Abstract:
Methods of forming an electronic device including a substrate and a raised pattern on the substrate are provided. For example, a first insulating layer may be formed on the raised pattern and on the substrate. More particularly, forming the first insulating layer may include forming a first portion of the first insulating layer using a first processing condition and forming a second portion of the first insulating layer using a second processing condition. After forming the first insulating layer including the first and second portions, portions of the first insulating layer may be removed to expose portions of the raised pattern while maintaining portions of the first insulating layer on the substrate. After removing portions of the first insulating layer, a second insulating layer may be formed on the exposed portions of the raised pattern and on the maintained portions of the first insulating layer.
Abstract:
A semiconductor structure includes a material layer on a substrate and to be patterned, an amorphous carbon layer on the material layer to be patterned, an N-free anti-reflective layer on the amorphous carbon layer, and a photoresist layer on the N-free anti-reflective layer. The N-free anti-reflective layer contains SiCXOYHZ as a main element. Related methods of patterning semiconductor structures also are provided.
Abstract translation:半导体结构包括在基板上的待图案化的材料层,待图案化的材料层上的无定形碳层,非晶碳层上的无N抗反射层,以及无N层的光致抗蚀剂层 防反射层。 不含N的抗反射层含有作为主要元素的碳化X O Y Y H。。。。。。。。。。。。。。。。。 还提供了图案化半导体结构的相关方法。
Abstract:
The present invention relates to a liquid crystal display device that prevents a color shift by allowing two sub-pixel areas to have the same transmittance. A liquid crystal display device according to the present invention includes a data line that includes: a connection portion having a direction of extension perpendicular to that of a gate line; a first portion oriented at a first angle with respect to a direction of extension of the connection portion; and a second portion oriented at a second angle different from the first angle with respect to the direction of extension of the connection portion, and wherein an angle between a rubbing direction of the liquid crystal and the connection portion satisfies θ L = θ 2 - θ 1 2 (where θL is the angle between the rubbing direction of the liquid crystal and the direction of extension of the connection portion, θ1: the first angle, θ2: the second angle).
Abstract:
A roller for a belt conveyer. A roller tube has an engraved groove for indicating the degree to which the surface of the roller is abraded. A shaft reinforcement member is provided in one end of the roller tube, connected to a shaft disposed inside the roller tube, and rotatably coupled to the belt conveyor. A dustproof cover closes one end of the roller tube, and the shaft reinforcement member extends through the dustproof cover. A bearing housing is fitted into the dustproof cover, with a bearing thereof being rotatably coupled to the outer circumference of the shaft reinforcement member. A flat spring is fitted into the bearing housing, and elastically supports one surface of the bearing, thereby controlling expansion or contraction of the bearing. An end cap is fixedly coupled to an outer surface of the dustproof cover in order to block impurities from entering the roller.
Abstract:
A memory device includes a charge trapping layer on a substrate, an insulating layer on the substrate adjacent to the charge trapping layer and exposing an upper surface of the charge trapping layer, a dielectric layer on the exposed charge trapping layer and on the insulating layer, and an electrode on the dielectric layer, the electrode corresponding to the charge trapping layer.
Abstract:
A memory device includes a charge trapping layer on a substrate, an insulating layer on the substrate adjacent to the charge trapping layer and exposing an upper surface of the charge trapping layer, a dielectric layer on the exposed charge trapping layer and on the insulating layer, and an electrode on the dielectric layer, the electrode corresponding to the charge trapping layer.
Abstract:
A metal via contact of a semiconductor device and a method for fabricating the same, wherein the method includes sequentially forming a first insulating layer, a low dielectric SOG (Spin On Glass) layer, a second insulating layer and a silicon oxynitride (SiON) layer on a semiconductor substrate forming a photoresist pattern, using the photoresist pattern as an etching mask and wet etching the silicon oxynitride layer and a portion of the second insulating layer, using the same photoresist pattern as an etching mask and anisotropically etching remainder second insulating layer, the low dielectric SOG layer and the first insulating layer to form a via hole exposing a predetermined portion of the semiconductor substrate, removing the photoresist pattern, using radio frequency (RF) etching to remove a reverse slope of the via hole and forming a metal plug in the via hole.