摘要:
An apparatus for characterizing capacitance and thickness of an insulating layer constructed between a conductive gate and a substrate has at least one test structure formed at a surface of a substrate. Each test structure has a bulk region formed of a semiconductor within the surface. Further the test structure has at least one source region and one drain region within the bulk region. A thin insulating layer is placed above the each source region, each drain region, and the bulk region. A conductive gate is placed above the thin insulating layer. A capacitance-voltage measuring device measures a capacitance value of the test structure, while forcing the bulk region between the source region and the drain region to be floating. An insulating layer thickness calculator determines the thickness of the insulating layer from the capacitance.
摘要:
A method for forming silicide and a semiconductor device formed thereby. A Si-containing polycrystalline region is converted to an amorphous region, and annealed to form a regrown polycrystalline region having an increased grain size. A silicide layer is formed by reacting a metal and the regrown polycrystalline region having the increased grain size.
摘要:
A utility knife is provided, including: a housing, defining an operation compartment and a storage compartment; a blade holder, movably received within the operation compartment; a blade storing carrier, movably received within the storage compartment, including a receiving portion for receiving at least one spare blade and a grip portion; and a locking mechanism, including a base body, a movable member, a first engaging member and a second engaging member, the base body being disposed to the housing, the movable member being attached to the base body and movable between a locking position and a release position, the first engaging member being disposed on and movable with the movable member, the first engaging member and the second engaging member are releasably engaged with each other so that the blade storing carrier is detachable from the housing.
摘要:
A packaging bag includes a sealed bag and a radio frequency identification (RFID) tag attached to an easily tearable line proximate to a sealed end of the sealed bag, such that when a user tears the sealed bag along the easily tearable line, the RFID tag is damaged to effectively prevent confidential information stored in the RFID tag from being stolen by others.
摘要:
The present invention is to provide a packaging material having a radio frequency identification (RFID) function and a bag structure using the same, wherein the packaging material comprises a surface material having an inner surface covered with a metal layer (such as aluminum foil), the metal layer has a slot with a width considerably smaller than a length thereof, and two longer side edges of the slot are connected to two feed-in ends of a radio frequency identification (RFID) chip, respectively, so as to form a slot antenna on the metal layer and enable the RFID chip to receive signals of electro-magnetic waves through the slot antenna. Therefore, the packaging material having the RFID function can be easily and speedily manufactured by forming the slot on the metal layer and installing the RFID chip to the corresponding positions of the metal layer.
摘要:
The present invention discloses a packaging material with a RFID tag, and the packaging material includes a surface material, a protecting layer printed on an internal side of the surface material, a conducting layer formed on the protecting layer to constitute a pattern of a transceiver antenna, a chip coupled to a feedback terminal of the transceiver antenna to form the RFID tag, a substrate and a coupling agent for combining an internal side of the surface material with an internal side of the substrate. The invention also discloses a method of manufacturing the packaging material with the RFID tag.
摘要:
A method for forming a field effect transistor device employs a conformal spacer layer formed upon a gate electrode. The gate electrode is employed as a mask for forming a lightly doped extension region within the semiconductor substrate and the gate electrode and conformal spacer layer are employed as a mask for forming a source/drain region within the semiconductor substrate. An anisotropically etched shaped spacer material layer is formed upon the conformal spacer layer and isotropically etched to enhance exposure of the source/drain region prior to forming a silicide layer thereupon.
摘要:
An apparatus for characterizing capacitance and thickness of an insulating layer constructed between a conductive gate and a substrate has at least one test structure formed at a surface of a substrate. Each test structure has a bulk region formed of a semiconductor within the surface. Further the test structure has at least one source region and one drain region within the bulk region. A thin insulating layer is placed above the each source region, each drain region, and the bulk region. A conductive gate is placed above the thin insulating layer. A capacitance-voltage measuring device measures a capacitance value of the test structure, while forcing the bulk region between the source region and the drain region to be floating. An insulating layer thickness calculator determines the thickness of the insulating layer from the capacitance.
摘要:
A method for improving the planarity of a semiconductor chip using chemical-mechanical polishing during a shallow trench isolation process is described. Specifically, an polish-stop layer, preferably of silicon nitride, is formed over a semiconductor wafer (or optionally formed over a pad oxide layer formed on the wafer). A cap layer, preferably of polysilicon, is then formed over the polish-stop layer. The active regions of the chip are defined, preferably using a photoresist mask by photolithography. The wafer, polish-stop and cap layers are then etched, between the active regions, to form shallow trenches. A lining dielectric layer, preferably an oxide, is formed over the etched and non-etched regions to fill the shallow trenches for isolation purposes. The dielectric layer has an etching rate at least three times greater than the etching rate of cap layer. When polysilicon is selected as the cap layer and oxide is selected as the dielectric layer, the selectivity rate is greater than ten. However, the conventional oxide dielectric/nitride layer etching selectivity rate is less than three. Accordingly, the present invention provides a far greater etching selectivity rate than the prior art. In addition, the polish rate of the cap layer is much higher that that of the polish-stop layer. Therefore, the cap layer can be easily removed which reduces the CMP time while minimizing the dishing effect.