公开(公告)号：US11600463B2

公开(公告)日：2023-03-07

申请号：US16495763

申请日：2018-03-27

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Xin Man ,  Junzo Azuma

IPC: H01J37/28 ,  G06T5/50 ,  H01J37/26

Abstract: This cross-section observation device bombards an object with a charged particle beam to repeatedly expose cross-sections of the object, bombards at least some of the cross-sections from among the plurality of the exposed cross-sections with a charged particle beam to acquire cross-sectional image information describing each of the at least some of the cross-sections, generates for each of these cross-sections a cross-sectional image described by the cross-sectional image information acquired, and generates a three-dimensional image in which the generated cross-sectional images are stacked together. This cross-section observation device displays a first three-dimensional image along with a second three-dimensional image, the first three-dimensional image being a three-dimensional image from the stacking of first cross-sectional images, which are cross-sectional images of the cross-sections described by the corresponding cross-sectional image information acquired on the basis of a first condition, and the second three-dimensional image being a three-dimensional image from the stacking of second cross-sectional images, which are cross-sectional images of the cross-sections described by the corresponding cross-sectional image information acquired on the basis of a second condition.

公开(公告)号：US11335534B2

公开(公告)日：2022-05-17

申请号：US17027341

申请日：2020-09-21

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Takuma Aso ,  Xin Man ,  Makoto Sato ,  Tatsuya Asahata

IPC: H01J37/22 ,  H01J37/244 ,  H01J37/28 ,  H01J37/30 ,  H01J37/26

Abstract: The particle beam irradiation apparatus includes: an irradiation unit configured to radiate a particle beam; a first detection unit configured to detect first particles; a second detection unit configured to detect second particles; an image forming unit configured to form an observation image based on a first signal obtained by the detection of the first particles, which is performed by the first detection unit, and to form an observation image based on a second signal obtained by the detection of the second particles, which is performed by the second detection unit; and a control unit configured to calculate a brightness of a first region in the formed first observation image and perform a brightness adjustment of the first detection unit based on a first target brightness as a first brightness adjustment when the brightness of the first region is different from the first target brightness.

公开(公告)号：US09318303B2

公开(公告)日：2016-04-19

申请号：US14470183

申请日：2014-08-27

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Xin Man ,  Tatsuya Asahata ,  Atsushi Uemoto

IPC: H01J37/305 ,  G01Q70/16 ,  H01J37/317 ,  H01J37/20 ,  H01J37/244

CPC classification number: H01J37/317 ,  H01J37/20 ,  H01J37/244 ,  H01J37/252 ,  H01J37/3056 ,  H01J2237/20214 ,  H01J2237/2067 ,  H01J2237/2445 ,  H01J2237/24585 ,  H01J2237/25 ,  H01J2237/2555 ,  H01J2237/2561

Abstract: A charged particle beam apparatus includes an electron beam irradiation unit that irradiates a sample with electron beams along a first irradiation axis. A rotation stage holds the sample and has a rotation axis in a direction perpendicular to the first irradiation axis. An ion beam irradiation unit irradiates the sample with ion beams along a second irradiation axis that is substantially parallel to the rotation axis to process the sample into a needle shape. A detection unit detects at least one of charged particles and X rays generated via the sample by the irradiation with the ion beams or the electron beams, and a gaseous ion beam irradiation unit irradiates the sample with gaseous ion beams. A control unit controls the apparatus to incrementally rotate the rotation stage repeatedly by a predetermined angle to rotate the rotation stage by 360° in conjunction with irradiating the entire surface of the needle-shaped sample in a circumferential direction with the gaseous ion beams to remove ions implanted during processing the sample by the ion beams.

Abstract translation: 带电粒子束装置包括：电子束照射单元，其沿着第一照射轴照射具有电子束的样品。 旋转台保持样品并且在垂直于第一照射轴的方向上具有旋转轴。 离子束照射单元沿着与旋转轴线大致平行的第二照射轴向离子束照射样品，以将样品处理成针状。 检测单元通过用离子束或电子束的照射检测通过样品产生的带电粒子和X射线中的至少一种，气体离子束照射单元用气体离子束照射样品。 控制单元控制装置以使预定角度重复地旋转旋转台，以使旋转台旋转360°，同时用气态离子束沿圆周方向照射针状样品的整个表面以除去离子 在通过离子束处理样品期间植入。

公开(公告)号：US09287087B2

公开(公告)日：2016-03-15

申请号：US13842274

申请日：2013-03-15

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Xin Man ,  Atsushi Uemoto

IPC: H01J37/26 ,  H01J37/28

CPC classification number: H01J37/261 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/20207 ,  H01J2237/31745

Abstract: In a sample observation method, a sample stage is placed at a first tilt angle with respect to a charged particle beam, and an observation surface of a sample is irradiated with the charged particle beam to acquire a first charged particle image. The sample stage is then tilted to a second tilt angle different from the first tilt angle about a first sample stage axis, and the observation surface is again irradiated with the charged particle beam to acquire a second charged particle image. The sample stage is tilted to a tilt angle at which an area of the observation surface in the acquired charged particle image is the larger of the first charged particle image and the second charged particle image. The observation surface is then irradiated with the charged particle beam to observe the observation surface.

Abstract translation: 在样本观察方法中，将样品台相对于带电粒子束以第一倾斜角度放置，并且用带电粒子束照射样品的观察表面以获得第一带电粒子图像。 然后将样品台倾斜到不同于第一倾斜角度的关于第一样品台轴线的第二倾斜角，并且再次用带电粒子束照射观察表面以获得第二带电粒子图像。 将样品台倾斜到所获取的带电粒子图像中的观察面的面积为第一带电粒子图像和第二带电粒子图像中的较大者的倾斜角度。 然后用带电粒子束照射观察表面以观察观察表面。

公开(公告)号：US09080945B2

公开(公告)日：2015-07-14

申请号：US14078852

申请日：2013-11-13

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Atsushi Uemoto ,  Xin Man ,  Tatsuya Asahata

IPC: H01J37/26 ,  H01J37/304 ,  H01J37/305 ,  G01N23/225 ,  H01J37/30 ,  G01N23/22 ,  G01N1/32

CPC classification number: H01J37/265 ,  G01N1/32 ,  G01N23/04 ,  G01N23/2208 ,  G01N23/225 ,  G01N23/2251 ,  G01N23/2255 ,  G01T1/36 ,  H01J37/28 ,  H01J37/3005 ,  H01J37/304 ,  H01J37/3045 ,  H01J2237/2611 ,  H01J2237/28 ,  H01J2237/2807 ,  H01J2237/2812 ,  H01J2237/30472 ,  H01J2237/30483 ,  H01J2237/31745 ,  H01J2237/31749

Abstract: A cross-section processing and observation method performed by a cross-section processing and observation apparatus, the method comprising: a cross-section processing step of forming a cross-section by irradiating a sample with an ion beam; a cross-section observation step of obtaining an observation image of the cross-section by irradiating the cross-section with an electron beam; and repeating the cross-section processing step and the cross-section observation step so as to obtain observation images of a plurality of cross-sections, wherein, in a case where Energy Dispersive X-ray Spectrometry (EDS) measurement of the cross-section is performed and an X-ray of a specified material is detected, an irradiation condition of the ion beam is changed so as to obtain observation images of a plurality of cross-sections of the specified material, and the cross-section processing and observation of the specified material is performed.

Abstract translation: 一种横截面加工和观察装置的横截面处理和观察方法，该方法包括：横截面处理步骤，用离子束照射样品形成横截面; 横截面观察步骤，通过用电子束照射横截面来获得横截面的观察图像; 并且重复横截面处理步骤和横截面观察步骤以获得多个横截面的观察图像，其中，在横截面的能量分散X射线光谱（EDS）测量的情况下 并且检测到特定材料的X射线，改变离子束的照射条件以获得指定材料的多个横截面的观察图像，并且对横截面加工和观察 执行指定的材料。

公开(公告)号：US08803111B2

公开(公告)日：2014-08-12

申请号：US13840117

申请日：2013-03-15

Applicant: Hitachi High-Tech Science Corporation

Inventor： Xin Man

IPC: G01N23/225 ,  H01J37/28

CPC classification number: H01J37/261 ,  H01J37/265 ,  H01J37/2955 ,  H01J2237/31745

Abstract: Provided is an apparatus for preparing a sample including: a sample stage that supports a sample; a focused ion beam column that applies a focused ion beam to the same sample and processes the sample; and an irradiation area setting unit that sets a focused-ion-beam irradiation area including a first irradiation area used to form an observation field irradiated with an electron beam in order to detect backscattered electrons and a second irradiation area used to form a tilted surface tilted with respect to the normal line of the observation field with an angle of 67.5° or more and less than 90°.

Abstract translation: 提供了一种用于制备样品的装置，包括：样品台，其支撑样品; 聚焦离子束柱，将聚焦离子束施加到相同的样品并处理样品; 以及照射区域设定单元，其设定包含用于形成用电子束照射的观察场的第一照射区域的聚焦离子束照射区域，以便检测反向散射的电子，以及用于形成倾斜面的第二照射区域 相对于观察场的法线，角度为67.5°以上且小于90°。

公开(公告)号：US11114276B2

公开(公告)日：2021-09-07

申请号：US16294543

申请日：2019-03-06

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Xin Man ,  Tatsuya Asahata ,  Makoto Sato

IPC: H01J37/304 ,  H01J37/244 ,  H01J37/28 ,  H01J37/305 ,  H01J37/22

Abstract: An apparatus for processing and observing a cross-section includes: a sample bed holding a sample; a focused ion beam column radiating a focused ion beam to the sample; an electron beam column radiating an electron beam to the sample, perpendicularly to the focused ion beam; an electron detector detecting secondary electrons or reflection electrons generated from the sample; a irradiation position controller controlling irradiation positions of the focused ion beam and the electron beam based on target irradiation position information showing target irradiation positions of beams on the sample; a process controller controlling a cross-section-exposing process that exposes a cross-section of the sample by radiating the focused ion beam to the sample and a cross-section image-obtaining process that obtains a cross-section image of the cross-section by radiating the electron beam to the cross-section; and an image quality corrector correcting image quality of the cross-section image obtained.

公开(公告)号：US20190164722A1

公开(公告)日：2019-05-30

申请号：US16195155

申请日：2018-11-19

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Xin Man

IPC: H01J37/30 ,  H01J37/20 ,  H01J37/244 ,  H01J37/22 ,  H01J37/26

Abstract: Provided is a cross-section processing observation method capable of easily and accurately forming a cross-section used to observe a sample's inside, and a cross-section processing observation apparatus for cross-section processing. The method includes a design data acquisition step acquiring design data of a three-dimensional structure of a sample having three-dimensional structure, a moving step moving the sample based on coordinate information of the design data, a surface observation step acquiring an observation image of a surface of the sample, a cross-section forming step irradiating the sample's surface with an ion beam to form a cross-section of the three-dimensional structure, a cross-section observation step acquiring an observation image of the sample's cross-section, and a display step displaying image data, among pieces of the design data, of surface and cross section corresponding to respective locations of the surface and the cross section.

公开(公告)号：US10242842B2

公开(公告)日：2019-03-26

申请号：US15465925

申请日：2017-03-22

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Xin Man ,  Atsushi Uemoto

IPC: H01J37/28 ,  H01J37/20 ,  H01J37/22 ,  G02B21/36 ,  H01J37/244 ,  H01J37/30 ,  H01J37/317

Abstract: A method for cross-section processing and observation, and apparatus therefor, includes performing a position information obtaining process of observing the entirety of a sample by using an optical microscope or an electron microscope, and obtaining three-dimensional position coordinate information of a particular observation target object included in the sample; performing a cross-section processing process of irradiating a particular region in which the object is present by using a focused ion beam based on the information, and exposing a cross section of the region; performing a cross-section image obtaining process of irradiating the cross section by using an electron beam, and obtaining a cross-section image of a predetermined size region including the object; and performing a three-dimensional image obtaining process of repeating the cross-section processing process and the cross-section image obtaining process at predetermined intervals in a predetermined direction, and obtaining a three-dimensional image from the multiple cross-section images.

公开(公告)号：US09470642B2

公开(公告)日：2016-10-18

申请号：US14696852

申请日：2015-04-27

Applicant: HITACHI HIGH-TECH SCIENCE CORPORATION

Inventor： Xin Man ,  Toshiaki Fujii

IPC: G01N23/203 ,  H01J37/28

CPC classification number: G01N23/203

Abstract: A crystal analysis apparatus includes: a measurement data storage configured to store electron back-scattering pattern (EBSP) data measured at electron beam irradiation points on a plurality of cross-sections of a sample formed substantially in parallel at prescribed intervals; a crystal orientation database configured to accumulate therein information of crystal orientations corresponding to EBSPs; and a map constructing unit that constructs a three-dimensional crystal orientation map based on distribution of crystal orientations in normal directions of a plurality of faces of a polyhedral image having the cross-sections arranged at the prescribed intervals by reading out the crystal orientations in the normal directions of the faces from the crystal orientation database on the basis of the EBSP data stored in the measurement data storage.