Electrolytic polishing method
    11.
    发明授权
    Electrolytic polishing method 失效
    电解抛光法

    公开(公告)号:US06808617B2

    公开(公告)日:2004-10-26

    申请号:US09955668

    申请日:2001-09-19

    IPC分类号: B23H1100

    摘要: A polishing method and polishing apparatus able to easily flatten an initial unevenness with an excellent efficiency of removal of excess copper film and suppress damage to a lower interlayer insulation film, and a plating method and plating apparatus able to deposit a flat copper film. The polishing method comprises the steps of measuring thickness equivalent data of a film on a wafer, making a cathode member smaller than the surface face a region thereof, interposing an electrolytic solution between the surface and the cathode member, applying a voltage using the cathode member as a cathode and the film an anode, performing electrolytic polishing by electrolytic elution or anodic oxidation and chelation and removal of a chelate film in the same region preferentially from projecting portions of the film until removing the target amount of film obtained from the thickness equivalent data, and repeating steps of moving the cathode member to another region to flattening the regions over the entire surface. Further, plating is performed by a reverse reaction of the above.

    摘要翻译: 一种抛光方法和抛光装置,其能够以极好的去除多余的铜膜的效率并且抑制对下层间绝缘膜的损坏而容易地平坦化初始凹凸,以及能够沉积扁平铜膜的电镀方法和电镀装置。 抛光方法包括以下步骤:测量晶片上的膜的厚度当量数据,使阴极部件小于表面面积的阴极部件,在电极表面和阴极部件之间插入电解液,使用阴极部件施加电压 作为阴极,膜是阳极,通过电解洗脱或阳极氧化进行电解抛光,并优先从膜的突出部分螯合并除去相同区域中的螯合膜,直到从厚度等效数据中除去目标量的膜 并且重复将阴极部件移动到另一区域以使整个表面上的区域变平的步骤。 此外,通过上述的反作用进行电镀。

    Real-time PCR system
    14.
    发明授权
    Real-time PCR system 有权
    实时PCR系统

    公开(公告)号:US08017380B2

    公开(公告)日:2011-09-13

    申请号:US12105722

    申请日:2008-04-18

    摘要: A real-time PCR system for detecting gene expression levels includes plural reaction regions, a like plural number of heating portions arranged corresponding to the reaction regions and having heat sources, respectively, an optical unit capable of irradiating exciting light of a specific wavelength to all of the plural reaction regions, and a like plural number of fluorescence detecting portions arranged corresponding to the reaction regions, respectively. The heating portions are each provided with a temperature detector for detecting a temperature in a vicinity of the corresponding heat source and converting the temperature into an electrical signal and also with a controller for controlling a thermal dose from the corresponding heat source based on a correlation between electrical signals and calorific values of the heat source stored beforehand.

    摘要翻译: 用于检测基因表达水平的实时PCR系统包括多个反应区域,分别对应于反应区域排列并具有热源的多个加热部分,能够将特定波长的激发光全部照射到所有的光学单元 的多个反应区域,以及分别对应于反应区域排列的多个荧光检测部分。 加热部分每个设有温度检测器,用于检测相应热源附近的温度并将温度转换成电信号,并且还具有控制器,用于根据相应的热源之间的相关性控制热剂量 预先存储的热源的电信号和发热量。

    Hybridization detecting unit relying on dielectrophoresis and sensor chip provided with the detecting unit
    16.
    发明授权
    Hybridization detecting unit relying on dielectrophoresis and sensor chip provided with the detecting unit 失效
    杂交检测单元依赖于介电电泳和设有检测单元的传感器芯片

    公开(公告)号:US07709195B2

    公开(公告)日:2010-05-04

    申请号:US11221940

    申请日:2005-09-09

    摘要: A hybridization detecting unit which includes a reaction region in which hybridization takes place, a plurality of sites (e.g., the surface of electrodes) arranged in the reaction region to which is fixed a nucleic acid for detection, and means for sequentially moving by dielectrophoresis the target nucleic acid introduced into the reaction region according to the order of arrangement of the sites to which is fixed a nucleic acid for detection. A sensor chip provided with the hybridization detecting unit. The detecting unit compulsorily moves the target nucleic acid into the region where a probe nucleic acid for detection exists, thereby increasing the probability of hybridization taking place.

    摘要翻译: 杂交检测单元,其包括发生杂交的反应区域,配置在固定有用于检测的核酸的反应区域中的多个位点(例如,电极表面),以及通过介电电泳依次移动的装置 根据固定用于检测的核酸的位点的排列顺序将目标核酸引入反应区域。 设置有杂交检测单元的传感器芯片。 检测单元强制地将目标核酸移动到存在检测用探针核酸的区域,从而增加发生杂交的可能性。

    Digital AGC circuit
    17.
    发明授权
    Digital AGC circuit 失效
    数字AGC电路

    公开(公告)号:US5955925A

    公开(公告)日:1999-09-21

    申请号:US972033

    申请日:1997-11-17

    CPC分类号: H03K5/1565 H03G3/001

    摘要: An AGC circuit according to the present invention comprises: a gain controller, having a variable gain, for amplifying an input signal at a predetermined gain and generating an output signal, and for varying the gain; a comparison circuit for comparing an amplitude of the input signal or of the output signal with a predetermined reference level, and for generating a control signal that goes to a first level when the amplitude is smaller than the reference level, and that goes to a second level when the amplitude is greater than the reference level; and a duty ratio detector for supplying the control signal generated by the comparison circuit, and for generating control code in accordance with a duty ratio of the control signal, wherein the gain of the gain controller is varied by using the control code, and so adjusted that the duty ratio of the control signal is maintained to be a predetermined value. When the amplitude of the input signal or the output signal is increased, a period during which the amplitude exceeds the reference level is also extended. By utilizing this phenomenon, a gain is varied so as to maintain a control signal duty ratio of 50%, for example, so that the amplitude of the output signal is amplified to a desired value, which is maintained.

    摘要翻译: 根据本发明的AGC电路包括:具有可变增益的增益控制器,用于以预定增益放大输入信号并产生输出信号并改变增益; 比较电路,用于将输入信号或输出信号的幅度与预定参考电平进行比较,并且用于当振幅小于参考电平时产生进入第一电平的控制信号,并且进入第二电平 当幅度大于参考电平时; 以及占空比检测器,用于提供由比较电路产生的控制信号,并且用于根据控制信号的占空比产生控制码,其中增益控制器的增益通过使用控制码而改变,并且被调整 控制信号的占空比保持为预定值。 当输入信号或输出信号的振幅增加时,振幅超过基准电平的时间段也延长。 通过利用这种现象,改变增益,以保持例如50%的控制信号占空比,使得输出信号的幅度被放大到保持的期望值。

    Compander circuit
    18.
    发明授权
    Compander circuit 失效
    压缩电路

    公开(公告)号:US5633939A

    公开(公告)日:1997-05-27

    申请号:US319721

    申请日:1994-10-07

    IPC分类号: H03G1/00 H03G7/06 H03G7/00

    CPC分类号: H03G1/0088 H03G7/06

    摘要: A compander circuit includes first and second volume controllers, a comparator, a counter and a control part. The comparator compares a compared voltage with a rectified and smoothed signal of an input signal of the compander circuit or an output signal of the first volume controller receiving the input signal, the compared voltage being an output signal of the second volume controller. The counter executes a count operation on an output signal of the comparator in synchronism with a clock signal and controls gains of the first and second volume controllers on the basis of a counter value of the counter. The control part controls a frequency of the clock signal applied to the counter by a predetermined control signal.

    摘要翻译: 压缩扩展器电路包括第一和第二音量控制器,比较器,计数器和控制部分。 比较器将比较的电压与压缩电路的输入信号的整流和平滑信号或接收输入信号的第一体积控制器的输出信号进行比较,所比较的电压是第二音量控制器的输出信号。 计数器与时钟信号同步地对比较器的输出信号执行计数操作,并且基于计数器的计数器值来控制第一和第二音量控制器的增益。 控制部分通过预定的控制信号控制施加到计数器的时钟信号的频率。