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公开(公告)号：US20120256559A1
公开(公告)日：2012-10-11
申请号：US13081734
申请日：2011-04-07
申请人： Guoheng Zhao , Ady Levy , Alex Salnik , Mehdi Vaez-Iravani , Lena Nicolaides , Samuel S.H. Ngai
发明人： Guoheng Zhao , Ady Levy , Alex Salnik , Mehdi Vaez-Iravani , Lena Nicolaides , Samuel S.H. Ngai
IPC分类号： H05B37/02
CPC分类号： H05B33/0803
摘要： An apparatus for illuminating a target surface, the apparatus having a plurality of LED arrays, where each of the arrays has a plurality of individually addressable LEDs, and where at least one of the arrays is disposed at an angle of between about forty-five degrees and about ninety degrees relative to the target surface, where all of the arrays supply light into a light pipe, the light pipe having interior walls made of a reflective material, where light exiting the light pipe illuminates the target surface, and a controller for adjusting an intensity of the individually addressable light sources.
摘要翻译： 一种用于照射目标表面的装置，该装置具有多个LED阵列，其中每个阵列具有多个独立可寻址的LED，并且其中至少一个阵列以大约四十五度之间的角度设置 并且相对于目标表面大约九十度，其中所有的阵列将光提供到光管中，光管具有由反射材料制成的内壁，其中离开光管的光照射目标表面，以及用于调节的控制器 独立寻址光源的强度。
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公开(公告)号：US20120062877A1
公开(公告)日：2012-03-15
申请号：US13226032
申请日：2011-09-06
申请人： Paul Doyle , Guoheng Zhao , Alexander Belyaev , J. Rex Runyon , Christian H. Wolters , Howard W. Dando , Mehdi Vaez-Iravani
发明人： Paul Doyle , Guoheng Zhao , Alexander Belyaev , J. Rex Runyon , Christian H. Wolters , Howard W. Dando , Mehdi Vaez-Iravani
CPC分类号： H01L21/6838
摘要： A tool for investigating a substrate, where the tool has a tool head for investigating the substrate, a chuck for disposing an upper surface of the substrate in proximity to the tool head, and an air bearing disposed on the tool head adjacent the substrate. The air bearing has a pressure source and a vacuum source, where the vacuum source draws the substrate toward the air bearing and the pressure source prevents the substrate from physically contacting the air bearing. The pressure source and the vacuum source work in cooperation to dispose the upper surface of the substrate at a known distance from the tool head. By using the air bearing as part of the tool in this manner, registration of the substrate to the tool head is accomplished relative to the upper surface of the substrate, not the back side of the substrate.
摘要翻译： 一种用于调查基板的工具，其中该工具具有用于检查基板的工具头，用于将基板的上表面设置在工具头附近的卡盘以及设置在与基板相邻的工具头上的空气轴承。 空气轴承具有压力源和真空源，其中真空源将基板拉向空气轴承，并且压力源防止基板物理接触空气轴承。 压力源和真空源协同工作，将衬底的上表面设置在与工具头一段已知距离处。 通过以这种方式使用空气轴承作为工具的一部分，基板相对于基板的上表面而不是基板的背面完成对准工具头。
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公开(公告)号：US20090278044A1
公开(公告)日：2009-11-12
申请号：US12351215
申请日：2009-01-09
IPC分类号： H01J40/00
CPC分类号： H01J37/244 , G01N2223/079 , G01N2223/086 , G01N2223/33 , H01J37/256 , H01J2237/24495 , H01J2237/2511 , H01J2237/2807
摘要： A spectrometer having an electron beam generator for generating an electron beam that is directed at a sample. An electron beam positioner directs the electron beam onto a position of the sample, and thereby produces a secondary emitted stream from the sample, where the secondary emitted stream includes at least one of electrons and x-rays. An secondary emitted stream positioner positions the secondary emitted stream onto a detector array, which receives the secondary emitted stream and detects both the amounts and the received positions of the secondary emitted stream. A modulator modulates the electron beam that is directed onto the sample, and thereby sweeps the electron beam between a first position and a second position on the sample. An extractor is in signal communication with both the modulator and the detector array, and extracts a differential signal that represents a difference between the signals that are received from the first position and the signals that are received from the second position.
摘要翻译： 具有用于产生针对样品的电子束的电子束发生器的光谱仪。 电子束定位器将电子束引导到样品的位置，从而产生来自样品的二次发射流，其中二次发射流包括电子和X射线中的至少一个。 二次发射流定位器将二次发射流定位在检测器阵列上，检测器阵列接收二次发射流并检测二次发射流的量和接收位置。 调制器调制被引导到样品上的电子束，从而在样品上的第一位置和第二位置之间扫描电子束。 提取器与调制器和检测器阵列进行信号通信，并且提取表示从第一位置接收的信号与从第二位置接收的信号之间的差的差分信号。
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公开(公告)号：US20090225399A1
公开(公告)日：2009-09-10
申请号：US12042252
申请日：2008-03-04
申请人： Guoheng Zhao , Rex Runyon , Mehdi Vaez-Iravani
发明人： Guoheng Zhao , Rex Runyon , Mehdi Vaez-Iravani
CPC分类号： G01N21/9501 , G01N21/8806 , G01N2201/10 , G01N2201/104 , G02B26/123 , Y10S359/90
摘要： A multi-spot scanning technique using a spot array having a predetermined gap between spots can advantageously provide scalability to a large number of spots as well as the elimination of cross-talk between channels. The multi-spot scanning technique can select a number of spots for the spot array (1D or 2D), determine a separation between the spots to minimize crosstalk, and perform a scan on a wafer using the spot array and a full field of view (FOV). Performing the scan includes performing a plurality of scan line cycles, wherein each scan line cycle can fill in gaps left by previous scan line cycles. This “delay and fill” scan allows large spacing between spots, thereby eliminating cross-talk at the detector plane. In one embodiment, the scan is begun and ended outside a desired scan area on the wafer to ensure full scan coverage.
摘要翻译： 使用具有点之间的预定间隙的点阵列的多点扫描技术可以有利地提供大量斑点的可扩展性以及消除通道之间的串扰。 多点扫描技术可以选择点阵列（1D或2D）的多个斑点，确定斑点之间的间隔以最小化串扰，并使用斑点阵列和全视场对晶片进行扫描（ FOV）。 执行扫描包括执行多个扫描线周期，其中每个扫描线周期可以填充先前扫描线周期留下的间隙。 这种“延迟和填充”扫描允许斑点之间的大间距，从而消除检测器平面处的串扰。 在一个实施例中，扫描开始并在晶片上期望的扫描区域外部结束以确保全扫描覆盖。
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15.发明授权Surface inspection system using laser line illumination with two dimensional imaging 有权表面检测系统采用激光线照明二维成像公开(公告)号：US07525649B1
公开(公告)日：2009-04-28
申请号：US11875240
申请日：2007-10-19
IPC分类号： G01N21/00
CPC分类号： G01N21/8806 , G01N21/9501 , G01N2021/8822 , G01N2021/9513 , G01N2021/95676
摘要： A surface inspection apparatus and a method are provided which include an illumination system configured to focus a beam of radiation at a non-orthogonal incidence angle to form an illumination line on a surface substantially in a plane of incidence of the focused beam. The apparatus and method further include a collection system configured to image the illumination line onto an array of detectors oriented parallel to the illumination line. The collection system includes an imaging lens for collecting light scattered from the illumination line, a focusing lens for focusing the collected light, and the array of detectors, each configured to detect a corresponding portion of the illumination line. The collection system may be configured to image the illumination line such that the width of the imaged illumination line on the array of detectors is larger than the pixel size of the detectors along the same direction.
摘要翻译： 提供了一种表面检查装置和方法，其包括被配置为以非正交入射角聚焦辐射束的照明系统，以在基本上在聚焦光束的入射平面的表面上形成照明线。 该装置和方法还包括收集系统，其被配置为将照明线图像成平行于照明线定向的检测器阵列。 收集系统包括用于收集从照明线散射的光的成像透镜，用于聚焦所收集的光的聚焦透镜以及每个被配置为检测照明线的相应部分的检测器阵列。 收集系统可以被配置成对照明线进行成像，使得检测器阵列上成像的照明线的宽度大于沿相同方向的检测器的像素尺寸。
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公开(公告)号：US20060256327A1
公开(公告)日：2006-11-16
申请号：US11459586
申请日：2006-07-24
IPC分类号： G01N21/88
CPC分类号： G01N21/95623 , G01N21/47 , G01N21/94 , G01N2201/1045
摘要： A cylindrical mirror or lens is used to focus an input collimated beam of light onto a line on the surface to be inspected, where the line is substantially in the plane of incidence of the focused beam. An image of the beam is projected onto an array of charge-coupled devices parallel to the line for detecting anomalies and/or features of the surface, where the array is outside the plane of incidence of the focused beam. For inspecting surface with a pattern thereon, the light from the surface is first passed through a spatial filter before it is imaged onto the charge-coupled devices. The spatial filter includes stripes of scattering regions that shift in synchronism with relative motion between the beam and the surface to block Fourier components from the pattern. The spatial filter may be replaced by reflective strips that selectively reflects scattered radiation to the detector, where the reflective strips also shifts in synchronism with the relative motion.
摘要翻译： 使用圆柱形镜或透镜将输入的准直光束聚焦到要检查的表面上的线上，其中线基本上在聚焦束的入射平面中。 光束的图像被投影到平行于线的电荷耦合器件的阵列上，用于检测表面的异常和/或特征，其中阵列位于聚焦光束的入射平面之外。 为了在其上检查具有图案的表面，来自表面的光首先在其被成像到电荷耦合器件之前通过空间滤光器。 空间滤波器包括散射区域的条带，其与波束和表面之间的相对运动同步地移动，以阻止来自图案的傅立叶分量。 空间滤波器可以被选择性地将散射的辐射反射到检测器的反射条替代，其中反射条也与相对运动同步地移动。
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公开(公告)号：US20050174568A1
公开(公告)日：2005-08-11
申请号：US10627402
申请日：2003-07-24
IPC分类号： G01N21/956 , G01J3/44 , G01N21/00 , G01N21/21 , G01N21/47 , G01N21/88 , G01N21/94 , G01N21/95 , H01L21/66
CPC分类号： G01J3/44 , G01J3/0216 , G01J3/0229 , G01N21/21 , G01N21/47 , G01N21/474 , G01N21/8806 , G01N21/94 , G01N21/9501 , G01N2021/8825 , G01N2021/8845 , G01N2021/8848 , G01N2201/065
摘要： A curved mirrored surface is used to collect radiation scattered by a sample surface and originating from a normal illumination beam and an oblique illumination beam. The collected radiation is focused to a detector. Scattered radiation originating from the normal and oblique illumination beams may be distinguished by employing radiation at two different wavelengths, by intentionally introducing an offset between the spots illuminated by the two beams or by switching the normal and oblique illumination beams on and off alternately. Beam position error caused by change in sample height may be corrected by detecting specular reflection of an oblique illumination beam and changing the direction of illumination in response thereto. Butterfly-shaped spatial filters may be used in conjunction with curved mirror radiation collectors to restrict detection to certain azimuthal angles.
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公开(公告)号：US06724473B2
公开(公告)日：2004-04-20
申请号：US10113145
申请日：2002-03-27
IPC分类号： G01N2100
CPC分类号： G01N21/47 , G01N21/9501 , G01N2021/8896 , G01N2021/9513
摘要： A method and system of using exposure control to inspect a surface, such as a wafer. One inspection system comprises charge coupled devices (CCDs) as detectors. The exposure control function of each CCD is used to adjust integration times on individual taps of the CCD such that light scattered from the surface, which may contain multiple scattering regions, is within a dynamic range of the CCD during inspection.
摘要翻译： 使用曝光控制来检查诸如晶片的表面的方法和系统。 一个检测系统包括作为检测器的电荷耦合器件（CCD）。 每个CCD的曝光控制功能用于调节CCD各个抽头上的积分时间，使得从表面散射的光可能包含多个散射区域，在检测期间处于CCD的动态范围内。
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公开(公告)号：US08194240B1
公开(公告)日：2012-06-05
申请号：US12042258
申请日：2008-03-04
申请人： Mehdi Vaez-Iravani , Stan Stokowski , Guoheng Zhao
发明人： Mehdi Vaez-Iravani , Stan Stokowski , Guoheng Zhao
IPC分类号： G01B9/00
CPC分类号： G01B11/0608 , G02B27/1086 , G02B27/425 , G02B27/4266 , G03F7/7085 , G03F9/7026
摘要： A plurality of spots forming an M×N matrix can be used in a focus system. Specifically, a plurality of identical spots can be simultaneously projected onto the sample. A V(z) curve can be generated for each spot. A robust focus can be determined based on the generated V(z) curves. Using the spot matrix significantly increases the probability that at least one of the plurality of spots in the matrix can provide an unambiguous V(z) curve. Thus, the spot matrix eliminates the need to search for an appropriate site because the spot matrix increases the probability of landing on a “good” location by a factor of M×N.
摘要翻译： 在聚焦系统中可以使用形成M×N矩阵的多个点。 具体地，可以将多个相同的斑点同时投影到样品上。 可以为每个点生成V（z）曲线。 可以基于生成的V（z）曲线来确定稳健的焦点。 使用点阵显着增加矩阵中的多个点中的至少一个可以提供明确的V（z）曲线的概率。 因此，斑点矩阵消除了搜索适当位置的需要，因为光点矩阵增加了在“良好”位置上降落M×N的概率。
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公开(公告)号：US07280199B2
公开(公告)日：2007-10-09
申请号：US10949078
申请日：2004-09-24
IPC分类号： G01N21/88
CPC分类号： G01N21/9501
摘要： A cylindrical mirror or lens is used to focus an input collimated beam of light onto a line on the surface to be inspected, where the line is substantially in the plane of incidence of the focused beam. An image of the beam is projected onto an array of charge-coupled devices parallel to the line for detecting anomalies and/or features of the surface, where the array is outside the plane of incidence of the focused beam.
摘要翻译： 使用圆柱形镜或透镜将输入的准直光束聚焦到要检查的表面上的线上，其中线基本上在聚焦束的入射平面中。 光束的图像被投影到平行于线的电荷耦合器件的阵列上，用于检测表面的异常和/或特征，其中阵列位于聚焦光束的入射平面之外。
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