摘要:
A polishing method and polishing apparatus able to easily flatten an initial unevenness with an excellent efficiency of removal of excess copper film and suppress damage to a lower interlayer insulation film, and a plating method and plating apparatus able to deposit a flat copper film. The polishing method comprises the steps of measuring thickness equivalent data of a film on a wafer, making a cathode member smaller than the surface face a region thereof, interposing an electrolytic solution between the surface and the cathode member, applying a voltage using the cathode member as a cathode and the film an anode, performing electrolytic polishing by electrolytic elution or anodic oxidation and chelation and removal of a chelate film in the same region preferentially from projecting portions of the film until removing the target amount of film obtained from the thickness equivalent data, and repeating steps of moving the cathode member to another region to flattening the regions over the entire surface. Further, plating is performed by a reverse reaction of the above.
摘要:
Disclosed herein is a microchip that allows a sample to be introduced into a region easily and accurately, and which makes it possible to obtain high analysis accuracy. The microchip includes an airtight region into which a solution is externally introduced; and positioning means for positioning a channel for injecting the solution into the region by penetrating a substrate layer forming the region with respect to a puncture part of the region.
摘要:
Disclosed herein is a microchip that allows a sample to be introduced into a region easily and accurately, and which makes it possible to obtain high analysis accuracy. The microchip includes an airtight region into which a solution is externally introduced; and positioning means for positioning a channel for injecting the solution into the region by penetrating a substrate layer forming the region with respect to a puncture part of the region.
摘要:
A real-time PCR system for detecting gene expression levels includes plural reaction regions, a like plural number of heating portions arranged corresponding to the reaction regions and having heat sources, respectively, an optical unit capable of irradiating exciting light of a specific wavelength to all of the plural reaction regions, and a like plural number of fluorescence detecting portions arranged corresponding to the reaction regions, respectively. The heating portions are each provided with a temperature detector for detecting a temperature in a vicinity of the corresponding heat source and converting the temperature into an electrical signal and also with a controller for controlling a thermal dose from the corresponding heat source based on a correlation between electrical signals and calorific values of the heat source stored beforehand.
摘要:
Disclosed herein is a light detection device including, at least, a substrate provided with a plurality of detection regions where to perform detection of fluorescent light emitted from the inside of a sample upon irradiation of the sample with light, a light irradiation section operable to perform the irradiation with light, an optical control section configured to irradiate the detection regions with the light radiated from the light irradiation section, and a light detection section operable to detect the fluorescent light.
摘要:
A hybridization detecting unit which includes a reaction region in which hybridization takes place, a plurality of sites (e.g., the surface of electrodes) arranged in the reaction region to which is fixed a nucleic acid for detection, and means for sequentially moving by dielectrophoresis the target nucleic acid introduced into the reaction region according to the order of arrangement of the sites to which is fixed a nucleic acid for detection. A sensor chip provided with the hybridization detecting unit. The detecting unit compulsorily moves the target nucleic acid into the region where a probe nucleic acid for detection exists, thereby increasing the probability of hybridization taking place.
摘要:
An AGC circuit according to the present invention comprises: a gain controller, having a variable gain, for amplifying an input signal at a predetermined gain and generating an output signal, and for varying the gain; a comparison circuit for comparing an amplitude of the input signal or of the output signal with a predetermined reference level, and for generating a control signal that goes to a first level when the amplitude is smaller than the reference level, and that goes to a second level when the amplitude is greater than the reference level; and a duty ratio detector for supplying the control signal generated by the comparison circuit, and for generating control code in accordance with a duty ratio of the control signal, wherein the gain of the gain controller is varied by using the control code, and so adjusted that the duty ratio of the control signal is maintained to be a predetermined value. When the amplitude of the input signal or the output signal is increased, a period during which the amplitude exceeds the reference level is also extended. By utilizing this phenomenon, a gain is varied so as to maintain a control signal duty ratio of 50%, for example, so that the amplitude of the output signal is amplified to a desired value, which is maintained.
摘要:
A compander circuit includes first and second volume controllers, a comparator, a counter and a control part. The comparator compares a compared voltage with a rectified and smoothed signal of an input signal of the compander circuit or an output signal of the first volume controller receiving the input signal, the compared voltage being an output signal of the second volume controller. The counter executes a count operation on an output signal of the comparator in synchronism with a clock signal and controls gains of the first and second volume controllers on the basis of a counter value of the counter. The control part controls a frequency of the clock signal applied to the counter by a predetermined control signal.
摘要:
Disclosed herein is an optical detector at least including: a first substrate in which a plurality of wells are formed; a second substrate in which a heating section is provided to heat the wells; a third substrate in which a plurality of photoirradiation sections are provided in alignment with the wells; and a fourth substrate in which a plurality of photodetection sections are provided in alignment with the wells.
摘要:
Disclosed herein is a light detection device including, at least, a substrate provided with a plurality of detection regions where to perform detection of fluorescent light emitted from the inside of a sample upon irradiation of the sample with light, a light irradiation section operable to perform the irradiation with light, an optical control section configured to irradiate the detection regions with the light radiated from the light irradiation section, and a light detection section operable to detect the fluorescent light.