公开(公告)号：US20130164652A1

公开(公告)日：2013-06-27

申请号：US13478901

申请日：2012-05-23

申请人： Yushan Yan ,  Xin Wang ,  Wenzhen Li ,  Mahesh Waje ,  Zhongwei Chen ,  William Goddard ,  Wei-Qiao Deng

发明人： Yushan Yan ,  Xin Wang ,  Wenzhen Li ,  Mahesh Waje ,  Zhongwei Chen ,  William Goddard ,  Wei-Qiao Deng

IPC分类号： H01M8/10

CPC分类号： H01M4/881 ,  H01M4/8605 ,  H01M4/92 ,  H01M4/926 ,  H01M8/1004 ,  H01M8/1011 ,  Y02E60/523

摘要： Novel proton exchange membrane fuel cells and direct methanol fuel cells with nanostructured components are configured with higher precious metal utilization rate at the electrodes, higher power density, and lower cost. To form a catalyst, platinum or platinum-ruthenium nanoparticles are deposited onto carbon-based materials, for example, single-walled, dual-walled, multi-walled and cup-stacked carbon nanotubes. The deposition process includes an ethylene glycol reduction method. Aligned arrays of these carbon nanomaterials are prepared by filtering the nanomaterials with ethanol. A membrane electrode assembly is formed by sandwiching the catalyst between a proton exchange membrane and a diffusion layer that form a first electrode. The second electrode may be formed using a conventional catalyst. The several layers of the MEA are hot pressed to form an integrated unit. Proton exchange membrane fuel cells and direct methanol fuel cells are developed by stacking the membrane electrode assemblies in a conventional manner.

摘要翻译： 新型质子交换膜燃料电池和具有纳米结构组分的直接甲醇燃料电池配置在电极上的贵金属利用率更高，功率密度更高，成本更低。 为了形成催化剂，将铂或铂 - 钌纳米颗粒沉积在碳基材料上，例如单壁，双壁，多壁和杯堆叠碳纳米管。 沉积工艺包括乙二醇还原法。 通过用乙醇过滤纳米材料来制备这些碳纳米材料的对准阵列。 通过将催化剂夹在质子交换膜和形成第一电极的扩散层之间形成膜电极组件。 第二电极可以使用常规的催化剂形成。 MEA的几层被热压形成一个集成的单元。 质子交换膜燃料电池和直接甲醇燃料电池通过以常规方式堆叠膜电极组件来开发。

公开(公告)号：US07919760B2

公开(公告)日：2011-04-05

申请号：US12331336

申请日：2008-12-09

申请人： Jack Jau ,  Hong Xiao ,  Joe Wang ,  Zhongwei Chen ,  Yi Xiang Wang ,  Edward Tseng

发明人： Jack Jau ,  Hong Xiao ,  Joe Wang ,  Zhongwei Chen ,  Yi Xiang Wang ,  Edward Tseng

IPC分类号： G21K5/10

CPC分类号： H01J37/28 ,  H01J37/20 ,  H01J2237/202 ,  H01J2237/2817 ,  H01L21/67288 ,  H01L21/6831

摘要： The present invention relates to an operation stage of a charged particle beam apparatus which is employed in a scanning electron microscope for substrate (wafer) edge and backside defect inspection or defect review. However, it would be recognized that the invention has a much broader range of applicability. A system and method in accordance with the present invention provides an operation stage for substrate edge inspection or review. The inspection region includes top near edge, to bevel, apex, and bottom bevel. The operation stage includes a supporting stand, a z-stage, an X-Y stage, an electrostatic chuck, a pendulum stage and a rotation track. The pendulum stage mount with the electrostatic chuck has the ability to swing from 0° to 180° while performing substrate top bevel, apex and bottom bevel inspection or review. In order to keep the substrate in focus and avoid a large position shift during altering the substrate observation angle by rotation the pendulum stage, one embodiment of the present invention discloses a method such that the rotation axis of the pendulum stage consist of the tangent of upper edge of the substrate to be inspected. The electrostatic chuck of the present invention has a diameter smaller than which of the substrate to be inspected. During the inspection process the substrate on the electrostatic chuck may be rotated about the central axis on the electrostatic chuck to a desired position, this design insures all position on the bevel and apex are able to be inspected.

摘要翻译： 本发明涉及用于基板（晶片）边缘和背面缺陷检查或缺陷检查的扫描电子显微镜中的带电粒子束装置的操作阶段。 然而，应当认识到，本发明具有更广泛的应用范围。 根据本发明的系统和方法提供了用于衬底边缘检查或审查的操作阶段。 检查区域包括顶部近边缘，斜面，顶点和底部斜面。 操作台包括支撑台，z台，X-Y台，静电卡盘，摆台和旋转轨道。 具有静电卡盘的摆台安装具有从0°摆动到180°的能力，同时执行基板顶部斜面，顶部和底部斜面检查或检查。 为了将基板保持在对焦状态，并且通过旋转摆锤台来改变基板观察角度而避免大的位置偏移，本发明的一个实施例公开了一种方法，使得摆台的旋转轴线由上部的切线 要检查的基板的边缘。 本发明的静电卡盘的直径小于要检查的基板的直径。 在检查过程中，静电卡盘上的基板可以围绕静电卡盘上的中心轴线旋转到期望的位置，该设计确保能够检查斜面上的所有位置和顶点。

公开(公告)号：US20100270468A1

公开(公告)日：2010-10-28

申请号：US12832127

申请日：2010-07-08

申请人： Xuedong Liu ,  Xu Zhang ,  Joe Wang ,  Edward Tseng ,  Zhongwei Chen

发明人： Xuedong Liu ,  Xu Zhang ,  Joe Wang ,  Edward Tseng ,  Zhongwei Chen

IPC分类号： H01J37/145 ,  H01J37/28

CPC分类号： H01J37/145 ,  H01J37/28 ,  H01J2237/0475 ,  H01J2237/12 ,  H01J2237/14 ,  H01J2237/24485 ,  H01J2237/2807

摘要： System and method for charged particle beam. According an embodiment, the present invention provides a charged particle beam apparatus. The apparatus includes a charged particle source for generating a primary charged particle beam. The apparatus also includes at least one condenser lens for pre-focusing the primary charge particle beam. Furthermore, the apparatus includes a compound objective lens for forming the magnetic field and the electrostatic field to focus the primary charged particle beam onto a specimen in the charged particle beam path. The specimen includes a specimen surface. The compound objective lens includes a conical magnetic lens, an immersion magnetic lens, and an electrostatic lens, the conical magnetic lens including an upper pole piece, a shared pole piece being electrically insulated from the upper pole piece, and an excitation coil.

摘要翻译： 带电粒子束的系统和方法。 根据实施例，本发明提供一种带电粒子束装置。 该装置包括用于产生初级带电粒子束的带电粒子源。 该装置还包括用于预聚焦初级充电粒子束的至少一个聚光透镜。 此外，该装置包括用于形成磁场的复合物镜和静电场，以将初级带电粒子束聚焦到带电粒子束路径中的样本上。 样品包括样品表面。 复合物镜包括锥形磁性透镜，浸没式磁透镜和静电透镜，该圆锥形磁性透镜包括上极片，与上极片电绝缘的共用极片和励磁线圈。

公开(公告)号：US20090220835A1

公开(公告)日：2009-09-03

申请号：US12224197

申请日：2007-02-24

申请人： Yan Yushan ,  Zhongwei Chen

发明人： Yan Yushan ,  Zhongwei Chen

IPC分类号： H01M8/10 ,  H01M4/88

CPC分类号： H01M4/92 ,  C22C5/04 ,  H01M4/8814 ,  H01M4/921 ,  H01M4/928 ,  H01M2008/1095 ,  Y02E60/50 ,  Y02E60/523

摘要： Electrocatalyst durability has been recently recognized as one of the most important issues that have to be addressed before the commercialization of the proton exchange membrane fuel cells (PEMFCs). The present invention is directed to a new class of cathode catalysts based on supportless platinum nanotubes (PtNTs) and platinum alloy nanotubes, for example, platinum-palladium nanotubes (PtPdNTs), that have remarkable durability and high catalytic activity. Due to their unique combination of dimensions at multiple length scales, the platinum nanotubes of the present invention can provide high platinum surface area due to their nanometer-sized wall thickness, and have the potential to eliminate or alleviate most of the degradation pathways of the commercial carbon supported platinum catalyst (Pt/C) and unsupported platinum-black (PtB) as a result of their micrometer-sized length. The platinum nanotube catalysts of the present invention asymptotically approach a maximum of about twenty percent platinum surface area loss in durability test, while the commercial PtB and Pt/C catalysts lose about fifty-one percent and ninety percent of their initial surface area, respectively. Moreover, the PtNT and PtPdNT catalysts of the present invention show higher mass activity and much higher specific activity than commercial Pt/C and PtB catalysts.

摘要翻译： 电催化剂耐久性最近被认为是在质子交换膜燃料电池（PEMFC）商业化之前必须解决的最重要的问题之一。 本发明涉及一类新型的基于无支撑铂纳米管（PtNTs）和铂合金纳米管（例如铂 - 钯纳米管（PtPdNTs））的阴极催化剂，其具有显着的耐久性和高催化活性。 由于它们在多个长度尺度上的独特的尺寸组合，本发明的铂纳米管由于其纳米尺寸的壁厚可以提供高的铂表面积，并且具有消除或减轻商业的大部分降解途径的潜力 碳负载的铂催化剂（Pt / C）和无支撑的铂黑（PtB），由于其微米尺寸的长度。 本发明的铂纳米管催化剂在耐久性试验中渐近地接近约百分之二十的铂表面积损失，而商业PtB和Pt / C催化剂分别损失其初始表面积的百分之五十一和百分之九十。 此外，本发明的PtNT和PtPdNT催化剂显示比商业Pt / C和PtB催化剂更高的质量活性和更高的比活性。

公开(公告)号：US06815345B2

公开(公告)日：2004-11-09

申请号：US10302809

申请日：2002-11-21

申请人： Yan Zhao ,  Chang-Chun (Roland) Yeh ,  Zhongwei Chen ,  Jack Jau

发明人： Yan Zhao ,  Chang-Chun (Roland) Yeh ,  Zhongwei Chen ,  Jack Jau

IPC分类号： H01L2144

CPC分类号： H01L22/34 ,  H01L21/76802 ,  H01L22/24

摘要： A method for in-line monitoring of via/contact etching process based on a test structure is described. The test structure is comprised of via/contact holes of different sizes and densities in a layout such that, for a certain process, the microloading or RIE lag induced non-uniform etch rate produce under-etch in some regions and over-etch in others. A scanning electron microscope is used to distinguish these etching differences in voltage contrast images. Image processing and simple calibration convert these voltage contrast images into a “fingerprint” image characterizing the etching process in terms of thickness over-etched or under-etched. Tolerance of shifting or deformation of this image can be set for validating the process uniformity. This image can also be used as a measure to monitor long-term process parameter shifting, as well as wafer-to-wafer or lot-to-lot variations. Advanced process control (APC) can be performed in-line with the guidance of this image so that potential electrical defects are avoided and process yield ramp accelerated.

摘要翻译： 描述了一种基于测试结构进行通孔/接触蚀刻工艺在线监测的方法。 测试结构由布局不同尺寸和密度的通孔/接触孔组成，使得对于某些工艺，微加载或RIE滞后引起的不均匀蚀刻速率在一些区域产生蚀刻不良并且在其它区域中过度蚀刻 。 使用扫描电子显微镜来区分电压对比图像中的这些蚀刻差异。 图像处理和简单校准将这些电压对比图像转换成表征蚀刻工艺的“指纹”图像，就厚度过蚀刻或欠蚀刻而言。 该图像的偏移或变形的公差可以设置为验证过程的均匀性。 该图像也可用作监视长期过程参数移位以及晶圆到晶圆或批次间变化的度量。 先进的过程控制（APC）可以与该图像的引导一起进行，以便避免潜在的电气缺陷，加速产出斜率。

公开(公告)号：US11328898B2

公开(公告)日：2022-05-10

申请号：US17305514

申请日：2021-07-08

申请人： Zhongwei Chen ,  Xiaoming Chen ,  Daniel Tang ,  Liang-Fu Fan

发明人： Zhongwei Chen ,  Xiaoming Chen ,  Daniel Tang ,  Liang-Fu Fan

IPC分类号： H01J37/244 ,  H01J37/28 ,  H01J37/22

摘要： The present invention provides a digital high-resolution detector for detecting X-ray, UV light or charged particles. In various embodiments, the digital detector comprises an array of CMOS or CCD pixels and a layer of conversion material on top of the array designed for converting incident X-ray, UV light or charged particles into photons for CMOS or CCD sensors to capture. The thin and high-resolution detector of the invention is particularly useful for monitoring and aligning beams in, and optimizing system performance of, an apparatus of charged-particle beam e.g. an electron microscope.

公开(公告)号：US20220108443A1

公开(公告)日：2022-04-07

申请号：US17452999

申请日：2021-10-31

申请人： Zhongwei Chen ,  Xiaoming Chen ,  Daniel Tang ,  Liang-Fu Fan

发明人： Zhongwei Chen ,  Xiaoming Chen ,  Daniel Tang ,  Liang-Fu Fan

IPC分类号： G06T7/00 ,  G06T7/50 ,  H01J37/28

摘要： A rapid and automatic virus imaging and analysis system includes (i) electron optical sub-systems (EOSs), each of which has a large field of view (FOV) and is capable of instant magnification switching for rapidly scanning a virus sample; (ii) sample management sub-systems (SMSs), each of which automatically loads virus samples into one of the EOSs for virus sample scanning and then unloads the virus samples from the EOS after the virus sample scanning is completed; (iii) virus detection and classification sub-systems (VDCSs), each of which automatically detects and classifies a virus based on images from the EOS virus sample scanning; and (iv) a cloud-based collaboration sub-system for analyzing the virus sample scanning images, storing images from the EOS virus sample scanning, and storing and analyzing machine data associated with the EOSs, the SMSs, and the VDCSs.

公开(公告)号：US20160351371A1

公开(公告)日：2016-12-01

申请号：US14940102

申请日：2015-11-12

申请人： Shuai Li ,  Wei He ,  Zhongwei Chen

发明人： Shuai Li ,  Wei He ,  Zhongwei Chen

IPC分类号： H01J37/145 ,  H01J37/28 ,  H01J37/21 ,  H01J37/147

CPC分类号： H01J37/145 ,  H01J37/1477 ,  H01J37/21 ,  H01J37/28 ,  H01J2237/0473 ,  H01J2237/2802

摘要： The present invention provides a scanning transmission electron microscope (STEM). In the STEM, a specimen is sandwiched between a variable axis objective lens and a variable axis collection lens. The axis of the collection lens varies along with the variation of the objective lens axis in a coordinated manner. The STEM of the invention exhibits technical merits such as large scanning field, high image resolution across the entire scanning field, and high throughput, among others.

摘要翻译： 本发明提供扫描透射电子显微镜（STEM）。 在STEM中，将样本夹在可变轴物镜和可变轴收集透镜之间。 收集透镜的轴线随着物镜轴的协调变化而变化。 本发明的STEM具有如扫描场大，整个扫描场的高图像分辨率，高通量等技术优点。

公开(公告)号：US20160322645A1

公开(公告)日：2016-11-03

申请号：US15106222

申请日：2014-12-17

申请人： Zhongwei Chen ,  Dong Un Lee

发明人： Zhongwei Chen ,  Dong Un Lee

IPC分类号： H01M4/90 ,  H01M12/08 ,  H01M12/06 ,  H01M4/86 ,  H01M4/88

CPC分类号： H01M4/9016 ,  C25B11/035 ,  H01M4/8615 ,  H01M4/8652 ,  H01M4/8668 ,  H01M4/8673 ,  H01M4/8828 ,  H01M4/8896 ,  H01M12/06 ,  H01M12/08 ,  H01M2004/8689 ,  Y02E60/128

摘要： A single layer air electrode comprising a porous active catalyst framework. The porous active catalyst framework comprises metallic macroparticles, an active catalyst, a substrate and a binder. The porous active catalyst framework acting as both the active catalyst layer and the gas diffusion layer.

摘要翻译： 包含多孔活性催化剂骨架的单层空气电极。 多孔活性催化剂骨架包括金属大颗粒，活性催化剂，底物和粘合剂。 用作活性催化剂层和气体扩散层的多孔活性催化剂骨架。

公开(公告)号：US20150338316A1

公开(公告)日：2015-11-26

申请号：US14284328

申请日：2014-05-21

申请人： Zhongwei Chen

发明人： Zhongwei Chen

IPC分类号： G01N1/06 ,  G01N1/28 ,  B26D7/18

CPC分类号： G01N1/06 ,  B26D7/1845 ,  G01N1/286 ,  G01N2001/061 ,  G01N2001/063 ,  G01N2001/066 ,  G01N2001/2873 ,  Y10T83/0448 ,  Y10T83/0453 ,  Y10T83/2066 ,  Y10T83/2096

摘要： Provided is a microtomic system and process for the preparation of sections for microscope examination. A cutting edge in the system can cut through a sample block and produce a section one end of which remains attached to the cutting edge. A voltage generator can generate a voltage and apply the voltage between the cutting edge and a section receiver such as a semiconductor chip grid. Through electrostatic force caused by the voltage, another end of the section can anchor to the section receiver. The section is then spread on the receiver. The system is automatable, highly efficient, and does not need liquid to float sample sections, and can therefore maintain the integration of the sample sections.

摘要翻译： 提供了用于制备用于显微镜检查的切片的显微镜系统和方法。 系统中的切割边缘可以切割出样品块，并产生其一端保持附着到切割边缘的部分。 电压发生器可以产生电压并且在切割边缘和诸如半导体芯片格栅之类的部分接收器之间施加电压。 通过由电压引起的静电力，该部分的另一端可以锚定到部分接收器。 然后将该部分扩展到接收器。 该系统是可自动化的，高效率的，并且不需要液体漂浮样品部分，因此可以保持样品部分的整合。