公开(公告)号：US07988835B2

公开(公告)日：2011-08-02

申请号：US11519154

申请日：2006-09-12

申请人： Eiji Takahashi ,  Takashi Mikami ,  Shigeaki Kishida ,  Kenji Kato ,  Atsushi Tomyo ,  Tsukasa Hayashi ,  Kiyoshi Ogata ,  Yuichi Setsuhara

发明人： Eiji Takahashi ,  Takashi Mikami ,  Shigeaki Kishida ,  Kenji Kato ,  Atsushi Tomyo ,  Tsukasa Hayashi ,  Kiyoshi Ogata ,  Yuichi Setsuhara

IPC分类号： C23C14/00 ,  C23C14/32 ,  C23C16/00 ,  C23C16/50

CPC分类号： C23C16/24 ,  H01L21/02381 ,  H01L21/02488 ,  H01L21/02532 ,  H01L21/02601 ,  H01L21/02631

摘要： There are provided a method and an apparatus which form silicon dots having substantially uniform particle diameters and exhibiting a substantially uniform density distribution directly on a substrate at a low temperature. A hydrogen gas (or a hydrogen gas and a silane-containing gas) is supplied into a vacuum chamber (1) provided with a silicon sputter target (e.g., target 30), or the hydrogen gas and the silane-containing gas are supplied into the chamber (1) without arranging the silicon sputter target therein, a high-frequency power is applied to the gas(es) so that plasma is generated such that a ratio (Si(288 nm)/Hβ) between an emission intensity Si(288 nm) of silicon atoms at a wavelength of 288 nm and an emission intensity Hβ of hydrogen atoms at a wavelength of 484 nm in plasma emission is 10.0 or lower, and preferably 3.0 or lower, or 0.5 or lower, and silicon dots (SiD) having particle diameters of 20 nm or lower, or 10 nm or lower are formed directly on the substrate (S) at a low temperature of 500 deg. C. or lower in the plasma (and with chemical sputtering if a silicon sputter target is present).

摘要翻译： 提供了形成具有基本上均匀的粒径并且在低温下直接在基底上表现出基本均匀的密度分布的硅点的方法和装置。 将氢气（或氢气和含硅烷气体）供给到设置有硅溅射靶（例如，靶30）的真空室（1）中，或者将氢气和含硅烷的气体供应到 在不将硅溅射靶设置在其中的腔室（1）中，向气体施加高频功率，从而产生等离子体，使得发射强度Si（288nm）的比率（Si（288nm）/ H＆bgr）） （288nm）的波长288nm的硅原子和发光强度H＆bgr; 的等离子体发射波长为484nm的氢原子为10.0以下，优选为3.0以下，或0.5以下，形成粒径为20nm以下或10nm以下的硅点（SiD） 在500度的低温下直接在基板（S）上。 在等离子体中（如果存在硅溅射靶，则具有化学溅射）。

公开(公告)号：US07880392B2

公开(公告)日：2011-02-01

申请号：US11586583

申请日：2006-10-26

申请人： Kenji Kato ,  Hiroshige Deguchi ,  Hitoshi Yoneda ,  Kiyoshi Kubota ,  Akinori Ebe ,  Yuichi Setsuhara

发明人： Kenji Kato ,  Hiroshige Deguchi ,  Hitoshi Yoneda ,  Kiyoshi Kubota ,  Akinori Ebe ,  Yuichi Setsuhara

IPC分类号： C23C16/00

CPC分类号： H01J37/32954 ,  H01J37/321 ,  H01J37/32174

摘要： Plasma producing method and apparatus wherein a plurality of high-frequency antennas are arranged in a plasma producing chamber, and a high-frequency power supplied from a high-frequency power supply device (including a power source, a phase controller and the like) is applied to a gas in the chamber from the antennas to produce inductively coupled plasma. At least some of the plurality of high-frequency antennas are arranged in a fashion of such parallel arrangement that the antennas successively neighbor to each other and each of the antennas is opposed to the neighboring antenna. The high-frequency power supply device controls a phase of a high-frequency voltage applied to each antenna, and thereby controls an electron temperature of the inductively coupled plasma.

摘要翻译： 等离子体制造方法和装置，其中多个高频天线布置在等离子体产生室中，并且从高频电源装置（包括电源，相位控制器等）提供的高频电力是 从天线施加到腔室中的气体以产生电感耦合等离子体。 多个高频天线中的至少一些以这样的并行布置的方式布置，使得天线彼此相邻并且每个天线与相邻天线相对。 高频电源装置控制施加到每个天线的高频电压的相位，从而控制感应耦合等离子体的电子温度。

公开(公告)号：US20110012068A1

公开(公告)日：2011-01-20

申请号：US12805162

申请日：2010-07-15

申请人： Kenji Kato ,  Masaya Yukinobu

发明人： Kenji Kato ,  Masaya Yukinobu

IPC分类号： H01B1/02 ,  C09D5/16

CPC分类号： B22F1/0022 ,  B22F9/24 ,  B22F2998/00 ,  B82Y30/00 ,  H01B1/22 ,  Y10S977/773 ,  Y10S977/777

摘要： A process for producing a fine silver particle colloidal dispersion which can simply form conductive silver layers and antimicrobial coatings by screen printing or the like. The process is characterized by having a reaction step of allowing an aqueous silver nitrate solution to react with a mixed solution of an aqueous iron(II) sulfate solution and an aqueous sodium citrate solution to form an agglomerate of fine silver particles, a filtration step of filtering the resultant agglomerate of fine silver particles to obtain a cake of the agglomerate of fine silver particles, a dispersion step of adding pure water to the cake to obtain a first fine silver particle colloidal dispersion of a water system in which dispersion the fine silver particles have been dispersed in the pure water, and a concentration and washing step of concentrating and washing the first fine silver particle colloidal dispersion of a water system.

摘要翻译： 一种能够通过丝网印刷等简单地形成导电性银层和抗菌涂层的细银粒子胶体分散体的制造方法。 该方法的特征在于具有使硝酸银水溶液与硫酸铁水溶液和柠檬酸钠水溶液的混合溶液反应以形成细银颗粒的附聚物的反应步骤，过滤步骤 过滤所得到的细银粒子附聚物，得到细银粒子附聚物的饼状物;分散步骤，向滤饼中加入纯水，得到水系的第一微细银粒子胶体分散液，其中分散有细银粒子 已经分散在纯水中，以及浓缩和洗涤水系的第一细银粒子胶体分散体的浓缩和洗涤步骤。

公开(公告)号：US07776491B2

公开(公告)日：2010-08-17

申请号：US11370064

申请日：2006-03-08

申请人： Noriyuki Takada ,  Kenji Kato ,  Yoshihiro Tamura ,  Toshihiko Nonobe

发明人： Noriyuki Takada ,  Kenji Kato ,  Yoshihiro Tamura ,  Toshihiko Nonobe

IPC分类号： H01M4/64

CPC分类号： H01M8/0267 ,  H01M8/026 ,  H01M8/04014 ,  H01M8/04223 ,  H01M8/241 ,  H01M8/2457 ,  H01M2008/1095

摘要： A separator unit inserted into a fuel cell having an electrolyte layer interposed between a fuel electrode and an oxygen electrode is provided with a plate like separator that separates fuel gas supplied to the fuel electrode from oxidizing gas supplied to the oxygen electrode, and a mesh like collector having an opening that forms one of a passage through which the fuel gas flows and a passage through which the oxidizing gas flows. The collector is provided to at least one side of the separator base in abutment against one of the fuel electrode and the oxygen electrode. The separator base has a coolant passage formed therein, through which a coolant is allowed to flow, and an electrode abutment portion of the collector, which abuts against one of the fuel electrode and the oxygen electrode, has an aperture ratio higher than those of other portions of the collector.

摘要翻译： 插入到具有置于燃料电极和氧电极之间的电解质层的燃料电池中的分离器单元设置有板状隔板，该板状隔板将供给燃料电极的燃料气体与供给到氧电极的氧化气体分离， 收集器具有形成燃料气体通过的通道中的一个的开口和氧化气体流过的通道。 收集器被提供到隔板基座的至少一侧，以抵靠燃料电极和氧电极中的一个。 分离器底座具有形成在其中的冷却剂通道，允许冷却剂流动，并且与集电器的电极邻接部分抵靠燃料电极和氧电极中的一个具有比其他开口率高的开口率 收集器的一部分。

公开(公告)号：US20100189921A1

公开(公告)日：2010-07-29

申请号：US12753379

申请日：2010-04-02

申请人： Hiroshige DEGUCHI ,  Hitoshi Yoneda ,  Kenji Kato ,  Akinori Ebe ,  Yuichi Setsuhara

发明人： Hiroshige DEGUCHI ,  Hitoshi Yoneda ,  Kenji Kato ,  Akinori Ebe ,  Yuichi Setsuhara

IPC分类号： B01J19/08

CPC分类号： C23C16/509 ,  H01J37/32192 ,  H01J37/3222

摘要： A plasma generating method and apparatus which use plural high-frequency antennas 2 to generate inductively coupled plasma, and a plasma processing apparatus using the apparatus. The antennas 2 are identical to one another. Application of a high-frequency electric power to the antennas 2 is performed from a high-frequency power source 4 which is disposed commonly to the antennas 2, through one matching circuit 5 and one busbar 3. The busbar 3 is partitioned into sections the number of which is equal to that of the antennas, while setting a portion which is connected to the matching circuit 5, as a reference. One-end portions of the antennas are connected to corresponding sections 31, 32, 33 through power supplying lines 311, 321, 331. The other end portions of the antennas are grounded. The impedances of the sections of the busbar, and those of the power supplying lines are adjusted so that same currents flow through the antennas, and a same voltage is applied to the antennas. Therefore, the inductively coupled plasma is generated while uniformalizing high-frequency electric powers supplied to the antennas 2.

摘要翻译： 使用多个高频天线2生成电感耦合等离子体的等离子体产生方法和装置以及使用该装置的等离子体处理装置。 天线2彼此相同。 通过一个匹配电路5和一个母线3，从天线2共同配置的高频电源4向天线2施加高频电力。母线3被分割为数字 在设置连接到匹配电路5的部分作为参考时，其等于天线的天线。 天线的一端部分通过供电线311,321,331连接到对应部分31,32,33。天线的另一端接地。 调节母线段和供电线的部分的阻抗，使得相同的电流流过天线，并且向天线施加相同的电压。 因此，在对提供给天线2的高频电力进行均匀化的同时产生电感耦合等离子体。

公开(公告)号：US20100140113A1

公开(公告)日：2010-06-10

申请号：US12630423

申请日：2009-12-03

申请人： Satoshi TERAMOTO ,  Hirotaka Onogi ,  Koji Shiotani ,  Kenji Kato ,  Takashi Kawai

发明人： Satoshi TERAMOTO ,  Hirotaka Onogi ,  Koji Shiotani ,  Kenji Kato ,  Takashi Kawai

IPC分类号： G01N27/26

CPC分类号： G01N27/419

摘要： There is provided a control apparatus for a gas sensor, which has a sensor element equipped with first and second oxygen pumping cells. The sensor control apparatus is configured to drive the first oxygen pumping cell to adjust the oxygen concentration of gas under measurement, drive the second oxygen pumping cell to produce a flow of electric current according to the amount of oxygen pumped out of the oxygen concentration adjusted gas by the second oxygen pumping cell, perform specific drive control to control the amount of oxygen pumped by the second oxygen pumping cell to a predetermined level after startup of the sensor element and before the application of the drive voltage between the electrodes of the second oxygen pumping cell.

摘要翻译： 提供了一种用于气体传感器的控制装置，其具有配备有第一和第二氧气泵浦单元的传感器元件。 传感器控制装置被配置为驱动第一氧气泵送单元以调节测量气体的氧气浓度，驱动第二氧气泵送单元，根据从氧浓度调节气体中抽出的氧气的量产生电流 通过第二氧气泵送单元，执行特定的驱动控制，以在启动传感器元件之后并且在第二氧气泵送电极之间施加驱动电压之前，将第二氧气泵浦单元泵浦的氧气量控制到预定水平 细胞。

公开(公告)号：US20100054999A1

公开(公告)日：2010-03-04

申请号：US12515950

申请日：2007-07-10

申请人： Naoki Uchiyama ,  Naoki Matsuda ,  Kazuki Yoshimura ,  Kenji Kato

发明人： Naoki Uchiyama ,  Naoki Matsuda ,  Kazuki Yoshimura ,  Kenji Kato

IPC分类号： G01N21/77 ,  G01N21/78

CPC分类号： G01N21/7703 ,  G01N21/783 ,  G01N2021/7773 ,  Y10T436/22

摘要： A hydrogen sensor includes a thin film layer formed on a top surface of a planar optical transmission medium, and a catalyst layer formed on a top surface of the thin film layer. A first interface is created between the planar optical transmission medium and the thin film layer. A substrate is joined to a bottom surface of the planar optical transmission medium so that a second interface is created between the planar optical transmission medium and the substrate. On entering a first end portion of the planer optical transmission medium, light from a light source is spread by an entrance section, and the spread light is transmitted inside the planar optical transmission medium to a second end portion by being reflected by the first and second interfaces alternately. Light exiting from the second end portion is transmitted to an optical sensor by an exit light-collecting section. If the thin film layer is hydrogenated by the catalyst layer contacted by hydrogen, the amount of light reflected from the first interface reduces. Hydrogen gas is detected by the optical sensor detecting such reduction in the amount of light.

摘要翻译： 氢传感器包括形成在平面光传输介质的顶表面上的薄膜层和形成在薄膜层的顶表面上的催化剂层。 在平面光传输介质和薄膜层之间产生第一界面。 基板被接合到平面光传输介质的底表面，使得在平面光传输介质和基板之间产生第二界面。 在进入平面光传输介质的第一端部分时，来自光源的光由入射部分扩展，并且扩散光在平面光传输介质内传播到第二端部，被第一和第二反射 接口交替。 从第二端部出射的光通过出射光收集部传送到光学传感器。 如果薄膜层被氢接触的催化剂层氢化，则从第一界面反射的光量减少。 通过光学传感器检测到氢气被检测到光量的减少。

公开(公告)号：USD608258S1

公开(公告)日：2010-01-19

申请号：US29311466

申请日：2009-03-24

申请人： Iwao Koizumi ,  Tadao Hoshino ,  Satoshi Hayasaka ,  Takeshi Shinohara ,  Kenji Kato

设计人： Iwao Koizumi ,  Tadao Hoshino ,  Satoshi Hayasaka ,  Takeshi Shinohara ,  Kenji Kato

公开(公告)号：US07630287B2

公开(公告)日：2009-12-08

申请号：US11502931

申请日：2006-08-11

申请人： Manabu Oumi ,  Nobuyuki Kasama ,  Hidetaka Maeda ,  Kenji Kato ,  Takashi Niwa ,  Yasuyuki Mitsuoka ,  Yoko Shinohara

发明人： Manabu Oumi ,  Nobuyuki Kasama ,  Hidetaka Maeda ,  Kenji Kato ,  Takashi Niwa ,  Yasuyuki Mitsuoka ,  Yoko Shinohara

IPC分类号： G11B7/00

CPC分类号： G11B7/122 ,  B82Y10/00 ,  G11B7/1387 ,  G11B7/22 ,  G11B7/24 ,  G11B7/26

摘要： The object of the present invention is to provide an information recording/reproduction device for implementing high-density information recording and reading using mutual interaction of a recording medium with near field light, and particularly to a near field optical head with a high optical efficiency and a manufacturing method thereof. This is achieved by enabling an energy propagation mechanism via a plasmon by forming a layer dispersed with metal particulate at a microscopic opening generating near field light, and therefore increase optical efficiency.

摘要翻译： 本发明的目的是提供一种使用记录介质与近场光的相互作用实现高密度信息记录和读取的信息记录/再现装置，特别是涉及具有高光学效率的近场光学头， 其制造方法。 这是通过在通过在靠近场光产生的微小开口处形成分散有金属颗粒的层而通过等离子体激元实现能量传播机制来实现的，因此提高了光学效率。

公开(公告)号：US07605680B2

公开(公告)日：2009-10-20

申请号：US11661606

申请日：2005-09-07

申请人： Yasuhiro Matsumoto ,  Nobutaka Kubota ,  Takeshi Noda ,  Kazuhiro Matsuo ,  Kenji Kato ,  Mitsutaka Homma ,  Takao Wakabayashi

发明人： Yasuhiro Matsumoto ,  Nobutaka Kubota ,  Takeshi Noda ,  Kazuhiro Matsuo ,  Kenji Kato ,  Mitsutaka Homma ,  Takao Wakabayashi

IPC分类号： H01F7/00

CPC分类号： H01F7/1615 ,  H01F7/081 ,  H01F2007/1692

摘要： A highly efficient electromagnetic actuator which can reduce leakage of the magnetic flux is provided. The electromagnetic actuator comprises a first coil 31, a movable body 2 adapted to move on the central axis of the first coil 31, a first stator 11 covering the top face, bottom face and outer peripheral face of the first coil 31, and a permanent magnet 15 adapted to firmly latch the movable body 2 at one end point of its movable range. A second stator 12 adapted to control the magnetic flux generated from the permanent magnet 15 is provided in succession with the first stator 11. By providing the second stator 12, when releasing the movable body 2 from its firmly latched state, the permanent magnet 15 is not inversely excited or demagnetized.

摘要翻译： 提供了一种可以减少磁通泄漏的高效电磁致动器。 电磁致动器包括第一线圈31，适于在第一线圈31的中心轴线上移动的可移动体2，覆盖第一线圈31的顶面，底面和外周面的第一定子11和永久 磁体15适于在可移动范围的一个端点处牢固地将可移动体2锁定。 适于控制从永磁体15产生的磁通量的第二定子12与第一定子11连续地设置。通过设置第二定子12，当将可动体2从其牢固的锁定状态释放时，永磁体15是 没有反向激发或退磁。