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公开(公告)号：US20200241289A1
公开(公告)日：2020-07-30
申请号：US16752941
申请日：2020-01-27
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Yuki MORINAGA , Anna YOSHIDA , Yoshihisa WARASHINA
Abstract: An optical unit includes: a base which includes a main surface; a mirror device which includes a movable mirror portion and is disposed on the base; a frame member that is provided on the main surface so as to surround the mirror device; and a window member that is bonded to the frame member and has a flat plate shape. The frame member includes a first wall portion which is provided on the main surface and includes a first top surface on the side opposite to the main surface, a second wall portion which is provided on the main surface so as to face the first wall portion and includes a second top surface on the side opposite to the main surface.
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公开(公告)号：US20200180944A1
公开(公告)日：2020-06-11
申请号：US16789795
申请日：2020-02-13
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Sadaharu TAKIMOTO , Yuki MORINAGA , Daiki SUZUKI , Yoshihisa WARASHINA
Abstract: An actuator device includes a support portion, a movable portion, a connection portion which connects the movable portion to the support portion on a second axis, a first wiring which is provided on the connection portion, a second wiring which is provided on the support portion, and an insulation layer which includes a first opening exposing a surface opposite to the support portion in a first connection part located on the support portion in one of the first wiring and the second wiring and covers a corner of the first connection part. The rigidity of a first metal material forming the first wiring is higher than the rigidity of a second metal material forming the second wiring. The other wiring of the first wiring and the second wiring is connected to the surface of the first connection part in the first opening.
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公开(公告)号：US20200173852A1
公开(公告)日：2020-06-04
申请号：US16615151
申请日：2018-05-14
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Yoshihisa WARASHINA , Kei TABATA
Abstract: Provided is a filter controlling expression derivation method including: preparing a Fabry-Perot interference filter of which distance between a fixed mirror and a movable mirror is controlled by balancing an electrostatic force and an elastic force; deriving a relational expression between a deflection amount and an elasticity index in which the elasticity index of the movable mirror is described as a quadratic or higher-order polynomial with the deflection amount of the movable mirror as a variable by performing predetermined measurement; and deriving a relational expression between a transmission wavelength of light transmitted through the Fabry-Perot interference filter and the voltage as a filter controlling expression based on the relational expression between the deflection amount and the elasticity index and a relational expression between the electrostatic force and the elastic force.
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公开(公告)号：US20240190699A1
公开(公告)日：2024-06-13
申请号：US18581466
申请日：2024-02-20
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Sadaharu TAKIMOTO , Yuki MORINAGA , Daiki SUZUKI , Yoshihisa WARASHINA
CPC classification number: B81B7/0006 , B81B3/0075 , G02B26/08 , G02B26/085 , B81B2201/042 , B81B2201/045 , B81B2203/0154 , B81B2203/0181 , B81B2203/058 , B81B2207/07
Abstract: An actuator device includes a support portion, a movable portion, a connection portion, a first wiring provided to the connection portion, a second wiring provided to the movable portion, a first insulation layer which includes a first opening exposing a surface opposite to the movable portion in a first connection part located at the movable portion in one wiring of the first and second wirings, a second insulation layer covering the first and second wirings. The other wiring of the first and second wirings is connected to the surface of the first connection part in the first opening. A region corresponding to a corner of the other wiring of the first and second wirings in a surface opposite to the movable portion in the second insulation layer is curved in a convex shape toward an opposite side to the movable portion.
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公开(公告)号：US20230187462A1
公开(公告)日：2023-06-15
申请号：US17925409
申请日：2021-05-17
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Yoshinori TSUKADA , Kohei KASAMORI , Masaki HIROSE , Yoshihisa WARASHINA
IPC: H01L27/146
CPC classification number: H01L27/14629 , H01L27/14649
Abstract: A photodetection element includes a semiconductor substrate having a principal surface on which detection target light is incident and a rear surface, and including one or a plurality of photodetection regions on the principal surface side, and a light absorption film provided on the rear surface. The light absorption film includes a reflection layer being a metal layer, a resonance layer provided between the reflection layer and the substrate, and a light absorption layer provided between the resonance layer and the substrate. In at least one of a wavelength of the detection target light and a wavelength of spontaneous light, a light transmittance inside the resonance layer is larger than a light transmittance inside the light absorption layer, and a light reflectance on a surface of the reflection layer is larger than a light reflectance on a surface of the resonance layer.
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Patent Agency Ranking
公开(公告)号：US20220242721A1
公开(公告)日：2022-08-04
申请号：US17725804
申请日：2022-04-21
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Sadaharu TAKIMOTO , Yuki MORINAGA , Daiki SUZUKI , Yoshihisa WARASHINA
Abstract: An actuator device includes a support portion, a movable portion, a connection portion which connects the movable portion to the support portion on a second axis, a first wiring which is provided on the connection portion, a second wiring which is provided on the support portion, and an insulation layer which includes a first opening exposing a surface opposite to the support portion in a first connection part located on the support portion in one of the first wiring and the second wiring and covers a corner of the first connection part. The rigidity of a first metal material forming the first wiring is higher than the rigidity of a second metal material forming the second wiring. The other wiring of the first wiring and the second wiring is connected to the surface of the first connection part in the first opening.
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公开(公告)号：US20220099920A1
公开(公告)日：2022-03-31
申请号：US17425589
申请日：2020-01-22
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Daiki SUZUKI , Yoshihisa WARASHINA
Abstract: An optical module includes a mirror unit configured to have a movable mirror part, a magnet part configured to have upper and bottom surfaces and a side surface and generate a magnetic field acting on the movable mirror part, and a holding member configured to hold the magnet part. The magnet part has a Halbach structure including a first magnet having a force to act in a first direction and a second magnet having a force to act in a second direction. The holding member integrally holds the magnet part against a force acting on the first magnet in the first direction and a force acting on the second magnet in the second direction. The mirror unit is supported on the upper surface by the holding member. A relaxation layer for relaxing stress from the magnet part is provided between the upper surface and the mirror unit.
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公开(公告)号：US20190033136A1
公开(公告)日：2019-01-31
申请号：US16072634
申请日：2017-02-02
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Yoshihisa WARASHINA , Tomofumi SUZUKI , Kohei KASAMORI , Ryosuke OKUMURA , Kyosuke KOTANI
CPC classification number: G01J3/4535 , B81B5/00 , G01B9/02051 , G01B9/02071 , G01B11/00 , G01B11/02 , G01J3/02 , G01J3/0202 , G01J3/0256 , G01J3/06 , G02B26/06
Abstract: An optical module includes an actuator that includes a movable part to be moved along a predetermined direction; a first interference optical system that includes a first movable mirror, a first stationary mirror, and a first beam splitter; and a second interference optical system that includes a second movable mirror, a second stationary mirror, and a second beam splitter. The first interference optical system is adapted so that first light reciprocates m times (m is a natural number) between the first beam splitter and the first movable mirror along the predetermined direction. The second interference optical system is adapted so that second light reciprocates n times (n is a natural number greater than m) between the second beam splitter and the second movable mirror along the predetermined direction.
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公开(公告)号：US20190031500A1
公开(公告)日：2019-01-31
申请号：US16071558
申请日：2016-12-22
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Sadaharu TAKIMOTO , Yuki MORINAGA , Daiki SUZUKI , Yoshihisa WARASHINA
Abstract: An actuator device includes a support portion, a movable portion, a connection portion which connects the movable portion to the support portion on a second axis so that the movable portion is swingable about the second axis, a first wiring which is provided on the connection portion, and a second wiring which is provided on the support portion. The rigidity of a first metal material forming the first wiring is higher than that of a second metal material forming the second wiring. The second wiring is connected to a surface opposite to the support portion in a first connection part located on the support portion in the first connection part.
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公开(公告)号：US20180217001A1
公开(公告)日：2018-08-02
申请号：US15748286
申请日：2015-09-03
Applicant: HAMAMATSU PHOTONICS K.K.
Inventor： Yoshihisa WARASHINA , Tomofumi SUZUKI , Kohei KASAMORI , Ryosuke OKUMURA , Kyosuke KOTANI
Abstract: An optical interferometer includes a branching-combining unit, a first optical system, a second optical system, and a drive unit. The branching-combining unit includes a branching surface, an incident surface, a first output surface, a combining surface, and a second output surface on an interface of a transparent member, the branching surface partially reflects incident light and outputs as first branched light, and transmits the rest of the incident light into the interior as second branched light, the combining surface partially combines the first branched light and the second branched light to be output to the outside as first combined light, and combines the rest of the first branched light and the second branched light to be propagated into the interior as second combined light, and the second output surface partially outputs the second combined light to the outside.
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