SEMICONDUCTOR DEVICE WITH SILICON CARBIDE EMBEDDED DUMMY PATTERN
    15.
    发明申请
    SEMICONDUCTOR DEVICE WITH SILICON CARBIDE EMBEDDED DUMMY PATTERN 审中-公开
    半导体器件与硅碳化物嵌入式模式

    公开(公告)号:US20150364549A1

    公开(公告)日:2015-12-17

    申请号:US14301348

    申请日:2014-06-11

    Applicant: MEDIATEK INC.

    Abstract: A semiconductor device with dummy patterns for alleviating micro-loading effect includes a semiconductor substrate having thereon a middle annular region between an inner region and an outer region; a SiC device on the semiconductor substrate within the inner region; and a plurality of dummy patterns provided on the semiconductor substrate within the middle annular region. At least one of the dummy patterns contains SiC.

    Abstract translation: 具有用于减轻微负载效应的虚设图形的半导体器件包括其内部区域和外部区域之间具有中间环形区域的半导体衬底; 在所述内部区域中的所述半导体衬底上的SiC器件; 以及设置在中间环形区域内的半导体衬底上的多个虚设图案。 至少一个虚拟图案包含SiC。

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