the same.
Abstract:
Provided is a method for producing a novel carbon member-inorganic member joined body. A carbon member-inorganic member joined body including a carbon member and an inorganic member joined together is produced. The carbon member-inorganic member joined body is obtained by forming on the carbon member a layer containing an inorganic material and a sintering aid, and heating the layer.
Abstract:
A method of producing a porous carbon is provided that can change type of functional groups, amount of functional groups, or ratio of functional groups while inhibiting its pore structure from changing. A method of producing a porous carbon includes: a first step of carbonizing a material containing a carbon source and a template source, to prepare a carbonized product; and a second step of immersing the carbonized product into a template removing solution, to remove a template from the carbonized product, and the method is characterized by changing at least two or more of the following conditions: type of the material, ratio of the carbon source and the template source, size of the template, and type of the template removal solution, to thereby control type, amount, or ratio of functional groups that are present in the porous carbon.
Abstract:
Provided is a surface treatment method for a SiC substrate (40), the method being capable of controlling whether to generate a step bunching or the type of step bunching that is generated. In the surface treatment method in which the surface of the SiC substrate (40) is etched by heating the SiC substrate (40) under Si vapor pressure, an etching mode and an etching depth which are determined at least on the basis of an etching rate, are controlled to etch the SiC substrate (40), so that a surface pattern of the SiC substrate (40) after etching treatment is controlled.
Abstract:
A carbon material for bearings includes a porous carbon base material and an impregnation material. The impregnation material is made of resin or metal, and with which the carbon base material is impregnated. The carbon material for bearings includes a plurality of pores. When a pore distribution in the carbon material for bearings is measured by a mercury penetration method using a mercury porosity meter, a cumulative pore volume of pores having a diameter larger than 0.1 μm is not more than 8 mm3/g.
Abstract:
A positive electrode for an air battery that can remarkably improve the battery performance is provided by uniformly dispersing fine Nb (Nb oxide) therein. An air battery using the positive electrode as well as a method of manufacturing the positive electrode is also provided.A positive electrode for an air battery includes an expanded graphite sheet containing expanded graphite and Nb dispersed within the sheet. It is desirable that the Nb be contained in a weight proportion of from 5 ppm to 50000 ppm with respect to the expanded graphite.
Abstract:
Provided is a method for controlling the rate of etching of a SiC substrate based on a composition of a storing container. The etching method of the present invention is for etching the SiC substrate by heating the SiC substrate under Si vapor pressure, in a state where the SiC substrate is stored in a crucible. The crucible is formed of a tantalum metal, and has a tantalum carbide layer provided on an internal space side of the tantalum metal, and a tantalum silicide layer provided on the side further toward the internal space side than the tantalum carbide layer. The rate of etching of the SiC substrate is controlled based on difference in a composition of the tantalum silicide layer.
Abstract:
Provided is a SiC substrate treatment method for, with respect to a SiC substrate (40) that has, on its surface, grooves (41), activating ions while preventing roughening of the surface of the substrate. In the method, an ion activation treatment in which the SiC substrate (40) is heated under Si vapor pressure is performed to the SiC substrate (40) has, on its surface, an ion implantation region (46) in which ions have been implanted, and has the grooves (41) provided in a region including at least the ion implantation region (46), thereby ions that are implanted in the SiC substrate (40) is activated while etching the surface of the substrate.