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11.发明授权
公开(公告)号：US6008942A
公开(公告)日：1999-12-28
申请号：US997704
申请日：1997-12-23
Applicant: Makoto Ogusu , Hiroshi Maehara , Keita Sakai
Inventor： Makoto Ogusu , Hiroshi Maehara , Keita Sakai
CPC classification number: G02B5/1866
Abstract: A diffractive optical element for diffracting non-collimated light includes a base surface and a periodic structure formed on the base surface and having a plurality of diffractive surfaces and a plurality of boundary surfaces. The boundary surfaces are separated into plural zones, and in each zone, the boundary surface is placed substantially parallel to a main portion of a light beam impinging on that zone.
Abstract translation: 用于衍射非准直光的衍射光学元件包括形成在基底表面上并具有多个衍射面和多个边界面的基底表面和周期性结构。 边界表面被分成多个区域，并且在每个区域中，边界表面基本上平行于入射到该区域上的光束的主要部分。
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公开(公告)号：US20130313417A1
公开(公告)日：2013-11-28
申请号：US13983754
申请日：2012-01-25
Applicant: Makoto Ogusu
Inventor： Makoto Ogusu
CPC classification number: G01J1/42 , B01L3/502707 , B01L2200/0689 , B01L2300/0654 , B01L2300/0816 , B01L2300/0877 , B01L2300/1827 , B29D11/00 , G01N21/0332 , G01N21/05 , G01N21/645 , G01N2021/0346 , G01N2201/064
Abstract: A light emission detection device having a flow path from which light to be detected is emitted is provided. The device includes a detection-side substrate having a joining surface and a detection surface provided opposite the joining surface, the joining surface having a depression and a light-shielding film provided over an area excluding the depression, the depression forming the flow path, the detection surface transmitting the light emitted from the flow path; and a wiring-side substrate having a joining surface and a conductive pattern provided with a varying thickness on the joining surface, the joining surface of the wiring-side substrate joining the joining surface of the detection-side substrate. In the area over which the light-shielding film is provided, adhesive is provided with a thickness corresponding to the varying thickness of the conductive pattern and the detection-side substrate and the wiring-side substrate are closely joined to each other with the adhesive.
Abstract translation: 提供一种发光检测装置，其具有从其被发射的光的流路。 该装置包括检测侧基板，其具有接合面和与接合面相对设置的检测面，所述接合面具有设置在不包括凹部的区域上的凹部和遮光膜，形成流路的凹部， 检测表面透射从所述流路发射的光; 以及布线侧基板，其具有接合面和在接合面上具有变化厚度的导电图案，所述布线侧基板的接合面与检测侧基板的接合面接合。 在设置有遮光膜的区域中，粘合剂具有与导电图案的变化厚度对应的厚度，并且检测侧基板和布线侧基板用粘合剂彼此紧密接合。
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公开(公告)号：US06930834B2
公开(公告)日：2005-08-16
申请号：US10023689
申请日：2001-12-21
Applicant: Makoto Ogusu , Yuichi Iwasaki
Inventor： Makoto Ogusu , Yuichi Iwasaki
CPC classification number: G02B5/1857 , C23F1/02 , G03F7/0005 , G03F7/0035
Abstract: A method of manufacturing a diffractive optical element, including a process for forming a resist mask of blazed shape upon a substrate and for etching the substrate by use of the resist mask so that the blazed shape is transferred to the substrate. The method includes a process for forming, before the etching, an element being effective to prevent a taper shape, to be produced at an edge of the blazed shape of the resist mask, from being transformed to the substrate.
Abstract translation: 一种制造衍射光学元件的方法，包括在衬底上形成闪耀形状的抗蚀剂掩模并通过使用抗蚀剂掩模蚀刻衬底的工艺，使得闪耀形状被转印到衬底。 该方法包括在蚀刻之前形成有效防止在抗蚀剂掩模的闪耀形状的边缘处产生的锥形形状的元件被转变为基板的工艺。
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14.发明授权Device manufacturing method and apparatus utilizing concentric fan-shaped pattern mask 有权使用同心扇形图案掩模的装置制造方法和装置公开(公告)号：US06221541B1
公开(公告)日：2001-04-24
申请号：US09570936
申请日：2000-05-15
Applicant: Makoto Ogusu , Kenji Saitoh
Inventor： Makoto Ogusu , Kenji Saitoh
IPC: G03F900
CPC classification number: G03F7/70425 , G03F7/70433 , G03F9/70
Abstract: A method of manufacturing an element with a concentric pattern by use of a photolithographic process is disclosed, wherein the method includes preparing masks having segment patterns corresponding to fan-shaped regions, respectively, of the pattern which fan-shaped regions can be defined by dividing the pattern by at least one circle concentric with the pattern to provide plural zones and then by dividing each zone equiangularly, and exposing regions of a substrate corresponding to the plural zones, respectively, by using the masks corresponding to the zones, respectively, while rotating the substrate by regular angles.
Abstract translation: 公开了一种通过使用光刻工艺制造具有同心图案的元件的方法，其中该方法包括分别制备具有对应于图案的扇形区域的扇形图案的掩模，该扇形图案可以通过划分扇形区域来限定扇形区域 所述图案与所述图案同心的至少一个圆圈以提供多个区域，然后通过等角度地划分每个区域，并且分别通过使用对应于所述区域的掩模来分别暴露与所述多个区域相对应的基板的区域，同时旋转 基板以规则的角度。
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Patent Agency Ranking
15.发明授权公开(公告)号：US09234791B2
公开(公告)日：2016-01-12
申请号：US13983754
申请日：2012-01-25
Applicant: Makoto Ogusu
Inventor： Makoto Ogusu
CPC classification number: G01J1/42 , B01L3/502707 , B01L2200/0689 , B01L2300/0654 , B01L2300/0816 , B01L2300/0877 , B01L2300/1827 , B29D11/00 , G01N21/0332 , G01N21/05 , G01N21/645 , G01N2021/0346 , G01N2201/064
Abstract: A light emission detection device having a flow path from which light to be detected is emitted is provided. The device includes a detection-side substrate having a joining surface and a detection surface provided opposite the joining surface, the joining surface having a depression and a light-shielding film provided over an area excluding the depression, the depression forming the flow path, the detection surface transmitting the light emitted from the flow path; and a wiring-side substrate having a joining surface and a conductive pattern provided with a varying thickness on the joining surface, the joining surface of the wiring-side substrate joining the joining surface of the detection-side substrate. In the area over which the light-shielding film is provided, adhesive is provided with a thickness corresponding to the varying thickness of the conductive pattern and the detection-side substrate and the wiring-side substrate are closely joined to each other with the adhesive.
Abstract translation: 提供一种发光检测装置，其具有从其被发射的光的流路。 该装置包括检测侧基板，其具有接合面和与接合面相对设置的检测面，所述接合面具有设置在不包括凹部的区域上的凹部和遮光膜，形成流路的凹部， 检测表面透射从所述流路发射的光; 以及布线侧基板，其具有接合面和在接合面上具有变化厚度的导电图案，所述布线侧基板的接合面与检测侧基板的接合面接合。 在设置有遮光膜的区域中，粘合剂具有与导电图案的变化厚度对应的厚度，并且检测侧基板和布线侧基板用粘合剂彼此紧密接合。
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公开(公告)号：US07352441B2
公开(公告)日：2008-04-01
申请号：US11617487
申请日：2006-12-28
Applicant: Makoto Ogusu
Inventor： Makoto Ogusu
CPC classification number: G03F9/7026 , G03F9/7076 , G03F9/7088 , H01L23/544 , H01L2223/54453 , H01L2924/0002 , H01L2924/00
Abstract: A sensor unit includes a substrate that has a first mark, and a second mark used to specify a position of the first mark, a sensor for detecting light that has transmitted through the first mark and the substrate, and a light shielding portion, provided between the second mark and the sensor, for shielding the light from the second mark against the sensor.
Abstract translation: 传感器单元包括具有第一标记的基板和用于指定第一标记的位置的第二标记，用于检测透过第一标记的光的传感器和基板;以及遮光部， 第二标记和传感器，用于将来自第二标记的光屏蔽在传感器上。
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17.发明授权公开(公告)号：US06829091B2
公开(公告)日：2004-12-07
申请号：US09362698
申请日：1999-07-29
Applicant: Takashi Kato , Kenji Saitoh , Hiroshi Maehara , Makoto Ogusu , Keiko Chiba
Inventor： Takashi Kato , Kenji Saitoh , Hiroshi Maehara , Makoto Ogusu , Keiko Chiba
IPC: G02B518
CPC classification number: G02B5/1814 , G02B5/1838 , G02B5/1857 , G02B5/1895 , G02B7/00 , G02B27/4222 , G03F7/70316 , G03F7/70825
Abstract: An optical system for forming an image of an object. The optical system includes an optical element, which is deformed by the weight thereof, and at least one optical member for preventing a change in optical performance of the optical system due to deformation of the optical element, when the optical element is provided in the optical system.
Abstract translation: 一种用于形成物体的图像的光学系统。 该光学系统包括光学元件，该光学元件由于其重量而变形，并且至少一个光学构件用于防止当光学元件设置在光学元件中时由于光学元件的变形而导致的光学系统的光学性能的变化 系统。
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18.发明授权Method of producing an optical element having a multiple-level step-like structure through lithography 失效通过光刻制造具有多级阶梯状结构的光学元件的方法公开(公告)号：US06562253B1
公开(公告)日：2003-05-13
申请号：US09628695
申请日：2000-07-28
Applicant: Makoto Ogusu
Inventor： Makoto Ogusu
IPC: B29D1100
CPC classification number: B29D11/00 , B29D11/00769 , G02B5/1857
Abstract: A method of producing an optical element having a multiple-level step-like structure includes a first process for providing a first mask pattern at a position corresponding to a predetermined boundary among boundaries at steps of the multiple-level step-like structure of a substrate, the first mask pattern having a width narrower than that of a single step, a second process for providing a second mask pattern upon the substrate having the first mask pattern formed thereon, the second mask pattern having a width corresponding to a single step or plural steps of the multiple-level step-like structure and a third process for processing the substrate by use of the first and second mask patterns and thereafter for removing the second mask pattern while leaving the first mask pattern there. After repeating the second and third processes plural times of a predetermined number, the first mask pattern is removed.
Abstract translation: 一种制造具有多级阶梯状结构的光学元件的方法包括：第一工艺，用于在衬底的多级阶梯状结构的步骤中在对应于边界中的预定边界的位置处提供第一掩模图案 所述第一掩模图案的宽度窄于单个步骤的宽度，所述第二掩模图案在其上形成有所述第一掩模图案的所述基板上提供第二掩模图案，所述第二掩模图案具有对应于单个步骤或多个的宽度 多级阶梯状结构的步骤和通过使用第一和第二掩模图案来处理衬底的第三工艺，并且此后用于在留下第一掩模图案的同时移除第二掩模图案。 在重复第二和第三处理多次预定数量之后，去除第一掩模图案。
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19.发明授权Polarization selective semiconductor laser, optical transmitter using the same, optical communication system using the same and fabrication method of the same 失效偏振选择半导体激光器，使用其的光发射机，使用相同的光通信系统及其制造方法
公开(公告)号：US06075799A
公开(公告)日：2000-06-13
申请号：US917700
申请日：1997-08-26
Applicant: Mamoru Uchida , Makoto Ogusu
Inventor： Mamoru Uchida , Makoto Ogusu
CPC classification number: B82Y20/00 , H01S5/06258 , H01S5/1021 , H01S5/06236 , H01S5/1017 , H01S5/125 , H01S5/3404 , H01S5/4031 , H01S5/4087 , H01S5/5036
Abstract: A semiconductor laser capable of controlling a polarization mode of output light is disclosed. In a fabrication method of the laser, after two laser portions are independently formed, the laser portions are positioned to be optically coupled to each other. In another fabrication method of the laser, after at least portions of two laser portions are separately formed, an irregularly-formed portion at a boundary portion therebetween is removed. The fabrication method can be facilitated and a degree of freedom in the polarization control can be increased, since the two laser portions are separately formed.
Abstract translation: 公开了能够控制输出光的偏振模式的半导体激光器。 在激光器的制造方法中，在独立地形成两个激光部分之后，激光部分被定位成彼此光耦合。 在激光的另一制造方法中，在两个激光部分的至少部分分开形成之后，在其间的边界部分处不规则地形成部分被去除。 由于两个激光部分分别形成，所以可以促进制造方法并且可以提高偏振控制的自由度。
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