Micromechanical anchor structure
    11.
    发明授权
    Micromechanical anchor structure 失效
    微机械锚结构

    公开(公告)号:US5583291A

    公开(公告)日:1996-12-10

    申请号:US509368

    申请日:1995-07-31

    摘要: A micromachined structure having at least one anchor that includes a supporting substrate with a first and a second foot fixedly positioned on the surface of the substrate and each foot has a supporting edge, which edges are positioned in parallel spaced apart relationship, an elongated tether positioned in spaced relation from the surface of the substrate and extending from the micromachined structure parallel to the parallel supporting edges of the first and the second foot, and first and second risers extending along the supporting edges of the first foot and the second foot, respectively, and rising upwardly to the edges of the tether. The first and the second foot, the first and second risers and the tether being formed integrally by surface micromachining.

    摘要翻译: 一种微加工结构,其具有至少一个锚,其包括支撑基底,第一和第二脚固定地定位在基底的表面上,并且每个脚具有支撑边缘,该边缘以平行间隔开的​​关系定位, 与衬底的表面间隔开并且从微机械结构平行于第一和第二脚的平行支撑边缘延伸,并且分别沿着第一脚和第二脚的支撑边缘延伸的第一和第二立管, 并向上升到系绳的边缘。 第一和第二脚,第一和第二立管和系绳通过表面微加工一体地形成。

    Laterally sensitive accelerometer and method for making
    12.
    发明授权
    Laterally sensitive accelerometer and method for making 失效
    侧向敏感的加速度计和制造方法

    公开(公告)号:US5337606A

    公开(公告)日:1994-08-16

    申请号:US926616

    申请日:1992-08-10

    摘要: A micromachined capacitor structure having a first anchor (12) attached to the substrate (24), a tether (13) coupled to the anchor (12) and having a portion free to move in a lateral direction over the substrate (24) in response to acceleration. A tie-bar (14) is coupled to the movable portion of the tether (13), and at least one movable capacitor plate (16) is coupled to the tie bar (13). A first fixed capacitor plate (16) is attached to the substrate (24) laterally overlapping and vertically spaced from the at least one movable capacitor plate (16).

    摘要翻译: 一种微加工电容器结构,其具有附接到所述基板(24)的第一锚固件(12),联接到所述锚固件(12)的系绳(13),并且具有在所述基板(24)上沿横向移动的部分,以响应 加速。 连杆(14)联接到系绳(13)的可移动部分,并且至少一个可移动电容器板(16)联接到连接杆(13)。 第一固定电容器板(16)与至少一个可移动电容器板(16)横向重叠并垂直间隔地安装到基板(24)。

    Package tolerate design and method
    14.
    发明授权
    Package tolerate design and method 有权
    封装容许设计和方法

    公开(公告)号:US08564075B1

    公开(公告)日:2013-10-22

    申请号:US13090234

    申请日:2011-04-19

    IPC分类号: H01L27/14

    摘要: An improved MEMS transducer apparatus and method. The apparatus has a movable base structure including an outer surface region and an inner surface region. At least one central anchor structure can be spatially disposed within a vicinity of the inner surface region and at least one peripheral anchor structure can be spatially disposed within a vicinity of the outer surface region. Additionally, the apparatus can have at least one peripheral spring structure. The peripheral spring structure(s) can be coupled to the peripheral anchor structure(s) and at least one portion of the outer surface region. The apparatus can also have at least one central spring structure. The central spring structure(s) can be operably coupled to the central anchor structure(s) and at least one portion of the inner surface region.

    摘要翻译: 一种改进的MEMS换能器装置和方法。 该装置具有包括外表面区域和内表面区域的可移动基座结构。 至少一个中心锚结构可以空间地设置在内表面区域附近,并且至少一个外围锚定结构可以空间地设置在外表面区域附近。 另外,该装置可以具有至少一个外围弹簧结构。 周边弹簧结构可以连接到周边锚结构和外表面区域的至少一部分。 该装置还可以具有至少一个中心弹簧结构。 中心弹簧结构可以可操作地联接到中心锚固结构和内表面区域的至少一部分。

    Acceleration sensing device and method of operation and forming
    15.
    发明授权
    Acceleration sensing device and method of operation and forming 失效
    加速度传感装置及其操作和形成方法

    公开(公告)号:US6018998A

    公开(公告)日:2000-02-01

    申请号:US114193

    申请日:1998-07-18

    摘要: A sensor (10) is capable of detecting linear acceleration in the three Cartesian directions and the angular acceleration about three Cartesian axes. The sensor (10) has a conductive layer (32) that is free to move or rotate in any direction. A first, second, and third set of conductors are used to sense and quantify the acceleration of the conductive layer (32). The sensor (10) can also be operated as a closed loop system with the addition of a fourth set of conductors.

    摘要翻译: 传感器(10)能够检测三个笛卡尔方向的线性加速度和围绕三个笛卡尔轴的角加速度。 传感器(10)具有可沿任何方向自由移动或旋转的导电层(32)。 使用第一,第二和第三组导体来感测和量化导电层(32)的加速度。 传感器(10)也可以作为闭环系统来操作,并添加第四组导体。

    Method for fabricating a transducer apparatus
    17.
    发明授权
    Method for fabricating a transducer apparatus 有权
    换能器装置的制造方法

    公开(公告)号:US09376312B2

    公开(公告)日:2016-06-28

    申请号:US14031041

    申请日:2013-09-18

    摘要: An improved MEMS transducer apparatus and method. The method includes providing a movable base structure having a base surface region overlying a substrate and a center cavity with a cavity surface region. At least one center anchor structure and one spring structure can be spatially disposed within a substantially circular portion of the surface region. The spring structure(s) can be coupled the center anchor structure(s) to a portion of the cavity surface region. The substantially circular portion can be configured within a vicinity of the center of the surface region. At least one capacitor element, having a fixed and a movable capacitor element, can be spatially disposed within a vicinity of the cavity surface region. The fixed capacitor element(s) can be coupled to the center anchor structure(s) and the movable capacitor element(s) can be spatially disposed on a portion of the cavity surface region.

    摘要翻译: 一种改进的MEMS换能器装置和方法。 该方法包括提供具有覆盖衬底的基面区域和具有空腔表面区域的中心空腔的可移动基座结构。 至少一个中心锚固结构和一个弹簧结构可以空间地设置在表面区域的基本圆形部分内。 弹簧结构可以将中心锚固结构耦合到空腔表面区域的一部分。 大致圆形的部分可以构造在表面区域的中心附近。 具有固定和可动电容器元件的至少一个电容器元件可以空间地设置在空腔表面区域附近。 固定电容器元件可以耦合到中心锚定结构,并且可移动电容器元件可以在空间上设置在空腔表面区域的一部分上。

    Transducer structure and method for MEMS devices
    18.
    发明授权
    Transducer structure and method for MEMS devices 有权
    MEMS器件的传感器结构和方法

    公开(公告)号:US08477473B1

    公开(公告)日:2013-07-02

    申请号:US12859672

    申请日:2010-08-19

    IPC分类号: H01G5/00

    摘要: An improved MEMS transducer apparatus and method is provided. The apparatus has a movable base structure including an outer surface region and at least one portion removed to form at least one inner surface region. At least one intermediate anchor structure is disposed within the inner surface region. The apparatus includes an intermediate spring structure operably coupled to the central anchor structure, and at least one portion of the inner surface region. A capacitor element is disposed within the inner surface region.

    摘要翻译: 提供了一种改进的MEMS换能器装置和方法。 该装置具有可移动的基座结构,其包括外表面区域和至少一个部分被去除以形成至少一个内表面区域。 至少一个中间锚结构设置在内表面区域内。 该装置包括可操作地联接到中心锚固结构的中间弹簧结构以及内表面区域的至少一部分。 电容器元件设置在内表面区域内。

    Stress release mechanism in MEMS device and method of making same
    19.
    发明授权
    Stress release mechanism in MEMS device and method of making same 有权
    MEMS器件中的应力释放机制及其制造方法

    公开(公告)号:US07268463B2

    公开(公告)日:2007-09-11

    申请号:US11192874

    申请日:2005-07-28

    IPC分类号: H02N1/00

    摘要: MEMS devices (100) and methods for forming the devices have now been provided. In one exemplary embodiment, the MEMS device (100) comprises a substrate (106) having a surface, an electrode (128) having a first portion coupled to the substrate surface, and a second portion movably suspended above the substrate surface, and a stress-release mechanism (204) disposed on the electrode second portion, the stress-release mechanism (204) including a first slot (208) integrally formed in the electrode. In another exemplary embodiment, the substrate (106) includes an anchor (134, 136) and the stress-release mechanism 222 is formed adjacent the anchor (134, 136).

    摘要翻译: 现在已经提供了MEMS器件(100)和用于形成器件的方法。 在一个示例性实施例中,MEMS器件(100)包括具有表面的衬底(106),具有耦合到衬底表面的第一部分的电极(128)和可移动地悬挂在衬底表面上方的第二部分 - 释放机构(204),所述应力释放机构(204)包括一体地形成在所述电极中的第一槽(208)。 在另一示例性实施例中,衬底(106)包括锚固件(134,136),并且应力释放机构222邻近锚固件(134,136)形成。

    Circuit for charging and discharging a row of memory cells
    20.
    发明授权
    Circuit for charging and discharging a row of memory cells 失效
    用于对一排存储单元进行充电和放电的电路

    公开(公告)号:US4730278A

    公开(公告)日:1988-03-08

    申请号:US914957

    申请日:1986-10-03

    CPC分类号: G11C8/08

    摘要: A circuit is described that provides a quick charge and discharge of a row of memory cells. A first transistor has its collector-emitter path coupled between a first voltage and a row of memory cells, and a base coupled to an input terminal. A second transistor has its collector-emitter path coupled to the first voltage by a resistor and to a voltage level setting device, and a base coupled to the input terminal. A third transistor has its collector-emitter path coupled between the row of memory cells and a second voltage, and a base coupled to a voltage level shifting device. As the row of memory cells are selected, the third transistor becomes less conductive, thereby sinking less current from the row of memory cells and allowing the inherent capacitance of the row of memory cells to charge more quickly. As the row of memory cells are deselected, the third transistor becomes more conductive, thereby sinking more current from the row of memory cells and discharging the inherent capacitance more quickly.

    摘要翻译: 描述了提供一行存储器单元的快速充电和放电的电路。 第一晶体管具有耦合在第一电压和一行存储器单元之间的集电极 - 发射极路径,以及耦合到输入端子的基极。 第二晶体管的集电极 - 发射极路径通过电阻器和电压电平设置装置耦合到第一电压,以及耦合到输入端子的基极。 第三晶体管具有耦合在该行存储单元和第二电压之间的集电极 - 发射极路径,以及耦合到电压电平移位装置的基极。 当选择存储单元行时,第三晶体管变得较少导电,从而从存储单元行中吸收更少的电流,并允许存储单元行的固有电容更快地充电。 当存储器单元行被取消选择时,第三晶体管变得更加导电,从而从存储单元行中吸收更多的电流并且更快地对固有电容进行放电。