公开(公告)号：US20070062451A1

公开(公告)日：2007-03-22

申请号：US11162692

申请日：2005-09-20

申请人： Wen-Cheng Hsu ,  Kuo-Chin Hung ,  Chin-Ming Hsu ,  Hor-Ta Chaung ,  Chung-Jun Cheng

发明人： Wen-Cheng Hsu ,  Kuo-Chin Hung ,  Chin-Ming Hsu ,  Hor-Ta Chaung ,  Chung-Jun Cheng

IPC分类号： C23C16/00

CPC分类号： H01J37/32183 ,  H01J37/32082

摘要： A stabilizing system for a plasma process is provided. The system has a high frequency power source, a plasma chamber, a control circuit for outputting a control signal, first switch element and an impedance matching network. The first switch element has a first, a second and a first switch control terminals, wherein the first and the first switch control terminals are coupled to the control circuit to determines whether the first and the second terminals element are connected or not according to the control signal. The impedance matching network has a first terminal coupled to the plasma chamber, a second terminal coupled to the high frequency power source and a matching control terminal coupled to the second terminal of the first switch element. In this way, whether an impedance matching auto-tune operation for the high frequency power is performed or not is determined based on the control signal.

摘要翻译： 提供了一种用于等离子体工艺的稳定系统。 该系统具有高频电源，等离子体室，用于输出控制信号的控制电路，第一开关元件和阻抗匹配网络。 第一开关元件具有第一开关控制端子和第一开关控制端子，其中第一开关控制端子和第一开关控制端子耦合到控制电路，以根据控制来确定第一和第二端子元件是否连接 信号。 阻抗匹配网络具有耦合到等离子体室的第一端子，耦合到高频电源的第二端子和耦合到第一开关元件的第二端子的匹配控制端子。 以这种方式，基于控制信号确定是否执行用于高频功率的阻抗匹配自动调谐操作。

公开(公告)号：US20050238350A1

公开(公告)日：2005-10-27

申请号：US11111141

申请日：2005-04-20

申请人： Wen-Cheng Hsu ,  Ching-Lung Wang ,  Yu-Ying Chan ,  Tseng-Kuei Tseng

发明人： Wen-Cheng Hsu ,  Ching-Lung Wang ,  Yu-Ying Chan ,  Tseng-Kuei Tseng

IPC分类号： G03D5/04 ,  G03D9/00 ,  G03F7/00 ,  G03F7/20 ,  G03F7/30 ,  G03F7/32

CPC分类号： G03F7/32 ,  G03D5/04 ,  G03F7/0007 ,  G03F7/30 ,  G03F7/322

摘要： An apparatus (3) for removing developing solution from a substrate (30) includes a working table (36) for placing the substrate, a supporting frame (33) positioned on the working table, a gas dispensing nozzle (31) mounted on the supporting frame, and a water dispensing nozzle (32) mounted on the supporting frame. The apparatus can remove the residual developing solution from the substrate and needs not to lift the substrate. The substrate is safely processed and the working time is improved.

摘要翻译： 一种用于从基板（30）去除显影液的装置（3），包括：放置基板的工作台（36），位于工作台上的支撑框架（33），安装在支撑件上的气体分配喷嘴 框架和安装在支撑框架上的水分配喷嘴（32）。 该装置可以从基板上除去残留的显影液，并且不需要提起基板。 基板被安全处理，工作时间得到改善。

公开(公告)号：US20050235910A1

公开(公告)日：2005-10-27

申请号：US11111101

申请日：2005-04-20

申请人： Chen Teng ,  Ching-Lung Wang ,  Wen-Cheng Hsu ,  Yu-Ying Chan ,  Tseng-Kuei Tseng ,  Ho-Li Hsieh

发明人： Chen Teng ,  Ching-Lung Wang ,  Wen-Cheng Hsu ,  Yu-Ying Chan ,  Tseng-Kuei Tseng ,  Ho-Li Hsieh

IPC分类号： B05B7/00 ,  B05C5/00 ,  B05C5/02 ,  B05C9/10 ,  B05C15/00 ,  B08B5/04 ,  B08B7/02 ,  G03F7/16

CPC分类号： B08B5/04 ,  B05C5/0254 ,  B05C9/10 ,  B08B7/028 ,  G03F7/16

摘要： A coating apparatus (20) for forming a photoresist film on a substrate (21) includes a flat table (30), a nozzle unit (40), and a particle cleaning unit (50). The flat table is used for supporting the substrate. The nozzle unit is used for dispensing photoresist material on a top surface of the substrate. The particle cleaning unit is used for removing particles from the top surface before the photoresist material is coated thereon. The coating apparatus can timely clean the substrate before coating. The coating performance is improved, and the nozzle unit is protected from being scratched or damaged.

摘要翻译： 用于在基板（21）上形成光致抗蚀剂膜的涂布装置（20）包括平台（30），喷嘴单元（40）和颗粒清洁单元（50）。 平台用于支撑基板。 喷嘴单元用于在基板的顶表面上分配光致抗蚀剂材料。 颗粒清洁单元用于在光致抗蚀剂材料被涂覆之前从顶表面去除颗粒。 涂布装置可以在涂布之前及时清洁基材。 改善了涂层性能，并且防止喷嘴单元被划伤或损坏。

公开(公告)号：US06420886B1

公开(公告)日：2002-07-16

申请号：US09552812

申请日：2000-04-20

申请人： Han-Shin Ho ,  Wei-Hai Lai ,  Chien-Shuan Kuo ,  Deng-Tswen Shieh ,  Wen-Cheng Hsu ,  Wea-Fun Fan ,  Hann-Tsong Wang ,  Yuh-Feng Chen

发明人： Han-Shin Ho ,  Wei-Hai Lai ,  Chien-Shuan Kuo ,  Deng-Tswen Shieh ,  Wen-Cheng Hsu ,  Wea-Fun Fan ,  Hann-Tsong Wang ,  Yuh-Feng Chen

IPC分类号： G01R3102

CPC分类号： G01R1/0735

摘要： A membrane probe card is provided. The membrane probe card includes a pressure mechanism having an upper-housing and a support block. The support block has a spring system for providing a distance of travel to the support block. A printed circuit board is coupled to the pressure mechanism for providing electrical connection to a test apparatus. A membrane assembly is coupled to the pads on a wafer for providing electric connection to the printed circuit board. The membrane assembly is a replaceable and modularized component for application to integrated circuits with various layouts and dimensions.

摘要翻译： 提供膜探针卡。 膜探针卡包括具有上壳体和支撑块的压力机构。 支撑块具有用于向支撑块提供行进距离的弹簧系统。 印刷电路板耦合到压力机构，用于提供与测试装置的电连接。 膜组件耦合到晶片上的焊盘，以提供与印刷电路板的电连接。 膜组件是可更换和模块化的组件，用于应用于具有各种布局和尺寸的集成电路。

公开(公告)号：US20240170225A1

公开(公告)日：2024-05-23

申请号：US17992882

申请日：2022-11-22

申请人： Yu-Peng Chung ,  Chia-Wei Li ,  Wen Cheng Hsu ,  En-Ming Chen ,  Che-Chih Tsao

发明人： Yu-Peng Chung ,  Chia-Wei Li ,  Wen Cheng Hsu ,  En-Ming Chen ,  Che-Chih Tsao

IPC分类号： H01G9/15 ,  H01G9/00 ,  H01G9/012 ,  H01G9/042

CPC分类号： H01G9/151 ,  H01G9/0029 ,  H01G9/012 ,  H01G9/0425

摘要： This invention describes a packaging structure for roll-type (wound-type) aluminum conductive polymer capacitor element. Two protective substrates are applied to sandwich a roll-type capacitor element in between with an insulating material surrounding the capacitor element also in between the protective substrates. The protective substrates comprise electrically separated anodic conductive pad and cathodic conductive pad on their surfaces and through holes that pass through the conductive pads. The capacitor element is oriented with its axis perpendicular to the two substrates. The anodic and cathodic leads of the capacitor element pass through the through holes. An anodic external terminal is plated over the anodic conductive pad and a cathodic external terminal is plated over the cathodic conductive pad so that the anodic external terminal is electrically connected to the anodic lead and the cathodic external terminal is electrically connected to the cathodic lead.

公开(公告)号：US20090054147A1

公开(公告)日：2009-02-26

申请号：US11842495

申请日：2007-08-21

申请人： Shuo-Tsung Chiu ,  Wen-Cheng Hsu

发明人： Shuo-Tsung Chiu ,  Wen-Cheng Hsu

IPC分类号： G06F17/00

CPC分类号： A63F13/424 ,  A63F13/06 ,  A63F13/211 ,  A63F13/235 ,  A63F2300/1006 ,  A63F2300/1031

摘要： An interactive game system has a main apparatus and a wireless controller. The main apparatus has three ultrasonic receiving modules. The wireless controller has an ultrasonic sending module. The three ultrasonic receiving modules receive ultrasonic signals sent by the ultrasonic sending module, and the main apparatus calculates the position of the wireless controller. When the wireless controller is moved, the main apparatus obtains a plurality of coordinate values indicating the motion track of the wireless controller. In this case, an electronic device shows the movement of the wireless controller on a display device by monitoring the coordinate values.

摘要翻译： 交互式游戏系统具有主要装置和无线控制器。 主设备有三个超声波接收模块。 无线控制器具有超声波发送模块。 三个超声波接收模块接收超声波发送模块发送的超声信号，主设备计算无线控制器的位置。 当无线控制器移动时，主设备获得指示无线控制器的运动轨迹的多个坐标值。 在这种情况下，电子设备通过监视坐标值来显示无线控制器在显示设备上的移动。

公开(公告)号：US4598898A

公开(公告)日：1986-07-08

申请号：US578217

申请日：1984-02-08

申请人： Wen-Cheng Hsu ,  Chin-Jia Wu ,  Shuen-Liang Kuo

发明人： Wen-Cheng Hsu ,  Chin-Jia Wu ,  Shuen-Liang Kuo

IPC分类号： B66F3/44 ,  B66F3/24

CPC分类号： B66F3/44

摘要： An improved electrical hydraulic jack of the type having of a jack body with a lift structure and a manually adjustable crown rod telescopically disposed therein, a base plate integrally formed to the jack body, a motor assembly matched with a housing body fixed on the base plate in upright position, wherein the improvement comprises a transmission device installed in the upper portion of the housing body in connection with the motor assembly, and a driving device mechanically coupled between the transmission device and the jack body, thereby, the high revolution of the motor assembly will be reduced, and the revolving motion will be converted into straight line movement for effecting hydraulic lift operation therewith.

摘要翻译： 一种改进的电液压千斤顶，其具有具有提升结构的千斤顶主体和可伸缩地布置在其中的可手动调节的冠杆，与所述千斤顶主体一体形成的基座板，与固定在所述基板上的壳体主体相匹配的马达组件 在直立位置，其中改进包括安装在与马达组件相关的壳体主体的上部的传动装置，以及机械地联接在传动装置和千斤顶体之间的驱动装置，由此马达的高转 组装将减少，并且旋转运动将被转换成直线运动以用于进行液压升降操作。

公开(公告)号：US20240304394A1

公开(公告)日：2024-09-12

申请号：US18445743

申请日：2024-01-12

申请人： Yu-Peng Chung ,  Chia-Wei Li ,  Wen Cheng Hsu ,  En-Ming Chen ,  Che-Chih Tsao

发明人： Yu-Peng Chung ,  Chia-Wei Li ,  Wen Cheng Hsu ,  En-Ming Chen ,  Che-Chih Tsao

IPC分类号： H01G9/00 ,  H01G9/008 ,  H01G9/08

CPC分类号： H01G9/0029 ,  H01G9/008 ,  H01G9/08

摘要： This invention describes a packaging structure for roll-type (wound-type) aluminum conductive polymer capacitor element. Two protective substrates are applied to sandwich a roll-type capacitor element in between with an insulating material surrounding the capacitor element also in between the protective substrates. The protective substrates comprise electrically separated anodic conductive pad and cathodic conductive pad on their surfaces. The capacitor element is oriented with its axis perpendicular to the two substrates. The anodic and cathodic leads of the capacitor element pass through the through holes. An anodic external terminal is plated over the anodic conductive pad and a cathodic external terminal is plated over the cathodic conductive pad so that the anodic external terminal is electrically connected to the anodic lead and the cathodic external terminal is electrically connected to the cathodic lead. In another arrangement, the anodic and cathodic leads are bent by about 90 degree so that they point to the two sides of the packaging. External terminals are placed on the two sides of the packaging on the surfaces of the insulating material. In still another arrangement, the packaging structure uses only one protective substrate.

公开(公告)号：US08550345B2

公开(公告)日：2013-10-08

申请号：US12120909

申请日：2008-05-15

申请人： Cheng-Fang Huang ,  Pin-Hsun Huang ,  Chih-Hsiang Wang ,  Wen-Cheng Hsu ,  Yi-fang cho ,  An-Hong Liu ,  Yi-Chang Lee

发明人： Cheng-Fang Huang ,  Pin-Hsun Huang ,  Chih-Hsiang Wang ,  Wen-Cheng Hsu ,  Yi-fang cho ,  An-Hong Liu ,  Yi-Chang Lee

IPC分类号： G06F19/00

CPC分类号： G06Q10/08

摘要： This invention provides an RFID real-time information system accommodated to a semiconductor supply chain for exchanging real-time information. The RFID real-time information system is characterized by comprising an RFID middleware module for generating a stock and logistic information corresponding to a plurality of carriers and wafers from a tag information; a manufacturing information module for storing an object information corresponding to the plurality of wafers; a real-time information module for integrating the RFID middleware module with the manufacturing information module to generate real-time information corresponding to the plurality of wafers and carriers; and a business-to-business (B2B) e-commerce module comprising a plurality of B2B servers respectively disposed in vendors in the semiconductor supply chain for connecting and exchanging the real-time information through a standard protocol of e-commerce.

摘要翻译： 本发明提供一种适用于半导体供应链的RFID实时信息系统，用于交换实时信息。 RFID实时信息系统的特征在于包括：RFID中间件模块，用于从标签信息生成对应于多个载体和晶片的库存和物流信息; 制造信息模块，用于存储对应于所述多个晶片的对象信息; 实时信息模块，用于将RFID中间件模块与制造信息模块集成，以生成与多个晶片和载体对应的实时信息; 以及分别设置在半导体供应链的供应商中的多个B2B服务器的企业对企业（B2B）电子商务模块，用于通过电子商务的标准协议来连接和交换实时信息。

公开(公告)号：US07609053B2

公开(公告)日：2009-10-27

申请号：US12061781

申请日：2008-04-03

申请人： Wen Cheng Hsu ,  Min Ming Lo ,  Chao Chien Wang ,  Yi Fang Cho

发明人： Wen Cheng Hsu ,  Min Ming Lo ,  Chao Chien Wang ,  Yi Fang Cho

IPC分类号： G01R31/28 ,  G06F17/00 ,  G08B13/14 ,  G06F7/00

CPC分类号： G01R31/01 ,  G01R31/2893

摘要： This invention provides a wafer testing system and testing method thereof. The wafer testing system comprises a wafer storage section, a prober, a tester, an RFID middleware unit, an EDA system and an MES system. The wafer storage section stores a multiplicity of carriers, each of which is provided with at least a RFID tag. The prober comprises a RFID reader to read a tag information. The tester sends a test signal to the prober for implementing the wafer test so as to generate a test result and calls an interface program to convert the test result into a file conformed with a specific data format. The RFID middleware unit receives the tag information and calls related applications to process the tag information so as to generate a wafer information. The EDA system receives the file of the specific data format converted from the interface program and calculates thereof to generate a wafer yield information after wafer test. The MES system integrates the wafer information from the RFID middleware unit with the yield information from the EDA system so as to allow monitoring the wafer manufacturing process and testing yield rate in a real-time manner.

摘要翻译： 本发明提供了一种晶片测试系统及其测试方法。 晶片测试系统包括晶片存储部分，探测器，测试器，RFID中间件单元，EDA系统和MES系统。 晶片存储部存储多个载体，每个载体至少设有RFID标签。 该探测器包括读取标签信息的RFID读取器。 测试仪将测试信号发送到探测器，以实现晶片测试，以产生测试结果，并调用接口程序将测试结果转换为符合特定数据格式的文件。 RFID中间件单元接收标签信息并调用相关应用程序来处理标签信息以产生晶片信息。 EDA系统接收从接口程序转换的特定数据格式的文件，并计算它们以在晶片测试之后生成晶片产量信息。 MES系统将RFID中间件单元的晶圆信息与EDA系统的产量信息相集成，以便实时监控晶圆制造过程和测试成品率。